Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304)
07/2002
07/11/2002WO2001046999A3 Method and apparatus for supercritical processing of a workpiece
07/11/2002WO2001014227A9 Material delivery system for clean room environments
07/11/2002US20020091465 Vacuum processing apparatus and semiconductor manufacturing line using the same
07/11/2002US20020090836 Wafer processing system
07/11/2002US20020090284 Loading and unloading station for semiconductor processing installations
07/11/2002US20020090282 Actuatable loadport system
07/11/2002US20020089655 Substrate transport apparatus and method
07/11/2002DE10100447A1 Anlage zur Behandlung, insbesondere zum Lackieren, von Gegenständen, insbesondere von Fahrzeugkarosserien Treatment plant, in particular for coating, articles, especially vehicle bodies
07/11/2002CA2400359A1 Treatment plant, in particular for painting objects, in particular vehicle bodies
07/10/2002EP1221420A1 Treatment device, especially for painting objects, having a geometry with a preferred orientation
07/10/2002EP1221346A1 Treatment device especially for painting objects, especially automobile bodies
07/10/2002EP1220739A1 Method and device for isolating plate-like substrates
07/10/2002EP0976146B1 Device for conveying substrates through a substrate processing plant
07/10/2002EP0892985B1 Transport device for flat objects and process of transfer of these objects between the device and a treatment apparatus
07/09/2002US6418355 Lot supply system and lot supply method
07/04/2002WO2002052638A1 Pressure control method, transfer device, and cluster tool
07/04/2002WO2002051695A1 Automatic modular system for conveying and processing vehicle bodies
07/04/2002US20020085899 Transfer chamber with integral loadlock and staging station
07/03/2002EP1218926A1 Wafer atmospheric transport module having a controlled mini-environment
07/03/2002CN1356756A Apparatus for processing electrically conducting parts
07/03/2002CN1087100C Constant temp chamber of handler for use with semiconductor device testing appts.
07/02/2002US6413459 Method for handling and processing microelectronic-device substrate assemblies
07/02/2002US6413037 Flexibly mounted contact cup
06/2002
06/27/2002WO2002050876A1 System and method for improved throughput of semiconductor wafer processing
06/27/2002WO2002049943A1 Facility for processing, especially painting objects, especially vehicle bodies
06/27/2002US20020082744 Vacuum processing apparatus and semiconductor manufacturing line using the same
06/27/2002US20020081181 Substrate processing apparatus and substrate processing method
06/27/2002US20020081177 Valve/sensor assemblies
06/27/2002US20020081175 Vacuum processing apparatus and a vacuum processing system
06/27/2002US20020081174 Vacuum processing apparatus and a vacuum processing system
06/27/2002US20020080291 Interback-type substrate processing device
06/27/2002US20020079056 Substrate processing unit
06/27/2002US20020078892 Substrate processing device and through-chamber
06/27/2002US20020078778 Drive system for multiple axis robot arm
06/27/2002DE10061628A1 Vorrichtung und Verfahren zum Ergreifen und Transportieren von Wafern Apparatus and method for grasping and transporting wafers
06/25/2002US6409448 Ergonomic load port
06/20/2002WO2002049200A1 Electrostatic device for holding an electronic component wafer
06/20/2002WO2002049099A1 Robot for carrying substrate
06/20/2002WO2002049097A1 Wafer holder
06/20/2002WO2002049096A1 Tilting fluid cutout device
06/20/2002WO2002047871A1 Substrate transfer method
06/20/2002US20020076316 Wafer boat and boat holder
06/20/2002US20020076310 System and method for improved throughput of semiconductor wafer processing
06/20/2002US20020074190 Material delivery system for clean room-like environments
06/19/2002EP1214733A1 Device for loading and unloading substrates
06/19/2002EP1214248A1 System and method for transferring components between packing media
06/19/2002CN1354891A Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications
06/18/2002US6406245 Processing system and device manufacturing method using the same
06/13/2002WO2002047139A2 Methode of forming a copper film on a substrate
06/13/2002WO2002046842A1 Assembly comprising a plurality of mask containers
06/13/2002US20020072241 Multi-position load lock chamber
06/13/2002US20020071745 Apparatus and method for grasping and transporting wafers
06/13/2002US20020071744 Compact apparatus and method for storing and loading semiconductor wafer carriers
06/13/2002US20020070371 Methods of implementing a single shaft, dual cradle vacuum slot valve
06/13/2002DE10059384A1 Vorrichtung zum Bearbeiten eines elektrisch leitenden Bauteils An apparatus for processing an electrically conductive component
06/12/2002EP1213747A1 Device and method for gripping and transporting wafers
06/12/2002EP0970266B1 Device for surface treatment by immersion
06/12/2002CN1353447A Wafer loader with locating structure and its installation method
06/11/2002US6403945 Device and method for detecting and distinguishing shelf-forming supports in cassettes and disk-shaped objects deposited thereon
06/11/2002US6402479 Apparatus for pumping out transfer chambers for transferring semiconductor equipment
06/06/2002WO2002045154A1 Transfer robot and inspection method for thin substrate
06/06/2002WO2002045137A2 Reduced edge contact wafer handling system and method of retrofitting and using same
06/06/2002US20020068982 Vacuum processing apparatus and semiconductor manafacturing line using the same
06/06/2002US20020067981 Wafer transport system
06/06/2002US20020067978 Machine and method for manufacturing compact discs
06/06/2002US20020066642 Device for the automated handling and interim buffering of manufacturing components
06/06/2002US20020066412 Wafer carrier and semiconductor apparatus for processing a semiconductor substrate
06/06/2002US20020066330 Double arm substrate transport unit
06/06/2002DE10056544A1 Verfahren und Vorrichtung zum Be- und Entladen von Halbleiterwafern Method and apparatus for loading and unloading of semiconductor wafers,
06/05/2002EP1211785A2 Device for holding and treating electrically conductive parts
06/05/2002EP1211201A1 Device for the automatic handling and intermediate buffering of suspended components
06/05/2002EP1210282A1 Smif-compatible open cassette enclosure
06/05/2002EP0929365B1 Method to introduce and remove workpieces, especially automobile bodies, device and installation for workpiece surface processing
06/04/2002US6398476 Automatic storage unit and automatic storing method
06/01/2002CA2364065A1 Device for the automated handling and interim buffering of manufacturing components
05/2002
05/30/2002US20020064954 Configuration in which wafers are individually supplied to fabrication units and measuring units located in a fabrication cell
05/30/2002US20020064450 Reduced edge contact wafer handling system and method of retrofitting and using same
05/30/2002US20020064442 Unified conveying apparatus, and semiconductor device manufacturing facility comprising the same
05/30/2002US20020064439 Drive-section-isolated FOUP opener
05/29/2002EP1207967A1 Method for introducing and removing workpieces into or from a surface treatment area, a surface treatment device and an arrangement for surface treatment
05/29/2002CN2493590Y Belt conveyer for diode
05/29/2002CN1351758A Installation for processing wafers
05/28/2002US6396566 Stage system for exposure apparatus and device manufacturing method in which a stage supporting member and a countermass supporting member provide vibration isolation
05/28/2002US6395648 Wafer processing system
05/28/2002US6395094 Process system with transfer unit for object to be processed
05/28/2002US6394733 Substrate body transfer apparatus
05/28/2002US6393716 Method and apparatus for transporting substrates in OLED process
05/23/2002US20020062166 Vacuum processing apparatus and semiconductor manufacturing line using the same
05/23/2002US20020062165 Vacuum processing apparatus and semiconductor manufacturing line using the same
05/23/2002US20020061245 Processing system and device manufacturing method using the same
05/23/2002US20020061244 Vacuum processing apparatus and semiconductor manufacturing line using the same
05/23/2002US20020061243 Wafer stage chamber
05/23/2002US20020060172 Installation for processing wafers
05/22/2002EP1207612A1 Power supply apparatus for supplying electric power to substrate carrier container
05/22/2002EP1207548A2 Method and apparatus for loading and unloading wafers
05/22/2002EP1054829A4 Smif pod storage, delivery and retrieval system
05/22/2002CN2492959Y Continuous terminal take-up mechanism
05/22/2002CN2492538Y Chip box carrying and conveying cart
05/22/2002CN1350699A System for manufacturing semiconductor products
05/22/2002CN1350132A Shaft sealing device
1 ... 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 ... 124