Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1992
03/17/1992US5096855 Covering with metal film; scoring
03/17/1992US5096854 Method for polishing a silicon wafer using a ceramic polishing surface having a maximum surface roughness less than 0.02 microns
03/17/1992US5096853 Method for manufacturing a resin encapsulated semiconductor device
03/17/1992US5096851 Vapor deposition of silicon nitride protective coating
03/17/1992US5096850 Covering with dielectric; forming barrier; then second dielectric
03/17/1992US5096849 Process for positioning a mask within a concave semiconductor structure
03/17/1992US5096848 Method for forming semiconductor device isolating regions
03/17/1992US5096847 Method making an ultra high density dram cell with stacked capacitor
03/17/1992US5096846 Method of forming a quantum effect switching device
03/17/1992US5096845 Reduced channel length, controlled doping
03/17/1992US5096844 Doped polycrystalline and monocrystalline layers, etching and covering with oxide layer
03/17/1992US5096843 Forming dielectric on walls of trenches before doping
03/17/1992US5096842 Method of fabricating bipolar transistor using self-aligned polysilicon technology
03/17/1992US5096841 Multilayer blocking film
03/17/1992US5096840 Method of making a polysilicon emitter bipolar transistor
03/17/1992US5096839 Two step heat treatment
03/17/1992US5096802 Positive photoresist treatment during photolithography to reduce feature size, heating to cause flow, uv radiation to stabilize
03/17/1992US5096791 Forming and oxidizing thin metal film on top side of substrate, etching away central portion of substrate from back side except for supportive frame surrounding etched portion, pattern delineation by photoresist on oxidized metal membrane
03/17/1992US5096737 Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films
03/17/1992US5096677 Vertically shiftable crucible and heater, seed crystal, drive and control means
03/17/1992US5096559 Cathode roller mechanism
03/17/1992US5096536 Cooling substrates, substrate-supporting electrode, seals, hea t transfer gas, partial vacuum
03/17/1992US5096535 Process for manufacturing segmented channel structures
03/17/1992US5096533 Molecular beam epitaxial growth device and molecular beam control method therein for exactly controlling thickness and composition of epitaxial film
03/17/1992US5096364 Wafer arm handler mechanism
03/17/1992US5095927 Semiconductor processor gas-liquid separation
03/17/1992US5095925 Aseptic cleaning apparatus
03/17/1992US5095848 Spin coating apparatus using a tilting chuck
03/17/1992US5095627 Method for mounting of semiconductor crystals
03/17/1992US5095626 Method of producing semiconductor memory packages
03/17/1992US5095608 Pellet accommodation and aligning jig
03/17/1992CA1297598C Reticle frame assembly
03/17/1992CA1297597C Method of assembling tab bonded semiconductor chip package
03/17/1992CA1297596C Method for fabricating multilayer circuits
03/17/1992CA1297390C Method of epitaxially growing gallium arsenide on silicon
03/15/1992WO1992005576A1 New structure and method for fabricating indium phosphide/indium gallium arsenide phosphide buried heterostructure semiconductor lasers
03/15/1992WO1992005473A1 Processing method for fabricating electrical contacts to mesa structures in semiconductor devices
03/15/1992CA2072632A1 Structure and method for fabricating indium phosphide/indium gallium arsenide phosphide buried heterostructure semiconductor lasers
03/15/1992CA2072617A1 Processing method for fabricating electrical contacts to mesa structures in semi-conductor devices
03/15/1992CA2047426A1 Product defect detection using thermal ratio analysis
03/14/1992CA2051198A1 Acid labile solution inhibitors and positive-and negative-acting photosensitive composition based thereon
03/12/1992WO1992004637A1 Functional at speed test system for integrated circuits on undiced wafers
03/12/1992DE4033508C1 Silicon@ wafer mfr. for high yield - by oxidising silicon@ disc, etching filling with silicon@, bonding with thick layer oxide layer and thinning for sepd. silicon areas
03/12/1992DE4028819A1 Schaltungsanordnung zum testen eines halbleiterspeichers mittels paralleltests mit verschiedenen testbitmustern Circuitry for testing a semiconductor memory using parallel tests with different testbitmustern
03/12/1992CA2091442A1 Functional at speed test system for integrated circuits on undiced wafers
03/11/1992EP0474508A2 Liquid crystal display device and mounting arrangement therefor
03/11/1992EP0474482A1 Process of wet etching of a silicon nitride layer
03/11/1992EP0474445A1 Autofocusing device and projection exposure apparatus with the same
03/11/1992EP0474433A1 Information processing method and apparatus
03/11/1992EP0474383A1 Dielectric for use in manufacturing semiconductors
03/11/1992EP0474329A2 Method and machine for slicing and grinding wafers
03/11/1992EP0474289A1 A method for the fabrication of low leakage polysilicon thin film transistors
03/11/1992EP0474280A2 Method for forming thin silicon membrane or beam
03/11/1992EP0474258A1 Method of fabricating a dynamic semiconductor memory
03/11/1992EP0474251A1 Thermal reactor for processing semiconductor wafers and a method of operating such a reactor
03/11/1992EP0474244A2 Plasma processing method
03/11/1992EP0474180A2 Method of and device for transporting semiconductor substrate in semiconductor processing system
03/11/1992EP0474176A2 Thin film multilayer circuit and method of making thin film multilayer circuits
03/11/1992EP0474140A1 Process of forming capacitive insulating film
03/11/1992EP0474108A1 Ion implantation apparatus and method of cleaning the same
03/11/1992EP0474068A2 A method for manufacturing a semiconductor device having insulating films
03/11/1992EP0474009A1 Photopolymerisable composition and photopolymerisable recording material produced therefrom
03/11/1992EP0473988A1 Method of fabricating a thin film transistor having amorphous/polycrystalline semiconductor channel region
03/11/1992EP0473976A1 Method and apparatus to bond a semiconductor chip to a carrier
03/11/1992EP0473930A1 Electrostatic chuck
03/11/1992EP0473929A1 Method of forming a thin film electronic device
03/11/1992EP0473718A1 Cage boat
03/11/1992EP0473594A1 Method for depositing a layer on a substrate and also a processing system for that purpose.
03/11/1992EP0454734A4 Devitrifying glass formulations for low expansion printed-circuit substrates and inks
03/11/1992EP0411088A4 Formation of microstructures with removal of liquid by freezing and sublimation
03/11/1992EP0236496B1 Thin semiconductor structures
03/11/1992CN1059424A Isolation method of semiconductor device
03/10/1992US5095511 Apparatus for verifying pattern data used in a step-and-repeat process for producing the same patterns regularly arranged on a substance
03/10/1992US5095463 Semiconductor memory device
03/10/1992US5095361 Tape-like carrier for mounting of integrated circuit
03/10/1992US5095359 Semiconductor package and computer using the package
03/10/1992US5095358 Application of electronic properties of germanium to inhibit n-type or p-type diffusion in silicon
03/10/1992US5095357 Inductive structures for semiconductor integrated circuits
03/10/1992US5095355 Bipolar cross-coupled memory cells having improved immunity to soft errors
03/10/1992US5095352 Semiconductor integrated circuit device of standard cell system
03/10/1992US5095351 Semiconductor device having bipolar transistor and method of producing the same
03/10/1992US5095347 Plural transistor silicon on insulator structure with shared electrodes
03/10/1992US5095346 Stacked-capacitor for a dram cell
03/10/1992US5095344 Highly compact eprom and flash eeprom devices
03/10/1992US5095300 Device for sensing side positioning of wafers
03/10/1992US5095268 Tool for tuning microwave circuit within a closed housing
03/10/1992US5095228 Circuits for preventing breakdown of low-voltage device inputs during high voltage antifuse programming
03/10/1992US5095223 Dc/dc voltage multiplier with selective charge/discharge
03/10/1992US5095192 Retention spacer
03/10/1992US5095187 Weakening wire supplied through a wire bonder
03/10/1992US5094984 Suppression of water vapor absorption in glass encapsulation
03/10/1992US5094983 Making circuit hydrophobic with reaction product of disilazane and water
03/10/1992US5094982 Lead frame and method of producing electronic components using such improved lead frame
03/10/1992US5094981 Technique for manufacturing interconnections for a semiconductor device by annealing layers of titanium and a barrier material above 550° C.
03/10/1992US5094980 Method for providing a metal-semiconductor contact
03/10/1992US5094979 Method of fabricating semiconductor device
03/10/1992US5094978 Wet etching and dry etching
03/10/1992US5094977 Stress reduction in metal films by laser annealing
03/10/1992US5094976 Dopant film and methods of diffusing impurity into and manufacturing a semiconductor wafer
03/10/1992US5094975 Conductive crystals epitaxially grown in square holes