Patents for B24B 37 - Lapping machines or devices; Accessories (20,836)
06/1994
06/23/1994WO1994013847A1 Method of manufacturing cast iron of high strength and low expansion
06/23/1994WO1994013434A1 Reduced viscosity slurries, abrasive articles made therefrom, and methods of making said articles
06/23/1994CA2151932A1 Reduced viscosity slurries, abrasive articles made therefrom, and methods of making said articles
06/14/1994US5321304 Detecting the endpoint of chem-mech polishing, and resulting semiconductor device
06/14/1994US5320706 Removing slurry residue from semiconductor wafer planarization
06/07/1994US5317837 Device on a double disk lapping machine
06/01/1994EP0599299A1 Method and apparatus for polishing a workpiece
05/1994
05/25/1994EP0598190A1 Apparatus for polishing wafer
05/18/1994EP0597709A1 Means and method for fabrication of grazing incidence optics
05/18/1994CN2164949Y Guide aerodynamic turbine grinder
05/18/1994CN2164948Y Surface abrasive polishing machine capable of grinding inner concave surface and external convex surface
05/10/1994US5310455 Bonding strength
05/10/1994US5310441 Wafer binding method and apparatus
05/03/1994US5308438 Providing a polishing pad coated with a slurry, rotating workpiece on pad, controlling rotational speed of workpiece and applying pressure, and monitoring current drawn by motor
04/1994
04/27/1994CN2163025Y Iron pot polishing machine
04/27/1994CN2163024Y Precision finishing machine with correcting ring
04/20/1994EP0593057A1 Planarization apparatus and method for performing a planarization operation
04/13/1994CN2161422Y Sand cylinder
04/12/1994US5302233 Method for shaping features of a semiconductor structure using chemical mechanical planarization (CMP)
04/12/1994US5301470 Ball lapping machine
04/06/1994EP0590871A1 Thinning a diamond body by means of molten rare-earth-containing alloys
04/05/1994US5300188 Depositing patterned polish stopping layer on substrate, depositing diamond layer, polishing down to stopping layer
04/05/1994US5300155 IC chemical mechanical planarization process incorporating slurry temperature control
04/05/1994US5300130 Diamond particles and alumina particles in suspension
04/05/1994US5299393 Slurry containment device for polishing semiconductor wafers
03/1994
03/30/1994EP0589434A1 Polishing apparatus
03/30/1994EP0589433A1 Polishing apparatus
03/29/1994US5297364 Polishing pad with controlled abrasion rate
03/29/1994US5297361 Polishing machine with an improved sample holding table
03/23/1994CN2159287Y Spile of finishing machine
03/16/1994CN1083758A Precision lapping machine with correction ring
03/15/1994US5294309 Electro-abrasive polishing of the inner surface of pipes to extra-smooth mirror finish
03/09/1994CN2158325Y Lapping machine for ferrite article
03/08/1994US5291693 For removing particulate from a lapping surface
03/08/1994CA1327453C Aluminum oxide/aluminum oxynitride/group ivb metal nitride abrasive particles derived from a sol-gel process
03/03/1994WO1994004599A1 Polymeric substrate with polymeric microelements
03/02/1994EP0584905A1 Apparatus for wafer chamfer polishing
03/02/1994CN2157850Y Lapping machine
02/1994
02/23/1994CN1082567A A polymeric substrate containing polymeric microelements and methods of making and using the same
02/22/1994US5287663 Polishing pad and method for polishing semiconductor wafers
02/08/1994US5284803 Metod of manufacturing a semiconductor body using a carrier wafer and a monocrystalline semiconducting top layer
02/08/1994US5284524 Method and apparatus for enhancing surface treatment of perforated materials
02/02/1994EP0581350A1 Slurry containment device for polishing semiconductor wafers
02/01/1994US5283680 Optical connector assembly
01/1994
01/26/1994EP0580162A1 Wafer with defined grinded warp and process for manufacturing
01/26/1994CN2154148Y Three-ring plane abrader
01/19/1994EP0579298A1 Method of manufacturing a plate having a plane main surface, method of manufacturing a plate having parallel main surfaces, and device suitable for implementing said methods
01/19/1994CN2153436Y 砂磨机 Sander
01/19/1994CN1080889A 研磨机 Grinder
01/18/1994US5279771 Removal photoresist from substrate
01/12/1994EP0578507A2 Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials
01/12/1994EP0578351A1 Elastic foamed sheet and wafer-polishing jig using the sheet
01/11/1994US5277702 Plately alumina
01/05/1994EP0577537A1 Confined water fixture for holding wafers undergoing chemical-mechanical polishing
01/04/1994US5274960 Uniform velocity double sided finishing machine
12/1993
12/28/1993US5272844 Polishing fixture with adjustable sample mount with adjustable weight
12/23/1993WO1993025347A1 Wafer polishing method and apparatus
12/22/1993CN2150017Y Lapping-head of stone-lapping machine
12/08/1993CN2148638Y Gas-filling temperature-controlling wet-type finishing machine
12/07/1993US5267418 Confined water fixture for holding wafers undergoing chemical-mechanical polishing
11/1993
11/30/1993US5265378 Detecting the endpoint of chem-mech polishing and resulting semiconductor device
11/11/1993DE4314152A1 Appts. to eliminate tendency of wafer substrates to swing in semiconductor processing - comprising elastically deformable ring with its inner periphery lying next to source
11/03/1993EP0567894A1 Device for guiding a workpiece or a tool while machining toric or spheric surfaces of ophtalmic lenses on grinding or polishing machines
11/02/1993USRE34425 Method and apparatus for mechanical planarization and endpoint detection of a semiconductor wafer
11/02/1993US5257478 Apparatus for interlayer planarization of semiconductor material
10/1993
10/28/1993WO1993017829A3 System and method for texturing magnetic data storage disks
10/20/1993EP0566258A1 Improved slurry polisher using ultrasonic agitation
10/20/1993EP0566218A2 Method for finding a preferred spot for a laser beam of a laser beam interferometer and laser interferometer apparatus
10/20/1993EP0566217A2 Method and apparatus for focussing a beam of radiant energy
10/20/1993CN1077406A Method for polishing plate and apparatus therefor
10/19/1993US5254205 Wafer binding method and apparatus
10/06/1993EP0563954A1 Method for polishing plate and apparatus therefor
10/03/1993CA2093046A1 Method for polishing plate and apparatus therefor
09/1993
09/29/1993EP0562718A1 Polishing machine and method of dissipating heat therefrom
09/28/1993US5248318 Lapping abrasive of alumina-zirconia system and method for producing the same
09/28/1993US5248024 Wafer mounting device having position indicator
09/22/1993EP0560902A1 Composite monolithic lap and a method of making the same
09/21/1993US5246525 Apparatus for polishing
09/21/1993US5245796 Slurry polisher using ultrasonic agitation
09/21/1993US5245794 Audio end point detector for chemical-mechanical polishing and method therefor
09/21/1993US5245790 Ultrasonic energy enhanced chemi-mechanical polishing of silicon wafers
09/16/1993WO1993017829A2 System and method for texturing magnetic data storage disks
09/15/1993CN1076152A Apparatus for interlayer planarization of semiconductor material
09/07/1993US5242524 Device for detecting an end point in polishing operations
08/1993
08/31/1993US5240552 Chemical mechanical planarization (CMP) of a semiconductor wafer using acoustical waves for in-situ end point detection
08/18/1993EP0555660A2 Apparatus for interlayer planarization of semiconductor material
08/11/1993EP0554908A1 Fine alpha alumina particles, their production and use
08/11/1993CN1075110A Cover operating device for a grinding drum and grinding device
08/10/1993US5234867 Method for planarizing semiconductor wafers with a non-circular polishing pad
08/03/1993US5232875 Method and apparatus for improving planarity of chemical-mechanical planarization operations
07/1993
07/29/1993DE4302067A1 Chemical-mechanical planarising - by turning semiconductor wafer, planarising, and polishing wafer
07/20/1993US5229656 Optical comparator circuit
07/20/1993US5228243 Support for a mirror blank
07/14/1993CN2138009Y Platinum finisher for vehicle
07/13/1993US5226955 Polishing composition for memory hard disc
07/13/1993US5226758 Method and an apparatus for handling wafers
07/11/1993CA2086447A1 Foam buffing pad having a finishing surface with a splash reducing configuration
07/06/1993US5224304 Automated free abrasive machine for one side piece part machining
06/1993
06/30/1993EP0548846A1 Wafer polisher head having floating retainer ring
06/29/1993US5222329 Acoustical method and system for detecting and controlling chemical-mechanical polishing (CMP) depths into layers of conductors, semiconductors, and dielectric materials