Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1991
05/07/1991US5013685 Method of making a non-alloyed ohmic contact to III-V semiconductors-on-silicon
05/07/1991US5013684 Lasers
05/07/1991US5013683 Method for growing tilted superlattices
05/07/1991US5013682 Method for selective epitaxy using a WSI mask
05/07/1991US5013681 Method of producing a thin silicon-on-insulator layer
05/07/1991US5013680 Process for fabricating a DRAM array having feature widths that transcend the resolution limit of available photolithography
05/07/1991US5013679 Cell capacitor of a dynamic random access memory and a method of manufacturing the same
05/07/1991US5013678 Method of making an integrated circuit comprising load resistors arranged on the field oxide zones which separate the active transistor zones
05/07/1991US5013677 Resistor, transistor, capacitor
05/07/1991US5013676 Structure of MIS-type field effect transistor and process of fabrication thereof
05/07/1991US5013675 Semiconductors
05/07/1991US5013674 A method of manufacturing integrated circuits comprising EPROM memory and logic transistors
05/07/1991US5013673 Implantation method for uniform trench sidewall doping by scanning velocity correction
05/07/1991US5013672 Manufacturing process for high-frequency bipolar transistors
05/07/1991US5013671 Process for reduced emitter-base capacitance in bipolar transistor
05/07/1991US5013670 Photoelectric converter
05/07/1991US5013588 Corrosion resistant silicon inorganic polymeric coatings
05/07/1991US5013586 Method and device for the uniformly even application of a resin coating on a substrate
05/07/1991US5013526 Superconducting alloys comprising tungsten, molybdenum, silicon and oxygen
05/07/1991US5013401 Microwave plasma etching method and apparatus
05/07/1991US5013400 Dry etch process for forming champagne profiles, and dry etch apparatus
05/07/1991US5013398 Silicon dioxide or nitride layers, polycrystalline silicon or refractory metal silicide layer, patterns, masking, plasma, tr ifluoromethane, silicon hexafluoride, hydrogen bromide
05/07/1991US5013385 Quad processor
05/07/1991US5013384 Vacuum system
05/07/1991US5013360 For semiconductors in ceramic packages
05/07/1991US5013347 Packaging integrated circuits
05/07/1991US5012969 Method of connecting electrodes
05/07/1991US5012935 Support frame for supporting a semiconductor wafer carrier
05/07/1991US5012924 Carriers for integrated circuits and the like
05/07/1991US5012664 Progressive form die
05/07/1991CA2028938A1 Microwave semiconductor device
05/07/1991CA1283886C Thin film sputtering with angular orientation of emission surface and receiving surface
05/07/1991CA1283885C Etching process for the surface of an indium phosphorus workpiece
05/04/1991WO1991006870A1 Cryogenic probe station
05/04/1991CA2072132A1 Cryogenic probe station
05/04/1991CA2029244A1 Planarizing surfaces of interconnect substrates by diamond turning
05/02/1991WO1991006137A1 Application specific tape automated bonding
05/02/1991WO1991006127A1 Graphotaxially formed photosensitive detector array
05/02/1991WO1991006121A1 Ferro-electric non-volatile variable resistive element
05/02/1991WO1991006120A1 Self-aligning metal interconnect fabrication
05/02/1991WO1991006119A1 Method of producing semiconductor integrated circuit devices
05/02/1991WO1991006117A1 Three dimensional microcircuit structure and process for fabricating the same from ceramic tape
05/02/1991WO1991006116A1 Method of preparing silicon carbide surfaces for crystal growth
05/02/1991WO1991006061A1 Improved routing system and method for integrated circuits
05/02/1991WO1991005887A1 Vacuum vessel
05/02/1991WO1991004573A3 Excimer laser ablation method and apparatus for microcircuit device fabrication
05/02/1991EP0425419A2 Methods and apparatus for contamination control in plasma processing
05/02/1991EP0425418A2 Base developable negative tone photoresist
05/02/1991EP0425411A2 Highly sensitive dry developable deep UV photoresist
05/02/1991EP0425404A2 Automated re-work shop order scheduling system
05/02/1991EP0425294A2 Two-color molded article for use in circuit formation
05/02/1991EP0425275A2 Address input circuitry of a semiconductor memory device
05/02/1991EP0425244A2 Semiconductor device having a heteroepitaxial substrate
05/02/1991EP0425242A1 Bipolar transistor structure
05/02/1991EP0425166A1 Polysilicon etch using bromine
05/02/1991EP0425162A2 Improved aluminum metallization for semiconductor devices
05/02/1991EP0425148A2 Method of forming multilayer thick film circuits
05/02/1991EP0425147A2 Metallization processing
05/02/1991EP0425090A1 Film deposition method and apparatus
05/02/1991EP0425084A1 Process for forming deposited film by use of alkyl aluminum hydride
05/02/1991EP0425037A2 A method of manufacturing a semiconductor device
05/02/1991EP0425032A1 Integrated CMOS circuit
05/02/1991EP0424981A1 Parallelepiped shaped crucible for single or quasi-single crystal silicon ingots
05/02/1991EP0424964A2 Read only memory device
05/02/1991EP0424963A2 Exposure mask
05/02/1991EP0424962A2 Semiconductor memory device
05/02/1991EP0424940A2 Positive photosensitive polyimide resin composition
05/02/1991EP0424935A2 Circuit for driving a liquid crystal panel
05/02/1991EP0424926A2 Bi-CMOS integrated circuit
05/02/1991EP0424925A2 Method of removing electric charge accumulated on a semiconductor substrate in ion implantation
05/02/1991EP0424908A2 Wiring-pattern-determination system and method
05/02/1991EP0424905A2 Semiconductor device manufacturing process
05/02/1991EP0424858A2 Semiconductor device and soldering method employable in manufacturing the same
05/02/1991EP0424857A2 Process for producing ohmic electrode for p-type cubic system boron nitride
05/02/1991EP0424825A2 Method for measuring DC current/voltage characteristic of semi-conductor device
05/02/1991EP0424805A2 Copolyimide ODPA/BPDA/4,4'-ODA/p-PDA
05/02/1991EP0424766A2 Radiation-sensitive composition and process for the formation of relief patterns
05/02/1991EP0424710A2 Thyristor and method of manufacturing the same
05/02/1991EP0424638A2 Fabrication of a semiconductor device including a step for prodiving a layer of insulating material formed from an organo-silica sol
05/02/1991EP0424623A2 Three-dimensional semiconductor structures formed from planar layers
05/02/1991EP0424620A2 Process and apparatus for chemically coating opposing faces of a workpiece
05/02/1991EP0424608A1 Forming wide dielectric filled isolation trenches in semiconductors
05/02/1991EP0424530A1 Resin-sealed semiconductor device
05/02/1991EP0424522A1 Interconnect device and method of manufacture thereof
05/02/1991EP0424513A1 Method of making a hermetic seal in a solid-state device
05/02/1991EP0424464A1 Thermally stable phenolic resin compositions and their use in light-sensitive compositions.
05/02/1991EP0424394A1 Means for reducing damage to jfets from electrostatic discharge events.
05/02/1991EP0424375A1 Monolithic channeling mask having amorphous/single crystal construction
05/02/1991DE4034186A1 Barrier layer FET - esp. JFET made of cpd. semiconductor
05/02/1991DE4034169A1 DRAM memory cell field with numerous cells for unit signals - has specified foreign atom. concentration in section coupled to capacitor
05/02/1991DE4033309A1 MOSFET semiconductor device - having ion-implanted regions with impurity ion concn. profile
05/02/1991DE3939527A1 Metal strip with support platelet for integrated circuit chips - has end strap(s) and other strap(s) rougher than terminal fins
05/02/1991DE3935998A1 Gold-doped silicon semiconductor device - with axially structured charge carrier life-time profile
05/02/1991DE3933501A1 Light-induced gas etching process - with etch prod. removal solely by photo-desorption
05/02/1991CA2070405A1 Ferro-electric non-volatile variable resistive element
05/01/1991WO1991006978A2 Multi-layer lead frames for integrated circuit packages
05/01/1991CN1051105A High density dynamic cell
05/01/1991CN1012494B Multi-layered ceramic coating using estersil and metalic oxide
05/01/1991CA2065295A1 Multi-layer lead frames for integrated circuit packages
05/01/1991CA2023388A1 Chip breaker for polycrystalline cbn and diamond compacts