Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304)
07/2000
07/19/2000CN1260318A Method and apparatus for taking out IC model from normal tray of IC model conveying device
07/18/2000US6091498 Semiconductor processing apparatus having lift and tilt mechanism
07/18/2000US6090220 Decontamination of upper wafer surface with a positive pressure gas flow, subsequently vacuum attaching wafer to transfer support and moving to desired position
07/18/2000US6090176 Sample transferring method and sample transfer supporting apparatus
07/18/2000US6089377 Semiconductor wafer carrier
07/13/2000WO2000041222A1 Apparatus for processing wafers
07/13/2000WO2000041220A1 Transport device
07/13/2000WO2000040379A1 Substrate transport apparatus with multiple arms on a common axis of rotation
07/13/2000WO1999061350A3 Substrate transfer shuttle having a magnetic drive
07/13/2000DE19900804A1 Conveyance system for transporting semiconductor wafers in clean rooms
07/13/2000DE19900461A1 Transportvorrichtung Transport device
07/12/2000EP1018477A1 Air stream transfer apparatus
07/11/2000US6086976 Semiconductor wafer, handling apparatus, and method
07/11/2000US6086323 Method for supplying wafers to an IC manufacturing process
07/11/2000US6085893 Circuit-component transferring apparatus
07/05/2000EP1017085A2 Semiconductor device manufacturing apparatus employing vacuum system
07/05/2000CN1258606A Installating system for glass of vehicle
07/04/2000US6083566 Substrates loading into lock chambers, pumping, loading and transferring
07/04/2000US6083320 Robot for and method of transporting semiconductor wafers
07/04/2000US6082951 Wafer cassette load station
07/04/2000US6082949 Load port opener
07/04/2000US6082948 Controlled environment enclosure and mechanical interface
07/04/2000US6082497 Manual wafer lift
06/2000
06/29/2000WO2000037340A1 In/out load port transfer mechanism
06/29/2000WO2000037339A1 Integrated load port-conveyor transfer system
06/29/2000WO2000037338A1 Integrated intra-bay transfer, storage and delivery system
06/29/2000CA2355183A1 Integrated load port-conveyor transfer system
06/29/2000CA2355135A1 In/out load port transfer mechanism
06/29/2000CA2355093A1 Integrated intra-bay transfer, storage and delivery system
06/28/2000EP1013575A1 Kiln loading and unloading system, particularly for ceramic products
06/28/2000EP1012876A2 Combined cmp and wafer cleaning apparatus and associated methods
06/27/2000US6079928 Dual plate gas assisted heater module
06/27/2000US6079927 Automated wafer buffer for use with wafer processing equipment
06/22/2000WO2000035782A2 Distributed control system architecture and method for a material transport system
06/22/2000CA2354624A1 Distributed control system architecture and method for a material transport system
06/21/2000EP1010223A1 Method for treating substrates
06/21/2000DE19857142A1 Semiconductor wafer or disc transport device uses spaced jets for directing gas onto underside of transported wafers or discs with broken sections received in spaces between transport jets
06/21/2000CN1257034A Base plate unloading apparatus and method thereof
06/20/2000US6077027 Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device
06/20/2000US6077026 Programmable substrate support for a substrate positioning system
06/20/2000US6077018 Device for sorting of glass blanks
06/15/2000WO2000034987A2 Apparatus and methods for handling a substrate
06/15/2000WO2000034194A1 Process and apparatus for processing and transporting flat glass workpieces
06/15/2000DE19856142A1 Querfördervorrichtung für einen stapelbaren Träger, insbesondere für einen vertikalen Durchlaufofen durchlaufende Träger, Verfahren zum Betreiben einer solchen Querfördervorrichtung sowie Träger für eine solche Querfördervorrichtung Transverse conveying device for a stackable carriers, particularly for a vertical continuous furnace passing carrier, method for operating such a cross conveyor and carriers for such a transverse conveyor
06/14/2000EP1008824A2 Installation for transversely conveying stackable supports, supports and operating process for such an installation
06/14/2000EP1008661A2 Installation for treating a continuously conveyed metal strip along a principal direction of transportation
06/14/2000CN1256509A Cutting device
06/13/2000US6074746 Separation device for sheet products and its fabrication process
06/13/2000US6074515 Apparatus for processing substrates
06/13/2000US6074163 Apparatus for taking away plate and method for taking away plate
06/13/2000US6074154 Substrate treatment system, substrate transfer system, and substrate transfer method
06/08/2000WO2000033377A1 Wafer transfer device
06/08/2000WO2000033359A2 Specimen holding robotic arm end effector
06/08/2000WO2000033355A2 Apparatus for storing and moving a cassette
06/08/2000WO2000033056A1 Method and apparatus for wafer inspection
06/08/2000WO2000032472A1 Passively activated valve for carrier purging
06/07/2000CN1255683A Batch workpiece transport controlling system and method for same
06/07/2000CN1053157C Transmission and storage appts. for case type container
06/06/2000US6071350 Semiconductor device manufacturing apparatus employing vacuum system
06/06/2000US6071344 Transferring device for optical discs being processed in a disc manufacturing assembly, disc manufacturing assembly incorporating the transferring device, and associated transferring method
06/06/2000US6071059 Loading and unloading station for semiconductor processing installations
05/2000
05/31/2000CN2380547Y Programme-controlled stacking machine
05/31/2000CN1255235A Multiple single-wafer loadlock wafer processing apparatus and loading method therefor
05/31/2000CN1254672A Combined bench for automatically loading/unloading ceramics products
05/30/2000US6068704 Transfer arm apparatus and semiconductor processing system using the same
05/30/2000US6068441 Substrate transfer system for semiconductor processing equipment
05/30/2000US6068316 Large diameter wafer conveying system and method thereof
05/30/2000US6068089 Releasable semiconductor wafer lifter basket
05/30/2000US6068088 Releasable semiconductor wafer lifter basket
05/25/2000WO2000030156A1 Vacuum processing system
05/24/2000EP1002748A1 Device for stacking flat objects
05/24/2000CN1254318A Device for surface treatment by immersion
05/23/2000US6066210 Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section
05/18/2000WO2000028587A1 Processing device
05/18/2000WO2000027770A1 Glass article, method for handling glass article and handling tool for glass article
05/18/2000CA2349574A1 Glass article, method for handling glass article and handling tool for glass article
05/17/2000EP0980301A4 Coaxial drive loader arm
05/16/2000US6062808 Clean transfer method and apparatus therefor
05/16/2000US6062795 Wafer ring feeding apparatus
05/16/2000US6062781 Load security system for a storage and transport framework for storing and/or transporting two-dimensional articles
05/16/2000US6062241 Substrate conveying device and substrate conveying method
05/16/2000CA2185158C Method and composition for applying acidic interleaving material in aqueous media to glass sheets
05/10/2000EP0999158A1 Modular station for the automated loading and unloading of ceramic products and the like
05/10/2000EP0999154A1 Shuttle conveyor
05/10/2000CN1252892A Device for conveying substrates through a substrate processing plant
05/09/2000US6059520 Process of loading rolls of roofing material onto a pallet
05/09/2000US6059517 End effector assembly for inclusion in a system for producing uniform deposits on a wafer
05/04/2000WO2000025347A1 Plasma treatment apparatus and method
05/04/2000WO2000024551A1 Carrier system positioning method
05/04/2000WO1999028951A3 Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing
05/04/2000DE19848946A1 Pendelförderer Shuttle conveyor
05/03/2000EP0997408A2 A method of manufacturing a stack of spaced lites
05/03/2000EP0996765A1 Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer
05/02/2000US6056828 Holding by suction; switching to select support; unloading
05/02/2000US6056026 Passively activated valve for carrier purging
04/2000
04/26/2000CN1251419A Gas-floating device, gas-floating conveying device and heat-treatment device thereof
04/25/2000US6053980 Substrate processing apparatus
04/25/2000US6053688 Method and apparatus for loading and unloading wafers from a wafer carrier
04/25/2000US6053687 Cost effective modular-linear wafer processing
04/25/2000US6053686 Device and method for load locking for semiconductor processing