| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/22/2015 | WO2015009801A1 Bonded wafer system and method for bonding and de-bonding thereof |
| 01/22/2015 | WO2015009791A1 Integrated circuit and method of forming the integrated circuit |
| 01/22/2015 | WO2015009784A1 Structure for improved gas activation for cross-flow type thermal cvd chamber |
| 01/22/2015 | WO2015009745A1 Ion assisted deposition for rare-earth oxide based thin film coatings on process rings |
| 01/22/2015 | WO2015009739A1 Illumination configurations for scatterometry measurements |
| 01/22/2015 | WO2015009669A1 Lift-off of epitaxial layers from silicon carbide or compound semiconductor substrates |
| 01/22/2015 | WO2015009619A1 Producing resist layers using fine segmentation |
| 01/22/2015 | WO2015009447A1 Substrate support ring for more uniform layer thickness |
| 01/22/2015 | WO2015009270A1 Organic light emitting diodes |
| 01/22/2015 | WO2015009249A1 Enhancement-mode iii-n transistor with n-polarity and method of fabricating the same |
| 01/22/2015 | WO2015009238A1 Method and apparatus for chip-to-wafer integration |
| 01/22/2015 | WO2015008963A1 Epitaxial reactor |
| 01/22/2015 | WO2015008887A1 Spring contact |
| 01/22/2015 | WO2015008864A1 Method for producing silicon target structure and silicon target structure |
| 01/22/2015 | WO2015008843A1 Scan bist lfsr seed generation method and memory medium for storing program for same |
| 01/22/2015 | WO2015008805A1 Oxide semiconductor thin film and thin film transistor |
| 01/22/2015 | WO2015008789A1 Solder-bump manufacturing method |
| 01/22/2015 | WO2015008731A1 Exposure device |
| 01/22/2015 | WO2015008720A1 Film-forming composition, film formed thereby, and method for manufacturing organic semiconductor element using same |
| 01/22/2015 | WO2015008719A1 Composition for forming films, film produced from said composition, and method for producing organic semiconductor element using said composition |
| 01/22/2015 | WO2015008694A1 Handle substrate for composite substrate for semiconductor |
| 01/22/2015 | WO2015008594A1 Resist composition for semiconductor manufacturing process; resist film, resist-coated mask blanks, photomask, and resist patterning method using said resist composition; electronic-device manufacturing method; and electronic device |
| 01/22/2015 | WO2015008572A1 Metallic polishing pad and production method therefor |
| 01/22/2015 | WO2015008550A1 Semiconductor device, and method for manufacturing same |
| 01/22/2015 | WO2015008548A1 Method for manufacturing semiconductor device |
| 01/22/2015 | WO2015008539A1 Contactless conveyance device and contactless conveyance method |
| 01/22/2015 | WO2015008532A1 Field-effect transistor |
| 01/22/2015 | WO2015008473A1 Semiconductor device |
| 01/22/2015 | WO2015008444A1 Semiconductor device |
| 01/22/2015 | WO2015008443A1 Cleaning liquid, cleaning apparatus and cleaning method for resist remover liquid filtration filter |
| 01/22/2015 | WO2015008430A1 Semiconductor device |
| 01/22/2015 | WO2015008387A1 Method for manufacturing semiconductor device, and semiconductor device |
| 01/22/2015 | WO2015008365A1 Exposure device |
| 01/22/2015 | WO2015008336A1 Semiconductor device and method for manufacturing same |
| 01/22/2015 | WO2015008093A1 Method of forming etched silicon structures |
| 01/22/2015 | WO2015008076A1 Preparation of copper selenide nanoparticles |
| 01/22/2015 | WO2015007966A1 Method for producing a multilayer workpiece by sintering |
| 01/22/2015 | WO2015007803A2 Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing |
| 01/22/2015 | WO2015007802A2 Apparatus and method for aligning and centering wafers |
| 01/22/2015 | WO2015007778A1 Encapsulation material for light emitting diodes |
| 01/22/2015 | WO2015007144A1 Fin field effect transistors having multiple threshold voltages |
| 01/22/2015 | WO2015007143A1 Intrinsic channel planar field effect transistors having multiple threshold voltages |
| 01/22/2015 | WO2015007083A1 Semiconductor fin manufacturing method and fin fet device manufacturing method |
| 01/22/2015 | WO2015007055A1 Method and system for preparing thin-film transistor and thin-film transistor, and array substrate |
| 01/22/2015 | WO2015007054A1 Method and apparatus of manufacturing flexible display device |
| 01/22/2015 | WO2015007053A1 Preparation method for array substrate, array substrate and display device |
| 01/22/2015 | WO2015007044A1 Exposure device and exposure method |
| 01/22/2015 | WO2015006988A1 Glass substrate positioning apparatus |
| 01/22/2015 | WO2015006866A1 Dual-band high efficiency doherty amplifiers with hybrid packaged power devices |
| 01/22/2015 | US20150026650 Integrated circuit manufacture using direct write lithography |
| 01/22/2015 | US20150024989 Cleaning composition and process for cleaning semiconductor devices and/or tooling during manufacturing thereof |
| 01/22/2015 | US20150024662 Flexible diaphragm post-type floating and rigid abrading workholder |
| 01/22/2015 | US20150024661 Mechanisms for removing debris from polishing pad |
| 01/22/2015 | US20150024659 Method of Controlling Polishing |
| 01/22/2015 | US20150024609 Semiconductor reaction chamber with plasma capabilities |
| 01/22/2015 | US20150024608 Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same |
| 01/22/2015 | US20150024607 Organoaluminum materials for forming aluminum oxide layer from coating composition that contains organic solvent |
| 01/22/2015 | US20150024606 Method and system for thinning wafer thereof |
| 01/22/2015 | US20150024605 Substrate processing method |
| 01/22/2015 | US20150024604 Method of etching a silicon substrate |
| 01/22/2015 | US20150024603 Plasma etching method and plasma etching apparatus |
| 01/22/2015 | US20150024602 Method for positioning spacers in pitch multiplication |
| 01/22/2015 | US20150024601 Method of manufacturing si-based high-mobility group iii-v/ge channel cmos |
| 01/22/2015 | US20150024600 Systems and methods to mitigate nitride precipitates |
| 01/22/2015 | US20150024599 Plasma processing apparatus and plasma processing method |
| 01/22/2015 | US20150024598 Method for manufacturing semiconductor device |
| 01/22/2015 | US20150024597 Method for sidewall spacer line doubling using polymer brush material as a sacrificial layer |
| 01/22/2015 | US20150024596 Abrasive, abrasive set, and method for abrading substrate |
| 01/22/2015 | US20150024595 Compositions and Methods For CMP of Silicon Oxide, Silicon Nitride, and Polysilicon Materials |
| 01/22/2015 | US20150024594 Cooled pin lifter paddle for semiconductor substrate processing apparatus |
| 01/22/2015 | US20150024593 Semiconductor device comprising capacitive element |
| 01/22/2015 | US20150024592 Void free tungsten fill in different sized features |
| 01/22/2015 | US20150024591 On-Chip RF Shields with Backside Redistribution Lines |
| 01/22/2015 | US20150024590 Removing conductive material to form conductive features in a substrate |
| 01/22/2015 | US20150024588 Hard Mask Removal Scheme |
| 01/22/2015 | US20150024587 Method of fabricating semiconductor device |
| 01/22/2015 | US20150024586 Method for producing a monocrystalline metal/semiconductor compound |
| 01/22/2015 | US20150024585 Systems and methods for fabricating gate structures for semiconductor devices |
| 01/22/2015 | US20150024584 Methods for forming integrated circuits with reduced replacement metal gate height variability |
| 01/22/2015 | US20150024582 Method of making a gas distribution member for a plasma processing chamber |
| 01/22/2015 | US20150024581 Method for manufacturing a semiconductor device |
| 01/22/2015 | US20150024580 Method For Implant Productivity Enhancement |
| 01/22/2015 | US20150024579 Method Of Improving Ion Beam Quality In An Implant System |
| 01/22/2015 | US20150024578 Methods for etching dielectric materials in the fabrication of integrated circuits |
| 01/22/2015 | US20150024576 Dicing Sheet with Protective Film-Forming Layer, and Method for Producing Chip |
| 01/22/2015 | US20150024575 Wafer Alignment Methods in Die Sawing Process |
| 01/22/2015 | US20150024574 Temporary bonding adhesive compositions and methods of manufacturing a semiconductor device using the same |
| 01/22/2015 | US20150024573 Methods of forming replacement fins for a finfet semiconductor device by performing a replacement growth process |
| 01/22/2015 | US20150024572 Process for faciltiating fin isolation schemes |
| 01/22/2015 | US20150024570 Scaling of bipolar transistors |
| 01/22/2015 | US20150024567 Defect Reduction for Formation of Epitaxial Layer in Source and Drain Regions |
| 01/22/2015 | US20150024566 Finlike Structures and Methods of Making Same |
| 01/22/2015 | US20150024565 Method of forming semiconductor device having embedded strain-inducing pattern |
| 01/22/2015 | US20150024564 Method for manufacturing semiconductor device |
| 01/22/2015 | US20150024563 Semiconductor device, method of manufacturing the semiconductor device, and electronic device |
| 01/22/2015 | US20150024561 Method for fabricating a finfet in a large scale integrated circuit |
| 01/22/2015 | US20150024559 System and method for integrated circuits with cylindrical gate structures |
| 01/22/2015 | US20150024554 Chip To Package Interface |
| 01/22/2015 | US20150024551 Semiconductor chip bonding apparatus and method of forming semiconductor device using the same |
| 01/22/2015 | US20150024550 Methods for producing semiconductor devices |