Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1991
03/27/1991EP0419287A2 Method of correcting astigmatism of variable shaped beam
03/27/1991EP0419256A1 Carbon doping MOSFET substrate to suppress hot electron trapping
03/27/1991EP0419240A2 Exposure apparatus
03/27/1991EP0419160A1 Amorphous silicon semiconductor devices
03/27/1991EP0419147A2 Resist composition
03/27/1991EP0419136A1 Electronic device with internal defect correction member
03/27/1991EP0419128A1 Silicon MOSFET doped with germanium to increase lifetime of operation
03/27/1991EP0419105A2 Integrated circuit having an embedded digital signal processor
03/27/1991EP0419073A2 Process for production of a semiconductor device
03/27/1991EP0419062A2 Electrode formed of semiconductor compounds and method of forming them
03/27/1991EP0419061A2 Method for pulling a silicon single crystal
03/27/1991EP0419053A1 Dielectric film deposition method and apparatus
03/27/1991EP0419044A1 Single crystal silicon
03/27/1991EP0418983A1 Method of manufacturing a field effect transistor and a semiconductor element
03/27/1991EP0418953A1 Method of manufacturing a semiconductor body comprising a mesa
03/27/1991EP0418914A2 Semiconductor memory device
03/27/1991EP0418911A2 Semiconductor memory device
03/27/1991EP0418896A2 Circuit configuration for the protection of electronic circuits against a voltage surge
03/27/1991EP0418890A2 Solid state laser device for lithography light source and semiconductor lithography method
03/27/1991EP0418870A2 Radiation sensitive polymer composition
03/27/1991EP0418802A2 Wiring structure in a wafer-scale integrated circuit
03/27/1991EP0418777A2 Wafer scale semiconductor device
03/27/1991EP0418749A2 Integrated device with improved connections between the pins and the semiconductor material chip
03/27/1991EP0418737A1 Method of manufacturing a semiconductor substrate dielectric isolating structure
03/27/1991EP0418670A2 Process for fabricating high performance BiMOS circuits
03/27/1991EP0418592A1 Cleaning process for removal of deposits from the susceptor of a chemical vapor deposition apparatus
03/27/1991EP0418554A2 Chemical vapor deposition apparatus
03/27/1991EP0418541A2 Multi-zone planar heater assembly and method of operation
03/27/1991EP0418540A2 Dry etching method
03/27/1991EP0418505A2 Method of manufacturing a Bi CMOS semiconductor device
03/27/1991EP0418500A2 Semiconductor device for charge transfer
03/27/1991EP0418491A2 Dram cell with trench capacitor and buried lateral contact
03/27/1991EP0418468A1 Method for producing an ultra-thin dielectric for microelectronics applications
03/27/1991EP0418438A1 Method and apparatus for the plasma etching, substrate cleaning or deposition of materials by D.C. glow discharge
03/27/1991EP0418427A2 Exposure process
03/27/1991EP0418423A1 Process for etching silicon anisotropically
03/27/1991EP0418422A1 CMOS compatible bipolar transistor having a reduced collector-substrate capacitance, and method for making the same
03/27/1991EP0418421A1 Bipolar transistor having a reduced collector capacitance, and method for making the same
03/27/1991EP0418360A1 Dielectric substrate with reduced and stabilized surface electrical conductivity, process for its manufacture, and use of the substrate
03/27/1991EP0416012A4 Etching solutions containing anionic sulfate esters of alkylphenol polyglycidol ethers
03/27/1991CN1050289A Design system for vlsi chips arranged on carrier and module thus designed
03/26/1991US5003511 Voltage supply switching device for nonvolatile memories in MOS technology
03/26/1991US5003374 Semiconductor wafer
03/26/1991US5003373 Aluminum electrode, copper ball at the end of a copper wire, a copper-aluminum alloy
03/26/1991US5003371 Fuse-melting device
03/26/1991US5003370 High power frequency semiconductor device with improved thermal resistance
03/26/1991US5003368 Turn-off thyristor
03/26/1991US5003366 Hetero-junction bipolar transistor
03/26/1991US5003365 Bipolar transistor with a sidewall-diffused subcollector
03/26/1991US5003342 Exposure apparatus
03/26/1991US5003253 Millimeter-wave active probe system
03/26/1991US5003199 Emitter coupled logic circuit having an active pull-down output stage
03/26/1991US5003188 Semiconductor waxer detection system
03/26/1991US5003183 Ion implantation apparatus and method of controlling the same
03/26/1991US5003178 Large-area uniform electron source
03/26/1991US5003152 Microwave transforming method and plasma processing
03/26/1991US5003151 Method and control arrangement for the evaporation rate of an electron beam
03/26/1991US5003131 Connection structure between ceramic body and outer terminal
03/26/1991US5003062 Dielectric multilayer integrated circuits, silicon dioxide coating over patterned conductive layer, vacuum degassing
03/26/1991US5002902 Multilayer semiconductor with insulator layers, apertures formed by etching
03/26/1991US5002899 Electrical contacts on diamond
03/26/1991US5002898 Integrated-circuit device isolation
03/26/1991US5002896 Masking a multilayer gate electrode to form a semiconductor, patterns, dopes
03/26/1991US5002818 Reworkable epoxy die-attach adhesive
03/26/1991US5002808 Adhesion methods employing benzocyclobutene-based organosilane adhesion aids
03/26/1991US5002796 Process for forming functional zinc oxide films using alkyl zinc compound and oxygen-containing gas
03/26/1991US5002793 Vapor deposition, decomposition, microwaving; semiconductors
03/26/1991US5002648 Process for producing an inorganic thin film on a substrate using a target
03/26/1991US5002632 Reaction of a metastable with etchant gas in activation zone
03/26/1991US5002631 Plasma etching apparatus and method
03/26/1991US5002618 Pin heterojunction photovoltaic elements with polycrystal BAs(H,F) semiconductor film
03/26/1991US5002464 Double buffer vacuum system
03/26/1991US5002367 Multi-level circuits, methods for their fabrication, and display devices incorporating such circuits
03/26/1991US5002217 Bonding method and bonding apparatus
03/26/1991US5002010 Vacuum vessel
03/26/1991CA2026086A1 Method of fabricating highly lattice mismatched quantum well structures
03/26/1991CA1282189C Use of adherent layer for filling contact holes for semiconductor devices
03/26/1991CA1282188C Multilayer metallization method for integrated circuits
03/26/1991CA1282186C Mos i/o protection using switched body circuit design
03/23/1991WO1991004577A1 Hot-carrier suppressed sub-micron misfet device
03/23/1991WO1991004513A1 Method of optical near field microlithography and microlithography devices implementing same
03/23/1991CA2066586A1 Method of optical near field microlithography and microlithography devices implementing same
03/23/1991CA2065242A1 Hot-carrier suppressed sub-micron misfet device
03/23/1991CA2025681A1 Photoreactive resin compositions developable in a semi-aqueous solution
03/22/1991CA2025871A1 Solid state laser device for lithography light source and semiconductor lithography method
03/22/1991CA2023023A1 Carbon doping mosfet substrate to suppress hot electron trapping
03/21/1991WO1991003841A1 Element, method of fabricating the same, semiconductor element and method of fabricating the same
03/21/1991WO1991003837A1 Method of producing read-only semiconductor memory
03/21/1991WO1991003835A1 Reworkable epoxy die-attach adhesive
03/21/1991WO1991003834A1 Method for selectively depositing material on substrates
03/21/1991WO1991003833A1 Electrostatic handling device
03/21/1991WO1991003816A1 X-ray phosphor imaging screen and method of making same
03/21/1991WO1991003769A1 Radiation-sensitive compositions containing fully substituted novolak polymers
03/21/1991DE3930536A1 Bipolar transistor with large band-gap emitter material - uses single crystalline silicon as emitter and collector and forms base-region from silicon-germanium cpd.
03/20/1991EP0418185A1 Method of fabricating a narrow base transistor
03/20/1991EP0418018A2 Compact specimen processing station
03/20/1991EP0417997A1 Process for forming metal deposited film containing aluminum as main component by use of alkyl aluminum hydride
03/20/1991EP0417955A1 Shallow junction formation by ion-implantation
03/20/1991EP0417948A2 Method and apparatus for pulling up silicon single crystal
03/20/1991EP0417942A1 Manufacture of polycrystalline silicon thin films and of transistors therefrom
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