Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304)
06/2003
06/17/2003US6578891 Substrate holder and substrate transfer apparatus using the same
06/17/2003CA2285393C Device for conveying substrates through a substrate processing plant
06/12/2003WO2003048012A1 Substrate processing apparatus with independently configurable integral load locks
06/12/2003WO2003047820A1 Scalar type robot for carrying flat plate-like object, and flat plate-like object processing system
06/12/2003WO2003047637A1 Sterilizing tunnel for pharmaceutical containers
06/12/2003US20030108415 Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm
06/12/2003US20030108409 Method for charging and discharging a process tank
06/12/2003US20030108407 Interbay transportation system and method of interbay transportation
06/12/2003US20030106776 Work conveying system and traveling path sealing structure in the work conveying system
06/11/2003CN1422791A Semiconductor chip transmission method and apparatus for transmitting semiconductor chip using same
06/11/2003CN1422790A Automatic board picking-up apparatus
06/11/2003CN1111277C Equipment for automatically dispensing based on prescription
06/10/2003US6577382 Substrate transport apparatus and method
06/10/2003US6576065 Grasping element for placement and removal
06/10/2003US6575687 Wafer transport system
06/05/2003WO2003046958A2 Wafer handling apparatus and method
06/05/2003US20030103836 Substrate processing apparatus with independently configurable integral load locks
06/05/2003US20030103835 Pod cover removing-installing apparatus
06/05/2003DE20301306U1 Transporting device for breakable objects has frame elements on both ends, each consisting of four square wood sections and diagonal square wood section dividing rectangular frame formed by other sections into trapezoidal areas
06/05/2003DE20211864U1 Handling system for vehicle body parts in factory has conveyer which dips each part into several vats of treatment and coating fluids in turn using carriage with rotatable clamp
06/04/2003EP1157184B1 Device for conveying insulating glass panes
06/04/2003CN1422373A Air feed system, air dezymotizing method and system and method for transfer
06/03/2003US6572321 Loader conveyor for substrate processing system
05/2003
05/30/2003WO1999067158A3 Integrated roller transport pod and asynchronous conveyor
05/29/2003US20030097982 Facility processing, especially painting objects, especially vehicle bodies
05/28/2003EP1315198A1 Pod cover removing-installing apparatus
05/28/2003EP1314703A2 Apparatus to cut laminated glass
05/28/2003EP1313662A2 Edge gripping end effector wafer handling apparatus
05/28/2003EP1313540A1 Fluid media particle isolating system
05/28/2003EP1066209B1 Device for treating plate-shaped work pieces, especially printed-circuit boards
05/28/2003CN2552877Y Packing box structure with cleaning function
05/27/2003US6568899 Wafer processing system including a robot
05/27/2003US6568552 Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing
05/22/2003WO2003043060A2 Reduced footprint tool for automated processing of substrates
05/22/2003WO2002099165A3 Tools with transfer devices for handling workpieces
05/22/2003US20030094212 Stationary and pivotable trays for semiconductor wafer transfer
05/21/2003EP0769986B1 Conveyor cassette for wafers
05/20/2003US6565722 Installation and method for multilayered immersion coating
05/20/2003US6565304 Wafer boat elevator system and method
05/20/2003US6564818 Methods of implementing a single shaft, dual cradle vacuum slot valve
05/20/2003US6564441 Method and apparatus for manufacturing wiper levers
05/20/2003US6564421 Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same
05/15/2003WO2003041136A1 Electron beam exposure device
05/15/2003WO2003041135A1 Electron beam exposure device
05/15/2003WO2003040708A1 Holder device
05/15/2003US20030092261 Substrate processing method
05/15/2003US20030091410 Reduced footprint tool for automated processing of microelectronic substrates
05/15/2003US20030091409 Integrated system for tool front-end workpiece handling
05/15/2003US20030089386 Modular treatment plant having horizontal drum machines
05/15/2003US20030089312 Treatment plant, in particular for painting objects, in particular vehicle bodies
05/15/2003US20030088959 Wafer transfer apparatus
05/14/2003EP1129046B1 Glass article, method for handling glass article and handling tool for glass article
05/14/2003CN1418056A Workpiece conveying robot
05/13/2003US6561894 Clean box, clean transfer method and apparatus therefor
05/08/2003WO2003038869A2 Universal modular wafer transport system
05/08/2003WO2003037762A1 Device and method for the surface treatment of workpieces
05/08/2003WO2003037576A1 Substrate transfer apparatus, and substrate transfer method
05/08/2003US20030086774 System and method for inhibiting motion of semiconductor wafers in a variable-pressure chamber
05/07/2003CN1416403A Modular sorter
05/06/2003US6558962 Method of manufacturing semiconductor devices with use of wafer carrier having conditioning units
05/06/2003US6558509 Dual wafer load lock
05/06/2003US6558100 Vacuum processing apparatus and a vacuum processing system
05/02/2003EP0861487B1 Time optimal trajectory for cluster tool robots
05/01/2003US20030082039 Plate parts carrying system
05/01/2003US20030082032 Wafer management system and methods for managing wafers
05/01/2003US20030079957 Work conveying system
04/2003
04/30/2003CN2547696Y Carrying frame squence moving apparatus
04/30/2003CN1414134A Sputtering method
04/30/2003CN1107009C In/out port transfer mechanism
04/30/2003CN1107005C Transport box
04/30/2003CN1106969C Installating system for glass of vehicle
04/29/2003US6554980 Vacuum treatment apparatus for deposition of thin layers on three-dimensional substrates
04/29/2003US6554904 Roller arrangement for a product to be coated in a molten metal bath
04/29/2003US6554560 Method for aligning wafers in a cassette
04/29/2003US6553850 Method and arrangement for transporting and inspecting semiconductor substrates
04/24/2003WO2002005313A3 Automated processing system
04/24/2003US20030077879 Method of manufacturing semiconductor device using heated conveyance member
04/24/2003US20030077162 Edge gripping prealigner
04/24/2003US20030077161 Person-guided vehicle
04/24/2003US20030077150 Substrate processing apparatus and a method for fabricating a semiconductor device by using same
04/24/2003US20030075387 Wafer loading device
04/24/2003DE10147656C1 Glass panel machining facility has clamp-jawed fingered lifting beam of all-ways powered lifting device to machine panel all over without obstruction
04/23/2003EP1304297A1 Spacer for stacked glass sheets
04/23/2003CN2546410Y Water-seal zipper conveyor
04/23/2003CN1412099A Automatic medicine-collecting and medicine-dispensing device according to registers for circular arc combined medicine cabinet
04/22/2003US6553280 Valve/sensor assemblies
04/22/2003US6551049 Device for controlling the drive of mechanisms operating separately from one another
04/22/2003US6551045 Wafer stage chamber
04/22/2003US6551044 Bellows isolation for index platforms
04/17/2003WO2002095542A3 Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers
04/17/2003WO2002067298A3 Consecutive deposition system
04/17/2003US20030074097 Lithography; stacked containers
04/17/2003US20030072645 Edge gripping pre-aligner
04/16/2003EP1301314A1 Robot having independent end effector linkage motion
04/16/2003CN2545159Y Pneumatic and electric module of extruding tank frame
04/16/2003CN1410329A Method of avoiding crystal plate delivery system to carry out fault program
04/16/2003CN1105673C Continuous surface treating method and apparatus with centrifugal separator
04/15/2003US6547510 Substrate transport apparatus with coaxial drive shafts and dual independent scara arms
04/15/2003US6547504 Wafer carrying system and carrying method thereof
04/15/2003US6547473 Fastening device for conveying cart
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