Patents
Sitemap › B65 - Conveying; Packing; Storing; Handling thin or filamentary material › B65G - Transport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors › B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for
Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304)
08/2003
08/14/2003US20030150329 Inert gas purge method and apparatus, exposure apparatus, recticle stocker, reticle inspection apparatus, reticle transfer box, and device manufacturing method
08/14/2003US20030150240 Automatic machine for working materials in sheet form, particularly glass sheets
08/14/2003DE10209908C1 Surface coating system has drums composed of two mirror-symmetrical half-shells which can be moved along horizontal axis
08/13/2003EP1335414A2 Semiconductor processing apparatus
08/13/2003EP1335413A1 Compact apparatus and method for storing and loading semiconductor wafer carriers
08/13/2003EP1334051A2 Integrated roller transport pod and asynchronous conveyor
08/13/2003EP1152964A4 Port door retention and evacuation system
08/13/2003EP1078391B1 Method and device for changing a semiconductor wafer position
08/13/2003CN1435364A Device and method for collecting completive test articles for integrated circuit tester table
08/12/2003US6604624 Work conveying system
08/07/2003WO2003065442A1 Arrangement structure of inspection devices
08/07/2003WO2003064288A1 Planar article rack having closeable holding members
08/07/2003WO2003021643A3 Semiconductor material handling system
08/07/2003US20030146066 By-pass conveyor
08/07/2003US20030145624 Method and device for manufacturing glass panes of any desired contour from sheet glass
08/06/2003EP1332991A1 Device for collating stacks of cut planks
08/06/2003EP1332349A2 Automated processing system
08/06/2003CN1433940A Method and device for conveying and installing feeding board using executor in end of feeding board of robot
08/06/2003CN1117010C System for cleaning carrier by gas from gas source and transporting and supporting carrier
08/05/2003US6602038 Unified conveying apparatus, and semiconductor device manufacturing facility comprising the same
08/05/2003US6601824 Single shaft, dual cradle vacuum slot valve
08/05/2003US6601468 Drive system for multiple axis robot arm
07/2003
07/31/2003US20030140952 System for treating mass-production parts
07/31/2003US20030140716 Method and arrangement for transporting and inspecting semiconductor substrates
07/30/2003EP1330835A1 Arrangement for transporting a semiconductor wafer carrier
07/30/2003CN2563130Y Transport device for etching machine of circuit board
07/30/2003CN1116213C Device for surface treatment by immersion
07/30/2003CN1116211C Chain for chain scraper conveyor
07/29/2003US6599077 Material delivery system for clean room-like environments
07/29/2003US6599076 Dual cassette load lock
07/29/2003US6599075 Semiconductor wafer processing apparatus
07/24/2003WO2003061354A2 System and methods for conveying and transporting levitated articles
07/24/2003WO2003060961A1 High-performance non-contact support platforms
07/24/2003WO2003059793A1 Device and method for the surface treatment of parts
07/24/2003US20030136515 Processing apparatus
07/24/2003US20030136514 Method of supercritical processing of a workpiece
07/23/2003CN1431976A Method and device for processing glass pane
07/17/2003WO2003058707A1 Semiconductor processing system and semiconductor carrying mechanism
07/17/2003WO2003058679A2 System and method of processing composite substrate within a high throughput reactor
07/17/2003US20030133762 Semiconductor wafer transport method and semiconductor wafer transport apparatus using the same
07/17/2003US20030133086 Substrate processing apparatus and substrate processing method
07/17/2003US20030131902 Vacuum load lock, system including vacuum load lock, and associated methods
07/17/2003US20030131874 Automated semiconductor processing systems
07/16/2003EP1327913A2 Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector
07/16/2003EP1327592A2 Sealing of traction elements
07/16/2003CN1114552C Synchronous assembling line capable of conveying work piece therein and method thereof
07/15/2003US6594560 Automated-guided vehicle system and method for controlling the same
07/15/2003US6594546 Plant for processing wafers
07/15/2003US6592322 Personal guided transport vehicle
07/15/2003US6592318 Docking cart with integrated load port
07/15/2003US6592317 Pod loader interface end effectors
07/15/2003US6591962 Transporting apparatus for plate form body
07/15/2003US6591960 Edge grip aligner with buffering capabilities
07/10/2003WO2003056624A1 Processed body carrying device, and processing system with carrying device
07/10/2003US20030129051 Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector
07/10/2003US20030129045 Universal modular wafer transport system
07/10/2003US20030127484 Method and equipment to divide glass plates into cut pieces
07/09/2003CN1429062A Method and device for mfg. printed circuit board
07/09/2003CN1428279A Board storage box
07/09/2003CN1114226C Vacuum treating apparatus
07/08/2003US6591163 System, process, apparatus and program for controlling special lot carrying in semiconductor carrying facility
07/08/2003US6588605 Planar article rack having closeable holding members
07/08/2003US6588577 System for conveying ceramic shaped bodies and a receiving plate used therefor
07/03/2003US20030125832 System, process, apparatus and program for controlling special lot carrying in semiconductor carrying facility
07/03/2003US20030123971 Substrate processing apparatus and substrate processing method
07/03/2003US20030123963 Bi-directional wafer transfer mechanism and method
07/03/2003US20030123958 Wafer handling apparatus and method
07/03/2003US20030121874 Transportation and storage cart
07/03/2003US20030121536 Washing device and its work conveying method
07/03/2003US20030121417 Process facility having at least two physical units each having a reduced density of contaminating particles with respect to the surroundings
07/03/2003DE10143722C2 Verfahren und Vorrichtung zur Sortierung von Wafern Method and apparatus for the sorting of wafers
07/02/2003EP1323651A2 Process and apparatus for sorting glass sheets
07/02/2003EP1272411A4 System for parallel processing of workpieces
07/02/2003CN2558622Y Soft circuit board holder
07/02/2003CN1113030C Plant for processing containers, device, method and pallet for transporting containers
07/01/2003US6585470 System for transporting substrates
07/01/2003US6585100 Arrangement for feeding and/or taking away magazines filled with articles
06/2003
06/26/2003WO2003052802A2 Dual robot processing system
06/26/2003US20030116567 Lot management production method and product carrying container
06/26/2003US20030115906 Method and device for processing glass pane
06/26/2003DE20301136U1 Transporting and storing unit for plate-form elements is built from and dismantled into several sub-assemblies, and in assembled state of unit the sub-assemblies interlock without additional connecting elements
06/25/2003EP1320874A1 Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool
06/25/2003EP1320418A1 Device and Method for the Surface Treatment of Workpieces
06/25/2003CN1426087A Lining treatment system
06/25/2003CN1112720C Semiconductor wafer aligning system and aligning method
06/25/2003CN1112590C Picking up and putting on device of mechanic finger system for testing semiconductor device
06/24/2003US6582175 Robot for handling semiconductor wafers
06/19/2003WO2003050022A1 Monorail semiconductor wafer cassette transport system
06/19/2003WO2003049868A1 Nozzle device, and substrate treating apparatus having the device
06/19/2003US20030113197 Apparatus for transferring semiconductor device in handler
06/19/2003US20030113190 Compact apparatus and method for storing and loading semiconductor wafer carriers
06/19/2003US20030113189 System and method of producing wafer
06/19/2003US20030113187 Dual robot processing system
06/18/2003EP1320121A2 Semiconductor wafer transport method and apparatus
06/18/2003EP1319634A2 Process and apparatus for severing glass sheets into parts
06/18/2003EP1319444A2 Device for treatment of articles
06/18/2003CN1111898C Device for conveying substrates through substrate processing plant
06/17/2003US6580967 Method for providing distributed material management and flow control in an integrated circuit factory
06/17/2003US6580955 Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme
06/17/2003US6579052 SMIF pod storage, delivery and retrieval system
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