Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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07/19/2000 | CN1260318A Method and apparatus for taking out IC model from normal tray of IC model conveying device |
07/18/2000 | US6091498 Semiconductor processing apparatus having lift and tilt mechanism |
07/18/2000 | US6090220 Decontamination of upper wafer surface with a positive pressure gas flow, subsequently vacuum attaching wafer to transfer support and moving to desired position |
07/18/2000 | US6090176 Sample transferring method and sample transfer supporting apparatus |
07/18/2000 | US6089377 Semiconductor wafer carrier |
07/13/2000 | WO2000041222A1 Apparatus for processing wafers |
07/13/2000 | WO2000041220A1 Transport device |
07/13/2000 | WO2000040379A1 Substrate transport apparatus with multiple arms on a common axis of rotation |
07/13/2000 | WO1999061350A3 Substrate transfer shuttle having a magnetic drive |
07/13/2000 | DE19900804A1 Conveyance system for transporting semiconductor wafers in clean rooms |
07/13/2000 | DE19900461A1 Transportvorrichtung Transport device |
07/12/2000 | EP1018477A1 Air stream transfer apparatus |
07/11/2000 | US6086976 Semiconductor wafer, handling apparatus, and method |
07/11/2000 | US6086323 Method for supplying wafers to an IC manufacturing process |
07/11/2000 | US6085893 Circuit-component transferring apparatus |
07/05/2000 | EP1017085A2 Semiconductor device manufacturing apparatus employing vacuum system |
07/05/2000 | CN1258606A Installating system for glass of vehicle |
07/04/2000 | US6083566 Substrates loading into lock chambers, pumping, loading and transferring |
07/04/2000 | US6083320 Robot for and method of transporting semiconductor wafers |
07/04/2000 | US6082951 Wafer cassette load station |
07/04/2000 | US6082949 Load port opener |
07/04/2000 | US6082948 Controlled environment enclosure and mechanical interface |
07/04/2000 | US6082497 Manual wafer lift |
06/29/2000 | WO2000037340A1 In/out load port transfer mechanism |
06/29/2000 | WO2000037339A1 Integrated load port-conveyor transfer system |
06/29/2000 | WO2000037338A1 Integrated intra-bay transfer, storage and delivery system |
06/29/2000 | CA2355183A1 Integrated load port-conveyor transfer system |
06/29/2000 | CA2355135A1 In/out load port transfer mechanism |
06/29/2000 | CA2355093A1 Integrated intra-bay transfer, storage and delivery system |
06/28/2000 | EP1013575A1 Kiln loading and unloading system, particularly for ceramic products |
06/28/2000 | EP1012876A2 Combined cmp and wafer cleaning apparatus and associated methods |
06/27/2000 | US6079928 Dual plate gas assisted heater module |
06/27/2000 | US6079927 Automated wafer buffer for use with wafer processing equipment |
06/22/2000 | WO2000035782A2 Distributed control system architecture and method for a material transport system |
06/22/2000 | CA2354624A1 Distributed control system architecture and method for a material transport system |
06/21/2000 | EP1010223A1 Method for treating substrates |
06/21/2000 | DE19857142A1 Semiconductor wafer or disc transport device uses spaced jets for directing gas onto underside of transported wafers or discs with broken sections received in spaces between transport jets |
06/21/2000 | CN1257034A Base plate unloading apparatus and method thereof |
06/20/2000 | US6077027 Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device |
06/20/2000 | US6077026 Programmable substrate support for a substrate positioning system |
06/20/2000 | US6077018 Device for sorting of glass blanks |
06/15/2000 | WO2000034987A2 Apparatus and methods for handling a substrate |
06/15/2000 | WO2000034194A1 Process and apparatus for processing and transporting flat glass workpieces |
06/15/2000 | DE19856142A1 Querfördervorrichtung für einen stapelbaren Träger, insbesondere für einen vertikalen Durchlaufofen durchlaufende Träger, Verfahren zum Betreiben einer solchen Querfördervorrichtung sowie Träger für eine solche Querfördervorrichtung Transverse conveying device for a stackable carriers, particularly for a vertical continuous furnace passing carrier, method for operating such a cross conveyor and carriers for such a transverse conveyor |
06/14/2000 | EP1008824A2 Installation for transversely conveying stackable supports, supports and operating process for such an installation |
06/14/2000 | EP1008661A2 Installation for treating a continuously conveyed metal strip along a principal direction of transportation |
06/14/2000 | CN1256509A Cutting device |
06/13/2000 | US6074746 Separation device for sheet products and its fabrication process |
06/13/2000 | US6074515 Apparatus for processing substrates |
06/13/2000 | US6074163 Apparatus for taking away plate and method for taking away plate |
06/13/2000 | US6074154 Substrate treatment system, substrate transfer system, and substrate transfer method |
06/08/2000 | WO2000033377A1 Wafer transfer device |
06/08/2000 | WO2000033359A2 Specimen holding robotic arm end effector |
06/08/2000 | WO2000033355A2 Apparatus for storing and moving a cassette |
06/08/2000 | WO2000033056A1 Method and apparatus for wafer inspection |
06/08/2000 | WO2000032472A1 Passively activated valve for carrier purging |
06/07/2000 | CN1255683A Batch workpiece transport controlling system and method for same |
06/07/2000 | CN1053157C Transmission and storage appts. for case type container |
06/06/2000 | US6071350 Semiconductor device manufacturing apparatus employing vacuum system |
06/06/2000 | US6071344 Transferring device for optical discs being processed in a disc manufacturing assembly, disc manufacturing assembly incorporating the transferring device, and associated transferring method |
06/06/2000 | US6071059 Loading and unloading station for semiconductor processing installations |
05/31/2000 | CN2380547Y Programme-controlled stacking machine |
05/31/2000 | CN1255235A Multiple single-wafer loadlock wafer processing apparatus and loading method therefor |
05/31/2000 | CN1254672A Combined bench for automatically loading/unloading ceramics products |
05/30/2000 | US6068704 Transfer arm apparatus and semiconductor processing system using the same |
05/30/2000 | US6068441 Substrate transfer system for semiconductor processing equipment |
05/30/2000 | US6068316 Large diameter wafer conveying system and method thereof |
05/30/2000 | US6068089 Releasable semiconductor wafer lifter basket |
05/30/2000 | US6068088 Releasable semiconductor wafer lifter basket |
05/25/2000 | WO2000030156A1 Vacuum processing system |
05/24/2000 | EP1002748A1 Device for stacking flat objects |
05/24/2000 | CN1254318A Device for surface treatment by immersion |
05/23/2000 | US6066210 Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section |
05/18/2000 | WO2000028587A1 Processing device |
05/18/2000 | WO2000027770A1 Glass article, method for handling glass article and handling tool for glass article |
05/18/2000 | CA2349574A1 Glass article, method for handling glass article and handling tool for glass article |
05/17/2000 | EP0980301A4 Coaxial drive loader arm |
05/16/2000 | US6062808 Clean transfer method and apparatus therefor |
05/16/2000 | US6062795 Wafer ring feeding apparatus |
05/16/2000 | US6062781 Load security system for a storage and transport framework for storing and/or transporting two-dimensional articles |
05/16/2000 | US6062241 Substrate conveying device and substrate conveying method |
05/16/2000 | CA2185158C Method and composition for applying acidic interleaving material in aqueous media to glass sheets |
05/10/2000 | EP0999158A1 Modular station for the automated loading and unloading of ceramic products and the like |
05/10/2000 | EP0999154A1 Shuttle conveyor |
05/10/2000 | CN1252892A Device for conveying substrates through a substrate processing plant |
05/09/2000 | US6059520 Process of loading rolls of roofing material onto a pallet |
05/09/2000 | US6059517 End effector assembly for inclusion in a system for producing uniform deposits on a wafer |
05/04/2000 | WO2000025347A1 Plasma treatment apparatus and method |
05/04/2000 | WO2000024551A1 Carrier system positioning method |
05/04/2000 | WO1999028951A3 Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing |
05/04/2000 | DE19848946A1 Pendelförderer Shuttle conveyor |
05/03/2000 | EP0997408A2 A method of manufacturing a stack of spaced lites |
05/03/2000 | EP0996765A1 Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer |
05/02/2000 | US6056828 Holding by suction; switching to select support; unloading |
05/02/2000 | US6056026 Passively activated valve for carrier purging |
04/26/2000 | CN1251419A Gas-floating device, gas-floating conveying device and heat-treatment device thereof |
04/25/2000 | US6053980 Substrate processing apparatus |
04/25/2000 | US6053688 Method and apparatus for loading and unloading wafers from a wafer carrier |
04/25/2000 | US6053687 Cost effective modular-linear wafer processing |
04/25/2000 | US6053686 Device and method for load locking for semiconductor processing |