Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/1992
01/02/1992EP0463330A2 Iterative self-aligned contact metallization process
01/02/1992EP0463319A1 Ablation mask and use thereof
01/02/1992EP0463297A1 Arrangement comprising substrate and component and method of making the same
01/02/1992EP0463174A1 Method of manufacturing semiconductor device
01/02/1992EP0463165A1 Device and method of manufacturing the same; and semiconductor device and method of manufacturing the same
01/02/1992EP0463137A1 Method and device for treating a substrate with a plasma
01/02/1992EP0463098A1 A fluxless soldering process.
01/02/1992EP0463026A1 Configurable cellular array.
01/02/1992EP0462995A1 Preparing substrates
01/02/1992DE4020724A1 Verfahren zur strukturierung eines einkristallinen silizium-traegers Method for structuring a monocrystalline silicon carrier
01/02/1992DE4020519A1 Monolithic integrated semiconductor with higher breakdown voltage
01/02/1992DE4020324A1 Vacuum deposition using pressurised reflow process - has thin film formed on substrate and heated to melt into recess and exposed to pressurised gas to remove voids
01/02/1992DE4020165A1 Resin packaging of board-mounted chip - using elastic mask with centring opening
01/02/1992DE4019915A1 Bonding wire directly to contact face - after laser removal of contact face oxide and impurities
01/01/1992CN1057547A Integrated bipolar and cmos transistor fabrication process
12/1991
12/31/1991US5077762 Charge transfer device having mim structures and method for driving the same
12/31/1991US5077688 Semiconductor memory device having improved memory cells provided with cylindrical type capacitors
12/31/1991US5077633 Grounding an ultra high density pad array chip carrier
12/31/1991US5077599 High wire bonding strength, low ohmic resistance
12/31/1991US5077598 Strain relief flip-chip integrated circuit assembly with test fixturing
12/31/1991US5077596 Semiconductor device
12/31/1991US5077594 Integrated high voltage transistors having minimum transistor to transistor crosstalk
12/31/1991US5077586 Vdmos/logic integrated circuit comprising a diode
12/31/1991US5077521 Supply connection integrity monitor
12/31/1991US5077518 Source voltage control circuit
12/31/1991US5077511 Stepper motor drive for way flow end station
12/31/1991US5077499 High-frequency feeding method for use in plasma apparatus and device for carrying out the method
12/31/1991US5077493 Wired logic circuit for use in gate array integrated circuit
12/31/1991US5077492 Bicmos circuitry having a combination cmos gate and a bipolar transistor
12/31/1991US5077475 Method for quantitative evaluation method of optical absorption image for determination of resistivity dispersion
12/31/1991US5077464 Method and apparatus for endpoint detection in a semiconductor wafer etching system
12/31/1991US5077382 Copolyimide odpa/bpda/4,4'-oda or p-pda
12/31/1991US5077244 Aluminum nitride sintered body and semiconductor substrate thereof
12/31/1991US5077238 Method of manufacturing a semiconductor device with a planar interlayer insulating film
12/31/1991US5077237 Method of encapsulating a semiconductor element using a resin mold having upper and lower mold half resin inflow openings
12/31/1991US5077236 Method of making a pattern of tungsten interconnection
12/31/1991US5077235 Monocrystallization; silicon on insulator type
12/31/1991US5077234 Planarization process utilizing three resist layers
12/31/1991US5077233 Forming anti-reflecting film with lower layer of silicon dioxide and upper of silicon nitride; exposure; irradiation; oxidation; etching
12/31/1991US5077232 Method of making stacked capacitor DRAM cells
12/31/1991US5077231 Method to integrate HBTs and FETs
12/31/1991US5077230 One transistor; floating gate; electrically programmable read-only memory cell; well defined reoxidation beak
12/31/1991US5077228 Process for simultaneous formation of trench contact and vertical transistor gate and structure
12/31/1991US5077227 Semiconductor device and method for fabricating the same
12/31/1991US5077226 Amorphous silicon layer changed to large grained polysilicon layer; emitter region formed by diffusing ion impurities; resistance lowered
12/31/1991US5077225 Deposition of polysilicon layers; masking; removing mask; thermal annealing to silicon dioxide; etching; swelling of implanted regions on conversion
12/31/1991US5077224 P-N juctions biased in non-conducting direction to reduce surface field strengths
12/31/1991US5077143 Silicon electroluminescent device
12/31/1991US5077100 Coating with alloyable metal, exposing to tungsten-bearing gas and irradiating
12/31/1991US5077092 Method and apparatus for deposition of zinc sulfide films
12/31/1991US5077085 High resolution metal patterning of ultra-thin films on solid substrates
12/31/1991US5076886 Incremental tune etch apparatus and method
12/31/1991US5076877 Apparatus for dry etching
12/31/1991US5076876 Using resin-free silver flame glass paste of thallium, vanadiu m and phsophorous oxides; terpenol solvent; fusing
12/31/1991US5076697 Apparatus and method for inspecting defect of mounted component with slit light
12/31/1991US5076692 Particle detection on a patterned or bare wafer surface
12/31/1991US5076486 Barrier disk
12/31/1991US5076485 Bonding electrical leads to pads with particles
12/31/1991US5076207 Apparatus for atmospheric chemical vapor deposition
12/31/1991US5076205 Modular vapor processor system
12/31/1991US5076204 Apparatus for producing semiconductor device
12/31/1991US5075965 Low temperature controlled collapse chip attach process
12/31/1991US5075962 Method for forming leads
12/31/1991US5075941 Press striking of die stamped metal frames for single-in-line packages for re-establishing planarity and parallellism of the opposite faces of the patterned pins to be eventually bent
12/31/1991CA1293824C Barrier layer arrangement for conductive layers on silicon substrates
12/27/1991EP0462944A1 Universal multicontact connection between an EWS probe card and a test card of a "test-on-wafer" station
12/27/1991EP0462882A1 Thin film field effect transistor with buried gate and its method of fabrication
12/27/1991EP0462756A2 X-ray exposure apparatus
12/27/1991EP0462741A2 Method for pulling up semiconductor single crystal
12/27/1991EP0462730A1 Method and apparatus for forming planar integrated circuit layers
12/27/1991EP0462717A2 Semiconductor device including a bipolar transistor with a buried electrode
12/27/1991EP0462715A1 A rapid thermal process for obtaining silica coatings
12/27/1991EP0462700A2 Process for the selective encapsulation of an electrically conductive structure in a semiconductor device
12/27/1991EP0462698A2 Masks for high quality images from total internal reflection holograms
12/27/1991EP0462656A1 A semiconductor device having a conductive track
12/27/1991EP0462653A2 Ratioed capacitances in integrated circuits
12/27/1991EP0462599A2 Apparatus and method for etch rate monitoring
12/27/1991EP0462596A1 Method and apparatus for packaging a semiconductor device
12/27/1991EP0462576A1 DRAM using barrier layer
12/27/1991EP0462563A1 Treating apparatus for semiconductor
12/27/1991EP0462550A2 Stripping method for removing resist from a printed circuit board
12/27/1991EP0462459A1 Method of heat treatment of substrate
12/27/1991EP0462416A2 Process for N-well and P-well creation on a silicon substrate using a blanket P-well implant and no N-well steam oxidation step
12/27/1991EP0462391A2 Acid hardened photoresists
12/27/1991EP0462270A1 Thin, dielectrically isolated island resident transistor structure having low collector resistance
12/27/1991EP0462209A1 Electron cyclotron resonance plasma source and method of operation
12/27/1991EP0462165A1 Ion gun.
12/27/1991EP0417294A4 Method and device for making integrated circuits
12/27/1991EP0177566B1 Method for precision sem measurements
12/27/1991EP0064506B2 Improvements in or relating to methods of producing devices comprising metallised regions on dielectric substrates
12/26/1991WO1991020093A1 Ellipsometric control of material growth
12/26/1991WO1991020084A1 Spatial optical modulator
12/25/1991CN1057364A Open tube aluminium-gallium diffusion process
12/25/1991CN1057336A Silicon film pressure sensor and its manufacturing method
12/24/1991US5075885 Ecl eprom with cmos programming
12/24/1991US5075817 Trench capacitor for large scale integrated memory
12/24/1991US5075765 Low stress multichip module
12/24/1991US5075762 Semiconductor device having an inter-layer insulating film disposed between two wiring layers and method of manufacturing the same
12/24/1991US5075761 Transistors, gate electrode on substrate active region having stacked layers of gate insulator, polycrystalline silicon laye r, metal silicide layer, conductive cap, interconnect containi ng material etching at same rate as gate metal silicide
12/24/1991US5075760 Semiconductor device package assembly employing flexible tape
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