Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
07/2008
07/16/2008CN101221881A Impedance matching method and device
07/16/2008CN101221356A Mask etch plasma reactor with backside optical sensors and multiple frequency control of etch distribution
07/15/2008US7399507 Method for preparation of a lithographic printing plate and to a lithographic printing plate produced by the method
07/15/2008US7399500 Rapid process for the production of multilayer barrier layers
07/15/2008US7399359 Method and system for providing a thin film with a controlled crystal orientation using pulsed laser induced melting and nucleation-initiated crystallization
07/10/2008WO2008083301A1 Apparatus and method for plasma arc coating
07/10/2008WO2008082518A2 Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber
07/10/2008WO2008082297A1 A surface dielectric barrier discharge plasma unit and a method of generating a surface plasma
07/10/2008WO2008080224A1 Cell injector for flow cytometer having mass spectrometer detector and method for using same
07/10/2008US20080166500 Catalytic surface activation method for electroless deposition
07/10/2008US20080164820 Charged particle beam apparatus, method for controlling charged particle, and frequency adjustment apparatus
07/10/2008US20080164819 Semiconductor apparatus using ion beam
07/10/2008DE202007018382U1 Vorrichtung zur Erzeugung eines Plasma-Jets und für eine solche Vorrichtung bestimmtes Werkzeug An apparatus for generating a plasma jet, and for such a device specific tool
07/10/2008DE102008003943A1 Ionenstrahlbereitstellungsvorrichtung Ion beam delivery apparatus
07/10/2008CA2673912A1 Cell injector for flow cytometer having mass spectrometer detector and method for using same
07/09/2008EP1940584A1 Rotating machines for treating containers
07/09/2008EP1503963B1 Vitrification furnace and method with dual heating means
07/09/2008CN101218860A Plasma treatment apparatus
07/09/2008CN101218859A Plasma reactor having multiple antenna coil set
07/09/2008CN101218723A Gas excitation device having bridged electrode and gas excitation method
07/09/2008CN101217096A A quick RF automatic impedance matching method
07/09/2008CN100401481C Plasma processing method and apparatus
07/08/2008US7397048 Technique for boron implantation
07/08/2008US7396570 Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers
07/08/2008US7395779 Plasma processing apparatus
07/03/2008WO2008079742A2 Prevention of film deposition on pecvd process chamber wall
07/03/2008WO2008078636A1 Ion injecting device, and ion injecting method
07/03/2008WO2008078508A1 Plasma generating body and reaction device
07/03/2008US20080161182 Rf non-thermal plasma techniques for catalyst development to improve process efficiencies
07/03/2008US20080160858 Plasma deposited microporous carbon material
07/03/2008US20080160205 introduction of reagents is controlled to enhance the coating formed on the substrate and conserve the amount of reagents used
07/03/2008US20080159461 Apparatus and process for generating nuclear heat
07/03/2008US20080156632 Arc Detection and Handling in Radio Frequency Power Applications
07/03/2008US20080156631 Methods of Producing Plasma in a Container
07/03/2008DE19801366B4 Vorrichtung zur Erzeugung von Plasma A device for generating plasma
07/02/2008EP1938672A2 Plasma boriding method
07/02/2008EP1937791A1 Decomposition of natural gas or methane using cold arc discharge
07/02/2008EP1937757A1 Method for the fabrication of high surface area ratio and high aspect ratio surfaces on substrates
07/02/2008EP1843863A4 Method and apparatus for cleaning and surface conditioning objects with plasma
07/02/2008CN201080494Y Solar cell deposition system radio-frequency discharge device
07/02/2008CN101213643A Microwave plasma processing apparatus
07/02/2008CN101211752A Method and device for controlling wafer DC auto-bias and compensating electrostatic gravitational force between direct current electrode and water
07/02/2008CN101211687A Inductance coupling coil and inductance coupling plasma device applying same
07/02/2008CN100398192C Apparatus for manufacturing particles using corona discharge and method thereof
07/01/2008US7392760 Microwave-excited plasma processing apparatus
06/2008
06/26/2008WO2008076629A2 Inductively-coupled plasma source
06/26/2008WO2008075817A1 Atmospheric pressure plasma generating apparatus by induction electrode
06/26/2008WO2008074969A1 Non-thermal plasma cell
06/26/2008WO2008074604A1 Device and method for generating a plasma beam
06/26/2008WO2008074443A2 Method and apparatuses for producing x-ray radiation
06/26/2008WO2008074162A1 Thermal plasma treatment technologies for hazardous wastes remediation
06/26/2008WO2007076280A8 Side-specific treatment of textiles using plasmas
06/26/2008WO2007030218A3 A method of forming a tantalum-containing layer from a metalorganic precursor
06/26/2008US20080152839 Electron device having electrode made of metal that is familiar with carbon
06/26/2008US20080152838 Hardware development to reduce bevel deposition
06/26/2008US20080150835 Plasma display apparatus and driving method thereof
06/26/2008US20080149603 Arc detector for plasma processing system
06/26/2008DE202007017015U1 Kontrollvorrichtung und Energieversorgungssystem Control device and power supply system
06/26/2008DE102006060942A1 Vorrichtung und Verfahren zur Erzeugung eines Plasmastrahls An apparatus and method for generating a plasma beam
06/25/2008CN201078871Y Plasma generator and cathode thereof
06/25/2008CN101207966A Plasma processing apparatus
06/25/2008CN101207965A Plasma generator and method for prolonging plasma generator cathode life
06/25/2008CN101207061A Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism
06/25/2008CN101207014A Method and apparatus for preventing arcing at ports exposed to a plasma in plasma processing chambers
06/25/2008CN101207003A Inner lining of wafer processing chamber and wafer processing chamber containing said inner lining
06/25/2008CN101207001A Exhaust device and reaction chamber containing the same
06/25/2008CN101206999A Inner lining and reaction chamber containing the same
06/25/2008CN101206990A Method for detecting plasma distribution density in responses chamber
06/25/2008CN100397588C Plasma processing device
06/25/2008CN100397567C Plasma reaction chamber
06/25/2008CN100396419C Plasma processing method
06/24/2008US7391851 EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions
06/24/2008US7391160 Controlled fusion in a field reversed configuration and direct energy conversion
06/24/2008US7390561 Preparing a pattern with contour of desired shape; applying release agent; flame spraying; integrating thermal spray material layer into composite by backing and vacuum infusing with resin; separating impregnated composite coated spray material from release agent coated pattern
06/24/2008US7390537 Methods for producing low-k CDO films with low residual stress
06/19/2008WO2008072390A1 Plasma producing apparatus and method of plasma production
06/19/2008WO2008071287A1 Plasma accelerator arrangement
06/19/2008WO2008027845A3 Dopant activation in doped semiconductor substrates
06/19/2008US20080145651 Method for Manufacturing a Pecvd Carbon Coated Polymer Article and Article Obtained by Such Method
06/19/2008US20080145565 Article with Lubricated Surface and Method
06/19/2008US20080142931 Method of Impurity Introduction, Impurity Introduction Apparatus and Semiconductor Device Produced with Use of the Method
06/19/2008US20080142755 coating layers having a seal structure comprising powders or slurries of yttrium oxide, aluminum oxide, boron oxide, silica, calcium oxide or strontium oxide, gallium oxide, and ammonium phosphate, used for wafer processing
06/19/2008US20080142729 Inductively-coupled plasma source
06/18/2008EP1933608A1 Method and apparatus for plasma treatment of porous material
06/18/2008EP1933607A1 Plasma-cutting torch with cooling circuit with adaptive immersion pipe
06/18/2008EP1933606A1 Electrode for plasma reactor
06/18/2008EP1933605A1 Plasma generating device and plasma generating method
06/18/2008EP1932587A1 Electrode for plasma reactor
06/18/2008CN101204123A Plasma arc torch providing angular shield flow injection
06/18/2008CN101203087A Plasma treatment device
06/18/2008CN101203086A Plasma treatment device
06/18/2008CN101202206A Reaction chamber inner lining and reaction chamber containing the inner lining
06/18/2008CN101202197A Ionization arrangement
06/17/2008CA2326202C Method and apparatus for deposition of biaxially textured coatings
06/12/2008WO2008070181A2 Mid-chamber gas distribution plate, tuned plasma control grid and electrode
06/12/2008WO2008069157A1 Apparatus and method for plasma processing
06/12/2008WO2008069110A1 Spin-polarization ion beam generator, scattering spectroscope using the spin-polarization ion beam, and specimen processing device
06/12/2008US20080138636 causing oxygen to diffuse and penetrate in solid solution form and bombarding the surface with gas flow containing particles into the surfaces of aircraft rails or flaps, having high wear resistance, lubricity and high fatigue strength
06/12/2008US20080138626 Plasma-enhanced functionalization of substrate surfaces with quaternary ammonium and quaternary phosphonium groups
06/12/2008US20080138535 plasma treating apparatus include electrodes on which substrates are supported, an inert gas and air supply used to control the temperature of the substrate during chucking and dechucking; surface treatment
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