Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304)
11/2001
11/07/2001CN2458257Y Improved circuit board conveyer
11/07/2001CN1321204A Transverse conveyor for electrodes
11/06/2001US6313596 Detection system for substrate clamp
11/06/2001US6312519 Transferring device for optical discs being processed in a disc manufacturing assembly, disc manufacturing assembly incorporating the transferring device, and associated transferring method
11/01/2001WO2001081651A1 Method and system for pumping semiconductor equipment from transfer chambers
11/01/2001US20010036398 Substrate transport apparatus with multiple arms on a common axis of rotation
11/01/2001US20010036393 Three chamber load lock apparatus
11/01/2001US20010035126 Dip type surface treatment apparatus and dip type surface treatment method
11/01/2001US20010035124 Substrate processing apparatus and semiconductor manufacturing method
11/01/2001US20010035065 Robot
10/2001
10/31/2001EP1149667A1 Tool for mutual clamping of planar members which butt together
10/31/2001CN2457846Y Automatic board placing rack for circuit board
10/31/2001CN2457095Y Counting transport belt of mini bulb lampwick
10/30/2001US6309518 Surface-treatment plant
10/30/2001US6309505 Substrate processing apparatus and method
10/30/2001US6309166 Wafer transfer device
10/30/2001US6309116 Substrate processing system
10/25/2001WO2001079091A1 System for parallel processing of workpieces
10/25/2001WO2001079090A1 Modular sorter
10/24/2001EP1147863A2 Vertically telescopic robot
10/23/2001US6306224 Process and device for treatment of sheet objects in a liquid bath
10/23/2001US6305898 Wafer transfer mechanism
10/23/2001US6305500 Material delivery system for clean room-like environments
10/18/2001WO2001078112A1 Method for charging and discharging a process tank
10/18/2001WO2001076990A1 Ergonomic load port
10/18/2001US20010030143 Semiconductor wafer accommodating jig, handling method and production system
10/18/2001US20010030101 Modular semiconductor workpiece processing tool
10/18/2001DE10017010A1 Verfahren zum Be- und Entladen eines Behandlungsbeckens A method for loading and unloading a treatment basin
10/17/2001EP1146548A1 Vacuum processing system
10/17/2001EP1146451A2 Fabrication system with extensible equipment sets
10/16/2001US6302962 Diffusion system having air curtain formation function for manufacturing semiconductor devices and method of controlling the same
10/11/2001WO2001075965A1 Treating device
10/11/2001US20010028837 Overhead gripping and conveying system for sheets of glass
10/11/2001CA2444847A1 Tablet packing apparatus
10/10/2001EP1143488A2 Vacuum processing apparatus and semiconductor manufacturing line using the same
10/10/2001EP1142002A1 Apparatus for processing wafers
10/10/2001EP1142000A1 Transport device
10/10/2001EP1141439A2 Distributed control system architecture and method for a material transport system
10/09/2001US6298685 Consecutive deposition system
10/09/2001US6298684 Substrate transfer robot
10/04/2001WO2001073840A1 Substrate transfer device
10/04/2001WO2001037626A3 Transport device and method for transferring product carriers for electronic components
10/04/2001US20010026749 Multi-position load lock chamber
10/04/2001US20010026748 Substrate transfer shuttle having a magnetic drive
10/04/2001US20010026747 Substrate transfer apparatus and substrate transfer method
10/04/2001US20010025528 Method and apparatus for testing of sheet material
10/04/2001EP1036014B1 Spacer
10/04/2001DE10029939C1 System conveying vehicle bodywork for surface treatment, has holders with independent rotary drive motors
10/03/2001CN2451550Y Super thin film aspirated-air conveyor
10/03/2001CN1072389C Equipment for transferring semiconductor chip
10/03/2001CN1072173C Panel support mechanism
10/02/2001US6298282 Robot crash sensor system
10/02/2001US6298274 Conveyance system in a semiconductor manufacturing process and method for processing semiconductor wafer therein
10/02/2001US6297611 Robot having independent end effector linkage motion
10/02/2001US6296735 Plasma treatment apparatus and method for operation same
09/2001
09/27/2001WO2001070605A1 Chuck transport method and system
09/27/2001WO2001033611A3 Machine for processing wafers
09/27/2001US20010025207 Vaccum processing apparatus and semiconductor manufacturing line using the same
09/27/2001US20010025204 Vacuum processing apparatus and semiconductor manufacturing line using the same
09/27/2001US20010024611 Integrated tools with transfer devices for handling microelectronic workpieces
09/27/2001US20010024609 Method and apparatus for substrate transfer and processing
09/26/2001EP1135795A2 Specimen holding robotic arm end effector
09/26/2001EP1135793A2 Apparatus for storing and moving a cassette
09/26/2001EP0897593B1 Device and process for treating substrates in a fluid container
09/25/2001US6293749 Substrate transfer system for semiconductor processing equipment
09/20/2001WO2001069660A2 Method and apparatus for supporting a substrate
09/20/2001WO2001068499A1 Device for vertically transporting products
09/20/2001WO2001068489A1 Automated feed mechanism for electronic components of silicon wafer
09/20/2001WO2001033610A3 Unit for processing wafers
09/20/2001US20010023377 Distributed control system architecture and method for a material transport system
09/20/2001US20010022927 Unit for sorting and transferring sheets of glass
09/20/2001US20010022188 Utilizing robot which carries semiconductor wafers to processing bays; clean rooms; compact
09/20/2001US20010022018 Method and apparatus for manufacturing wiper levers
09/20/2001DE10013833A1 Device for vertical transport of semiconductor wafers and disks comprises carrier unit with cooled, magnetised, superconducting strips which interact with permanent magnets so that carrier unit is suspended on air cushion of constant height
09/19/2001EP1134641A1 Apparatus for storing and moving a cassette
09/19/2001EP1134031A2 Dip type surface treatment apparatus and dip type surface treatment method
09/19/2001EP1133442A1 Opening system compatible with a vertical interface
09/19/2001EP1133441A1 Dual arm substrate handling robot with a batch loader
09/19/2001EP1133440A1 Automated opening and closing of ultra clean storage containers
09/19/2001CN1313409A Method for forming electric conductive region by ion implanation
09/13/2001US20010021340 Method for automatically transferring wafers between wafer holders in a liquid environment
09/12/2001EP1132947A2 Fabrication system with extensible equipment sets
09/12/2001CN2447307Y Conveying wheel with wringing function
09/11/2001US6287976 Plasma processing methods and apparatus
09/11/2001US6287386 Carousel wafer transfer system
09/07/2001WO2001064555A1 Pollution-free goods transfer system and method
09/06/2001US20010019004 Conveyance apparatus
09/06/2001DE10010325A1 Support frame for transporting panes of glass or windows has bases linked to frames which are slightly inclined to vertical. and are made up of short sections connected by bolts, allowing them to be folded down in concertina fashion
09/05/2001EP1129046A1 Glass article, method for handling glass article and handling tool for glass article
09/05/2001EP0960061B1 Continuous workpiece treatment plant
09/04/2001US6285102 Drive mechanism having a gas bearing operable under a negative pressure environment
09/04/2001US6283692 Apparatus for storing and moving a cassette
08/2001
08/30/2001WO2001063651A2 Wafer processing system
08/29/2001EP1127815A2 Overhead gripping and conveying system for sheets of glass
08/28/2001US6281516 FIMS transport box load interface
08/28/2001US6281510 Sample transferring method and sample transfer supporting apparatus
08/28/2001US6280137 Apparatus for transporting rows of products
08/28/2001US6280134 Apparatus and method for automated cassette handling
08/28/2001US6279412 Corrosion resistant exoskeleton arm linkage assembly
08/23/2001US20010016307 Processing method for substrate