| Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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| 04/25/2000 | US6053668 Water slide for transferring semiconductor wafers |
| 04/25/2000 | US6052913 Positioning device and positioning method |
| 04/20/2000 | WO2000022653A1 Sorting/storage device for wafers and method for handling thereof |
| 04/20/2000 | WO2000022589A1 Wafer mapping system |
| 04/20/2000 | DE19845504A1 Hordenaufnahmevorrichtung Horde recording device |
| 04/20/2000 | DE19832084C1 Substrate transport device e.g. for handling CD's or DVD's, has curved transport path sections provided by pivot devices rotated about respective axes lying at spaced points along common line |
| 04/19/2000 | EP0993681A1 Glass spacer |
| 04/18/2000 | US6052193 Apparatus and method for inspecting loading state of wafers in carrier |
| 04/18/2000 | US6051101 Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus |
| 04/18/2000 | US6050768 Automatic carrier control method in semiconductor wafer cassette transportation apparatus |
| 04/18/2000 | US6050389 Carrier apparatus with more than one carrier belts and processing apparatus therewith |
| 04/12/2000 | EP0993023A1 Method for transferring a web-or sheet-like material into a clean room |
| 04/12/2000 | CN1250489A A surface-treatment plant |
| 04/11/2000 | US6048259 Wafer loading and unloading mechanism for loading robot |
| 04/11/2000 | US6048154 High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lock |
| 04/06/2000 | WO2000019493A2 Wafer load lock with internal wafer transport |
| 04/06/2000 | WO2000018988A1 Transverse conveyor for electrodes |
| 04/06/2000 | WO2000018980A1 An in-line sputter deposition system |
| 04/06/2000 | WO2000018547A1 Substrate transport apparatus |
| 04/06/2000 | WO2000003418B1 Intelligent wafer handling system and method |
| 04/06/2000 | WO1999067158A9 Integrated roller transport pod and asynchronous conveyor |
| 04/05/2000 | EP0991112A2 Transport vehicle |
| 04/05/2000 | EP0991111A1 Holder for carriers |
| 04/04/2000 | US6045315 Robot apparatus and treating apparatus |
| 03/30/2000 | WO2000017925A1 Vacuum processing device |
| 03/30/2000 | WO2000017067A1 Support device for glass panels |
| 03/30/2000 | WO2000003255A3 Device without set-up kit for the targeted moving of electronic components |
| 03/30/2000 | WO2000002232A3 Rapid thermal processing system having scanning temperature sensor |
| 03/28/2000 | US6043502 Apparatus and method for sensing an insertion state of a wafer in a cassette |
| 03/28/2000 | US6042623 Positioning multi-wafer carrier, transferring wafers into loadlock with robot device, sealing loadlock, removing wafers from loadlock, sealing and venting outbound loadlock, opening and transferring wafers to carrier |
| 03/28/2000 | US6042372 Heat treatment apparatus |
| 03/28/2000 | US6042324 Multi-stage single-drive FOUP door system |
| 03/28/2000 | US6041703 Compact disc printing system and method |
| 03/23/2000 | WO2000015420A1 Device for transporting circular disk-shaped substrates from a feeding station to an end station via several intermediate stations |
| 03/23/2000 | WO1999065803A9 Automated opening and closing of ultra clean storage containers |
| 03/23/2000 | DE19842257A1 Method and device for transferring and delivering a workpiece to or from a station by using an automatic interlocking mechanism locks and unlocks the workpiece being transferred on a transporting arm and a holding device. |
| 03/22/2000 | EP0986825A1 Carousel wafer transfer system |
| 03/22/2000 | CN1248232A Shock-absorbing spacer for sheet glasses and stacked glass sheets |
| 03/22/2000 | CN1247827A Chain for chain scraper conveyor |
| 03/21/2000 | US6039172 Device for processing a disc-shaped substrate as well as a station suitable for being coupled to such a device |
| 03/16/2000 | DE19841393A1 Turntable rapidly conveying compact discs between processing stations, has radial arms and grippers oscillating through small angle and depositing tested result on second turntable in compact arrangement |
| 03/15/2000 | EP0985224A1 Device and method for transporting separate substrates |
| 03/14/2000 | US6036426 Wafer handling method and apparatus |
| 03/09/2000 | WO2000012417A1 Gas jetting structure for float transport devices and method of forming jet holes |
| 03/09/2000 | WO2000012416A1 Float transport device and float transport system |
| 03/09/2000 | WO1999065800A3 Method and device for processing components |
| 03/09/2000 | DE19839898A1 Apparatus for vertical transport of disk-shaped substrates comprises pivotable vertical shafts which are uniformly distributed on a circular and are provided with several flange-like elements with cut-off segments |
| 03/08/2000 | EP0983827A1 Waterjet cutting machine |
| 03/08/2000 | CN1246433A Chip transfer device |
| 03/07/2000 | US6033521 Tilt mechanism for wafer cassette |
| 03/07/2000 | US6033175 Docking mechanism for aligning, coupling and securing a movable cart to a stationary workstation |
| 03/07/2000 | US6032784 Book turn apparatus |
| 03/01/2000 | EP0982762A2 Wafer transfer apparatus |
| 03/01/2000 | EP0982251A2 Automatic or semi-automatic machine for taking away glass sheets or different materials from a storing section and feeding a process machine and/or vice versa |
| 03/01/2000 | CN1245757A Method for conveying base plate coated with adhesive and its equipment |
| 02/29/2000 | US6032083 Substrate transfer apparatus and heat treatment system using the same |
| 02/29/2000 | US6030455 Substrate holder |
| 02/29/2000 | US6030167 Apparatus for loading wafers into a horizontal quartz tube |
| 02/24/2000 | WO2000009429A1 Charging neutralizer for floating transportation device and floating transportation system |
| 02/24/2000 | WO2000003467A3 Wafer carrier and method for handling of wafers with minimal contact |
| 02/24/2000 | WO2000003418A3 Intelligent wafer handling system and method |
| 02/24/2000 | CA2280360A1 A method of manufacturing a stack of spaced lites |
| 02/23/2000 | EP0980716A1 Coating equipment |
| 02/23/2000 | EP0980585A1 Multiple single-wafer loadlock wafer processing apparatus and loading and unloading method therefor |
| 02/23/2000 | EP0980301A1 Coaxial drive loader arm |
| 02/23/2000 | CN2365178Y Radioisotope source cylinder transport apparatus |
| 02/22/2000 | US6027301 Semiconductor wafer testing apparatus with a combined wafer alignment/wafer recognition station |
| 02/22/2000 | US6026589 Wafer carrier and semiconductor apparatus for processing a semiconductor substrate |
| 02/17/2000 | WO2000007915A1 Port door retention and evacuation system |
| 02/15/2000 | US6024393 Robot blade for handling of semiconductor substrate |
| 02/10/2000 | WO2000006810A1 Installation and method for multilayered immersion coating |
| 02/10/2000 | WO2000006352A1 Apparatus for sensing the presence of a wafer |
| 02/10/2000 | CA2338971A1 Installation and process for multiple coating by dipping |
| 02/09/2000 | EP0978368A1 Method and apparatus for transporting a substrate with adhesive |
| 02/09/2000 | EP0630296B1 Method and apparatus for cleaning cylindrical components which are transversely rotated in a drum during liquid treatment |
| 02/09/2000 | CN1244027A Method for transferring miniature machined block including integrated circuits |
| 02/08/2000 | US6021790 Substrate treating apparatus and method for treating substrate |
| 02/07/2000 | CA2276503A1 Method and apparatus for transporting a substrate with adhesive |
| 02/03/2000 | WO1999062317A3 Method for mixing lump materials in a liquid and device for realising the same |
| 02/03/2000 | DE19834245A1 Anlage und Verfahren zum Mehrfachbeschichten durch Tauchen System and method for multi-Dip Coating |
| 02/02/2000 | EP0976668A2 Slat conveyor chain |
| 02/02/2000 | EP0976146A1 Device for conveying substrates through a substrate processing plant |
| 02/02/2000 | CN2361836Y Free run reciprocating coal feeder |
| 02/01/2000 | US6019563 Automated guided vehicle |
| 02/01/2000 | US6019192 Glass-carrying trestle |
| 01/26/2000 | EP0975009A1 Wafer transfer mechanism |
| 01/26/2000 | CN1242872A Wafer transfer device |
| 01/26/2000 | CN1242753A Waffer transport device |
| 01/20/2000 | WO2000003467A2 Wafer carrier and method for handling of wafers with minimal contact |
| 01/20/2000 | WO2000003428A1 Substrate transfer device and operating method thereof |
| 01/20/2000 | WO2000003418A2 Intelligent wafer handling system and method |
| 01/20/2000 | WO2000003255A2 Device without set-up kit for the targeted moving of electronic components |
| 01/20/2000 | WO2000003057A1 Multi-position load lock chamber |
| 01/20/2000 | WO2000002804A1 Opening system compatible with a vertical interface |
| 01/20/2000 | WO2000002803A1 Dual arm substrate handling robot with a batch loader |
| 01/20/2000 | DE19830212A1 Verfahren und Vorrichtung zum Behandeln von Gegenständen, insbesondere scheibenförmigen Gegenständen wie Blechen, Glasplatten, Leiterplatten, Keramiksubstraten Method and apparatus for treating objects, in particular disc-shaped objects such as sheet metals, glass panes, printed circuit boards, ceramic substrates |
| 01/19/2000 | EP0769986A4 Conveyor cassette for wafers |
| 01/18/2000 | US6014817 Semiconductor wafer processing system |
| 01/18/2000 | CA2026174C Surface treatment apparatus |
| 01/13/2000 | WO2000002239A1 Exposure system, method of manufacture thereof, method of wafer transfer, device and method of manufacture device |