Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1991
11/26/1991US5068602 DUT board for a semiconductor device tester having a reconfigurable coaxial interconnect grid and method of using same
11/26/1991US5068601 Dual function cam-ring system for DUT board parallel electrical inter-connection and prober/handler docking
11/26/1991US5068599 Integrated circuit having an enabling circuit for controlling primary and secondary subcircuits
11/26/1991US5068594 Semiconductor integrated circuit
11/26/1991US5068549 Semiconductor integrated circuit apparatus having programmable logic device
11/26/1991US5068547 Process monitor circuit
11/26/1991US5068539 Ion implantation apparatus
11/26/1991US5068516 Device for liquid-phase thin film epitaxy
11/26/1991US5068210 Low dielectric constant ceramic materials
11/26/1991US5068207 Method for producing a planar surface in integrated circuit manufacturing
11/26/1991US5068206 Method of manufacturing semiconductor devices, and leadframe and differential overlapping apparatus therefor
11/26/1991US5068203 Method for forming thin silicon membrane or beam
11/26/1991US5068202 Process for excavating trenches with a rounded bottom in a silicon substrate for making trench isolation structures
11/26/1991US5068201 Method for forming a high valued resistive load element and low resistance interconnect for integrated circuits
11/26/1991US5068200 Dynamic Random Access Memory
11/26/1991US5068199 Method for anodizing a polysilicon layer lower capacitor plate of a DRAM to increase capacitance
11/26/1991US5068169 Process for production of semiconductor device
11/26/1991US5068168 Styrene, monoisobutyl maleate and mono-2-(butoxy)ethyl maleate terpolymer useful as alkali soluble binders for photoresists
11/26/1991US5068163 Radiation-sensitive positive working composition and copying material
11/26/1991US5068124 Method for depositing high quality silicon dioxide by pecvd
11/26/1991US5068040 Cleaning a substrate by exposing to ultraviolet radiation to produce a photochemical reaction to remove undesirable material
11/26/1991US5068007 Plasma etching substrates using methane, hydrogen and trialkyl boron
11/26/1991US5067989 Silicon with impurities of copper, iron, nickel and chromium for integrated circuits
11/26/1991US5067811 Illuminance distribution measuring system
11/26/1991US5067762 Non-contact conveying device
11/26/1991US5067647 Apparatus for fastening semiconductor components to substrates
11/26/1991US5067437 Apparatus for coating of silicon semiconductor surface
11/26/1991US5067382 Method and apparatus for notching a lead wire attached to an IC chip to facilitate severing the wire
11/26/1991US5067218 Vacuum wafer transport and processing system and method using a plurality of wafer transport arms
11/26/1991CA2042735A1 Image reversal negative working photoresist
11/26/1991CA1292550C Epitaxial gallium arsenide semiconductor wafer and method of producing the same
11/26/1991CA1292548C Preservation of surface features on semiconductor surfaces
11/26/1991CA1292547C Electrodeposited doped ii-vi semiconductor films and devices incorporating such films
11/26/1991CA1292542C Apparatus and methods for the production of large area electro-optic devices
11/21/1991EP0457670A1 Method of manufacturing an active matrix display with storage capacitors and display obtained by the method
11/21/1991EP0457632A2 Blanking aperture array and method of producing same
11/21/1991EP0457626A2 Method of using an ID saw slicing machine for slicing a single crystal ingot and an apparatus for carrying out the method
11/21/1991EP0457601A2 Thin film semi-conductor device and method of producing same
11/21/1991EP0457596A2 Process for fabricating a thin film transistor
11/21/1991EP0457593A2 Lead frame and assembly process
11/21/1991EP0457592A2 Process for manufacturing a multi-layer lead frame
11/21/1991EP0457591A2 Semiconductor memory device having reduced parasitic capacities between bit lines
11/21/1991EP0457533A2 A wafer slicing and grinding system
11/21/1991EP0457508A2 Diamond semiconductor device
11/21/1991EP0457468A2 Integrated electronic assembly comprising a transmission line
11/21/1991EP0457463A2 Methods of reducing anti-fuse resistance during programming
11/21/1991EP0457434A1 MOS thin film transistor having a drain offset region
11/21/1991EP0457415A1 Semiconductor device manufacturing method
11/21/1991EP0457367A1 Radiation-sensitive resin composition
11/21/1991EP0457364A2 Automatic edge grinder
11/21/1991EP0457321A2 Method and apparatus for measuring ion beam collimation, shaping the ion beam and controlling scanning thereof
11/21/1991EP0457311A2 Semiconductor memory cell
11/21/1991EP0457271A2 A charge transfer device
11/21/1991EP0457270A2 Floating diffusion type charge detection circuit for use in charge transfer device
11/21/1991EP0457260A1 Semiconductor device having a ceramic package
11/21/1991EP0457253A2 Cantilever stylus for use in an atomic force microscope and method of making same
11/21/1991EP0457168A2 Method for the temporary stable marking of individual atoms or atom groups as well as utilisation of this method for storing information units in the atomic domain
11/21/1991EP0457150A2 BICMOS compacted logic array
11/21/1991EP0457131A1 Method of manufacturing semiconductor memory device having stacked capacitor cells
11/21/1991EP0457049A2 Dry etching method
11/21/1991EP0457013A2 Ferroelectric capacitor test structure for chip die
11/21/1991EP0456963A1 Superconducting multilayer ceramic substrate
11/21/1991EP0456791A1 Methods of plating into holes and products produced thereby
11/21/1991DE4016211A1 Verfahren zur ueberwachung und steuerung eines aetzvorgangs und vorrichtung hierfuer Method for monitoring and controlling of etching and device for here
11/20/1991CN1056379A Integrated package of led array and manufacture thereof
11/19/1991US5067101 Topography simulation method
11/19/1991US5067008 Ic package and ic card incorporating the same thereinto
11/19/1991US5067006 Semiconductor device
11/19/1991US5067005 Semiconductor device
11/19/1991US5067004 Module for interconnecting integrated circuits
11/19/1991US5067003 Semicustom-made semiconductor integrated circuit having interface circuit selectively coupled to different voltage source
11/19/1991US5067002 Integrated circuit structures having polycrystalline electrode contacts
11/19/1991US5067001 Structure and method for manufacturing a series read only memory with spacer film
11/19/1991US5067000 Semiconductor device having field shield isolation
11/19/1991US5066998 Severable conductive path in an integrated-circuit device
11/19/1991US5066997 Semiconductor device
11/19/1991US5066996 Channelless gate array with a shared bipolar transistor
11/19/1991US5066993 Semiconductor device having semiconductor-on-insulator structure
11/19/1991US5066991 Semiconductor diode and method
11/19/1991US5066938 Diamond film thermistor
11/19/1991US5066908 Method for electrically detecting positional deviation of contact hole in semiconductor device
11/19/1991US5066875 Signal output circuit having bipolar transistors at output, for use in a mos semiconductor integrated circuit
11/19/1991US5066874 Signal output circuit having bipolar transistor in output stage and arranged in cmos semiconductor integrated circuit
11/19/1991US5066870 Charge pump having pull-up circuit operating with two clock pulse sequences
11/19/1991US5066868 Apparatus for generating phase shifted clock signals
11/19/1991US5066751 Resist material for energy beam lithography and method of using the same
11/19/1991US5066615 Photolithographic processes using thin coatings of refractory metal silicon nitrides as antireflection layers
11/19/1991US5066613 Process for making semiconductor-on-insulator device interconnects
11/19/1991US5066612 Method of forming wiring of a semiconductor device
11/19/1991US5066611 Method for improving step coverage of a metallization layer on an integrated circuit by use of molybdenum as an anti-reflective coating
11/19/1991US5066610 Capping technique for zone-melting recrystallization of insulated semiconductor films
11/19/1991US5066609 Method of manufacturing a semiconductor device including a trench capacitor
11/19/1991US5066608 Semiconductors
11/19/1991US5066607 Method of making a trench DRAM cell with dynamic gain
11/19/1991US5066606 Developing Source-Drain Diffusion Regions Of A Semiconductor
11/19/1991US5066605 Process of producing monolithically integrated multifunction circuit arrangements
11/19/1991US5066604 Method for manufacturing a semiconductor device utilizing a self-aligned contact process
11/19/1991US5066603 Method of manufacturing static induction transistors
11/19/1991US5066602 Method of making semiconductor ic including polar transistors
11/19/1991US5066599 Silicon crystal oxygen evaluation method using fourier transform infrared spectroscopy (ftir) and semiconductor device fabrication method using the same