Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2013
06/26/2013CN103177963A Manufacturing method of Fin FET (field-effect transistor) device
06/26/2013CN103177962A Method for forming transistor
06/26/2013CN103177961A Method for forming fin type field-effect transistors
06/26/2013CN103177960A Substrate breakdown voltage improvement for group iii-nitride on silicon substrate
06/26/2013CN103177959A Diode for preventing stress from being acted on chip and manufacture method thereof
06/26/2013CN103177958A Integrated Schottky diode and manufacturing method thereof
06/26/2013CN103177957A Method for avoiding generating metal sharp angles
06/26/2013CN103177956A Method for depositing silica metal barrier layer
06/26/2013CN103177955A Process method of peeling sidewall
06/26/2013CN103177954A Etching device adopting temperature-controllable limit ring
06/26/2013CN103177953A Substrate processing method and substrate processing apparatus
06/26/2013CN103177952A Method for manufacturing low-temperature high-coverage lateral wall
06/26/2013CN103177951A Gate structure for semiconductor device
06/26/2013CN103177950A Structure and method for fabricating fin devices
06/26/2013CN103177949A Forming method of metal silicide gate
06/26/2013CN103177948A Method for forming fin portion of fin field effect tube and fin field effect tube
06/26/2013CN103177947A Method for preparing polysilicon gate electrode of Metal Oxide Semiconductor (MOS) transistor
06/26/2013CN103177946A Production method of false gate in back gate process
06/26/2013CN103177945A High-dielectric-constant metal gate production method
06/26/2013CN103177944A Method for manufacturing semiconductor device
06/26/2013CN103177943A Laser processing method for wafer
06/26/2013CN103177942A Doping method for PMOS (p-channel metal oxide semiconductor) tube
06/26/2013CN103177941A Manufacturing method of semiconductor device
06/26/2013CN103177940A Method for improving polycrystalline silicon doping diffusing uniformity of germanium-silicon emitter
06/26/2013CN103177939A Production method of silicon-based semi-insulating III-V materials
06/26/2013CN103177938A Silicon compound epitaxial growth thickness detection method and silicon compound production mehtod
06/26/2013CN103177937A Selective bias compensation for patterning steps in CMOS processes
06/26/2013CN103177936A Method of manufacturing semiconductor device
06/26/2013CN103177935A Method for manufacturing a flexible structure by transfers of layers and middle structure and flexible structure
06/26/2013CN103177934A Cleaning and drying device of thin disc-shaped object
06/26/2013CN103177924A Substrate processing device and substrate processing system having the same
06/26/2013CN103177788A Thick-film composition containing antimony oxides and their use in the manufacture of semi-conductor devices
06/26/2013CN103176364A Positive photosensitive resin composition and uses thereof
06/26/2013CN103176322A Liquid crystal display device and method for fabricating the same
06/26/2013CN103176321A Array substrate for flat display device and method of fabricating the same
06/26/2013CN103176320A Transversely-distributed pixel structure, liquid crystal display (LCD) device and manufacture method of pixel structure and LCD device
06/26/2013CN103173854A Epitaxially coated semiconductor wafer and device and method for producing an epitaxially coated semiconductor wafer
06/26/2013CN103173743A Wafer carrier with hub
06/26/2013CN103173741A Film deposition system
06/26/2013CN103171897A Transfer robot
06/26/2013CN103170617A Improved silver paste, application thereof and sintering method of chip and main body of power module
06/26/2013CN103170447A Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation
06/26/2013CN102446892B High-performance metal-oxide-metal capacitor and manufacturing method thereof
06/26/2013CN102446714B Method for improving multi-exposure stability of aluminum metal layer
06/26/2013CN102437015B Method for increasing metal-insulating layer-metal (MIM) capacitor density in semiconductor device and structure thereof
06/26/2013CN102420119B Gate polysilicon etching method for enhancing stress memorization technique
06/26/2013CN102420102B Method used for forming MIM (metal-insulator-metal) capacitor structure and MIM capacitor
06/26/2013CN102403242B Method for protecting chip to be detected from damage during re-bonding
06/26/2013CN102403200B Method for realizing pattern with line width of 0.18[mu]m by double photoetching method for I line photoetching machine
06/26/2013CN102376769B Ultrathin transistor and manufacturing method thereof
06/26/2013CN102376674B Packaging structure with embedded semi-conductor element
06/26/2013CN102376567B Method for etching metal
06/26/2013CN102324414B Sequentially etched and plated lead frame structure with island prepacked plastic sealed material and producing method thereof
06/26/2013CN102324366B Multi-wafer positioning system for ion implanter and positioning method thereof
06/26/2013CN102299107B Method for manufacturing bottom electrode of memory cell of phase change memory
06/26/2013CN102264944B CVD device
06/26/2013CN102257431B Positive-type photosensitive resin composition, method for producing resist pattern, semiconductor device, and electronic device
06/26/2013CN102231376B Multi-cycle arrangement carrier-free double-integrated chip (IC) package and production method
06/26/2013CN102194885B N-type buried-channel silicon carbide metal oxide semiconductor field effect transistor (DEMOSFET) device and preparation method thereof
06/26/2013CN102194823B Memory device and manufacturing method thereof
06/26/2013CN102157425B Ring assembly for substrate processing chamber
06/26/2013CN102152232B Polishing pad and method for producing the same
06/26/2013CN102150249B Cleaning jig of capillary for wire bonding, cleaning device of capillary for wire bonding, method for fabricating thereof and method for cleaning using the same
06/26/2013CN102130042B Method for manufacturing through hole interconnection structure
06/26/2013CN102097289B Load lock chamber
06/26/2013CN102083921B Method of preparing an electrical insulation film and application for the metallization of through-vias
06/26/2013CN102076518B Traveling vehicle system
06/26/2013CN102054817B Antifuse and method of making the antifuse
06/26/2013CN102026858B Overhead conveying vehicle
06/26/2013CN102024823B Integrated circuit with embedded SRAM and technical method thereof
06/26/2013CN102007066B Patch production
06/26/2013CN102005474B Semiconductor device and method for manufacturing the same
06/26/2013CN101989598B Multi-die package
06/26/2013CN101983420B Autofocus method and apparatus for wafer scribing
06/26/2013CN101982808B Chemically amplified resist composition and pattern forming process
06/26/2013CN101981675B Laminated structure, method of manufacturing a laminated structure, electronic element, electronic element array, image displaying medium, and image displaying device
06/26/2013CN101960607B Semiconductor device, method for manufacturing semiconductor device, and display device
06/26/2013CN101902131B Supply power adjusting apparatus and semiconductor manufacturing apparatus
06/26/2013CN101883986B Probe device
06/26/2013CN101852763B Chiral sensor based on field effect transistor and preparation method thereof
06/26/2013CN101849130B Vacuum gate valve, and gate opening/closing method using the gate valve
06/26/2013CN101821347B Adhesive film, connecting method and connected body
06/26/2013CN101789434B Image display system and manufacturing method thereof
06/26/2013CN101777520B Production method of split-gate type nonvolatile storage of embedded floating gate
06/26/2013CN101752325B Low viscosity polymeric printing solutions and electronic components bearing polyimide based upon the low viscosity polymeric printing solutions
06/26/2013CN101697348B Small-carrier flat-four-side pin-less packaging part and preparation method thereof
06/26/2013CN101600779B Printable medium for etching of oxidic, transparent and conducting layers
06/26/2013CN101471383B Nonvolatile semiconductor memory device, method for manufacturing the same, and nonvolatile memory array
06/26/2013CN101449370B Memory system with switch element
06/26/2013CN101409301B Solid state imaging device, its manufacturing method, and imaging device
06/26/2013CN101409279B Semiconductor device including electronic component coupled to a backside of a chip
06/26/2013CN101369522B Method for processing a substrate
06/26/2013CN101314470B Carbon nanotube having improved conductivity, process of preparing the same, and electrode comprising the carbon nanotube
06/26/2013CN101288166B Memory devices, transistors, memory cells, and methods of making same
06/26/2013CN101256977B Semiconductor structure and forming method of semiconductor structure
06/26/2013CN101135794B Liquid crystal display device, method of driving the same, and method of fabricating the same
06/25/2013US8473096 Substrate transfer robot, substrate transfer device, semiconductor manufacturing apparatus, and method for producing semiconductor
06/25/2013US8472911 Wireless communication system
06/25/2013US8472002 Lithographic apparatus and device manufacturing method
06/25/2013US8471389 Multiple selectable function integrated circuit module