| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/19/1991 | US4994689 Semiconductor integrated circuit device |
| 02/19/1991 | US4994413 Doping, annealing in oxygen atmosphere |
| 02/19/1991 | US4994409 Method for manufacturing a trench capacitor using a photoresist etch back process |
| 02/19/1991 | US4994408 Aluminum gallium arsenide films on gallium arsenide substrate |
| 02/19/1991 | US4994407 Radiation hardened field oxides for NMOS and CMOS-bulk and process for forming |
| 02/19/1991 | US4994406 Used in integrated circuit |
| 02/19/1991 | US4994404 Method for forming a lightly-doped drain (LDD) structure in a semiconductor device |
| 02/19/1991 | US4994403 Forming first and second drain regions on opposite sides of source region; semiconductors |
| 02/19/1991 | US4994402 Method of fabricating a coplanar, self-aligned contact structure in a semiconductor device |
| 02/19/1991 | US4994401 Method of making a thin film transistor |
| 02/19/1991 | US4994400 Forming dielectric and conductive sidewalls along opening in composite layer, doping |
| 02/19/1991 | US4994399 Method of gettering heavy-metal impurities from silicon substrates by laser-assisted intrinsic gettering |
| 02/19/1991 | US4994336 Method for manufacturing a control plate for a lithographic device |
| 02/19/1991 | US4994302 Multilayer ceramics; firing green tape |
| 02/19/1991 | US4994162 Continuous sputtering, heating |
| 02/19/1991 | US4994154 Filling voids by plating metals from solutions; controlling voltage to prevent overheating |
| 02/19/1991 | US4994142 Stripping oxides, deoxygenation before heating to prvevent oxide formation under mask; accuracy, uniform width channels |
| 02/19/1991 | US4994141 Method of manufacturing a mask support of SiC for radiation lithography masks |
| 02/19/1991 | US4994140 Selective etching of semiconductor wafers |
| 02/19/1991 | US4994139 Method of manufacturing a light-conducting device |
| 02/19/1991 | US4993955 Top-load socket for integrated circuit device |
| 02/19/1991 | US4993954 Device for interconnection between and integrated circuit and an electrical circuit |
| 02/19/1991 | US4993885 Adaptable passage for the transporation of parts in an ultra-clean environment |
| 02/19/1991 | US4993837 Method and apparatus for pattern detection |
| 02/19/1991 | US4993622 Copper doped aluminum bonding pad and copper doped gold wire; hardness, nondeforming |
| 02/19/1991 | US4993618 Wire bonding method |
| 02/19/1991 | US4993559 Wafer carrier |
| 02/19/1991 | US4993534 Method and apparatus for reliable integrated circuit package construction |
| 02/19/1991 | US4993358 Chemical vapor deposition reactor and method of operation |
| 02/19/1991 | US4993357 Apparatus for atomic layer epitaxial growth |
| 02/19/1991 | US4993355 Susceptor with temperature sensing device |
| 02/19/1991 | US4993148 Method of manufacturing a circuit board |
| 02/15/1991 | CA2023092A1 Method and device for sputtering of films |
| 02/14/1991 | DE4024318A1 Semiconductor read-only memory with higher density - uses common contacts to word and bit-lines and source diffusion, reduces series resistance with metal- or silicide-layers |
| 02/13/1991 | EP0412945A1 Automatic handling of different magazines by standarized pick-ups and identification codes |
| 02/13/1991 | EP0412837A2 Ultraviolet erasable non-volatile memory devices |
| 02/13/1991 | EP0412796A2 Automatic cleaning apparatus for disks |
| 02/13/1991 | EP0412781A1 Test method for an integrated circuit including non-volatile memory cell capable of temporarily holding information |
| 02/13/1991 | EP0412772A2 Semiconductor device with a passivation layer |
| 02/13/1991 | EP0412755A1 Method of forming crystal semiconductor film |
| 02/13/1991 | EP0412741A2 Conductive adhesive sheet used in semiconductor device manufacture |
| 02/13/1991 | EP0412728A2 Interferometric method and apparatus for controlling film thickness |
| 02/13/1991 | EP0412701A2 Thin film transistor and preparation thereof |
| 02/13/1991 | EP0412690A2 Device manufacture involving lithographic processing |
| 02/13/1991 | EP0412644A2 Low temperature low pressure thermal CVD process for forming conformal group III and/or group V-doped silicate glass coating of uniform thickness on integrated structure |
| 02/13/1991 | EP0412561A2 Semiconductor integrated circuit device |
| 02/13/1991 | EP0412558A2 Method of manufacturing nonvolatile semiconductor memories |
| 02/13/1991 | EP0412545A2 IC package and IC card incorporating the same thereinto |
| 02/13/1991 | EP0412502A1 Method of making MES type field effect transistor using III-V compound semiconductor |
| 02/13/1991 | EP0412405A2 Method and apparatus for improvement of interconnection capacitance |
| 02/13/1991 | EP0412393A2 Electron-detector diode biassing scheme for improved writing by an electron beam lithography machine |
| 02/13/1991 | EP0412326A2 A high-resolution lithographic method of making monolithic integrated circuits |
| 02/13/1991 | EP0412323A2 A film carrier for use in integrated circuit mounting |
| 02/13/1991 | EP0412263A2 Method of forming a contact hole in semiconductor integrated circuit |
| 02/13/1991 | EP0412185A1 Metallization for semiconductor devices having a diffusion barrier |
| 02/13/1991 | CN1049247A Metal-semiconductor field-effect transistor |
| 02/12/1991 | US4993053 Charge transfer device provided with an improved output stage |
| 02/12/1991 | US4992986 Semiconductor memory |
| 02/12/1991 | US4992980 Electrically programmable memory |
| 02/12/1991 | US4992907 Electrostatic discharge protection system |
| 02/12/1991 | US4992848 Self-aligned contact technology |
| 02/12/1991 | US4992847 Interconnected hybrid integrated circuit |
| 02/12/1991 | US4992846 Semiconductor |
| 02/12/1991 | US4992845 Semiconductor integrated circuit device having input/output buffer cells each comprising a plurality of transistor regions arranged in a single line |
| 02/12/1991 | US4992843 Collector contact of an integrated bipolar transistor |
| 02/12/1991 | US4992842 Charge-coupled device channel with countinously graded built-in potential |
| 02/12/1991 | US4992841 Pseudo uniphase charge coupled device |
| 02/12/1991 | US4992840 Aging resistance |
| 02/12/1991 | US4992839 Field effect thin film transistor having a semiconductor layer formed from a polycrystal silicon film containing hydrogen atom and halogen atom and process for the preparation of the same |
| 02/12/1991 | US4992838 Vertical MOS transistor with threshold voltage adjustment |
| 02/12/1991 | US4992836 Device for controlling the electrical supply to a load, in a "smart" power integrated circuit |
| 02/12/1991 | US4992699 X-ray phosphor imaging screen and method of making same |
| 02/12/1991 | US4992680 Programmable logic device having a plurality of programmable logic arrays arranged in a mosaic layout together with a plurality of interminglingly arranged interfacing blocks |
| 02/12/1991 | US4992668 Electron beam pattern generator control |
| 02/12/1991 | US4992394 Forming metal silicides; accuracy |
| 02/12/1991 | US4992393 Forming recess in stacked layered structure, filling with coolant, irradiating |
| 02/12/1991 | US4992392 Doping |
| 02/12/1991 | US4992391 Multilayer; polysilicon and silicide layers |
| 02/12/1991 | US4992390 Trench gate structure with thick bottom oxide |
| 02/12/1991 | US4992389 Making a self aligned semiconductor device |
| 02/12/1991 | US4992388 Short channel IGFET process |
| 02/12/1991 | US4992387 Method for fabrication of self-aligned asymmetric field effect transistors |
| 02/12/1991 | US4992386 Method of manufacturing a semiconductor light detector |
| 02/12/1991 | US4992303 Chemical vapor deposition of cadmium mercury telluride |
| 02/12/1991 | US4992299 Low pressure chemical vapor deposition |
| 02/12/1991 | US4992253 Adding 1 to 5 % by weight of aluminum nitride to a mixture of alumina and carbon black, heating in the presence of nitrogen |
| 02/12/1991 | US4992152 Reducing hillocking in aluminum layers formed on substrates |
| 02/12/1991 | US4992137 Evacuation by injection of an inert pruge gas to expel reactive gas from reactor while controlling voltage |
| 02/12/1991 | US4992136 Dry etching method |
| 02/12/1991 | US4992135 Containing oxidizer, forming tungsten oxide which is polished mechanically and dissolved in potassium or ammonium hydroxide in the solution |
| 02/12/1991 | US4992134 Dopant-independent polysilicon plasma etch |
| 02/12/1991 | US4992044 Reactant exhaust system for a thermal processing furnace |
| 02/12/1991 | US4991939 Liquid crystal display device |
| 02/12/1991 | US4991714 Spring loaded integrated circuit carrier |
| 02/12/1991 | US4991666 Terminal pad for fixing a clawed pin to the edge of a hybrid circuit substrate and a connection formed thereby |
| 02/12/1991 | US4991542 Method of forming a thin film by plasma CVD and apapratus for forming a thin film |
| 02/12/1991 | US4991540 Quartz-glass reactor for MOCVD systems |
| 02/12/1991 | US4991309 Fine positioning device and displacement controller therefor |
| 02/12/1991 | US4991291 Method for fabricating a fold-up frame |
| 02/12/1991 | US4991290 Flexible electrical interconnect and method of making |