Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/1991
01/15/1991US4985746 Semiconductor device and method of production
01/15/1991US4985745 Substrate structure for composite semiconductor device
01/15/1991US4985743 Insulated gate bipolar transistor
01/15/1991US4985741 MOS-controlled bipolar power semiconductor component
01/15/1991US4985740 Power field effect devices having low gate sheet resistance and low ohmic contact resistance
01/15/1991US4985722 Apparatus for coating a photo-resist film and/or developing it after being exposed
01/15/1991US4985717 MOS memory cell with exponentially-profiled doping and offset floating gate tunnel oxidation
01/15/1991US4985681 Particle beam measuring method for non-contact testing of interconnect networks
01/15/1991US4985673 Method and system for inspecting plural semiconductor devices
01/15/1991US4985646 Output buffer circuit of semiconductor integrated circuit
01/15/1991US4985641 Semiconductor integrated circuit device having selectable operational functions
01/15/1991US4985374 Making a semiconductor device with ammonia treatment of photoresist
01/15/1991US4985373 Multiple insulating layer for two-level interconnected metallization in semiconductor integrated circuit structures
01/15/1991US4985372 Dry etching
01/15/1991US4985371 Process for making integrated-circuit device metallization
01/15/1991US4985370 Method of manufacturing semiconductor laser device
01/15/1991US4985369 Method for making self-aligned ohmic contacts
01/15/1991US4985368 Method for making semiconductor device with no stress generated at the trench corner portion
01/15/1991US4985367 Method of manufacturing a lateral transistor
01/15/1991US4985344 Radiation imaging process for forming pattern without alkali-soluble polymer underlayer and water soluble radiation-sensitive diazonium salt overlayer
01/15/1991US4985342 Polysiloxane pattern-forming material with SiO4/2 units and pattern formation method using same
01/15/1991US4985319 Process for manufacturing a photomask
01/15/1991US4985114 Dry etching by alternately etching and depositing
01/15/1991US4985113 Sample treating method and apparatus
01/15/1991US4985112 Oscillation
01/15/1991US4985109 Apparatus for plasma processing
01/15/1991US4985105 Taping apparatus for lead frame
01/15/1991US4985097 Joined metal composite and method for production thereof
01/15/1991US4984954 Spatula for wafer transport
01/15/1991US4984953 Plate-like article conveying system
01/15/1991US4984902 Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
01/15/1991US4984891 Laser gauge interferometer and locating method using the same
01/15/1991US4984890 Method and an apparatus for aligning first and second objects with each other
01/15/1991US4984885 Method and apparatus for high power optical fiber injection and alignment
01/15/1991US4984731 Method of packaging electronic component parts using a eutectic die bonder
01/15/1991US4984730 Quality control for wire bonding
01/15/1991US4984597 Apparatus for rinsing and drying surfaces
01/15/1991US4984531 Device for accepting and holding a workpiece in vacuum coating apparatus
01/15/1991US4984358 Method of assembling stacks of integrated circuit dies
01/15/1991CA2056358A1 Laser machining
01/15/1991CA1279130C Differentially pumped seal apparatus
01/15/1991CA1279104C Lithographic technique using laser for fabrication of electronic components and the like
01/15/1991CA1278984C Crucible for epitaxy from the liquid phase of semiconductor layers having a "controlled" composition
01/12/1991CA2019921A1 Trimming circuit and trimming method performable using such a trimming circuit
01/10/1991WO1991000618A1 Electronic systems disposed in a high force environment
01/10/1991WO1991000617A1 Low inductance encapsulated package including a semiconductor chip
01/10/1991WO1991000615A1 Method for producing field oxide for a silicon-base integrated circuit
01/10/1991WO1991000614A1 Process for the anisotropic etching of semiconductor materials
01/10/1991WO1991000613A1 A method and arrangement for treating silicon plates
01/10/1991DE4019967A1 Miniaturised semiconductor device - e.g. vertical MOS transistor, with reduced switch-on resistance
01/10/1991DE3922833A1 Semiconductor disc heat treatment oven - has inlet apertures in row(s) in inner processing tube
01/09/1991EP0407324A2 A method of inhibiting corrosion in an electronic package
01/09/1991EP0407233A1 Method for fabricating a semiconductor substrate
01/09/1991EP0407202A2 Manufacturing semiconductor devices
01/09/1991EP0407169A2 Electron cyclotron resonance (ECR) plasma etching process and ECR plasma etching apparatus
01/09/1991EP0407168A2 A thin film semiconductor array device
01/09/1991EP0407133A2 Semiconductor device and method of manufacturing such semiconductor device
01/09/1991EP0407130A1 A low noise and high gain mesfet having improved performance at low current levels
01/09/1991EP0407107A2 Low reflection input configuration for integrated circuit packages
01/09/1991EP0407103A2 Method of packaging and powering integrated circuit chips and the chip assembly formed thereby
01/09/1991EP0407088A1 Amorphous semiconductor film and process for its production
01/09/1991EP0407086A2 Melamine-containing photoresists of improved sensitivity
01/09/1991EP0407077A2 Trench etching in an integrated-circuit semiconductor device
01/09/1991EP0407048A2 A dual channel A/D and D/A converter
01/09/1991EP0407047A2 Improved method of planarization of topologies in integrated circuit structures
01/09/1991EP0407044A1 A shutter system
01/09/1991EP0407011A2 Insulated gate semiconductor devices
01/09/1991EP0406995A1 TiN Thin film formation method
01/09/1991EP0406916A2 Conductivity modulation type semiconductor device and method for manufacturing the same
01/09/1991EP0406911A1 Process for preparation of polysilsesquioxane
01/09/1991EP0406890A2 Charge transfer device and its driving method
01/09/1991EP0406889A2 Method of manufacturing a solid-state imaging device
01/09/1991EP0406883A2 Bipolar type semiconductor device and method of making same
01/09/1991EP0406882A2 Ohmic connection electrodes for p-type semiconductor diamonds
01/09/1991EP0406861A2 Non-volatile semiconductor memory device
01/09/1991EP0406824A1 Apparatus for feeding granular silicon material
01/09/1991EP0406690A2 Process for continuously forming a large area functional deposited film by microwave PCVD method and an apparatus suitable for practicing the same
01/09/1991EP0406669A2 Thin film making method on semiconductor substrate and temperature controlling systems therefor
01/09/1991EP0406544A2 Collimated metal deposition
01/09/1991EP0406434A1 Dry-etching method
01/09/1991EP0406373A1 Tape automated bonded lead package and reusable transport tape for use therewith
01/09/1991EP0406351A1 Ultrasonic laser soldering.
01/09/1991EP0192668B1 Semiconductor integrated circuits gettered with phosphorus
01/09/1991EP0177042B1 Electronic circuit device and method of producing the same
01/08/1991US4984259 X-ray exposure apparatus
01/08/1991US4984201 Semiconductor storage device with common data line structure
01/08/1991US4984199 Semiconductor memory cells having common contact hole
01/08/1991US4984197 Semiconductor memory device having transfer gates coupled between bit line pairs and sense amplifier circuits
01/08/1991US4984061 Semiconductor device in which wiring layer is formed below bonding pad
01/08/1991US4984060 Semiconductor device wirings with hillocks
01/08/1991US4984059 Semiconductor device and a method for fabricating the same
01/08/1991US4984058 Semiconductor integrated circuit device
01/08/1991US4984056 Semiconductor integrated circuit device
01/08/1991US4984055 Semiconductor device having a plurality of conductive layers and manufacturing method therefor
01/08/1991US4984054 Electric fuse for a redundancy circuit
01/08/1991US4984053 Bipolar transistor with reduced parasitic capacitance
01/08/1991US4984052 Bonded substrate of semiconductor elements having a high withstand voltage
01/08/1991US4984050 Gate-array type intergated circuit semiconductor device
01/08/1991US4984048 Semiconductor device with buried side contact
01/08/1991US4984046 Silicon pressure sensor having a resistance layer of polycrystalline semicondutor