| Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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| 10/31/2002 | DE10121053A1 Fördervorrichtung zum Fördern von Werkstücken durch einen Behandlungsbereich zur Oberflächenbehandlung der Werkstücke Conveying device for conveying workpieces through a treatment area for the surface treatment of the workpieces |
| 10/30/2002 | EP1252079A1 Wafer transport system |
| 10/30/2002 | CN1377510A Wafer atmospheric transport module having controlled mini-environment |
| 10/30/2002 | CN1376625A Surface treatment device |
| 10/30/2002 | CN1376624A Surface treatment device |
| 10/29/2002 | US6473151 Substrate processing apparatus |
| 10/29/2002 | US6471460 Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly |
| 10/29/2002 | US6471459 Substrate transfer shuttle having a magnetic drive |
| 10/29/2002 | US6471010 Material delivery system for clean room-like environments |
| 10/24/2002 | WO2002083372A1 Wafer carrying robot teaching method and teaching plate |
| 10/24/2002 | US20020155647 Method of manufacturing semiconductor devices with use of wafer carrier having conditioning units |
| 10/24/2002 | US20020154977 Wafer transport system and method |
| 10/24/2002 | US20020154974 Automatic guided vehicle, automatic guided vehicle system and wafer carrying method |
| 10/24/2002 | US20020154970 Wafer boat elevator system and method |
| 10/24/2002 | US20020152632 Vessel conveying system |
| 10/24/2002 | DE10119702A1 Device for testing the latching force for the latches of clean room transport boxes |
| 10/23/2002 | EP1251549A2 Automatic guided vehicle, automatic guided vehicle system and wafer carrying method |
| 10/23/2002 | EP1251085A1 Vessel conveying system |
| 10/23/2002 | CN2517701Y Steering device of circuit board |
| 10/23/2002 | CN2517700Y Improved sucking hoisting group of oblique standing retraction plate machine |
| 10/23/2002 | CN1376305A Device for loading and unloading substrates |
| 10/22/2002 | US6468022 Edge-gripping pre-aligner |
| 10/22/2002 | US6468021 Integrated intra-bay transfer, storage, and delivery system |
| 10/22/2002 | US6468018 Article transfer apparatuses |
| 10/22/2002 | US6468017 Vehicle, system and method for loading and unloading |
| 10/22/2002 | US6467626 Wafer storing method and storing container therefor and wafer transferring method for transferring wafer to the storing container |
| 10/22/2002 | US6467189 Method of transferring a material from first apparatus to second apparatus in the clean room and an assembly line |
| 10/17/2002 | WO2002082507A1 Wafer handling system and apparatus |
| 10/17/2002 | WO2002081391A1 Method and device for processing glass pane |
| 10/17/2002 | WO2002081345A1 Method and installation for handling and positioning elements separating stacks of flat elements, and related use |
| 10/17/2002 | US20020150459 Substrate transfer apparatus and substrate transfer method |
| 10/17/2002 | US20020150456 Method and apparatus for transferring a wafer |
| 10/17/2002 | US20020150449 Automated semiconductor processing system |
| 10/17/2002 | US20020150448 Conveyance system |
| 10/17/2002 | US20020150447 Conveyance system |
| 10/17/2002 | US20020148320 Arms of scalar robot |
| 10/16/2002 | CN1374241A Plate-shape body handling apparatus |
| 10/15/2002 | US6464445 System and method for improved throughput of semiconductor wafer processing |
| 10/15/2002 | US6463762 Process and apparatus for breaking and transporting flat glass sheets |
| 10/10/2002 | WO2002079059A1 Integrated substrate handler having pre-aligner and storage pod access mechanism |
| 10/10/2002 | US20020146309 Method and apparatus for the transfer of supports of electronic and/or computer components in the form of disks |
| 10/10/2002 | US20020146304 Vacuum apparatus and transfer apparatus |
| 10/10/2002 | US20020146303 Wafer handling system and apparatus |
| 10/10/2002 | US20020144654 Installation for processing wafers |
| 10/08/2002 | US6461094 Loading and unloading station for semiconductor processing installations |
| 10/08/2002 | US6461085 Sputter pallet loader |
| 10/08/2002 | US6460369 Consecutive deposition system |
| 10/03/2002 | US20020141831 Sputter pallet loader |
| 10/02/2002 | CN2513960Y Positioning conveyer for thin circuit board |
| 10/01/2002 | US6459947 Apparatus using positional data detected in a non-contact manner to transfer a substantially rectangular substrate from a first position to a second position |
| 10/01/2002 | US6458440 Spacer materials |
| 10/01/2002 | US6457929 Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment |
| 09/26/2002 | WO2002074669A1 Air track conveyor system for disk production |
| 09/26/2002 | WO2002074668A1 Sputter pallet loader |
| 09/26/2002 | WO2002003431A3 Apparatus and methods for semiconductor wafer processing equipment |
| 09/26/2002 | US20020136629 Method for aligning conveying position of object processing system, and object processing system |
| 09/26/2002 | US20020134650 Arrangement for feeding and/or taking away magazines filled with articles |
| 09/26/2002 | DE10113898A1 Einrichtung zum Zuführen und/oder Wegführen von mit Objekten gefüllten Magazinen Means for supplying and / or carrying away of filled with objects magazines |
| 09/25/2002 | EP1243991A1 Small footprint vertical lift and rotation stage |
| 09/25/2002 | EP1243532A1 An apparatus for loading and unloading tiles from roller stillages |
| 09/25/2002 | EP1243529A2 Device for supplying and/or removing magazines filled with objects |
| 09/25/2002 | EP1243021A2 Method and apparatus for supercritical processing of a workpiece |
| 09/25/2002 | CN1371122A IC conveying program and unit of IC testing processor |
| 09/25/2002 | CN1370726A Transport controlling method and system for transportor |
| 09/24/2002 | US6454519 Dual cassette load lock |
| 09/24/2002 | US6454515 Semiconductor wafer accommodating jig, handling method and production system |
| 09/24/2002 | US6454514 Microelectronic workpiece support and apparatus using the support |
| 09/24/2002 | US6454512 Person-guided vehicle |
| 09/24/2002 | US6454508 Dual cassette load lock |
| 09/24/2002 | US6454367 Apparatus for processing workpieces |
| 09/24/2002 | US6454332 Apparatus and methods for handling a substrate |
| 09/24/2002 | US6454258 Device for treating plate-shaped work pieces, especially printed-circuit boards |
| 09/24/2002 | US6453543 Transport and transfer device |
| 09/19/2002 | WO2002072265A1 Penetrable cap |
| 09/19/2002 | WO2001098015A9 Method for the production of glass substrates for electronic storage media |
| 09/19/2002 | WO2001040884A9 Monitoring system for a conveying device that conveys flat articles, especially wafers |
| 09/19/2002 | US20020130560 Small footprint vertical lift and rotation stage |
| 09/19/2002 | US20020129707 Substrate transport container |
| 09/19/2002 | DE10164192A1 Vorrichtung und Verfahren zur Bearbeitung von Substraten Apparatus and method for processing substrates |
| 09/18/2002 | CN1369901A Mfg. method of semiconductor device |
| 09/17/2002 | US6453214 Method of using a specimen sensing end effector to align a robot arm with a specimen stored on or in a container |
| 09/17/2002 | US6450755 Dual arm substrate handling robot with a batch loader |
| 09/17/2002 | CA2231852C Substrate processing apparatus and method |
| 09/12/2002 | US20020127147 Transfer fluids to or from a fluid-holding vessel, and remain physically and sealably associated during transfer |
| 09/12/2002 | US20020127091 Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers |
| 09/12/2002 | US20020124960 Substrate processing apparatus |
| 09/11/2002 | CN2510453Y Improved circuit board registering apparatus |
| 09/11/2002 | CN2510449Y Passive device conveying mechanism |
| 09/11/2002 | CN2510448Y Material-separating mechanism for wafer testing machine |
| 09/11/2002 | CN1368474A Delivery system for stored materials |
| 09/10/2002 | US6449530 Semiconductor wafer carrier, semiconductor wafer carrier automatic transfer system and method for producing a semiconductor device |
| 09/10/2002 | US6449520 Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme |
| 09/10/2002 | US6447382 Apparatus for removing semiconductor wafers from within the runner disks of a double-sided polishing machine |
| 09/10/2002 | US6447233 Automated door assembly for use in semiconductor wafer manufacturing |
| 09/10/2002 | US6447232 Semiconductor wafer processing apparatus having improved wafer input/output handling system |
| 09/10/2002 | US6447217 Substrate transfer device and operating method thereof |
| 09/10/2002 | US6446806 Transportation container and method for opening and closing lid thereof |
| 09/06/2002 | WO2002069392A1 Lift type substrate treatment device, and substrate treatment system with the substrate treatment device |
| 09/05/2002 | US20020121518 Lot management production method and product carrying container |
| 09/05/2002 | US20020121424 Transporting apparatus for plate form body |