| Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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| 04/02/2002 | US6364955 Particulary of all types of storage disks for reactive and nonreactive processes; a carrousel-type conveyor for rotating about an axis and a transport element to be moved out and back radially and controlled at given positions; apertures |
| 04/02/2002 | US6364922 Substrate transport container |
| 04/02/2002 | US6364762 Wafer atmospheric transport module having a controlled mini-environment |
| 04/02/2002 | US6364745 Mapping system for semiconductor wafer cassettes |
| 04/02/2002 | US6364593 Material transport system |
| 04/02/2002 | US6364592 Small footprint carrier front end loader |
| 03/28/2002 | US20020037655 Method for manufacturing semiconductor device having low dielectric constant insulating film, wafer processing equipment and wafer storing box used in this method |
| 03/28/2002 | US20020037210 Substrate processing apparatus |
| 03/28/2002 | US20020037207 Apparatus for and method of transporting substrates to be processed |
| 03/27/2002 | EP1191574A2 Chip feeder and method for feeding semiconductor chips |
| 03/27/2002 | EP1042191A4 Slippable roller conveyor for clean rooms |
| 03/27/2002 | CN1342214A Distributed control system architecture and method for material transport system |
| 03/27/2002 | CN1341543A 芯片元件进给器 Chip component feeder |
| 03/26/2002 | US6361648 Wafer transfer station for a chemical mechanical polisher |
| 03/21/2002 | WO2002022469A2 Loadlock with integrated pre-clean chamber |
| 03/21/2002 | US20020035418 Automated-guided vehicle system and method for controlling the same |
| 03/21/2002 | US20020034595 Substrate processing equipment and method and covering member for use therein |
| 03/21/2002 | US20020034433 Method and apparatus for processing wafers |
| 03/21/2002 | US20020034429 Substrate processing pallet and related substrate processing method and machine |
| 03/21/2002 | US20020033133 Substrate processing pallet and related substrate processing method and machine |
| 03/20/2002 | EP1189275A1 Substrate transfer device |
| 03/20/2002 | CN1340468A Automatic separator for plate glass |
| 03/20/2002 | CN1340447A Flexible material conveying machanism |
| 03/19/2002 | US6360132 Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme |
| 03/19/2002 | US6358115 Dicing apparatus |
| 03/14/2002 | US20020032496 Transport device |
| 03/14/2002 | US20020031421 Substrate arranging apparatus and method |
| 03/14/2002 | US20020031420 Single wafer load lock with internal wafer transport |
| 03/14/2002 | US20020029936 Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers |
| 03/13/2002 | EP1185475A1 Cassette buffering within a minienvironment |
| 03/13/2002 | CN1339393A Feeder for integrated circuit chip elements |
| 03/12/2002 | US6354794 Method for automatically transferring wafers between wafer holders in a liquid environment |
| 03/12/2002 | US6354781 Semiconductor manufacturing system |
| 03/12/2002 | US6354445 Rack holding device |
| 03/07/2002 | WO2002018107A1 Edge grip aligner with buffering capabilities |
| 03/07/2002 | US20020026984 By which a predetermined number of flat workpieces may be parallel processed, whereby the number of operating cycles for such treatment is minimalized so as to reach optimal short throughput times with optimal low handling |
| 03/07/2002 | US20020026728 Processing method for substrate |
| 03/05/2002 | US6352403 Controlled environment enclosure and mechanical interface |
| 03/05/2002 | US6352265 Seal ring using gas curtain |
| 02/28/2002 | US20020026259 Method of transporting substrates and apparatus for transporting substrates |
| 02/28/2002 | US20020025244 Transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same |
| 02/28/2002 | US20020024645 Load-lock chamber and exposure apparatus using the same |
| 02/27/2002 | EP1182695A2 Semiconductor processing module and apparatus |
| 02/27/2002 | EP1182694A2 Processing system for substrate |
| 02/27/2002 | EP1182691A2 Method and apparatus for transfering a wafer |
| 02/27/2002 | CN1337291A Disc laser-graining apparatus |
| 02/26/2002 | US6351686 Semiconductor device manufacturing apparatus and control method thereof |
| 02/26/2002 | US6350177 Combined CMP and wafer cleaning apparatus and associated methods |
| 02/26/2002 | US6350097 Method and apparatus for processing wafers |
| 02/23/2002 | CA2355832A1 Restricted article access device |
| 02/21/2002 | US20020021952 Substrate processing apparatus |
| 02/21/2002 | US20020021934 Fastening device for conveying cart |
| 02/21/2002 | US20020021435 Substrate conveying system in exposure apparatus |
| 02/21/2002 | US20020020751 Substrate transfer apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing method |
| 02/21/2002 | US20020020355 Processing apparatus |
| 02/21/2002 | US20020020344 Semiconductor manufacturing method, substrate processing method, and semiconductor manufacturing apparatus |
| 02/21/2002 | DE10038168A1 Handling and processing machine for use in semiconductor industry comprises two storage modules containing magazines whose height can be adjusted and which are mounted on turntables, allowing disk-shaped components to be transferred |
| 02/20/2002 | CN1336316A Conveying system for ceramic mouldings, and supporting therefor |
| 02/19/2002 | US6347919 Wafer processing chamber having separable upper and lower halves |
| 02/14/2002 | WO2002012076A1 Support device |
| 02/14/2002 | WO2002011858A1 Fluid media particle isolating system |
| 02/14/2002 | WO2001058818A3 Method for transporting glass panels through a coating installation and device for transporting said glass panels |
| 02/14/2002 | WO2001040884A3 Monitoring system for a conveying device that conveys flat articles, especially wafers |
| 02/14/2002 | CA2418428A1 Fluid media particle isolating system |
| 02/13/2002 | EP1179611A2 Chamber for transport of substrates |
| 02/13/2002 | EP1178940A1 Vacuum assisted walking beam apparatus |
| 02/13/2002 | CN1336008A Specimen holding robotic arm end effector |
| 02/13/2002 | CN1335700A Automatic guiding transporting apparatus system and its controlling method |
| 02/13/2002 | CN1079037C Method for input-output workpieces especially automobile bodies, and equipment for workpiece surface processing |
| 02/12/2002 | US6345947 Substrate arranging apparatus and method |
| 02/12/2002 | US6345635 Conveying system for work pieces |
| 02/07/2002 | WO2001001454A9 Atmospheric wafer transfer module with nest for wafer transport robot and method of implementing same |
| 02/07/2002 | US20020014390 Wafer carrying system and carrying method thereof |
| 02/06/2002 | EP1177994A2 A system for conveying ceramic shaped bodies and a receiving plate used therefor |
| 02/06/2002 | EP1177573A2 System for treating wafers |
| 02/06/2002 | EP1177572A2 Device for treating wafers |
| 02/06/2002 | EP1177570A1 Device for handling substrates inside and outside a clean room |
| 01/31/2002 | US20020011203 Multi wafer introduction/single wafer conveyor mode processing system and method of processing wafers using the same |
| 01/30/2002 | EP1176628A2 On-the-fly center finding and notch aligning for wafer |
| 01/30/2002 | EP1175970A2 Method and apparatus for calibrating a robot |
| 01/30/2002 | CN1333732A In/out port transfer mechanism |
| 01/30/2002 | CN1333731A Integrated intra-bag transfer, storage and delivery system |
| 01/30/2002 | CN1333730A Integrated load port-conveyor transfer system |
| 01/29/2002 | US6343239 Transportation method for substrate wafers and transportation apparatus |
| 01/24/2002 | US20020009813 Exposure apparatus, coating/developing apparatus, method of transferring a substrate, method of producing a device, semiconductor production factory, and method of maintaining an exposure apparatus |
| 01/24/2002 | US20020009357 Semiconductor processing apparatus having lift and tilt mechanism |
| 01/24/2002 | US20020008005 Clean room having an escalator, and method of transporting a semiconductor device therein |
| 01/24/2002 | US20020007986 Material delivery system for clean room-like environments |
| 01/24/2002 | US20020007782 Heater in a conveyor system |
| 01/23/2002 | CN1332686A Passively activated valve for carrier purging |
| 01/23/2002 | CN1332667A Substrate transport apparatus with multiple arms on common axis of rotation |
| 01/22/2002 | US6340405 Etching apparatus for manufacturing semiconductor devices |
| 01/17/2002 | WO2002005328A2 Pod load interface equipment adapted for implementation in a fims system |
| 01/17/2002 | WO2002005314A2 Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly |
| 01/17/2002 | WO2002005313A2 Automated processing system |
| 01/17/2002 | WO2002004176A1 Robot having independent end effector linkage motion |
| 01/17/2002 | US20020006324 Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment |
| 01/17/2002 | US20020006323 Semiconductor processing system and transfer apparatus for the same |
| 01/17/2002 | US20020005168 Dual wafer load lock |
| 01/17/2002 | DE10032525A1 Vorrichtung zum Bedrucken von Einzelobjekten An apparatus for printing on individual objects |