Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2015
01/20/2015US8936832 Device and method for wet treating plate-like-articles
01/20/2015US8936829 Method of aftertreatment of amorphous hydrocarbon film and method for manufacturing electronic device by using the aftertreatment method
01/20/2015US8936763 Integrated sensor arrays for biological and chemical analysis
01/20/2015US8936729 Planarizing method
01/20/2015US8936705 Electrochemical deposition apparatus
01/20/2015US8936696 Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor
01/20/2015US8936680 Crucible vessel and crucible cover having grooves for producing single-crystal silicon carbide, production apparatus and method
01/20/2015US8936507 Semiconductor manufacturing apparatus
01/20/2015US8936462 Multi-operation wafer baking system
01/20/2015US8936425 Ancillary apparatus and method for loading glass substrates into a bracket
01/20/2015US8936405 Multi-channel optical receiver module
01/20/2015US8936181 Valve accelerating type dispensing pump
01/20/2015US8936050 Lid opening and closing device
01/20/2015US8935990 Low contamination components for semiconductor processing apparatus and methods for making components
01/20/2015US8935850 Method of manufacturing printed wiring board
01/15/2015WO2015006742A1 Coated cmp retaining ring
01/15/2015WO2015006712A2 An electronic device using group iii nitride semiconductor and its fabrication method and an epitaxial multi-layer wafer for making it
01/15/2015WO2015006688A1 Method for patterning sub-50-nanometers structures
01/15/2015WO2015006655A1 Semiconductor device having three terminal miniature package
01/15/2015WO2015006604A1 Identifying registration errors of dsa lines
01/15/2015WO2015006598A1 Metrology tool stage configurations and operation methods
01/15/2015WO2015006392A1 Method of doping a polycrystalline transistor channel for vertical nand devices
01/15/2015WO2015006311A1 Process apparatus with on-the-fly substrate centering
01/15/2015WO2015006234A1 Combined x-ray and optical metrology
01/15/2015WO2015006233A1 Aperture alignment in scatterometry metrology systems
01/15/2015WO2015006230A1 Methods and systems for detecting repeating defects on semiconductor wafers using design data
01/15/2015WO2015006189A2 Method and structure for improved nanoimprint lithography mask
01/15/2015WO2015006186A1 Thickness control variation
01/15/2015WO2015006131A1 Method to fabricate self-aligned isolation in gallium nitride devices and integrated circuits
01/15/2015WO2015006074A1 High-voltage field-effect transistor having multiple implanted layers
01/15/2015WO2015006034A1 Scalable triode pecvd source and system devices
01/15/2015WO2015005997A1 Light emitting device and method for making the same
01/15/2015WO2015005947A1 Semiconductor devices comprising edge doped graphene and methods of making the same
01/15/2015WO2015005931A1 Amorphous thin metal film
01/15/2015WO2015005779A1 Providing a chip die with electrically conductive elements
01/15/2015WO2015005687A1 Retainer ring for chemical-mechanical polishing device
01/15/2015WO2015005607A1 Substrate processing apparatus
01/15/2015WO2015005571A1 Method for forming pad of wafer
01/15/2015WO2015005549A1 Transferring tool, and linking member and picker thereof
01/15/2015WO2015005527A1 Thin-film pattern array and production method therefor
01/15/2015WO2015005517A1 Method for forming pattern and catalyst and electronic element using method therefor
01/15/2015WO2015005433A1 Polishing composition and method for producing same
01/15/2015WO2015005397A1 Silicon-carbide semiconductor device and method for manufacturing silicon-carbide semiconductor device
01/15/2015WO2015005385A1 Semiconductor layered structure and semiconductor element
01/15/2015WO2015005372A1 Semiconductor device using silver nanoparticles and method for manufacturing same
01/15/2015WO2015005371A1 Semiconductor device using silver nanoparticles and method for producing same
01/15/2015WO2015005348A1 Copper material for high-purity copper sputtering target, and high-purity copper sputtering target
01/15/2015WO2015005340A1 Thermoelectric conversion material, thermoelectric conversion element, and thermoelectricity-generating article and sensor-use power source in which same is used
01/15/2015WO2015005202A1 Semiconductor device and manufacturing method for same, crystal, and manufacturing method for same
01/15/2015WO2015005200A1 Polishing composition
01/15/2015WO2015005192A1 Substrate processing device, gas-purging method, method for manufacturing semiconductor device, and recording medium containing anomaly-processing program
01/15/2015WO2015005157A1 Nitride semiconductor and field effect transistor
01/15/2015WO2015005138A1 Method for transporting sealing resin composition and packaging
01/15/2015WO2015005118A1 Substrate processing apparatus, device manufacturing system, device manufacturing method, and pattern formation apparatus
01/15/2015WO2015005093A1 Temperature detection tool
01/15/2015WO2015005083A1 Nitride semiconductor multilayer substrate, nitride semiconductor device, and method for manufacturing nitride semiconductor multilayer substrate
01/15/2015WO2015005064A1 Method for producing silicon carbide semiconductor device, and silicon carbide semiconductor device
01/15/2015WO2015005053A1 Liquid composition for cleaning/removing copper-containing adhering matter from surface of oxide comprising indium, gallium, zinc, and oxygen (igzo), method for cleaning igzo surface using said liquid composition, and substrate cleaned using said method for cleaning
01/15/2015WO2015005037A1 Semiconductor device
01/15/2015WO2015005010A1 Semiconductor device and method for manufacturing same
01/15/2015WO2015004956A1 Semiconductor device and manufacturing method for same
01/15/2015WO2015004950A1 Bonding stage and method for manufacturing same
01/15/2015WO2015004911A1 Drive control device
01/15/2015WO2015004891A1 Semiconductor device and inverter using same
01/15/2015WO2015004890A1 Metal oxide thin film, method of producing same, and coating solution for forming metal oxide thin film used in said method
01/15/2015WO2015004867A1 Semiconductor device for detecting radiation
01/15/2015WO2015004853A1 Semiconductor device
01/15/2015WO2015004830A1 Method for determining curing conditions, method for producing circuit device, and circuit device
01/15/2015WO2015004774A1 Semiconductor device manufacturing method and pin diode
01/15/2015WO2015004716A1 Semiconductor device
01/15/2015WO2015004666A1 Thermal doping by vacancy formation in nanocrystals
01/15/2015WO2015004596A1 The use of surfactants having at least three short-chain perfluorinated groups in formulations for photo mask cleaning
01/15/2015WO2015004262A1 Apparatus for removing a ring-shaped reinforcement edge from a ground semiconductor wafer
01/15/2015WO2015004096A1 Etching method for forming a carrier having inward flanges in particular for confining a droplet for capillary self-assembly
01/15/2015WO2015003609A1 Composite substrate with isolation layer and manufacturing method thereof
01/15/2015WO2015003553A1 Dynamic random access memory (dram) and production method, semiconductor packaging component and packaging method
01/15/2015WO2015003525A1 Method for manufacturing semiconductor display panel
01/15/2015WO2015003456A1 Array substrate and manufacturing method thereof, and display device
01/15/2015WO2014171798A9 Method of manufacturing transparent electrode film for display and transparent electrode film for display
01/15/2015US20150019885 Countermeasure method and device for protecting data circulating in an electronic microcircuit
01/15/2015US20150019004 Transfer device and transfer method
01/15/2015US20150017890 Polishing head and polishing apparatus
01/15/2015US20150017880 Film-thickness measuring apparatus, film-thickness measuring method, and polishing apparatus having the film-thickness measuring apparatus
01/15/2015US20150017817 Laser processing apparatus and laser processing method
01/15/2015US20150017816 Method for performing laser crystallization
01/15/2015US20150017815 Combinatorial Non-Contact Wet Processing
01/15/2015US20150017814 Method of forming gate oxide layer
01/15/2015US20150017813 Semiconductor Device Manufacturing Method and Substrate Treatment System
01/15/2015US20150017812 Sequential precursor dosing in an ald multi-station/batch reactor
01/15/2015US20150017811 Method for processing base body to be processed
01/15/2015US20150017810 Dual chamber plasma etcher with ion accelerator
01/15/2015US20150017809 Fluorocarbon based aspect-ratio independent etching
01/15/2015US20150017808 Method of forming fine patterns of semiconductor device
01/15/2015US20150017807 Methods of forming patterns
01/15/2015US20150017806 Polishing agent, polishing agent set, and substrate polishing method
01/15/2015US20150017805 Wafer processing apparatus having independently rotatable wafer support and processing dish
01/15/2015US20150017804 Method of forming a pattern in a semiconductor device and method of forming a gate using the same
01/15/2015US20150017803 Customized alleviation of stresses generated by through-substrate via(s)
01/15/2015US20150017802 Double-etch nanowire process
01/15/2015US20150017801 Semiconductor structure and method for making same
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