| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/29/2015 | WO2015013243A1 Apparatus and method for forming alignment features for back side processing of a wafer |
| 01/29/2015 | WO2015013186A1 Remote delivery of chemical reagents |
| 01/29/2015 | WO2015013185A1 System and method for generation of extreme ultraviolet light |
| 01/29/2015 | WO2015013162A1 Compositions and methods for cmp of silicon oxide, silicon nitride, and polysilicon materials |
| 01/29/2015 | WO2015013143A1 An end effector for transferring a substrate |
| 01/29/2015 | WO2015013142A1 An electrostatic chuck for high temperature process applications |
| 01/29/2015 | WO2015012839A1 Resistive memory device having field enhanced features |
| 01/29/2015 | WO2015012498A1 Conductive connector and manufacturing method therefor |
| 01/29/2015 | WO2015012403A1 Pretreatment method for base substrate, and method for manufacturing laminate using pretreated base substrate |
| 01/29/2015 | WO2015012385A1 Resin composition for display substrate, thin resin film for display substrate, and process for producing thin resin film for display substrate |
| 01/29/2015 | WO2015012359A1 Ferroelectric device and method for manufacturing same |
| 01/29/2015 | WO2015012353A1 Crystalline silicon solar battery and method for producing same |
| 01/29/2015 | WO2015012352A1 Electroconductive paste and method for producing crystalline silicon solar battery |
| 01/29/2015 | WO2015012264A1 Copper and/or copper oxide dispersion, and electroconductive film formed using dispersion |
| 01/29/2015 | WO2015012257A1 Continuous-distillation-type trichlorosilane vaporization supply device and continuous-distillation-type trichlorosilane gas vaporization method |
| 01/29/2015 | WO2015012218A1 Composite substrate, method for fabricating same, function element, and seed crystal substrate |
| 01/29/2015 | WO2015012177A1 Method for forming pattern |
| 01/29/2015 | WO2015012172A1 Additive for resist underlayer film-forming composition, and resist underlayer film-forming composition containing same |
| 01/29/2015 | WO2015012161A1 Second mold to which irregular first mold pattern has been transferred, second mold manufacturing method, method for manufacturing article using second mold, optical panel manufacturing method and optical element manufacturing method |
| 01/29/2015 | WO2015012151A1 Substrate with multilayered reflective film, reflective mask blank for euv lithography, reflective mask for euv lithography, process for producing same, and process for producing semiconductor device |
| 01/29/2015 | WO2015012118A1 Silica for cmp, aqueous dispersion, and process for producing silica for cmp |
| 01/29/2015 | WO2015012107A1 Transistor |
| 01/29/2015 | WO2015012099A1 Laser system, extreme ultraviolet light generation system, and method for controlling laser device |
| 01/29/2015 | WO2015012041A1 Method for measuring total oxidizing-substance concentration, substrate cleaning method, and substrate cleaning system |
| 01/29/2015 | WO2015012019A1 Silicon carbide semiconductor device and production method therefor |
| 01/29/2015 | WO2015012009A1 Silicon carbide semiconductor device and method for manufacturing same |
| 01/29/2015 | WO2015012002A1 Wiring length measurement device, and recording medium |
| 01/29/2015 | WO2015011968A1 Inspection device |
| 01/29/2015 | WO2015011893A1 Resin composition, method for forming pattern using same, and electronic component |
| 01/29/2015 | WO2015011870A1 Semiconductor device |
| 01/29/2015 | WO2015011859A1 Overhead transport vehicle and overhead transport vehicle control method |
| 01/29/2015 | WO2015011855A1 Method for forming oxide thin film |
| 01/29/2015 | WO2015011829A1 Substrate treatment device and method for manufacturing semiconductor device |
| 01/29/2015 | WO2015011583A1 Method of separating light emitting devices formed on a substrate wafer |
| 01/29/2015 | WO2015011243A1 Method and apparatus for optically checking by interferometry the thickness of an object being machined |
| 01/29/2015 | WO2015010872A1 Cooling body |
| 01/29/2015 | WO2015010656A1 Method for the manufacture of non-punch-through insulated gate bipolar transistor |
| 01/29/2015 | WO2015010618A1 Method for manufacturing injection-enhanced insulated-gate bipolar transistor |
| 01/29/2015 | WO2015010427A1 Array substrate and manufacturing method therefor, and display device |
| 01/29/2015 | WO2015010416A1 Array substrate, manufacturing method therefor, and display panel |
| 01/29/2015 | WO2015010410A1 Array substrate, manufacturing method therefor, and display panel |
| 01/29/2015 | WO2015010404A1 Thin film transistor, manufacturing method thereof, array substrate and display device |
| 01/29/2015 | WO2015010397A1 Array substrate, method for manufacturing same, and display device |
| 01/29/2015 | WO2015010384A1 Array substrate, preparation method therefor, and display device |
| 01/29/2015 | WO2015010355A1 Static elimination device, cassette bearing apparatus and material handling system |
| 01/29/2015 | WO2015010195A1 Through semiconductor via structure with reduced stress proximity effect |
| 01/29/2015 | WO2015010168A1 Thermal processing in silicon |
| 01/29/2015 | WO2015010167A1 High concentration doping in silicon |
| 01/29/2015 | WO2014164966A9 Composite end effectors |
| 01/29/2015 | US20150032246 Energy-consumption monitoring system for substrate processing apparatus and energy-consumption monitoring method for substrate processing apparatus |
| 01/29/2015 | US20150031273 Pad conditioner and method of reconditioning planarization pad |
| 01/29/2015 | US20150031271 Double-side polishing apparatus |
| 01/29/2015 | US20150031218 Film forming process and film forming apparatus |
| 01/29/2015 | US20150031217 Encapsulated Nanoparticles |
| 01/29/2015 | US20150031216 Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium |
| 01/29/2015 | US20150031215 Apparatus, hybrid laminated body, method and materials for temporary substrate support |
| 01/29/2015 | US20150031214 Chemical Fluid Processing Apparatus and Chemical Fluid Processing Method |
| 01/29/2015 | US20150031213 Plasma processing apparatus and plasma processing method |
| 01/29/2015 | US20150031212 Method for obtaining extreme selectivity of metal nitrides and metal oxides |
| 01/29/2015 | US20150031211 Intrench profile |
| 01/29/2015 | US20150031210 Methods of fabricating fine patterns |
| 01/29/2015 | US20150031209 Method for forming features with sub-lithographic pitch using directed self-assembly of polymer blend |
| 01/29/2015 | US20150031208 Method of manufacturing semiconductor device |
| 01/29/2015 | US20150031207 Forming multiple gate length transistor gates using sidewall spacers |
| 01/29/2015 | US20150031206 Composition for forming highly adhesive resist underlayer film |
| 01/29/2015 | US20150031205 Polishing method |
| 01/29/2015 | US20150031204 Method of depositing film |
| 01/29/2015 | US20150031203 Method for processing a workpiece |
| 01/29/2015 | US20150031202 Method for manufacturing semiconductor wafers |
| 01/29/2015 | US20150031201 Trench patterning with block first sidewall image transfer |
| 01/29/2015 | US20150031200 Bump Pad Structure |
| 01/29/2015 | US20150031198 Pattern forming method and method of manufacturing semiconductor device |
| 01/29/2015 | US20150031196 METHOD OF ADJUSTING A TRANSISTOR GATE FLAT BAND VOLTAGE WITH ADDITION OF Al203 ON NITRIDED SILICON CHANNEL |
| 01/29/2015 | US20150031195 Method of Fabricating a Semiconductor Device |
| 01/29/2015 | US20150031194 Method for designing antenna cell that prevents plasma induced gate dielectric damage in semiconductor integrated circuits |
| 01/29/2015 | US20150031193 Semiconductor substrate suitable for the realization of electronic and/or optoelectronic devices and relative manufacturing process |
| 01/29/2015 | US20150031192 Substrate carrier arrangement, coating system having a substrate carrier arrangement and method for performing a coating process |
| 01/29/2015 | US20150031191 Method of manufacturing semiconductor device |
| 01/29/2015 | US20150031190 Process for thinning the active silicon layer of a substrate of "silicon on insulator" (soi) type |
| 01/29/2015 | US20150031189 Mechanisms for cleaning substrate surface for hybrid bonding |
| 01/29/2015 | US20150031188 Method for isolating active regions in germanium-based mos device |
| 01/29/2015 | US20150031187 Methods for forming a round bottom silicon trench recess for semiconductor applications |
| 01/29/2015 | US20150031185 Methods of fabricating semiconductor devices and semiconductor devices fabricated thereby |
| 01/29/2015 | US20150031184 Methods of manufacturing a package |
| 01/29/2015 | US20150031182 Method of manufacturing a fin-like field effect transistor (finfet) device |
| 01/29/2015 | US20150031181 Replacement source/drain finfet fabrication |
| 01/29/2015 | US20150031179 Method of forming a semiconductor structure including silicided and non-silicided circuit elements |
| 01/29/2015 | US20150031178 Method of cmos manufacturing utilizing multi-layer epitaxial hardmask films for improved gate spacer control |
| 01/29/2015 | US20150031177 Method of cmos manufacturing utilizing multi-layer epitaxial hardmask films for improved epi profile |
| 01/29/2015 | US20150031176 Semiconductor Device Containing HEMT and MISFET and Method of Forming the Same |
| 01/29/2015 | US20150031175 Method for manufacturing semiconductor device |
| 01/29/2015 | US20150031173 Copper post solder bumps on substrates |
| 01/29/2015 | US20150031172 Method for interconnection of components on a substrate |
| 01/29/2015 | US20150031171 Methods for forming conductive elements and vias on substrates and for forming multi-chip modules |
| 01/29/2015 | US20150031170 Method and apparatus for stacked semiconductor chips |
| 01/29/2015 | US20150031169 Method for manufacturing semiconductor device |
| 01/29/2015 | US20150031167 Deposition apparatus, method of forming thin film using the deposition apparatus, and method of manufacturing organic light emitting display apparatus using the deposition apparatus |
| 01/29/2015 | US20150031149 Multi-chip package and method of manufacturing the same |
| 01/29/2015 | US20150031148 Shadow Mask for Patterned Deposition on Substrates |
| 01/29/2015 | US20150031147 Organic light emitting diode fabrication |