| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/28/2005 | US20050087759 System and method for surface reduction, passivation, corrosion prevention and activation of copper surface |
| 04/28/2005 | US20050087758 GaN-based III - V group compound semiconductor device and p-type electrode for the same |
| 04/28/2005 | US20050087751 Insulating nitride layer and process for its forming, and semiconductor device and process for its production |
| 04/28/2005 | US20050087750 LED array |
| 04/28/2005 | US20050087746 Group III-nitride on Si using epitaxial BP buffer layer |
| 04/28/2005 | US20050087745 Organic thin film transistor array substrate and method of producing the same |
| 04/28/2005 | US20050087744 Flat panel display with thin film transistor |
| 04/28/2005 | US20050087743 Semiconductor device, LED print head and image-forming apparatus using same, and method of manufacturing semiconductor device |
| 04/28/2005 | US20050087742 Thin film transistor substrate for display device and fabricating method thereof |
| 04/28/2005 | US20050087741 Semiconductor display device |
| 04/28/2005 | US20050087739 Semiconductor device and fabrication method for the same |
| 04/28/2005 | US20050087738 Method for making a semiconductor device including band-engineered superlattice having 3/1-5/1 germanium layer structure |
| 04/28/2005 | US20050087737 Semiconductor device comprising a superlattice channel vertically stepped above source and drain regions |
| 04/28/2005 | US20050087736 Semiconductor device including band-engineered superlattice having 3/1-5/1 germanium layer structure |
| 04/28/2005 | US20050087734 Semiconductor light emitting apparatus and method of fabricating the same |
| 04/28/2005 | US20050087701 Pattern-definition device for maskless particle-beam exposure apparatus |
| 04/28/2005 | US20050087699 Method of evaluating optical element |
| 04/28/2005 | US20050087697 Inspection by a transmission electron microscope of a sample |
| 04/28/2005 | US20050087686 Method of observing defects |
| 04/28/2005 | US20050087585 Automated filament attachment system for vacuum fluorescent display |
| 04/28/2005 | US20050087578 Method and system for correcting web deformation during a roll-to-roll process |
| 04/28/2005 | US20050087529 Selective layer millimeter-wave surface-heating system and method |
| 04/28/2005 | US20050087519 Method and apparatus for fast and local anneal of anti-ferromagnetic (AF) exchange-biased magnetic stacks |
| 04/28/2005 | US20050087517 Adhesion between carbon doped oxide and etch stop layers |
| 04/28/2005 | US20050087516 Method for using ion implantation to treat the sidewalls of a feature in a low-k dielectric film |
| 04/28/2005 | US20050087515 Endpoint detection using laser interferometry |
| 04/28/2005 | US20050087514 Method for high-resolution processing of thin layers using electron beams |
| 04/28/2005 | US20050087511 Process for making magnetic memory structures having different-sized memory cell layers |
| 04/28/2005 | US20050087510 Method for avoiding polysilicon film over etch abnormal |
| 04/28/2005 | US20050087493 Fabrication method of semiconductor integrated circuit device |
| 04/28/2005 | US20050087476 Workpiece holder for clean container |
| 04/28/2005 | US20050087470 Stackable container with removable holders |
| 04/28/2005 | US20050087447 Addition of cyanine dye allows copper plating from trenches and vias having high aspect ratio which have been formed on surfaces of substrate; electromigration |
| 04/28/2005 | US20050087441 Revolution member supporting apparatus and semiconductor substrate processing apparatus |
| 04/28/2005 | US20050087364 Multilayer wiring board |
| 04/28/2005 | US20050087356 Build-up structures with multi-angle vias for chip to chip interconnects and optical bussing |
| 04/28/2005 | US20050087305 Plasma processing apparatus and method |
| 04/28/2005 | US20050087304 Plasma processing system |
| 04/28/2005 | US20050087302 Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
| 04/28/2005 | US20050087301 Apparatus for processing substrate and method of doing the same |
| 04/28/2005 | US20050087300 Processed body carrying device, and processing system with carrying device |
| 04/28/2005 | US20050087299 Semiconductor device fabricating system and semiconductor device fabricating method |
| 04/28/2005 | US20050087298 Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor |
| 04/28/2005 | US20050087297 Plasma processing apparatus and method for stabilizing inner wall of processing chamber |
| 04/28/2005 | US20050087296 Processor |
| 04/28/2005 | US20050087289 Method for forming film, method for forming wiring pattern, method for manufacturing semiconductor device, electro-optical device, and electronic device |
| 04/28/2005 | US20050087226 Electrode arranging method |
| 04/28/2005 | US20050087217 Substrate treating method, substrate-processing apparatus, developing method, method of manufacturing a semiconductor device, and method of cleaning a developing solution nozzle |
| 04/28/2005 | US20050087212 Scrubber box and methods for using the same |
| 04/28/2005 | US20050087211 System for rinsing and drying semiconductor substrates and method therefor |
| 04/28/2005 | US20050087210 Substrate cleaning device |
| 04/28/2005 | US20050087209 Megasonic processing system with gasified fluid |
| 04/28/2005 | US20050087140 Remote plasma apparatus for processing substrate with two types of gases |
| 04/28/2005 | US20050087138 Semiconductor device manufacturing apparatus and semiconductor device manufacturing method |
| 04/28/2005 | US20050087137 Method of fabricating a thin film transistor and manufacturing equipment |
| 04/28/2005 | US20050087136 Particle sticking prevention apparatus and plasma processing apparatus |
| 04/28/2005 | US20050087135 Fluid feeding apparatus |
| 04/28/2005 | US20050087133 Substrate processing apparatus and substrate processing method |
| 04/28/2005 | US20050087130 Apparatus and methods for plasma vapor deposition processes |
| 04/28/2005 | US20050087129 Reduced-pressure drying unit and coating film forming method |
| 04/28/2005 | US20050087055 Device for processing a wire |
| 04/28/2005 | US20050086946 Specimen cooling system of focused ion beam apparatus |
| 04/28/2005 | US20050086869 Plurality of spaced apart members projecting protruding from substrate comprising abrasive and chemical additive layers |
| 04/28/2005 | US20050086825 Method of manufacturing liquid crystal panel and gap adjusting apparatus therefor |
| 04/28/2005 | DE10085499T5 Duale Epitaxialschicht für Hochspannungs-Leistungs-MOSFET-Bauteile mit vertikaler Leitung Dual epitaxial layer for high voltage power MOSFET devices with a vertical line |
| 04/28/2005 | CA2531899A1 Process and apparatus for fabricating precise microstructures and polymeric molds for making same |
| 04/27/2005 | EP1526588A1 Magnetoresistance effect element and magnetic memory unit |
| 04/27/2005 | EP1526584A2 Photosensitive semiconductor nanocrystals, photosensitive composition comprising semiconductor nanocrystals and method for forming semiconductor nanocrystal pattern using the same |
| 04/27/2005 | EP1526577A2 Method for manufacturing solid-state imaging devices |
| 04/27/2005 | EP1526576A2 Transistor structure |
| 04/27/2005 | EP1526575A2 Monolithically integrated circuit comprising a thin film resistor, and fabrication method thereof |
| 04/27/2005 | EP1526574A2 Semiconductor device, light emitting diode print head and image-forming apparatus using same, and method of manufacturing semiconductor device |
| 04/27/2005 | EP1526568A1 Sealing method for electronic devices formed on a common semiconductor substrate and corresponding circuit structure |
| 04/27/2005 | EP1526567A2 Bonded semiconductor device having alignment mark and fabrication method for the same |
| 04/27/2005 | EP1526566A2 Method of fabricating a silicon nanocrystal, silicon nanocrystal, method for fabricating a floating gate type memory capacitor structure and floating gate type memory capacitor structure |
| 04/27/2005 | EP1526565A2 Load lock chamber for large area substrate processing system |
| 04/27/2005 | EP1526550A1 Mirror for use in a lithographic apparatus, lithographic apparatus comprising such a mirror and device manufacturing method |
| 04/27/2005 | EP1526409A2 Scanning exposure apparatus and device manufacturing method |
| 04/27/2005 | EP1526407A2 An assembly, a lithographic apparatus, and a device manufacturing method |
| 04/27/2005 | EP1526406A1 Photomask |
| 04/27/2005 | EP1526405A2 Phase shift mask blank, phase shift mask, and pattern transfer method |
| 04/27/2005 | EP1526163A1 Method of second step polishing in copper CMP with a polishing fluid containing no oxidizing agent |
| 04/27/2005 | EP1526110A2 Nanopore chip with n-type semiconductor |
| 04/27/2005 | EP1525623A1 Semiconductor structure for imaging detectors |
| 04/27/2005 | EP1525621A2 Trench-gate semiconductor device, corresponding module and apparatus, and method of operating the device |
| 04/27/2005 | EP1525619A1 Surface-mounted semiconductor component and method for the production thereof |
| 04/27/2005 | EP1525614A1 Hetero integration of semiconductor materials on silicon |
| 04/27/2005 | EP1525613A1 Use of metal oxide masks for treating surfaces in the production of microchips |
| 04/27/2005 | EP1525612A1 Method of manufacturing multi-level contacts by sizing of contact sizes in integrated circuits |
| 04/27/2005 | EP1525611A1 Method for filling trench and relief geometries in semiconductor structures |
| 04/27/2005 | EP1525610A1 Method for the vertical structuring of substrates in semiconductor process technology by means of non-conforming deposition |
| 04/27/2005 | EP1525609A1 Device for etching semiconductors with a large surface area |
| 04/27/2005 | EP1525602A2 Method for adjusting voltage on a powered faraday shield |
| 04/27/2005 | EP1525601A2 Methods and apparatus for monitoring plasma parameters in plasma doping systems |
| 04/27/2005 | EP1525600A1 Adjustable implantation angle workpiece support structure for an ion beam implanter |
| 04/27/2005 | EP1525586A2 Sublithographic nanoscale memory architecture |
| 04/27/2005 | EP1525585A2 Stochastic assembly of sublithographic nanoscale interfaces |
| 04/27/2005 | EP1525584A2 Magnetoresistive random access memory with soft magnetic reference layer |
| 04/27/2005 | EP1525512A2 Method of forming and repairing a lithographic template having a gap defect |
| 04/27/2005 | EP1525488A1 Electronic circuit with asynchronously operating components |