Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1995
10/19/1995WO1995028003A1 Semiconductor devices and methods
10/19/1995WO1995028002A1 Method and device for processing semiconductor wafer
10/19/1995WO1995028001A2 Manufacture of electronic devices comprising thin-film transistors with laterally separated drain and graded doping
10/19/1995WO1995028000A2 Method of manufacturing a semiconductor device with a multilayer wiring structure containing narrow vias
10/19/1995WO1995027996A1 Method for high energy implantation using a low or medium current implanter, and devices therefor
10/19/1995WO1995027982A1 Non-volatile memory
10/19/1995WO1995027924A1 Method of photolithographically metallizing at least the inside of holes arranged in accordance with a pattern in a plate of an electrically insulating material
10/19/1995WO1995027815A1 Method for growing gallium nitride compound semiconductor crystal, and gallium nitride compound semiconductor device
10/19/1995WO1995027595A1 Improved polishing pads and methods for their use
10/19/1995WO1995027570A1 Selective plasma deposition
10/19/1995WO1995022083A3 Photomask blanks
10/19/1995DE4437260C1 Micro-mechanical electrostatic relay with slotted spring tongue surface
10/19/1995DE4413529A1 Elektronisches Bauelement und Verfahren zu seiner Herstellung An electronic device and method for its preparation
10/19/1995DE4413257A1 Integrierte Schaltungsanordnung mit einem EEPROM, Halbleiterscheibe mit solchen integrierten Schaltungen sowie Verfahren zur Verwendung einer solchen Halbleiterscheibe Integrated circuit arrangement having an EEPROM, the semiconductor wafer having such integrated circuits as well as methods of using such a semiconductor wafer
10/19/1995DE4413077A1 Verfahren und Vorrichtung zur chemischen Behandlung von Substraten Method and device for the chemical treatment of substrates
10/19/1995DE4412475A1 Metall-Halbleiter-Diode und Verfahren zur Herstellung von Metall-Halbleiter-Dioden Metal-semiconductor diode and methods for the production of metal-semiconductor diodes
10/19/1995DE19515591A1 Microelectronic circuit conductor path connection system
10/19/1995CA2146304A1 Non-corrosion photoresist stripping composition
10/19/1995CA2121543A1 Composition for cleaning microchips
10/18/1995EP0677879A1 Light trigger type semiconductor device
10/18/1995EP0677878A2 Double-epitaxy heterojunction bipolar transistors for high speed performance
10/18/1995EP0677877A2 Insulating gate type semiconductor device and power inverter using such a device
10/18/1995EP0677876A1 High and low voltage CMOS device and method of fabrication
10/18/1995EP0677874A1 Default indicator for a protection component
10/18/1995EP0677873A1 A lead frame and a process for fabricating a packaged device containing the lead frame
10/18/1995EP0677872A1 Method of forming Si-O containing coatings
10/18/1995EP0677871A2 Electronic coatings using filled borosilazanes
10/18/1995EP0677870A2 Controlled etching of oxides via gas phase reactions
10/18/1995EP0677869A1 Planarization process for the manufacturing of integrated circuits, particularly for non-volatile semiconductor memory devices
10/18/1995EP0677868A1 A thin film for a multilayer semiconductor device for improving thermal stability and a method thereof
10/18/1995EP0677867A2 Method and apparatus for scrubbing substrate
10/18/1995EP0677861A2 High-speed switching regulator drive circuit
10/18/1995EP0677789A1 Positive photoresist composition
10/18/1995EP0677745A1 Probe card assembly
10/18/1995EP0677737A2 Method and system for analyzing plasma data
10/18/1995EP0677703A1 Method and apparatus for dry vapor generation
10/18/1995EP0677500A2 Multiple level mask for patterning of ceramic materials
10/18/1995EP0677334A1 Coating device and coating method
10/18/1995EP0677207A1 Single crystal silicon on quartz
10/18/1995EP0677183A1 Process for producing a developer having a low metal ion level.
10/18/1995EP0638001A4 Ultrasonic spray coating system and method.
10/18/1995EP0591262B1 Process for producing a self-supporting thick film structure
10/18/1995CN1110431A Electronic package with thermally conductive support member having a thin circuitized substrate and semiconductor device bonded thereto
10/17/1995US5459746 Surface emission type semiconductor light-emitting device
10/17/1995US5459735 Logic integrated circuit with a sequential circuit having edge trigger flip-flops
10/17/1995US5459694 Nonvolatile storage apparatus with folded bit line structure
10/17/1995US5459693 Very large scale integrated planar read only memory
10/17/1995US5459688 Semiconductor memory cell and fabrication process
10/17/1995US5459687 Memory element
10/17/1995US5459685 Semiconductor memory device having memory cells with enhanced capacitor capacity
10/17/1995US5459655 Neutral-point clamped inverter device using semiconductor modules
10/17/1995US5459638 Semiconductor device with heat radiating fin assembly and container for housing the same
10/17/1995US5459634 Area array interconnect device and method of manufacture thereof
10/17/1995US5459632 Releasing a workpiece from an electrostatic chuck
10/17/1995US5459602 Micro-mechanical optical shutter
10/17/1995US5459573 Light quantity controlling apparatus
10/17/1995US5459547 Illumination device
10/17/1995US5459546 Method and apparatus for accurate alignment of semiconductor wafers in photo printers
10/17/1995US5459509 Method for transferring charge, charge transfer device and solid state image sensing device using the same
10/17/1995US5459408 Measurement of semiconductor parameters at cryogenic temperatures using a spring contact probe to form a MIS device
10/17/1995US5459354 Semiconductor device with improved insulation of wiring structure from a gate electrode
10/17/1995US5459353 Semiconductor device including interlayer dielectric film layers and conductive film layers
10/17/1995US5459347 Method of making field-effect semiconductor device on SOI
10/17/1995US5459346 Semiconductor substrate with electrical contact in groove
10/17/1995US5459345 Semiconductor device high dielectric capacitor with narrow contact hole
10/17/1995US5459344 Stacked capacitor type semiconductor memory device and manufacturing method thereof
10/17/1995US5459342 Field programmable gate array with spare circuit block
10/17/1995US5459341 Semiconductor device and method of manufacturing the same
10/17/1995US5459335 Semiconductor substrate having a thin film semiconductor layer bonded on a support substrate through an adhesive layer
10/17/1995US5459331 Contains a plurality of very thin gallium arsenide layers through which most of operating current passes
10/17/1995US5459326 Method for surface treatment with extra-low-speed ion beam
10/17/1995US5459108 Normal pressure CVD process for manufacture of a semiconductor device through reaction of a nitrogen containing organic source with ozone
10/17/1995US5459107 Method of obtaining high quality silicon dioxide passivation on silicon carbide and resulting passivated structures
10/17/1995US5459105 Method of manufacturing a semiconductor device having multilayer insulating films
10/17/1995US5459104 Process for production of semiconductor substrate
10/17/1995US5459102 Method of electroplating lead pins of integrated circuit package
10/17/1995US5459101 Method for fabricating a semiconductor device comprising a polycide structure
10/17/1995US5459100 Method for forming metal wiring of semiconductor device
10/17/1995US5459099 Method of fabricating sub-half-micron trenches and holes
10/17/1995US5459098 Maskless laser writing of microscopic metallic interconnects
10/17/1995US5459097 Method for selectively growing aluminum-containing layers
10/17/1995US5459096 Process for fabricating a semiconductor device using dual planarization layers
10/17/1995US5459095 Method for making capacitor for use in DRAM cell using triple layers of photoresist
10/17/1995US5459094 Method for fabricating a capacitor cell in the semiconductor memory device having a step portion
10/17/1995US5459093 Method for forming dummy pattern in a semiconductor device
10/17/1995US5459091 Method for fabricating a non-volatile memory device
10/17/1995US5459090 Semiconductor device and method for forming the same
10/17/1995US5459089 Method of fabricating high voltage silicon carbide MESFETs
10/17/1995US5459088 Method for making a thin film transistor
10/17/1995US5459087 Gallium arsenide metal-Schottky gate field effect transistor; electron beam evaporation; heat treatment of epitaxial layer to recover damage; tungsten silicide layer; multi-layer metals
10/17/1995US5459086 Metal via sidewall tilt angle implant for SOG
10/17/1995US5459085 Gate array layout to accommodate multi angle ion implantation
10/17/1995US5459084 Method for fabricating hetero-junction bipolar transistor having reduced base parasitic resistance
10/17/1995US5459003 Exposure method for forming sloping sidewalls in photoresists
10/17/1995US5459002 Gradients
10/17/1995US5459001 X-ray lithography of integrated circuits
10/17/1995US5458998 Method of making mask pattern data and process for manufacturing the mask
10/17/1995US5458919 Method for forming a film on a substrate by activating a reactive gas
10/17/1995US5458911 Producing a dome above a recess in a substrate
10/17/1995US5458756 Apparatus for producing porous silicon on a substrate
1 ... 6008 6009 6010 6011 6012 6013 6014 6015 6016 6017 6018 6019 6020 6021 6022 6023 6024 6025 6026 6027 6028 ... 6590