Patents
Sitemap › B65 - Conveying; Packing; Storing; Handling thin or filamentary material › B65G - Transport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors › B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for
Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304)
11/1999
11/03/1999CN2346752Y Ampoule code spraying conveyor
11/02/1999US5976306 Method and apparatus for removing die from an expanded wafer and conveying die to a pickup location
11/02/1999US5976255 Substrate holder for reducing non-uniform film characteristics resulting from support structures
11/02/1999US5976199 Single semiconductor wafer transfer method and manufacturing system
11/02/1999US5975825 Transfer apparatus for wafers
11/02/1999US5975740 Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme
11/02/1999US5974682 Cooling process system
10/1999
10/28/1999WO1999054927A1 Unprocessed material storing device and carry-in/out stage
10/28/1999WO1999054921A1 Automated wafer buffer for use with wafer processing equipment
10/26/1999US5971701 Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device
10/26/1999US5971696 System for carrying-in of cassette for substrates to be processed
10/26/1999US5970818 Notch alignment apparatus and adjustment jig for the same
10/26/1999US5970621 Semiconductor wafer cassette positioning and detection mechanism
10/21/1999DE19816739A1 Apparatus for loading/unloading a process reactor with components, in particular wafers
10/20/1999EP0950730A2 A system for galvanic treatment or finishing of pieces, and corresponding method
10/20/1999CN1232413A Method to introduce and remove workpieces, especially automobile bodies, device and installation for workpiece surface processing
10/19/1999US5969537 Semiconductor device testing apparatus
10/19/1999US5967578 Tool for the contact-free support of plate-like substrates
10/19/1999US5967159 Substrate conveying device and substrate conveying method
10/14/1999WO1999052143A1 Alignment processing mechanism and semiconductor processing device using it
10/14/1999WO1999052142A1 Transfer device for body to be treated
10/14/1999WO1999052141A1 Method and apparatus for wafer processing, and method and apparatus for exposure
10/13/1999CN1231508A Semiconductor storage holder, operation method and production system
10/12/1999US5964561 For buffering wafer carriers to be loaded to a wafer fabrication tool
10/12/1999CA2012888C Method and apparatus for positioning glass sheets on a conveyor belt
10/07/1999WO1999050891A1 A programmable substrate support for a substrate system
10/07/1999WO1999036336A8 Semiconductor wafer cassette positioning and detection mechanism
10/07/1999DE19824040C1 Coating system especially for coating silicon wafers, particularly for plasma-enhanced CVD in solar cell production
10/07/1999DE19813528A1 Vorrichtung zur Behandlung von plattenförmigen Werkstücken, insbesondere Leiterplatten Apparatus for treating plate-like workpieces, in particular printed circuit boards
10/07/1999DE19812670A1 Substrate transport equipment especially for transporting substrates, e.g. CDs or DVDs, between stations in a sputter coating chamber
10/06/1999EP0946971A1 Substrate treatment device
10/06/1999CN1230774A Method and apparatus for determining wafer warpage for optimized electrostatic chuck clamping voltage
10/05/1999US5963753 Substrate processing apparatus
10/05/1999US5963449 Interlock apparatus for a transfer machine
10/05/1999US5961380 For transporting a workpiece
10/05/1999US5961269 Three chamber load lock apparatus
10/05/1999US5961169 Apparatus for sensing the presence of a wafer
09/1999
09/30/1999WO1999048780A1 Device for treating plate-shaped work pieces, especially printed-circuit boards
09/30/1999WO1999048652A1 Transferring substrates with different holding end effectors
09/30/1999DE19813684A1 Transport container coupling device to a port at a loading and unloading station as used in e.g. the fabrication of integrated circuits (ICs)
09/29/1999CN2340746Y Lifting packing conveyor
09/29/1999CN2340745Y Conveyor for washing apparatus for printed circuit boards
09/28/1999US5960225 Substrate treatment apparatus
09/28/1999US5957651 Substrate carrying apparatus
09/28/1999US5957648 Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers
09/28/1999US5957305 Linearly moving mechanism
09/23/1999WO1999013498A8 Combined cmp and wafer cleaning apparatus and associated methods
09/23/1999WO1999012192A3 Transport system
09/23/1999DE19906805A1 Semiconductor wafer holding position adjustment mechanism in substrate conveying processing apparatus
09/23/1999DE19837851C1 Apparatus and method for transferring a sample from a reaction vessel into ultrahigh vacuum
09/23/1999DE19805624A1 Schleuse zum Öffnen und Schließen von Reinraumtransport-Boxen Lock for opening and closing of cleanroom transport boxes
09/22/1999EP0943699A1 Load-lock device for transferring substrates in and out of a treatment chamber
09/22/1999EP0943698A2 Method and device for the transport of cylindrical substrates
09/22/1999EP0943564A2 Shipping container
09/22/1999CN1229051A Wafer cassette transfer system and method
09/22/1999CN1229050A Automated transportation system and method capable of recognizing wafer carrier related data
09/21/1999US5955857 Wafer conveyor system
09/16/1999WO1999046802A1 Installation and method for chemical treatment of microelectronics wafers
09/14/1999US5953591 Purging with an inert gas
09/14/1999US5951770 Carousel wafer transfer system
09/14/1999US5950843 Device for preventing contacting of wafers in wafer cassette
09/10/1999WO1999035673B1 Two-wafer loadlock wafer processing apparatus and loading and unloading method therefor
09/09/1999DE19806306A1 Device for contact-free gripping and holding of object, especially semiconductor disks
09/07/1999US5948132 Glass sheet strip annealing method
09/07/1999US5947677 Cassette transfer mechanism
09/07/1999US5947675 Cassette transfer mechanism
09/02/1999WO1999043582A1 Door assembly for semiconductor wafer manufacturing
08/1999
08/31/1999US5944940 Wafer transfer system and method of using the same
08/31/1999US5944857 Multiple single-wafer loadlock wafer processing apparatus and loading and unloading method therefor
08/31/1999US5944475 Rotated, orthogonal load compatible front-opening interface
08/26/1999WO1999042289A1 Method and apparatus for removing die from a wafer and conveying die to a pickup location
08/26/1999DE19822418C1 Apparatus for bath treatment of a work-piece whose vertical dimensions exceed the available bath depth
08/26/1999DE19807032A1 Vapor coating of cylindrical substrates e.g. silicon dioxide coating for sealing plastic carbonated drinks bottles
08/24/1999US5943238 High-speed personalization machine
08/19/1999WO1999041771A1 Device for loading substrates into and unloading them from a clean room
08/18/1999EP0935913A1 Heater in a conveyor system
08/18/1999EP0851832B1 Plant for processing containers, transport device and pallets for containers
08/12/1999WO1999040623A1 Exposure system and apparatus for positioning substrate storing cassette
08/11/1999EP0935279A2 Device and method for load locking for semiconductuctor processing
08/10/1999US5935768 Baking and cooling of substrates done inside integrated thermal process module
08/10/1999US5934856 Multi-chamber treatment system
08/05/1999WO1999039386A1 Load port and carriage for transferring the same
08/05/1999WO1999039144A1 Wafer carrier and semiconductor apparatus for processing a semiconductor substrate
08/05/1999CA2319636A1 Wafer carrier and semiconductor apparatus for processing a semiconductor substrate
08/04/1999EP0933316A1 Handling apparatus for plate-shaped materials
08/03/1999US5932014 Apparatus for producing semiconductor device
08/03/1999US5931631 Method and apparatus for vertical transfer of a semiconductor wafer cassette
08/03/1999US5931627 Wafer transport apparatus that can transfer multiple wafers in a short period of time
08/03/1999US5931626 Robot mounting de-coupling technique
08/03/1999US5931518 Gripper for wafer-shaped articles
08/03/1999CA2124082C Device for the electrolytic coating of small parts
07/1999
07/29/1999WO1999038200A1 Wafer cassette load station
07/29/1999WO1999038199A1 System for the treatment of wafers
07/28/1999EP0931175A1 Conveyor and delivery device
07/28/1999CN1223956A Work transfer method and system
07/22/1999WO1999036336A1 Semiconductor wafer cassette positioning and detection mechanism
07/22/1999DE19806231C1 Device for gripping an object by a gripping component with interacting adjustable gripping components
07/22/1999DE19801692A1 Glass panel etc. transfer procedure
07/21/1999EP0930816A1 Circuit substrate conveying apparatus
07/21/1999EP0930140A1 Apparatus for transporting rows of products
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