Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1996
09/17/1996US5556734 Radiation sensitive resin composition comprising copolymer of isopropenylphenol and T-butyl(meth)acrylate
09/17/1996US5556725 Forming chrome patterns by exposure of masked area, etching and removal
09/17/1996US5556714 Removing halogen residues leftover from plasma etching wiring patterns on aluminum coated wafers, reaction with hydrogen gas
09/17/1996US5556706 Conductive layered product and method of manufacturing the same
09/17/1996US5556647 Encapsulation mold
09/17/1996US5556507 Forming barrier layer on substrate, metallization, applying photoresists layer pattern, masking, development, etching, stripping and applying second layer
09/17/1996US5556506 Plasma ignitor, etching
09/17/1996US5556503 Apparatus for thinning a semiconductor film on an insulating film
09/17/1996US5556501 Silicon scavenger in an inductively coupled RF plasma reactor
09/17/1996US5556500 Vacuum chambers, gases, exhaust systems, counter electrodes, supports, power supply and focus rings
09/17/1996US5556479 Drainage of water, heating wafer at interfaces between water and gas for forming semiconductors
09/17/1996US5556476 Controlling edge deposition on semiconductor substrates
09/17/1996US5556472 Film deposition apparatus
09/17/1996US5556463 Crystallographically oriented growth of silicon over a glassy substrate
09/17/1996US5556462 Growth method by repeatedly measuring flux in MBE chamber
09/17/1996US5556461 Method for producing a silicon single crystal by a float-zone method
09/17/1996US5556275 Heat treatment apparatus
09/17/1996US5556248 Semiconductor wafer cassette transfer system
09/17/1996US5556204 Method and apparatus for detecting the temperature of a sample
09/17/1996US5556147 For holding a substrate
09/17/1996US5556024 Process for separating an active/passive device from a device carrier
09/17/1996US5556022 Polar bond head
09/17/1996US5555981 Cushion for use in suspending disk products
09/17/1996US5555928 Liquid cooled cooling device
09/17/1996US5555634 Wafer holder
09/17/1996CA2056308C Method for manufacturing a photomask for an optical memory
09/17/1996CA2053448C Multilayer printed wiring board and process for manufacturing the same
09/15/1996CA2170431A1 Method for designing an electronic integrated circuit with optical inputs and outputs
09/12/1996WO1996027907A1 Capacitor structure for an integrated circuit and method of fabrication thereof
09/12/1996WO1996027902A1 Method of forming a capacitor
09/12/1996WO1996027901A1 Improved semiconductor contacts to thin conductive layers
09/12/1996WO1996027900A1 Method of production of semiconductor device and sealing pellet used for the method
09/12/1996WO1996027899A1 Method for plasma etching an oxide/polycide structure
09/12/1996WO1996027898A1 Cleaning device and method
09/12/1996WO1996027897A1 Thermal processing apparatus and process
09/12/1996DE19609147A1 Forming raised bumps on substrate pad using bonding tool
09/12/1996DE19609107A1 Prodn. of silicon@ wafers with defect-free surface layer
09/12/1996DE19608904A1 Highly pure silicone ladder polymer with high mol.wt. and prepolymer
09/12/1996DE19608504A1 IGFET for power component of motor controlled current inverter
09/12/1996DE19535629C1 Integrated CMOS switch prodn. eliminating lateral dopant diffusion between gate electrodes
09/12/1996DE19535622C1 Solder bead application system for substrate termination surfaces
09/12/1996DE19526183C1 Mfg. two transistors of different dielectric strengths on single semiconductor body
09/12/1996DE19519160C1 DRAM cell arrangement having packing density required for specified memory
09/12/1996DE19507206A1 Flexible prodn. of microstructures on large surfaces
09/11/1996EP0731563A2 A BiCMOS logic gate
09/11/1996EP0731557A1 Voltage reproduction device with improved linearity
09/11/1996EP0731511A2 Semiconductor mixed crystal quantum well device manufacture
09/11/1996EP0731504A1 Process for the manufacturing of integrated circuits comprising lateral low-voltage and high-voltage DMOS-technology power devices and non-volatile memory cells
09/11/1996EP0731503A2 Semiconductor cavity filling process
09/11/1996EP0731502A2 Ultra-small semiconductor devices and methods of fabricating and connecting said devices
09/11/1996EP0731501A1 Method for plasma etching an oxide/polycide structure
09/11/1996EP0731500A2 Method of forming a semiconductor device comprising an oxidation step followed by a heat-treatment step
09/11/1996EP0731499A2 Dry etching method of GaAs
09/11/1996EP0731498A2 Surface processing method and surface processing device for silicone substrates
09/11/1996EP0731497A2 Diluted nitrogen trifluoride thermal cleaning process
09/11/1996EP0731496A2 Process for etching a silicium substrate without plasma
09/11/1996EP0731495A2 Process and device for cleaning semiconductor wafers
09/11/1996EP0731494A2 Method for fabricating an integrated circuit using boron implant methodology
09/11/1996EP0731493A2 Method for formation of a polycrystalline semiconductor film
09/11/1996EP0731492A2 Method of growing a single crystal thin film with a uniform thickness, in the vapor phase
09/11/1996EP0731491A2 Method of producing silicon layer having surface controlled to be uneven or even
09/11/1996EP0731490A2 Ultra-fine microfabrication method using an energy beam
09/11/1996EP0731471A1 Static random access memories
09/11/1996EP0731388A2 An energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material
09/11/1996EP0731387A2 Gray-tone mask and pattern formation and ion implantation methods using the same
09/11/1996EP0731360A2 Structure for testing bare integrated circuit devices
09/11/1996EP0730937A1 A resin molding machine with release film
09/11/1996EP0730787A1 Electrical interconnects
09/11/1996EP0730679A1 An epitaxial reactor, susceptor and gas-flow system
09/11/1996EP0730532A1 Topology induced plasma enhancement for etched uniformity improvement
09/11/1996EP0668010B1 Device for bending leads of a lead frame
09/11/1996EP0585256B1 Direct substrate bonding
09/11/1996EP0457843B1 Method and apparatus for measuring registration between layers of a semiconductor wafer
09/11/1996EP0396272B1 IC device including test circuit
09/11/1996EP0389533B1 Sublimation growth of silicon carbide single crystals
09/11/1996EP0366553B1 Test device and method for testing electronic device and semiconductor device having the test device
09/11/1996CN1130958A 多芯片模块 A multi-chip module
09/11/1996CN1130808A Semiconductor device and method of fabricating same
09/11/1996CN1130807A Lead frame and manufacturing method thereof
09/11/1996CN1130806A Method of manufacturing semiconductor device having various types of MOSFETS
09/11/1996CN1130805A Method for preventing moisture from being absorbed into impurity-contained insulating layer
09/11/1996CN1130804A Packaging method for chip plugging module and apparatus thereof
09/11/1996CN1130803A Method of fabricating gate electrode of CMOS device
09/11/1996CN1130801A Method for making capacitor
09/11/1996CN1130689A Method and apparatus for cleaning electronic parts
09/11/1996CN1130606A Method for reducing shrinkage during firing of ceramic bodies
09/11/1996CN1032781C Method of and apparatus for molding resin to seal electronic parts
09/10/1996US5555523 Semiconductor memory device
09/10/1996US5555522 Semiconductor memory having redundant cells
09/10/1996US5555520 Semiconductor memory device
09/10/1996US5555519 Dynamic random access memory device with the combined open/folded bit-line pair arrangement
09/10/1996US5555488 Integrated circuit device having improved post for surface-mount package
09/10/1996US5555479 Reduction projection lens system including refractive and diffractive optical elements
09/10/1996US5555234 Developing method and apparatus
09/10/1996US5555219 Ferroelectric material, and semiconductor memory, optical recording medium and micro-displacement control device using the ferroelectric material
09/10/1996US5555208 Static random access memory
09/10/1996US5555154 CVD Raw Material for oxide-system dielectric thin film and capacitor produced by CVD method using the CVD raw material
09/10/1996US5555091 Wafer diameter/sectional shape measuring machine
09/10/1996US5554940 Bumped semiconductor device and method for probing the same
09/10/1996US5554939 Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same
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