Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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06/17/2003 | US6578891 Substrate holder and substrate transfer apparatus using the same |
06/17/2003 | CA2285393C Device for conveying substrates through a substrate processing plant |
06/12/2003 | WO2003048012A1 Substrate processing apparatus with independently configurable integral load locks |
06/12/2003 | WO2003047820A1 Scalar type robot for carrying flat plate-like object, and flat plate-like object processing system |
06/12/2003 | WO2003047637A1 Sterilizing tunnel for pharmaceutical containers |
06/12/2003 | US20030108415 Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm |
06/12/2003 | US20030108409 Method for charging and discharging a process tank |
06/12/2003 | US20030108407 Interbay transportation system and method of interbay transportation |
06/12/2003 | US20030106776 Work conveying system and traveling path sealing structure in the work conveying system |
06/11/2003 | CN1422791A Semiconductor chip transmission method and apparatus for transmitting semiconductor chip using same |
06/11/2003 | CN1422790A Automatic board picking-up apparatus |
06/11/2003 | CN1111277C Equipment for automatically dispensing based on prescription |
06/10/2003 | US6577382 Substrate transport apparatus and method |
06/10/2003 | US6576065 Grasping element for placement and removal |
06/10/2003 | US6575687 Wafer transport system |
06/05/2003 | WO2003046958A2 Wafer handling apparatus and method |
06/05/2003 | US20030103836 Substrate processing apparatus with independently configurable integral load locks |
06/05/2003 | US20030103835 Pod cover removing-installing apparatus |
06/05/2003 | DE20301306U1 Transporting device for breakable objects has frame elements on both ends, each consisting of four square wood sections and diagonal square wood section dividing rectangular frame formed by other sections into trapezoidal areas |
06/05/2003 | DE20211864U1 Handling system for vehicle body parts in factory has conveyer which dips each part into several vats of treatment and coating fluids in turn using carriage with rotatable clamp |
06/04/2003 | EP1157184B1 Device for conveying insulating glass panes |
06/04/2003 | CN1422373A Air feed system, air dezymotizing method and system and method for transfer |
06/03/2003 | US6572321 Loader conveyor for substrate processing system |
05/30/2003 | WO1999067158A3 Integrated roller transport pod and asynchronous conveyor |
05/29/2003 | US20030097982 Facility processing, especially painting objects, especially vehicle bodies |
05/28/2003 | EP1315198A1 Pod cover removing-installing apparatus |
05/28/2003 | EP1314703A2 Apparatus to cut laminated glass |
05/28/2003 | EP1313662A2 Edge gripping end effector wafer handling apparatus |
05/28/2003 | EP1313540A1 Fluid media particle isolating system |
05/28/2003 | EP1066209B1 Device for treating plate-shaped work pieces, especially printed-circuit boards |
05/28/2003 | CN2552877Y Packing box structure with cleaning function |
05/27/2003 | US6568899 Wafer processing system including a robot |
05/27/2003 | US6568552 Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing |
05/22/2003 | WO2003043060A2 Reduced footprint tool for automated processing of substrates |
05/22/2003 | WO2002099165A3 Tools with transfer devices for handling workpieces |
05/22/2003 | US20030094212 Stationary and pivotable trays for semiconductor wafer transfer |
05/21/2003 | EP0769986B1 Conveyor cassette for wafers |
05/20/2003 | US6565722 Installation and method for multilayered immersion coating |
05/20/2003 | US6565304 Wafer boat elevator system and method |
05/20/2003 | US6564818 Methods of implementing a single shaft, dual cradle vacuum slot valve |
05/20/2003 | US6564441 Method and apparatus for manufacturing wiper levers |
05/20/2003 | US6564421 Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same |
05/15/2003 | WO2003041136A1 Electron beam exposure device |
05/15/2003 | WO2003041135A1 Electron beam exposure device |
05/15/2003 | WO2003040708A1 Holder device |
05/15/2003 | US20030092261 Substrate processing method |
05/15/2003 | US20030091410 Reduced footprint tool for automated processing of microelectronic substrates |
05/15/2003 | US20030091409 Integrated system for tool front-end workpiece handling |
05/15/2003 | US20030089386 Modular treatment plant having horizontal drum machines |
05/15/2003 | US20030089312 Treatment plant, in particular for painting objects, in particular vehicle bodies |
05/15/2003 | US20030088959 Wafer transfer apparatus |
05/14/2003 | EP1129046B1 Glass article, method for handling glass article and handling tool for glass article |
05/14/2003 | CN1418056A Workpiece conveying robot |
05/13/2003 | US6561894 Clean box, clean transfer method and apparatus therefor |
05/08/2003 | WO2003038869A2 Universal modular wafer transport system |
05/08/2003 | WO2003037762A1 Device and method for the surface treatment of workpieces |
05/08/2003 | WO2003037576A1 Substrate transfer apparatus, and substrate transfer method |
05/08/2003 | US20030086774 System and method for inhibiting motion of semiconductor wafers in a variable-pressure chamber |
05/07/2003 | CN1416403A Modular sorter |
05/06/2003 | US6558962 Method of manufacturing semiconductor devices with use of wafer carrier having conditioning units |
05/06/2003 | US6558509 Dual wafer load lock |
05/06/2003 | US6558100 Vacuum processing apparatus and a vacuum processing system |
05/02/2003 | EP0861487B1 Time optimal trajectory for cluster tool robots |
05/01/2003 | US20030082039 Plate parts carrying system |
05/01/2003 | US20030082032 Wafer management system and methods for managing wafers |
05/01/2003 | US20030079957 Work conveying system |
04/30/2003 | CN2547696Y Carrying frame squence moving apparatus |
04/30/2003 | CN1414134A Sputtering method |
04/30/2003 | CN1107009C In/out port transfer mechanism |
04/30/2003 | CN1107005C Transport box |
04/30/2003 | CN1106969C Installating system for glass of vehicle |
04/29/2003 | US6554980 Vacuum treatment apparatus for deposition of thin layers on three-dimensional substrates |
04/29/2003 | US6554904 Roller arrangement for a product to be coated in a molten metal bath |
04/29/2003 | US6554560 Method for aligning wafers in a cassette |
04/29/2003 | US6553850 Method and arrangement for transporting and inspecting semiconductor substrates |
04/24/2003 | WO2002005313A3 Automated processing system |
04/24/2003 | US20030077879 Method of manufacturing semiconductor device using heated conveyance member |
04/24/2003 | US20030077162 Edge gripping prealigner |
04/24/2003 | US20030077161 Person-guided vehicle |
04/24/2003 | US20030077150 Substrate processing apparatus and a method for fabricating a semiconductor device by using same |
04/24/2003 | US20030075387 Wafer loading device |
04/24/2003 | DE10147656C1 Glass panel machining facility has clamp-jawed fingered lifting beam of all-ways powered lifting device to machine panel all over without obstruction |
04/23/2003 | EP1304297A1 Spacer for stacked glass sheets |
04/23/2003 | CN2546410Y Water-seal zipper conveyor |
04/23/2003 | CN1412099A Automatic medicine-collecting and medicine-dispensing device according to registers for circular arc combined medicine cabinet |
04/22/2003 | US6553280 Valve/sensor assemblies |
04/22/2003 | US6551049 Device for controlling the drive of mechanisms operating separately from one another |
04/22/2003 | US6551045 Wafer stage chamber |
04/22/2003 | US6551044 Bellows isolation for index platforms |
04/17/2003 | WO2002095542A3 Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers |
04/17/2003 | WO2002067298A3 Consecutive deposition system |
04/17/2003 | US20030074097 Lithography; stacked containers |
04/17/2003 | US20030072645 Edge gripping pre-aligner |
04/16/2003 | EP1301314A1 Robot having independent end effector linkage motion |
04/16/2003 | CN2545159Y Pneumatic and electric module of extruding tank frame |
04/16/2003 | CN1410329A Method of avoiding crystal plate delivery system to carry out fault program |
04/16/2003 | CN1105673C Continuous surface treating method and apparatus with centrifugal separator |
04/15/2003 | US6547510 Substrate transport apparatus with coaxial drive shafts and dual independent scara arms |
04/15/2003 | US6547504 Wafer carrying system and carrying method thereof |
04/15/2003 | US6547473 Fastening device for conveying cart |