Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/1991
04/09/1991CA1282874C Semiconductor devices employing high resistivity in p-based epitaxial layer forcurrent confinement
04/09/1991CA1282873C Method for fabricating self-aligned, conformal metallization on semiconductor wafer
04/09/1991CA1282872C Circuit containing integrated bipolar and complementary mos transistors on a common substrate
04/09/1991CA1282867C Thin film orthogonal microsensor for air flow and method
04/09/1991CA1282840C Shared current loop, multiple field apparatus and process for plasma processing
04/09/1991CA1282627C Image reversal negative working photoresist
04/07/1991CA2027070A1 Multilayered leadframe with interdigitated leads
04/04/1991WO1991004650A1 Via-forming ceramics composition
04/04/1991WO1991004599A1 Controllable temperature-compensated voltage-limiting device
04/04/1991WO1991004574A1 Method of manufacturing a field effect transistor and a semiconductor element
04/04/1991WO1991004573A2 Excimer laser ablation method and apparatus for microcircuit device fabrication
04/04/1991WO1991004572A1 Substrate support device for cvd apparatus
04/04/1991WO1991004569A1 Disk scanning apparatus for batch ion implanters
04/04/1991WO1991004498A1 Test circuit
04/04/1991WO1991004213A1 Automated wafer transport system
04/04/1991WO1991004212A1 Tip for a pipette barrel, especially a vacuum pipette barrel
04/04/1991WO1991004123A1 Method of producing spot-like partially clad member
04/04/1991DE3931985A1 Transport magazine for wafers in clean room - has transport carriage with enclosed magazine chamber with movable wall member(s)
04/04/1991DE3931587A1 Producing semiconductor layer on wafer - by doping in reaction chamber of epitaxy reactor
04/04/1991DE3931551A1 Copper and ceramic multilayer substrate prodn. - involving slitting of ceramic layers to avoid thermal stress damage
04/03/1991EP0420827A2 Aqueous base developable negative resist compositions
04/03/1991EP0420764A2 Charge transfer device with meander channel
04/03/1991EP0420748A1 Process of fabricating a high-tension MIS integrated circuit
04/03/1991EP0420700A2 Exposure apparatus
04/03/1991EP0420672A1 Semiconducteur stubstrate structure for use in power IC device
04/03/1991EP0420646A2 Semiconductor memory device having capacitor through which data read/write is carried out
04/03/1991EP0420636A1 Method of controlling misfit dislocation
04/03/1991EP0420597A2 Process for forming a deposited film by use of alkyl aluminum hydride and process for preparing semiconductor device
04/03/1991EP0420595A2 Deposited film formation method utilizing selective deposition by use of alkyl aluminum hydride
04/03/1991EP0420594A2 Process for forming metal deposited film containing aluminium as main component by use of alkyl aluminium hydride
04/03/1991EP0420590A2 Process for forming deposited film and process for producing semiconductor device
04/03/1991EP0420589A2 Process for forming deposited film and process for preparing semiconductor device
04/03/1991EP0420555A2 Method of bubble-free bonding of silicon wafers
04/03/1991EP0420551A2 Conveying apparatus
04/03/1991EP0420529A2 Metallization processing
04/03/1991EP0420516A1 Method for forming semiconductor thin film
04/03/1991EP0420489A2 Compensation of lithographic and etch proximity effects
04/03/1991EP0420405A2 Integrated circuit comprising interconnections
04/03/1991EP0420322A1 Process for manufacturing a semiconductor integrated circuit including a heterojunction bipolar transistor and/or buried resistors
04/03/1991EP0420267A2 Apparatus for producing semiconductor devices
04/03/1991EP0420182A2 Nonvolatile memory cell and its manufacturing method
04/03/1991EP0420164A1 Bipolar power semiconductor device and method for making the same
04/03/1991EP0420141A2 Process for removing fine particles from articles of fluorine-containing resin
04/03/1991EP0420122A1 Pellicle packaging and handling system
04/03/1991EP0420068A2 Charge transfer device having MIM structures and method for driving the same
04/03/1991EP0419941A2 Method of producing a plastic packaged semiconductor device
04/03/1991EP0419930A2 Particulate contamination prevention scheme
04/03/1991EP0419898A2 Method of enhancing the withstand voltage of a multilayered semiconductor device
04/03/1991EP0419804A2 Multilayer structures of different electroactive materials and methods of fabrication thereof
04/03/1991EP0419767A2 Method for manufacturing a Silicon body
04/03/1991EP0419763A1 A stable interconnection metallization for VLSI devices including copper
04/03/1991EP0419693A1 Process for passivating crystal defects in a polycrystalline silicon material
04/03/1991EP0419663A1 Nonvolatile semiconductor memory and method of producing the same
04/03/1991EP0419586A1 Integrated circuit comprising a vertical transistor.
04/03/1991EP0419483A1 Method and apparatus for generating high-resolution images
04/03/1991EP0419464A1 Process for surface and fluid cleaning
04/03/1991EP0419461A1 Wafer handling system with bernoulli pick-up
04/03/1991EP0265494A4 Accelerometer proof mass interface
04/03/1991EP0245431A4 Photoimaging processes and compositions
04/03/1991CN1050469A Bipolar and cmos transistor
04/03/1991CN1050468A Electrode-selecting trabsistor
04/03/1991CN1012310B Vlsi local interconnect method and structure
04/02/1991US5005138 Electron beam direct printing apparatus
04/02/1991US5005136 Silicon-compiler method and arrangement
04/02/1991US5005102 Multilayer electrodes for integrated circuit capacitors
04/02/1991US5005075 X-ray mask and method of manufacturing an X-ray mask
04/02/1991US5005071 Semiconductor device
04/02/1991US5005068 Semiconductor memory device
04/02/1991US5005067 Semiconductor integrated circuit
04/02/1991US5005066 Self-aligned NPN bipolar transistor built in a double polysilicon CMOS technology
04/02/1991US5005060 Tablecloth memory matrix with staggered EPROM cells
04/02/1991US5005059 Digital-to-analog converting field effect device and circuitry
04/02/1991US5005057 Semiconductor light-emitting diode and method of manufacturing the same
04/02/1991US5005056 Amorphous-silicon thin film transistor array substrate
04/02/1991US5005046 Pattern forming method
04/02/1991US5004936 Non-loading output driver circuit
04/02/1991US5004934 Semiconductor integrated circuit and test method for characteristics
04/02/1991US5004927 Process for forming a fine pattern having a high aspect ratio
04/02/1991US5004925 Method and apparatus for detecting alignment mark of semiconductor device
04/02/1991US5004924 Wafer transport apparatus for ion implantation apparatus
04/02/1991US5004705 Inverted epitaxial process
04/02/1991US5004704 Method for manufacturing a semiconductor device having a phospho silicate glass layer as an interlayer insulating layer
04/02/1991US5004703 Multiple trench semiconductor structure method
04/02/1991US5004702 Forming cantactor apertures
04/02/1991US5004701 Method of forming isolation region in integrated circuit semiconductor device
04/02/1991US5004640 Heat treatment, reduction, firing
04/02/1991US5004521 Etchant effective on thin metal film but not on protective coating over it
04/02/1991US5004399 A semiconductor
04/02/1991US5004348 Alignment device
04/02/1991US5004340 Calibration target for surface analysis scanner systems
04/02/1991US5004321 Resolution confocal microscope, and device fabrication method using same
04/02/1991US5003999 Apparatus for treating silicon wafers in an acid bath
04/02/1991CA1282273C Method of creating patterned multilayer films for use in production of semiconductor circuits and systems
03/1991
03/30/1991WO1991005366A1 Method of producing a thin silicon-on-insulator layer
03/29/1991CA2026126A1 Process for the production of a high voltage mis integrated circuit
03/28/1991DE3931238A1 Multi-chip module - with chips carried in book page fashion by specified plastic coating
03/28/1991CA2026248A1 Pellicle packaging and handling system
03/27/1991EP0419369A1 Optical near-field method for microlithography and microlithography devices using this method
03/27/1991EP0419356A1 Process for removing gaseous hydrids on a solid carrier consisting of metal oxides
03/27/1991EP0419302A1 A method of manufacturing semiconductor on insulator
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