Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304)
01/2000
01/13/2000WO2000002232A2 Rapid thermal processing system having scanning temperature sensor
01/13/2000WO2000001995A1 Substrate transport assembly for rapid thermal processing system
01/13/2000WO2000001628A1 Heating assembly for rapid thermal processing system
01/12/2000EP0971051A1 A machine for the electrophoretic re-painting or re-varnishing of thin metal objects
01/12/2000EP0970899A1 Method and device for processing articles, especially slice-shaped articles like plates, glaspanes, circuit boards, ceramic substrates
01/12/2000EP0970510A1 System for transferring wafers from cassettes to furnaces and method
01/12/2000EP0970509A1 Process and device for treating substrates in a fluid container
01/12/2000EP0970266A2 Device for surface treatment by immersion
01/11/2000US6013112 Relay apparatus for relaying object to be treated
01/11/2000US6012894 Automatic lot organization method
01/11/2000US6012751 Device for introducing a vacuum to the vacuum chuck of a semiconductor device fabrication facility
01/05/2000EP0969119A2 Method and device for coating of objects
01/05/2000EP0968325A2 A surface-treatment plant
01/04/2000US6010008 Transport module
01/04/2000CA2050306C Device for transporting bulk materials comprising a vibrator conveyor which dips into a liquid
12/1999
12/29/1999WO1999067158A2 Integrated roller transport pod and asynchronous conveyor
12/29/1999CN2356012Y Automatic medicine taking and distributing device
12/29/1999CA2335054A1 Integrated roller transport pod and asynchronous conveyor
12/28/1999US6007675 Wafer transfer system and method of using the same
12/23/1999WO1999066550A1 Substrate transfer device
12/23/1999WO1999065803A1 Automated opening and closing of ultra clean storage containers
12/23/1999WO1999065800A2 Method and device for processing components
12/23/1999DE19845350C1 Work trolley for wafer cassette production machine
12/23/1999DE19827155A1 Verfahren und Vorrichtung zum Bearbeiten von Bauteilen Method and apparatus for machining components
12/23/1999DE19827124A1 Transport of flat circular disc-shaped workpieces to and from working stations
12/23/1999DE19826949A1 Conveyor for plate-shaped substrates
12/21/1999US6004181 Field emission display fabrication method
12/16/1999WO1999065064A1 Method and device for transferring wafers
12/16/1999DE19910478A1 Conveying procedure of semiconductor wafer, LCD substrate during semiconductor device manufacture
12/15/1999EP0964434A2 Adapter device for confinement boxes with at least one flat object in ultra-clean atmosphere
12/15/1999EP0963959A1 Shock-absorbing spacer for sheet glasses and stacked glass sheets
12/14/1999US6002971 Time optimal trajectory for cluster tool robots
12/14/1999US6002840 Substrate transport apparatus
12/14/1999US6000900 Wafer cassette conveying system
12/09/1999WO1999063581A1 Device and method for handling a container
12/09/1999WO1999062799A1 Liquid transport of solid material
12/09/1999WO1999062317A2 Method for mixing lump materials in a liquid and device for realising the same
12/09/1999DE19823854A1 Rollenanordnung für in einem flüssigen Metallbad zu beschichtendes Behandlungsgut Roller assembly for a liquid metal to be coated, treated
12/07/1999US5997235 Swap out plate and assembly
12/07/1999US5996241 Semiconductor wafer processing system with immersion module
12/02/1999WO1999061678A1 A substrate handling and processing system and method
12/02/1999WO1999061675A1 Method and apparatus for increasing wafer throughput between cleanings in semiconductor processing reactors
12/02/1999WO1999061356A1 Roller arrangement for a product to be coated in a molten metal bath
12/02/1999WO1999061350A2 Substrate transfer shuttle having a magnetic drive
12/02/1999CA2333530A1 Method and apparatus for increasing wafer throughput between cleanings in semiconductor processing reactors
12/02/1999CA2333480A1 Roller arrangement for a product to be coated in a molten metal bath
12/01/1999EP0961309A2 A tool for the contact-free support of plate-like substrates
12/01/1999EP0960434A1 Device for processing semiconductor wafers
12/01/1999EP0960061A1 Continuous workpiece treatment plant
11/1999
11/30/1999US5993148 Article transfer methods
11/30/1999US5993141 Independent linear dual-blade robot and method for transferring wafers
11/30/1999US5993081 In-line processing system
11/30/1999US5992616 Apparatus for the guiding of workpieces
11/25/1999WO1999060625A1 Method and apparatus for wafer transportation, exposure system, micro device, and reticle library
11/25/1999WO1999060614A1 A wafer buffer station and a method for a per-wafer transfer between work stations
11/25/1999WO1999060612A1 Method and apparatus for substrate transfer and processing
11/25/1999WO1999060611A1 In-situ substrate transfer shuttle
11/25/1999WO1999060610A1 An automated substrate processing system
11/25/1999WO1999059928A2 Substrate transfer shuttle
11/24/1999EP0959495A1 Container and loader for substrate
11/24/1999EP0959153A2 An electroplating machine
11/24/1999EP0958226A1 Coaxial drive elevator
11/24/1999CN1236026A Electroplating machine
11/23/1999US5988971 Wafer transfer robot
11/18/1999DE19821677A1 Mechanical handling stacking assembly for plate glass using hinged frame mounted on turntable
11/18/1999DE19821019A1 Mechanical handling system for manufacture of compact discs
11/17/1999EP0957510A1 Processor and processing method, and robot device
11/17/1999CN2349178Y Automatic blank distributor
11/17/1999CN2349177Y Dry unfired brick conveyer
11/17/1999CN1235697A Processor, method and robot device therefor
11/17/1999CN1046478C Spreader set for surface treatment of coiled wire rod
11/16/1999US5984624 Article loader/unloader
11/16/1999US5984610 Pod loader interface
11/16/1999US5984607 Transfer apparatus, transfer method, treatment apparatus and treatment method
11/16/1999US5983479 Apparatus and method of automatically removing a wafer carrier from a container
11/11/1999WO1999057953A1 Apparatus for transporting thin boards, in particular printed circuit boards
11/11/1999WO1999057752A1 Method and device for changing a semiconductor wafer position
11/11/1999WO1999056920A1 Dual arm apparatus with co-axial drive shafts
11/11/1999DE19820369A1 Mechanical handling system for transfer of unleavened dough from stack to work station
11/11/1999DE19818479C1 Vorrichtung und Verfahren zum Handhaben von Substraten Device and method for handling substrates
11/11/1999CA2331079A1 Method and device for changing a semiconductor wafer position
11/11/1999CA2330951A1 Apparatus for transporting thin boards, in particular printed circuit boards
11/10/1999EP0955253A2 Apparatus and method for transferring articles through a plurality of processing stations
11/10/1999EP0865395A4 Panel support mechanism
11/09/1999US5981399 Method and apparatus for fabricating semiconductor devices
11/09/1999US5980591 System for processing a plurality of objects contained in a plurality of cassettes
11/09/1999US5980197 Method for laying spacing ribs between prelaminated glass panels
11/09/1999US5980195 Positioning apparatus for substrates to be processed
11/09/1999US5980188 Semiconductor manufacturing device including sensor for sensing mis-loading of a wafer
11/09/1999US5980187 Mechanism for transporting semiconductor-process masks
11/09/1999US5980183 Integrated intrabay buffer, delivery, and stocker system
11/04/1999WO1999056306A1 Device for fixing substrates
11/04/1999WO1999056302A1 Glass spacer
11/04/1999WO1999055605A1 Device and method for handling substrates
11/04/1999WO1999043582A8 Door assembly for semiconductor wafer manufacturing
11/04/1999DE19821742C1 Manipulation arrangement, especially for test head for wafer test arrangement
11/04/1999DE19818478A1 Vorrichtung zum Fixieren von Substraten A device for fixing substrates
11/04/1999CA2329356A1 Device and method for handling substrates
11/04/1999CA2329118A1 Device for fixing substrates
11/03/1999CN2346753Y Bagasse pilling up and back conveying discharging running appts.