| Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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| 07/11/2002 | WO2001046999A3 Method and apparatus for supercritical processing of a workpiece |
| 07/11/2002 | WO2001014227A9 Material delivery system for clean room environments |
| 07/11/2002 | US20020091465 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 07/11/2002 | US20020090836 Wafer processing system |
| 07/11/2002 | US20020090284 Loading and unloading station for semiconductor processing installations |
| 07/11/2002 | US20020090282 Actuatable loadport system |
| 07/11/2002 | US20020089655 Substrate transport apparatus and method |
| 07/11/2002 | DE10100447A1 Anlage zur Behandlung, insbesondere zum Lackieren, von Gegenständen, insbesondere von Fahrzeugkarosserien Treatment plant, in particular for coating, articles, especially vehicle bodies |
| 07/11/2002 | CA2400359A1 Treatment plant, in particular for painting objects, in particular vehicle bodies |
| 07/10/2002 | EP1221420A1 Treatment device, especially for painting objects, having a geometry with a preferred orientation |
| 07/10/2002 | EP1221346A1 Treatment device especially for painting objects, especially automobile bodies |
| 07/10/2002 | EP1220739A1 Method and device for isolating plate-like substrates |
| 07/10/2002 | EP0976146B1 Device for conveying substrates through a substrate processing plant |
| 07/10/2002 | EP0892985B1 Transport device for flat objects and process of transfer of these objects between the device and a treatment apparatus |
| 07/09/2002 | US6418355 Lot supply system and lot supply method |
| 07/04/2002 | WO2002052638A1 Pressure control method, transfer device, and cluster tool |
| 07/04/2002 | WO2002051695A1 Automatic modular system for conveying and processing vehicle bodies |
| 07/04/2002 | US20020085899 Transfer chamber with integral loadlock and staging station |
| 07/03/2002 | EP1218926A1 Wafer atmospheric transport module having a controlled mini-environment |
| 07/03/2002 | CN1356756A Apparatus for processing electrically conducting parts |
| 07/03/2002 | CN1087100C Constant temp chamber of handler for use with semiconductor device testing appts. |
| 07/02/2002 | US6413459 Method for handling and processing microelectronic-device substrate assemblies |
| 07/02/2002 | US6413037 Flexibly mounted contact cup |
| 06/27/2002 | WO2002050876A1 System and method for improved throughput of semiconductor wafer processing |
| 06/27/2002 | WO2002049943A1 Facility for processing, especially painting objects, especially vehicle bodies |
| 06/27/2002 | US20020082744 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 06/27/2002 | US20020081181 Substrate processing apparatus and substrate processing method |
| 06/27/2002 | US20020081177 Valve/sensor assemblies |
| 06/27/2002 | US20020081175 Vacuum processing apparatus and a vacuum processing system |
| 06/27/2002 | US20020081174 Vacuum processing apparatus and a vacuum processing system |
| 06/27/2002 | US20020080291 Interback-type substrate processing device |
| 06/27/2002 | US20020079056 Substrate processing unit |
| 06/27/2002 | US20020078892 Substrate processing device and through-chamber |
| 06/27/2002 | US20020078778 Drive system for multiple axis robot arm |
| 06/27/2002 | DE10061628A1 Vorrichtung und Verfahren zum Ergreifen und Transportieren von Wafern Apparatus and method for grasping and transporting wafers |
| 06/25/2002 | US6409448 Ergonomic load port |
| 06/20/2002 | WO2002049200A1 Electrostatic device for holding an electronic component wafer |
| 06/20/2002 | WO2002049099A1 Robot for carrying substrate |
| 06/20/2002 | WO2002049097A1 Wafer holder |
| 06/20/2002 | WO2002049096A1 Tilting fluid cutout device |
| 06/20/2002 | WO2002047871A1 Substrate transfer method |
| 06/20/2002 | US20020076316 Wafer boat and boat holder |
| 06/20/2002 | US20020076310 System and method for improved throughput of semiconductor wafer processing |
| 06/20/2002 | US20020074190 Material delivery system for clean room-like environments |
| 06/19/2002 | EP1214733A1 Device for loading and unloading substrates |
| 06/19/2002 | EP1214248A1 System and method for transferring components between packing media |
| 06/19/2002 | CN1354891A Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications |
| 06/18/2002 | US6406245 Processing system and device manufacturing method using the same |
| 06/13/2002 | WO2002047139A2 Methode of forming a copper film on a substrate |
| 06/13/2002 | WO2002046842A1 Assembly comprising a plurality of mask containers |
| 06/13/2002 | US20020072241 Multi-position load lock chamber |
| 06/13/2002 | US20020071745 Apparatus and method for grasping and transporting wafers |
| 06/13/2002 | US20020071744 Compact apparatus and method for storing and loading semiconductor wafer carriers |
| 06/13/2002 | US20020070371 Methods of implementing a single shaft, dual cradle vacuum slot valve |
| 06/13/2002 | DE10059384A1 Vorrichtung zum Bearbeiten eines elektrisch leitenden Bauteils An apparatus for processing an electrically conductive component |
| 06/12/2002 | EP1213747A1 Device and method for gripping and transporting wafers |
| 06/12/2002 | EP0970266B1 Device for surface treatment by immersion |
| 06/12/2002 | CN1353447A Wafer loader with locating structure and its installation method |
| 06/11/2002 | US6403945 Device and method for detecting and distinguishing shelf-forming supports in cassettes and disk-shaped objects deposited thereon |
| 06/11/2002 | US6402479 Apparatus for pumping out transfer chambers for transferring semiconductor equipment |
| 06/06/2002 | WO2002045154A1 Transfer robot and inspection method for thin substrate |
| 06/06/2002 | WO2002045137A2 Reduced edge contact wafer handling system and method of retrofitting and using same |
| 06/06/2002 | US20020068982 Vacuum processing apparatus and semiconductor manafacturing line using the same |
| 06/06/2002 | US20020067981 Wafer transport system |
| 06/06/2002 | US20020067978 Machine and method for manufacturing compact discs |
| 06/06/2002 | US20020066642 Device for the automated handling and interim buffering of manufacturing components |
| 06/06/2002 | US20020066412 Wafer carrier and semiconductor apparatus for processing a semiconductor substrate |
| 06/06/2002 | US20020066330 Double arm substrate transport unit |
| 06/06/2002 | DE10056544A1 Verfahren und Vorrichtung zum Be- und Entladen von Halbleiterwafern Method and apparatus for loading and unloading of semiconductor wafers, |
| 06/05/2002 | EP1211785A2 Device for holding and treating electrically conductive parts |
| 06/05/2002 | EP1211201A1 Device for the automatic handling and intermediate buffering of suspended components |
| 06/05/2002 | EP1210282A1 Smif-compatible open cassette enclosure |
| 06/05/2002 | EP0929365B1 Method to introduce and remove workpieces, especially automobile bodies, device and installation for workpiece surface processing |
| 06/04/2002 | US6398476 Automatic storage unit and automatic storing method |
| 06/01/2002 | CA2364065A1 Device for the automated handling and interim buffering of manufacturing components |
| 05/30/2002 | US20020064954 Configuration in which wafers are individually supplied to fabrication units and measuring units located in a fabrication cell |
| 05/30/2002 | US20020064450 Reduced edge contact wafer handling system and method of retrofitting and using same |
| 05/30/2002 | US20020064442 Unified conveying apparatus, and semiconductor device manufacturing facility comprising the same |
| 05/30/2002 | US20020064439 Drive-section-isolated FOUP opener |
| 05/29/2002 | EP1207967A1 Method for introducing and removing workpieces into or from a surface treatment area, a surface treatment device and an arrangement for surface treatment |
| 05/29/2002 | CN2493590Y Belt conveyer for diode |
| 05/29/2002 | CN1351758A Installation for processing wafers |
| 05/28/2002 | US6396566 Stage system for exposure apparatus and device manufacturing method in which a stage supporting member and a countermass supporting member provide vibration isolation |
| 05/28/2002 | US6395648 Wafer processing system |
| 05/28/2002 | US6395094 Process system with transfer unit for object to be processed |
| 05/28/2002 | US6394733 Substrate body transfer apparatus |
| 05/28/2002 | US6393716 Method and apparatus for transporting substrates in OLED process |
| 05/23/2002 | US20020062166 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 05/23/2002 | US20020062165 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 05/23/2002 | US20020061245 Processing system and device manufacturing method using the same |
| 05/23/2002 | US20020061244 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 05/23/2002 | US20020061243 Wafer stage chamber |
| 05/23/2002 | US20020060172 Installation for processing wafers |
| 05/22/2002 | EP1207612A1 Power supply apparatus for supplying electric power to substrate carrier container |
| 05/22/2002 | EP1207548A2 Method and apparatus for loading and unloading wafers |
| 05/22/2002 | EP1054829A4 Smif pod storage, delivery and retrieval system |
| 05/22/2002 | CN2492959Y Continuous terminal take-up mechanism |
| 05/22/2002 | CN2492538Y Chip box carrying and conveying cart |
| 05/22/2002 | CN1350699A System for manufacturing semiconductor products |
| 05/22/2002 | CN1350132A Shaft sealing device |