Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1991
03/06/1991EP0415343A2 Integrated circuit device and method for manufacturing the same
03/06/1991EP0415340A1 Method and apparatus for bonding semiconductor substrates
03/06/1991EP0415336A2 Method for manufacturing thick film circuit substrate
03/06/1991EP0415318A2 Semiconductor device
03/06/1991EP0415266A2 Radiation-sensitive positive resist composition
03/06/1991EP0415253A2 Thin film forming apparatus
03/06/1991EP0415252A2 Thin film forming apparatus
03/06/1991EP0415221A2 Non-volatile programmable interconnection circuit
03/06/1991EP0415191A1 System for controlling epitaxial grow rate in vertical provided with a frustum pyramid susceptor
03/06/1991EP0415131A2 Forming a pattern on a substrate
03/06/1991EP0415106A2 Lead frames for semiconductor device
03/06/1991EP0415085A2 Method for fabricating structures on a substrate
03/06/1991EP0414880A1 Carrier for flat panel displays
03/06/1991EP0414859A1 Improved etch chamber with gas dispersing membrane.
03/06/1991EP0414852A1 Method for improving the adhesion of a plastic encapsulant to copper containing leadframes
03/06/1991EP0259414B1 Apparatus for thermal treatments of thin parts such as silicon wafers
03/06/1991EP0223824B1 Voltage calibration in e-beam probe using optical flooding
03/06/1991EP0137805B1 Fabrication of mos integrated circuit devices
03/06/1991CN1011933B Device and method for treatment of magnetic controlled tube gas discharging
03/06/1991CN1011932B Process for galliumization in silicon mesa transister prodn.
03/06/1991CN1011889B Multi-layer and pin grid arrays
03/06/1991CA2023423A1 Transparent dissolution rate modifiers for photoresists
03/05/1991US4998267 X-ray lithography carbon mask and method of manufacturing the same
03/05/1991US4998265 Method of driving a charge detection circuit
03/05/1991US4998191 Illuminating optical device
03/05/1991US4998161 LDD MOS device having an element separation region having an electrostatic screening electrode
03/05/1991US4998159 Ceramic laminated circuit substrate
03/05/1991US4998157 Metal silicide and nitride layers and an aluminum or alloy layer; semiconductors
03/05/1991US4998156 Structure for a complementary-symmetry COMFET pair
03/05/1991US4998155 Radiation-hardened semiconductor device with surface layer
03/05/1991US4998153 Charge-coupled device
03/05/1991US4998152 Thin film transistor
03/05/1991US4998151 Power field effect devices having small cell size and low contact resistance
03/05/1991US4998150 Raised source/drain transistor
03/05/1991US4998146 High voltage thin film transistor
03/05/1991US4998134 Exposure apparatus
03/05/1991US4998021 Method of detecting an end point of surface treatment
03/05/1991US4998002 Wire-bonding method, wire-bonding apparatus, and semiconductor device produced by the wire-bonding method
03/05/1991US4997809 Critical temperature
03/05/1991US4997794 Method of making semiconductor device comprising a capacitor and a buried passivation layer
03/05/1991US4997793 Method of improving cleaving of diode arrays
03/05/1991US4997792 Method for separation of diode array chips during fabrication thereof
03/05/1991US4997791 IC card and method of manufacturing the same
03/05/1991US4997790 Selective planarization and etching; sacrificial plug
03/05/1991US4997789 Aluminum contact etch mask and etchstop for tungsten etchback
03/05/1991US4997787 Method for fabricating a semiconductor film which is electrically isolated from a substrate
03/05/1991US4997786 Forming trenches, doping, heat treatment
03/05/1991US4997785 Shared gate CMOS transistor
03/05/1991US4997783 Forming buried, isolated n-layer on p-substraet, epitaxial growth of silicon trenching
03/05/1991US4997782 Masking
03/05/1991US4997781 Method of making planarized EPROM array
03/05/1991US4997780 Method of making CMOS integrated devices in seeded islands
03/05/1991US4997779 Forming metal silicide layer; etching, doping
03/05/1991US4997778 Process for forming a self-aligned FET having a T-shaped gate structure
03/05/1991US4997777 Manufacturing process for an integrated circuit comprising double gate components
03/05/1991US4997776 Complementary bipolar transistor structure and method for manufacture
03/05/1991US4997775 Method for forming a complementary bipolar transistor structure including a self-aligned vertical PNP transistor
03/05/1991US4997774 Method for fabricating a DRAM cell
03/05/1991US4997746 Method of forming conductive lines and studs
03/05/1991US4997718 Silver phosphate glass die-attach composition
03/05/1991US4997520 Method for etching tungsten
03/05/1991US4997518 Semiconductors
03/05/1991US4997490 Method of cleaning and rinsing wafers
03/05/1991US4997482 Ceramics
03/05/1991US4997355 Apparatus for producing semiconductor devices
03/05/1991US4996942 Rotatable substrate supporting susceptor with temperature sensors
03/01/1991CA2024471A1 Polycrystalline silicon thin film and transistor using the same
03/01/1991CA2023678A1 Semiconductor device
02/1991
02/28/1991DE4026544A1 Light sensitive compsn. contg. -imino-diazo-quinone n-sulphonyl cpd. - and alkali-soluble polymer of positive type useful as resist
02/28/1991DE3927899A1 Thyristor module with main and auxiliary thyristors - has higher charge carrier life in auxiliary thyristor region
02/28/1991DE3927726A1 Epitaxial layer deposition - using reactor in room partitioned by wall from clean room for loading-unloading
02/27/1991EP0414647A2 Method for the fabrication of a lead frame
02/27/1991EP0414618A1 Thin film MOS transistor with the channel region connected to the source and method of fabrication
02/27/1991EP0414594A1 Method of repairing a device comprising integrated circuits on a carrier substrate
02/27/1991EP0414520A1 Master slice type semiconductor devices
02/27/1991EP0414499A2 Semiconductor structure with closely coupled substrate temperature sense element
02/27/1991EP0414457A1 Selective etching process
02/27/1991EP0414412A2 Semiconductor integrated circuit device having wiring layers
02/27/1991EP0414400A2 MOSFET depletion device
02/27/1991EP0414372A2 Dry etching methods
02/27/1991EP0414361A2 Semiconductor antifuse structure and method
02/27/1991EP0414267A2 Process for deposition of a tungsten layer on a semiconductor wafer
02/27/1991EP0414257A2 Resin sealing type semiconductor device in which a very small semiconductor chip is sealed in package with resin
02/27/1991EP0414255A2 Emitter coupled logic circuitry
02/27/1991EP0414227A1 Dynamic random access memory device having rampart structure outside memory cell array
02/27/1991EP0414226A2 MOS field-effect transistor with sidewall spacers
02/27/1991EP0414146A2 Wire bonding apparatus
02/27/1991EP0414140A2 Light transmission paste and metallic copper deposition method using same
02/27/1991EP0414040A1 A semiconductor device with a uniform surface doping well region and method of making the same
02/27/1991EP0414038A2 Process and apparatus for removing deposits from backside and end edge of semiconductor wafer while preventing removal of materials from front surface of wafer
02/27/1991EP0414013A2 Method for forming bipolar transistor in conjunction with complementary metal oxide semiconductor transistors
02/27/1991EP0413982A1 Impurity doping method with adsorbed diffusion source
02/27/1991EP0413937A2 Thermocompression bonding in integrated circuit packaging
02/27/1991EP0305402B1 Spin drying apparatus
02/27/1991EP0300011B1 Method for producing electric insulation zones in a cmos integrated circuit
02/27/1991EP0238549B1 Nonvolatile memory cell
02/27/1991EP0226931B1 A method of preparing semiconductor substrates
02/27/1991EP0204767B1 Method for fabricating modules comprising stacked circuit-carrying layers
02/27/1991EP0181341B1 Infrared panel emitter and method of producing the same
02/27/1991CN1049573A Process for producing substrate for selective crystal growth, selective crystal growth process and process for producing solar battery by use of them
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