Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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01/13/2000 | WO2000002232A2 Rapid thermal processing system having scanning temperature sensor |
01/13/2000 | WO2000001995A1 Substrate transport assembly for rapid thermal processing system |
01/13/2000 | WO2000001628A1 Heating assembly for rapid thermal processing system |
01/12/2000 | EP0971051A1 A machine for the electrophoretic re-painting or re-varnishing of thin metal objects |
01/12/2000 | EP0970899A1 Method and device for processing articles, especially slice-shaped articles like plates, glaspanes, circuit boards, ceramic substrates |
01/12/2000 | EP0970510A1 System for transferring wafers from cassettes to furnaces and method |
01/12/2000 | EP0970509A1 Process and device for treating substrates in a fluid container |
01/12/2000 | EP0970266A2 Device for surface treatment by immersion |
01/11/2000 | US6013112 Relay apparatus for relaying object to be treated |
01/11/2000 | US6012894 Automatic lot organization method |
01/11/2000 | US6012751 Device for introducing a vacuum to the vacuum chuck of a semiconductor device fabrication facility |
01/05/2000 | EP0969119A2 Method and device for coating of objects |
01/05/2000 | EP0968325A2 A surface-treatment plant |
01/04/2000 | US6010008 Transport module |
01/04/2000 | CA2050306C Device for transporting bulk materials comprising a vibrator conveyor which dips into a liquid |
12/29/1999 | WO1999067158A2 Integrated roller transport pod and asynchronous conveyor |
12/29/1999 | CN2356012Y Automatic medicine taking and distributing device |
12/29/1999 | CA2335054A1 Integrated roller transport pod and asynchronous conveyor |
12/28/1999 | US6007675 Wafer transfer system and method of using the same |
12/23/1999 | WO1999066550A1 Substrate transfer device |
12/23/1999 | WO1999065803A1 Automated opening and closing of ultra clean storage containers |
12/23/1999 | WO1999065800A2 Method and device for processing components |
12/23/1999 | DE19845350C1 Work trolley for wafer cassette production machine |
12/23/1999 | DE19827155A1 Verfahren und Vorrichtung zum Bearbeiten von Bauteilen Method and apparatus for machining components |
12/23/1999 | DE19827124A1 Transport of flat circular disc-shaped workpieces to and from working stations |
12/23/1999 | DE19826949A1 Conveyor for plate-shaped substrates |
12/21/1999 | US6004181 Field emission display fabrication method |
12/16/1999 | WO1999065064A1 Method and device for transferring wafers |
12/16/1999 | DE19910478A1 Conveying procedure of semiconductor wafer, LCD substrate during semiconductor device manufacture |
12/15/1999 | EP0964434A2 Adapter device for confinement boxes with at least one flat object in ultra-clean atmosphere |
12/15/1999 | EP0963959A1 Shock-absorbing spacer for sheet glasses and stacked glass sheets |
12/14/1999 | US6002971 Time optimal trajectory for cluster tool robots |
12/14/1999 | US6002840 Substrate transport apparatus |
12/14/1999 | US6000900 Wafer cassette conveying system |
12/09/1999 | WO1999063581A1 Device and method for handling a container |
12/09/1999 | WO1999062799A1 Liquid transport of solid material |
12/09/1999 | WO1999062317A2 Method for mixing lump materials in a liquid and device for realising the same |
12/09/1999 | DE19823854A1 Rollenanordnung für in einem flüssigen Metallbad zu beschichtendes Behandlungsgut Roller assembly for a liquid metal to be coated, treated |
12/07/1999 | US5997235 Swap out plate and assembly |
12/07/1999 | US5996241 Semiconductor wafer processing system with immersion module |
12/02/1999 | WO1999061678A1 A substrate handling and processing system and method |
12/02/1999 | WO1999061675A1 Method and apparatus for increasing wafer throughput between cleanings in semiconductor processing reactors |
12/02/1999 | WO1999061356A1 Roller arrangement for a product to be coated in a molten metal bath |
12/02/1999 | WO1999061350A2 Substrate transfer shuttle having a magnetic drive |
12/02/1999 | CA2333530A1 Method and apparatus for increasing wafer throughput between cleanings in semiconductor processing reactors |
12/02/1999 | CA2333480A1 Roller arrangement for a product to be coated in a molten metal bath |
12/01/1999 | EP0961309A2 A tool for the contact-free support of plate-like substrates |
12/01/1999 | EP0960434A1 Device for processing semiconductor wafers |
12/01/1999 | EP0960061A1 Continuous workpiece treatment plant |
11/30/1999 | US5993148 Article transfer methods |
11/30/1999 | US5993141 Independent linear dual-blade robot and method for transferring wafers |
11/30/1999 | US5993081 In-line processing system |
11/30/1999 | US5992616 Apparatus for the guiding of workpieces |
11/25/1999 | WO1999060625A1 Method and apparatus for wafer transportation, exposure system, micro device, and reticle library |
11/25/1999 | WO1999060614A1 A wafer buffer station and a method for a per-wafer transfer between work stations |
11/25/1999 | WO1999060612A1 Method and apparatus for substrate transfer and processing |
11/25/1999 | WO1999060611A1 In-situ substrate transfer shuttle |
11/25/1999 | WO1999060610A1 An automated substrate processing system |
11/25/1999 | WO1999059928A2 Substrate transfer shuttle |
11/24/1999 | EP0959495A1 Container and loader for substrate |
11/24/1999 | EP0959153A2 An electroplating machine |
11/24/1999 | EP0958226A1 Coaxial drive elevator |
11/24/1999 | CN1236026A Electroplating machine |
11/23/1999 | US5988971 Wafer transfer robot |
11/18/1999 | DE19821677A1 Mechanical handling stacking assembly for plate glass using hinged frame mounted on turntable |
11/18/1999 | DE19821019A1 Mechanical handling system for manufacture of compact discs |
11/17/1999 | EP0957510A1 Processor and processing method, and robot device |
11/17/1999 | CN2349178Y Automatic blank distributor |
11/17/1999 | CN2349177Y Dry unfired brick conveyer |
11/17/1999 | CN1235697A Processor, method and robot device therefor |
11/17/1999 | CN1046478C Spreader set for surface treatment of coiled wire rod |
11/16/1999 | US5984624 Article loader/unloader |
11/16/1999 | US5984610 Pod loader interface |
11/16/1999 | US5984607 Transfer apparatus, transfer method, treatment apparatus and treatment method |
11/16/1999 | US5983479 Apparatus and method of automatically removing a wafer carrier from a container |
11/11/1999 | WO1999057953A1 Apparatus for transporting thin boards, in particular printed circuit boards |
11/11/1999 | WO1999057752A1 Method and device for changing a semiconductor wafer position |
11/11/1999 | WO1999056920A1 Dual arm apparatus with co-axial drive shafts |
11/11/1999 | DE19820369A1 Mechanical handling system for transfer of unleavened dough from stack to work station |
11/11/1999 | DE19818479C1 Vorrichtung und Verfahren zum Handhaben von Substraten Device and method for handling substrates |
11/11/1999 | CA2331079A1 Method and device for changing a semiconductor wafer position |
11/11/1999 | CA2330951A1 Apparatus for transporting thin boards, in particular printed circuit boards |
11/10/1999 | EP0955253A2 Apparatus and method for transferring articles through a plurality of processing stations |
11/10/1999 | EP0865395A4 Panel support mechanism |
11/09/1999 | US5981399 Method and apparatus for fabricating semiconductor devices |
11/09/1999 | US5980591 System for processing a plurality of objects contained in a plurality of cassettes |
11/09/1999 | US5980197 Method for laying spacing ribs between prelaminated glass panels |
11/09/1999 | US5980195 Positioning apparatus for substrates to be processed |
11/09/1999 | US5980188 Semiconductor manufacturing device including sensor for sensing mis-loading of a wafer |
11/09/1999 | US5980187 Mechanism for transporting semiconductor-process masks |
11/09/1999 | US5980183 Integrated intrabay buffer, delivery, and stocker system |
11/04/1999 | WO1999056306A1 Device for fixing substrates |
11/04/1999 | WO1999056302A1 Glass spacer |
11/04/1999 | WO1999055605A1 Device and method for handling substrates |
11/04/1999 | WO1999043582A8 Door assembly for semiconductor wafer manufacturing |
11/04/1999 | DE19821742C1 Manipulation arrangement, especially for test head for wafer test arrangement |
11/04/1999 | DE19818478A1 Vorrichtung zum Fixieren von Substraten A device for fixing substrates |
11/04/1999 | CA2329356A1 Device and method for handling substrates |
11/04/1999 | CA2329118A1 Device for fixing substrates |
11/03/1999 | CN2346753Y Bagasse pilling up and back conveying discharging running appts. |