Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2015
01/21/2015CN104300040A 一种硅片的磷吸杂工艺 Silicon wafers phosphorus gettering process
01/21/2015CN104300032A 一种单晶硅太阳能离子注入工艺 One kind of monocrystalline silicon solar ion implantation process
01/21/2015CN104300009A 一种薄膜晶体管及其制备方法、电路结构、电子设备 A thin film transistor and its preparation method, the circuit structure, electronic equipment
01/21/2015CN104300007A 薄膜晶体管及其制作方法、阵列基板、显示装置 Thin film transistor and its manufacturing method, the array substrate, display device
01/21/2015CN104300006A 薄膜晶体管及其制造方法、oled背板和显示装置 A thin film transistor and its manufacturing method, oled backplane and display means
01/21/2015CN104300004A 薄膜晶体管及其制备方法、阵列基板、显示装置 Thin film transistor and its preparation method, the array substrate, display device
01/21/2015CN104300003A 薄膜晶体管及其制造方法以及电子设备 A thin film transistor and its manufacturing method, and electronic device
01/21/2015CN104300002A 一种薄膜晶体管及其制造方法、光刻工艺 A thin film transistor and its manufacturing method, a lithographic process
01/21/2015CN104300000A 具有静电保护结构的功率器件及其制作方法 Has the power device and manufacturing method thereof static protection structures
01/21/2015CN104299998A 一种ldmos器件及其制作方法 Ldmos one kind of device and manufacturing method thereof
01/21/2015CN104299997A 电荷补偿半导体器件 Charge compensation semiconductor devices
01/21/2015CN104299996A 非对称替代金属栅场效应晶体管及其制造方法 Asymmetric replacement metal gate field effect transistor and manufacturing method thereof
01/21/2015CN104299994A 晶体管及晶体管的形成方法 The method for forming transistors and transistor
01/21/2015CN104299992A 一种横向沟槽绝缘栅双极型晶体管及其制备方法 A widthwise trench insulated gate bipolar transistor and its preparation method
01/21/2015CN104299990A 绝缘栅双极晶体管及其制造方法 Insulated gate bipolar transistor and its manufacturing method
01/21/2015CN104299989A 绝缘栅双极型晶体管及其制造方法 Insulated gate bipolar transistor and its manufacturing method
01/21/2015CN104299988A 一种具有平面型发射阴极的纳米真空三极管及其制作方法 A planar nano-emission cathode triode vacuum and its production method
01/21/2015CN104299987A 具有掩埋栅极电极和栅极接触的半导体器件 Having a buried gate electrode and a gate contact of a semiconductor device
01/21/2015CN104299986A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
01/21/2015CN104299984A 一种半导体器件及其制造方法 A semiconductor device and manufacturing method thereof
01/21/2015CN104299975A 阵列基板及其制作方法 Array substrate and manufacturing method thereof
01/21/2015CN104299973A 一种显示基板及其制备方法、显示装置 A display substrate and its preparation method, a display device
01/21/2015CN104299972A 薄膜晶体管阵列基板及其制造方法、液晶显示器 The thin film transistor array substrate and manufacturing method thereof, a liquid crystal display
01/21/2015CN104299971A 具有不均匀p型杂质分布的mos器件 Having a non-uniform distribution of the p-type impurity mos device
01/21/2015CN104299970A 具有减少的面的外延区的mos器件 Mos device having a reduced surface area of ​​the epitaxial
01/21/2015CN104299969A 具有加强焊盘区域的柔性显示器 A reinforcing pad region of the flexible display
01/21/2015CN104299968A 电致发光器件及其制造方法、显示基板和显示装置 Electroluminescent device and a manufacturing method, the display substrate and a display device
01/21/2015CN104299967A 用于增强esd保护的半导体结构 The semiconductor structure used to enhance esd protection
01/21/2015CN104299964A 一种层叠封装结构及其制备方法 A laminated packaging structure and its preparation method
01/21/2015CN104299961A 一种阵列基板及其制备方法 One kind of array substrate and its preparation method
01/21/2015CN104299960A 半导体装置和半导体装置的制造方法 The method of manufacturing a semiconductor device and a semiconductor device
01/21/2015CN104299958A 互连结构及互连结构的形成方法 The method of forming an interconnect structure and the interconnect structure
01/21/2015CN104299956A 使用cmos兼容反铁电高k材料的复杂电路组件及电容器 Use cmos compatible antiferroelectric complex high-k material and capacitor circuit components
01/21/2015CN104299953A 电子器件和用于制造电子器件的方法 The method of manufacturing an electronic device and an electronic device for
01/21/2015CN104299948A 具有芯片贴装焊盘的腔体封装 Cavity package with die attach pad
01/21/2015CN104299947A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
01/21/2015CN104299945A 固态成像设备及其制造方法 The solid-state imaging device and manufacturing method thereof
01/21/2015CN104299944A 快闪存储器及其形成方法 Flash memory and method for forming
01/21/2015CN104299943A 阵列基板及其制造方法和显示面板 Array substrate and manufacturing method thereof and a display panel
01/21/2015CN104299942A 过孔制作方法、阵列基板制作方法及阵列基板、显示装置 Vias production methods, production methods and array substrate array substrate, a display device
01/21/2015CN104299941A 接触插塞及其制造方法 Contact plug and a manufacturing method
01/21/2015CN104299940A 金属阻挡层的成膜方法 Metal barrier layer deposition method
01/21/2015CN104299939A 互连结构的形成方法 The method of forming an interconnect structure
01/21/2015CN104299938A 浅沟槽隔离结构的形成方法 The method for forming a shallow trench isolation structure
01/21/2015CN104299937A 一种应用于硅腐蚀的固定装置 Fixed an apparatus used in silicone corrosion
01/21/2015CN104299936A 一种芯片校准系统及校准方法 A chip calibration system and calibration method
01/21/2015CN104299935A 用于光伏串焊机的电池片上料传输机构 Material transport mechanism for photovoltaic solar cell strings on the welder
01/21/2015CN104299934A Efem、装载端口 Efem, loading port
01/21/2015CN104299933A 晶圆刻蚀装置 Wafer etching device
01/21/2015CN104299932A 芯片焊接器、拾取方法以及拾取装置 Chip welders, picking methods and pickup
01/21/2015CN104299931A 全自动分片装置 Automatic slicing device
01/21/2015CN104299930A 基板清洗机、基板清洗装置、清洗后基板的制造方法及基板处理装置 Substrate cleaning machine, the substrate cleaning apparatus, the cleaning method of manufacturing a rear substrate and a substrate processing apparatus
01/21/2015CN104299929A 用于原位晶片边缘和背侧等离子体清洁的系统和方法 Situ plasma cleaning wafer edge and the backside of a system and method for
01/21/2015CN104299928A 用于处理微电子工件的设备和方法 Apparatus and method for processing microelectronic workpieces
01/21/2015CN104299927A 图案形成装置以及图案形成方法 Device and pattern forming method patterning
01/21/2015CN104299926A 结晶化的硅的检测方法及装置 Detection crystallized silicon and means
01/21/2015CN104299925A 半导体制程温度量测装置 Semiconductor process temperature measuring device
01/21/2015CN104299924A 一种基于终点检测的soi衬底刻蚀方法 An soi substrate etching endpoint detection method based on
01/21/2015CN104299923A 接合装置以及接合方法 Apparatus and method for bonding bonding
01/21/2015CN104299922A 背面金属化共晶工艺方法 Backside metallization process for eutectic
01/21/2015CN104299921A 一种用于大功率rf mems开关的高温金属微电极的制备方法 A process for producing high-power rf mems switch for high temperature metal microelectrodes
01/21/2015CN104299920A 形成封装结构的机制 Mechanism of forming a package structure
01/21/2015CN104299919A 无芯层封装结构及其制造方法 No core package structure and its manufacturing method
01/21/2015CN104299918A 封装集成电路的方法和具有非功能性占位块的模压衬底 Methods and packaged integrated circuit substrate having a non-functional molded blocks occupying
01/21/2015CN104299917A 一种汽车发电机二极管芯片与底座的制作安装工艺 Fabrication and installation process for automobile generator diode chip and the base
01/21/2015CN104299916A 配线基板及制造方法,部件嵌入式玻璃基板及制造方法 Wiring board and manufacturing method, a glass substrate and embedded member manufacturing method
01/21/2015CN104299915A 金属氧化物薄膜晶体管制备方法 Preparing a metal oxide thin film transistor
01/21/2015CN104299914A FinFET的制造方法 The method of manufacturing FinFET
01/21/2015CN104299913A 薄膜晶体管的制造方法 The method of manufacturing a thin film transistor
01/21/2015CN104299912A 在先进多栅极装置中的高度共形延伸掺杂 In more highly advanced gate means extending doped conformal
01/21/2015CN104299911A 通过单步骤沉积实现栅极包覆 Realized by a single step of depositing a gate covered
01/21/2015CN104299910A 由杂质离子植入调整的通道半导体合金层成长 By adjustment of the channel ion implantation impurity semiconductor alloy layer is grown
01/21/2015CN104299909A 热调整半导体器件中的应力 Adjust heat stress in semiconductor devices
01/21/2015CN104299908A Vdmos及其制造方法 Vdmos and manufacturing method thereof
01/21/2015CN104299907A Vdmos器件的制作方法 Vdmos device manufacturing method
01/21/2015CN104299906A 一种掩埋式势垒分压场效应管及其生产方法 One kind of buried barrier divider FET and its production method
01/21/2015CN104299905A 无结晶体管及其制造方法 No junction transistor and manufacturing method thereof
01/21/2015CN104299904A 闪存单元的形成方法 The method for forming the flash unit
01/21/2015CN104299903A 沟槽栅mosfet的制造方法 Manufacturing method of the trench gate mosfet
01/21/2015CN104299902A 电容值可变的mis电容的结构及制作方法 Structure and method of making the capacitance value of variable capacitance mis
01/21/2015CN104299901A 开管涂源全扩散制造低功耗雪崩晶闸管芯片的方法 The method of manufacturing a low-power chip avalanche thyristor open source full diffusion tube coated
01/21/2015CN104299900A 制造场截止型绝缘栅双极晶体管的方法 Manufacturing a field-type insulated gate bipolar transistor cutoff method
01/21/2015CN104299899A 间隔层双曝光刻蚀方法 Double Exposure spacer layer etching method
01/21/2015CN104299898A 半导体晶片、半导体ic芯片及其制造方法 A semiconductor wafer, a semiconductor chip and its manufacturing method ic
01/21/2015CN104299897A 具改善阈值电压表现的取代金属栅极的集成电路及其制法 Replace with improving the performance of the threshold voltage metal gate IC Jiqizhifa
01/21/2015CN104299896A 一种多步推进扩散工艺 A multi-step process to promote the diffusion
01/21/2015CN104299895A 一种应用于硅太阳能电池的扩散工艺 Applied to the diffusion process of the silicon solar cell
01/21/2015CN104299894A 一种pecvd低温镀膜工艺研究 Low Temperature Coating process for pecvd
01/21/2015CN104299893A 通过执行替代生长制程形成finfet半导体装置的替代鳍片的方法 Finfet alternative method of forming a fin of a semiconductor device by performing alternative routing Growth
01/21/2015CN104299892A 图案转印模具和图案形成方法 Pattern transfer mold and pattern forming method
01/21/2015CN104299891A 低温多晶硅薄膜的制备方法、tft、阵列基板及显示装置 Low-temperature polysilicon thin film preparation methods, tft, array substrate and display device
01/21/2015CN104299890A 一种硅片表面钨铁金属离子的清洗方法 A method of cleaning the surface of the silicon metal ions ferrotungsten
01/21/2015CN104299889A 混合特征蚀刻和倒角蚀刻的系统 Mixing characteristics etching and etching systems chamfer
01/21/2015CN104299888A 半导体芯片的制作方法 Fabrication of a semiconductor chip
01/21/2015CN104299881A 等离子刻蚀设备 Plasma etching equipment
01/21/2015CN104299878A 等离子蚀刻装置 Plasma etching apparatus
01/21/2015CN104298033A 一种像素结构及其制备方法、显示面板及显示装置 PIXEL structure and preparation method, the display panel and display device
01/21/2015CN104298018A 阵列基板及其制作方法、显示面板 Array substrate and method of making the display panel
01/21/2015CN104297423A 检测装置和检测方法 Detecting means and detection methods
01/21/2015CN104296887A 一种实现稳定测温的测温装置及其所在的半导体设备 A temperature measuring device to achieve a stable temperature and where the semiconductor device
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