Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2015
02/04/2015CN104332407A 用于镍硅合金化工艺的阻挡层的制备方法 Preparation for nickel alloying silicon barrier layer
02/04/2015CN104332406A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
02/04/2015CN104332405A 一种锗纳米线场效应晶体管及其制备方法 One kind of germanium nanowire field effect transistor and its preparation method
02/04/2015CN104332404A Cmos工艺制造双极型晶体管的方法及双极型晶体管 Cmos technology manufacturing method of the bipolar transistor and the bipolar transistor
02/04/2015CN104332403A 半导体功率器件及其制造方法 The semiconductor power device and manufacturing method thereof
02/04/2015CN104332402A 大面积硅旁路二极管的制备方法 Bypass diode large area silicon production method
02/04/2015CN104332401A 沟槽型双层栅mos多晶硅间热氧介质层的制造方法 Trench-type double-gate mos polysilicon manufacturing method of hot oxygen between dielectric layers
02/04/2015CN104332400A 一种金属硅化物绝缘层的形成方法 A method of forming an insulating layer of metal silicide
02/04/2015CN104332399A 半导体器件制造方法 The semiconductor device manufacturing method
02/04/2015CN104332398A 一种大面积制备伞状硅锥复合结构阵列的方法 Preparing a large-area array of umbrella-shaped composite structure of silicon cone method
02/04/2015CN104332397A 磨削装置 Grinding equipment
02/04/2015CN104332396A 一种将异型中电流离子注入机导入量产的方法 A method of current implanters shaped into mass production method
02/04/2015CN104332395A 一种保护石墨烯薄膜刻蚀和转移的装置以及方法 A protective film etch graphene and transfer apparatus and method
02/04/2015CN104332394A 一种柔性衬底基板的制作方法 A method of making a flexible substrate board
02/04/2015CN104332393A 一种制备tsv立体集成rdl电镀掩膜的厚胶工艺 A three-dimensional integrated process tsv thick rubber rdl plating mask preparation
02/04/2015CN104332392A 的方法 The method
02/04/2015CN104332391A 一种去除较高密度碳纳米管阵列中金属性碳纳米管的方法 A method of removing a high density of carbon nanotubes metallic carbon nanotube array method
02/04/2015CN104332390A 一种图案化石墨烯制作方法、阵列基板以及显示装置 A pattern graphene production methods, the array substrate and a display device
02/04/2015CN104332389A 一种高锗浓度锗硅沟道的制备方法 Preparation of a high concentration of germanium SiGe channel
02/04/2015CN104332388A 蚀刻工件的方法、蚀刻工件的装置及非瞬态计算机可读介质 The method of etching of the workpiece, the etching apparatus and a non-transitory computer-readable medium workpiece
02/04/2015CN104330955A 用于eb 或euv 平版印刷的化学放大正性抗蚀剂组合物和图案化方法 Chemical or euv for lithographic printing eb amplified positive resist compositions and patterning method
02/04/2015CN104330954A 掩膜版、掩膜版组、像素的制作方法及像素结构 Production methods mask, mask group of pixels and pixel structure
02/04/2015CN104330889A 电润湿显示面板及其制作方法、显示装置 Electrowetting display panel and method of manufacturing the display device
02/04/2015CN104328488A 一种制备高质量氮化物的方法 A method of preparing high-quality nitride
02/04/2015CN104326438A 反应性离子蚀刻 Reactive ion etching
02/04/2015CN104325509A 一种组合式切筋凸模模具 A modular punch die cut tendons
02/04/2015CN104325402A 切削装置 Cutting device
02/04/2015CN103384850B 正型光致抗蚀剂组合物、其涂膜及酚醛清漆型酚醛树脂 Positive type photoresist composition, coating film and novolak type phenolic resin
02/04/2015CN103367252B 一种双极型晶体管用双层硅外延片的制造方法 Method of manufacturing a bipolar transistor with a double silicon wafer
02/04/2015CN103137564B 一种实现BiCMOS器件中扩展基区结构的方法 A method for implementing a BiCMOS device in the extended base region structure
02/04/2015CN103137541B 具有内侧墙的浅槽填充方法 Shallow groove filling method has an inner wall
02/04/2015CN103137540B Rfldmos的厚隔离介质层结构的制造方法 Rfldmos thick isolation dielectric layer manufacturing method of the structure
02/04/2015CN103094217B 晶体管制作方法 Transistor production methods
02/04/2015CN103094152B 半导体处理装置及处理流体收集方法 Semiconductor processing apparatus and method for processing a fluid collection
02/04/2015CN103065935B 一种采用挤压方式去除igbt用硅晶圆抛光片边缘氧化膜的方法 One kind is removed by using extrusion igbt with silicon oxide film is polished edge method
02/04/2015CN103050521B 锗硅hbt器件的集电区引出结构及其制造方法 Collector region hbt SiGe device structure and manufacturing method leads
02/04/2015CN103035720B 超级结器件及其制作方法 Super-junction device and manufacturing method thereof
02/04/2015CN103022109B 局部氧化抬升外基区全自对准双极晶体管及其制备方法 Local oxidation of the whole outer base uplift self-aligned bipolar transistor and its preparation method
02/04/2015CN103021948B 深亚微米半导体器件的工艺集成方法 The method of deep submicron process integration of semiconductor devices
02/04/2015CN103000519B 去除超级结高压器件外延沉积过程中产生的硅脊的方法 Super high pressure ridge junction silicon removal devices produced during epitaxial deposition method
02/04/2015CN102956565B 制造镶嵌式自对准铁电随机存取存储器的方法 The method of producing self-aligned mosaic ferroelectric random access memory
02/04/2015CN102956491B 功率晶体管的制造方法 The method of manufacturing the power transistor
02/04/2015CN102956488B 功率晶体管的制作方法 The method of making the power transistor
02/04/2015CN102956477B 锗硅hbt发射极光刻对准精度优化的方法 SiGe hbt auroral emission optimization method engraved alignment accuracy
02/04/2015CN102956475B 锗硅双极cmos跨多晶硅层的制备方法 SiGe bipolar cmos cross polysilicon layer preparation
02/04/2015CN102954903B 锗硅薄膜监控片的制备方法及采用该片进行监控的方法 Preparation SiGe film sheet and monitoring method to monitor the use of the sheet
02/04/2015CN102938382B 阵列基板制造方法及阵列基板、显示装置 Array substrate and method of manufacturing an array substrate, a display device
02/04/2015CN102931215B 集成有低漏电肖特基二极管的igbt结构及其制备方法 Integrated low leakage Schottky diode structure and preparation method igbt
02/04/2015CN102931081B 带场阻挡层的半导体器件的制造方法 The method of manufacturing a barrier layer of a semiconductor device with a field
02/04/2015CN102881653B 薄膜晶体管的制造方法及其制造的薄膜晶体管 The method of manufacturing a thin film transistor and a thin film transistor manufactured
02/04/2015CN102879963B 阵列基板及其制备方法、液晶面板、液晶显示装置 Array substrate and its preparation method, a liquid crystal panel, liquid crystal display device
02/04/2015CN102856230B Tft基板接触孔蚀刻制程监控方法 Tft substrate contact hole etching process monitoring method
02/04/2015CN102854684B 一种金属氧化物边缘场开关型液晶显示面板及其制造方法 Panel and manufacturing method of a metal oxide fringe field switching liquid crystal display
02/04/2015CN102842519B 一种硅片薄膜的生长方法 A silicon thin film growth method
02/04/2015CN102832190B 一种倒装芯片的半导体器件及制造方法 Semiconductor device and method of manufacturing a flip chip
02/04/2015CN102810516B Rom器件及其制造方法 Rom device and manufacturing method thereof
02/04/2015CN102790047B 串联ggNMOS管及制备方法、多VDD-VSS芯片 Series ggNMOS tube and preparation methods, multi-chip VDD-VSS
02/04/2015CN102790033B 封装结构及其制作方法 Package structure and manufacturing method thereof
02/04/2015CN102789964B Ⅲ-Ⅴ族化合物半导体晶片及其清洗方法 Ⅲ-Ⅴ compound semiconductor wafer cleaning method
02/04/2015CN102781637B 使用流体射束开孔的方法 Method using fluid jet openings
02/04/2015CN102779830B 一种金属氧化物的显示装置及其制造方法 The display device and manufacturing method of a metal oxide
02/04/2015CN102779811B 一种芯片封装及封装方法 A chip packaging and packaging methods
02/04/2015CN102751318B 一种ZnO同质pn结及其制备方法 One kind of homogeneous ZnO pn junction and its preparation method
02/04/2015CN102749728B 一种压合平板校正治具 One kind of laminated flat calibration fixture
02/04/2015CN102738031B 包含可抽拉腔室的半导体处理装置 The semiconductor processing apparatus comprising a chamber may pull
02/04/2015CN102737993B 沟槽dmos器件及其制造方法 Device and method for manufacturing the trench dmos
02/04/2015CN102729137B 距离监控装置 Distance monitoring device
02/04/2015CN102723300B 太阳能电池片自动上料装置 Solar cells automatic feeding device
02/04/2015CN102723275B 基于nmos的otp器件的制造方法 Based on the manufacturing method of otp nmos device
02/04/2015CN102722058B 一种液晶阵列基板及其制造方法、修复方法 A liquid crystal array substrate and its manufacturing method, fix
02/04/2015CN102714189B 用于穿通硅通路的完整空隙填充 For through-silicon vias complete void fill
02/04/2015CN102694033B 肖特基二极管器件及其制造方法 Schottky diode device and a manufacturing method
02/04/2015CN102687075B 用于抗蚀剂的下层的组合物和使用其来生产半导体集成电路装置的方法 Composition for the lower layer resist and use it to a method for producing a semiconductor integrated circuit device
02/04/2015CN102683308B 穿硅通孔结构及其形成方法 Through silicon vias structure and method of forming
02/04/2015CN102683250B 晶体硅太阳能电池镀膜设备 Crystalline silicon solar cell coating equipment
02/04/2015CN102656669B 具有旋转式遮光器的脱气腔室的uv灯总成 Chopper having a rotary degassing chamber uv lamp assembly
02/04/2015CN102629606B 阵列基板及其制备方法和显示装置 Array substrate preparation method and display device
02/04/2015CN102610587B 缓冲元件及应用此缓冲元件的倒装芯片软膜接合方法 Flip-chip soft cushion membrane components and apply this cushion engagement element method
02/04/2015CN102610523B 在超级结mosfet中集成肖特基二极管的方法 Integrated Schottky diode junction in super mosfet methods
02/04/2015CN102596455B 金属微粒分散体、导电性基板的制造方法及导电性基板 Dispersion of metal particles, the manufacturing method of a conductive substrate and the conductive substrate
02/04/2015CN102569412B 薄膜晶体管器件及其制造方法 A thin film transistor device and manufacturing method thereof
02/04/2015CN102569386B 具有屏蔽栅的vdmos器件及其制备方法 Vdmos device and its preparation method has shielded gate
02/04/2015CN102569189B 半导体装置的制造方法 The method of manufacturing a semiconductor device
02/04/2015CN102569171B 改善冠状缺陷的线路结构及其制作方法 Improving the structure and method of making the coronal line defect
02/04/2015CN102544083B 一种mos型功率器件及其制造方法 One kind mos power devices and manufacturing method
02/04/2015CN102543775B 半导体装置的制造方法及制造装置 The method of manufacturing a semiconductor device manufacturing apparatus and
02/04/2015CN102543737B 具有自对准金属硅化物工艺的双栅vdmos的制备方法 Preparation has self-aligned silicide process of dual-gate vdmos
02/04/2015CN102543726B 高压锗硅异质结双极晶体管的制造方法 High voltage silicon-germanium heterojunction bipolar transistor fabrication method
02/04/2015CN102449770B 用于半导体器件的3d沟道结构 3d channel structure for a semiconductor device
02/04/2015CN102414807B 确定基底完整性的非破坏性信号传播系统和方法 Determine the integrity of the base signal propagation systems and non-destructive methods
02/04/2015CN102403273B 在sonos制造工艺中生长厚栅极氧化层的方法 Growth thick gate oxide layer in the manufacturing process method sonos
02/04/2015CN102383112B 热处理装置 Heat treatment device
02/04/2015CN102365707B 具有改善的晶体取向的光伏装置 With improved crystal orientation photovoltaic device
02/04/2015CN102339784B 具有阶梯型氧化埋层的soi结构的制作方法 Manufacturing method has a step-type buried oxide layer structure soi
02/04/2015CN102315120B 降低半导体芯片漏电流的方法 Reducing the leakage current of the semiconductor chip method
02/04/2015CN102222611B 闸栅极介电层的制造方法 The method of manufacturing a gate dielectric layer gate
02/04/2015CN102169896B 一种沟槽型功率mos晶体管的制造方法 A method of manufacturing a trench type power mos transistor
02/04/2015CN102163576B 分栅闪存单元及其制造方法 Sub-gate Flash memory cell and its manufacturing method
02/04/2015CN102157380B 制造半导体装置的方法 The method of manufacturing a semiconductor device
02/04/2015CN102142401B 层压电子器件 Laminated electronic devices
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