Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2005
05/03/2005US6888178 Method and system for magnetically assisted statistical assembly of wafers
05/03/2005US6888177 Increased base-emitter capacitance
05/03/2005US6888176 Thyrister semiconductor device
05/03/2005US6888175 Compound semiconductor structure with lattice and polarity matched heteroepitaxial layers
05/03/2005US6888170 Highly doped III-nitride semiconductors
05/03/2005US6888168 Microelectronic assemblies
05/03/2005US6888167 Flip-chip bonding of light emitting devices and light emitting devices suitable for flip-chip bonding
05/03/2005US6888166 Semiconductor light emitting device and its manufacture
05/03/2005US6888164 Display pixel having a capacitive electrode with different conductivity type from the switching element
05/03/2005US6888162 Electronic apparatus having polycrystalline semiconductor thin film structure
05/03/2005US6888161 Structure of TFT planar display panel
05/03/2005US6888160 Semiconductor device and fabrication method thereof
05/03/2005US6888158 Bare chip carrier and method for manufacturing semiconductor device using the bare chip carrier
05/03/2005US6888156 Thin film device
05/03/2005US6888151 Lithographic apparatus, device manufacturing method, and device manufactured thereby
05/03/2005US6888145 Optical particle corrector
05/03/2005US6888106 Ceramic heater
05/03/2005US6888104 Thermally matched support ring for substrate processing chamber
05/03/2005US6888072 Fixture, circuit board with fixture, and electronic-component mounted body and method of manufacturing the same
05/03/2005US6888063 Device and method for providing shielding in radio frequency integrated circuits to reduce noise coupling
05/03/2005US6887910 Lower dielectric constant than corresponding non-porous matrix material, making porous matrix material particularly attractive for electronic applications including integrated circuits, multichip modules, and flat panel displays
05/03/2005US6887803 Gas-assisted rapid thermal processing
05/03/2005US6887802 Method of manufacturing semiconductor device and semiconductor device
05/03/2005US6887801 Edge bead control method and apparatus
05/03/2005US6887800 Method for making a semiconductor device with a high-k gate dielectric and metal layers that meet at a P/N junction
05/03/2005US6887799 Indium oxide conductive film
05/03/2005US6887798 STI stress modification by nitrogen plasma treatment for improving performance in small width devices
05/03/2005US6887797 Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
05/03/2005US6887796 Method of wet etching a silicon and nitrogen containing material
05/03/2005US6887795 Method of growing electrical conductors
05/03/2005US6887794 Pre-cleaning method of substrate for semiconductor device
05/03/2005US6887793 Method for plasma etching a wafer after backside grinding
05/03/2005US6887792 Embossed mask lithography
05/03/2005US6887791 Optimization methods for on-chip interconnect geometries suitable for ultra deep sub-micron processes
05/03/2005US6887790 Method of forming dummy copper plug to improve low k structure mechanical strength and plug fill uniformity
05/03/2005US6887789 Process and manufacturing tool architecture for use in the manufacture of one or more protected metallization structures on a workpiece
05/03/2005US6887788 Method of manufacturing semiconductor device
05/03/2005US6887786 Method and apparatus for forming a barrier layer on a substrate
05/03/2005US6887785 Etching openings of different depths using a single mask layer method and structure
05/03/2005US6887784 Self aligned metal interconnection and method of making the same
05/03/2005US6887783 Bilayer HDP CVD/PE CVD cap in advance BEOL interconnect structures and method thereof
05/03/2005US6887782 Diffusion barrier and method therefor
05/03/2005US6887781 Method for the formation of diffusion barrier
05/03/2005US6887780 Concentration graded carbon doped oxide
05/03/2005US6887778 Semiconductor device and manufacturing method
05/03/2005US6887777 Method for connecting an integrated circuit to a substrate and corresponding circuit arrangement
05/03/2005US6887776 Methods to form metal lines using selective electrochemical deposition
05/03/2005US6887775 Process and apparatus for epitaxially coating a semiconductor wafer and epitaxially coated semiconductor wafer
05/03/2005US6887774 Conductor layer nitridation
05/03/2005US6887773 Methods of incorporating germanium within CMOS process
05/03/2005US6887772 Structures of high voltage device and low voltage device, and method of manufacturing the same
05/03/2005US6887771 Semiconductor device and method for fabricating the same
05/03/2005US6887770 Method for fabricating semiconductor device
05/03/2005US6887769 Dielectric recess for wafer-to-wafer and die-to-die metal bonding and method of fabricating the same
05/03/2005US6887768 Method and structure for composite trench fill
05/03/2005US6887767 Method for manufacturing semiconductor device
05/03/2005US6887766 Semiconductor device and method of fabricating the same
05/03/2005US6887765 Method for manufacturing a bipolar junction transistor
05/03/2005US6887764 Method for producing a gate structure for an MOS transistor
05/03/2005US6887763 Method for using thin spacers and oxidation in gate oxides
05/03/2005US6887762 Method of fabricating a field effect transistor structure with abrupt source/drain junctions
05/03/2005US6887761 Vertical semiconductor devices
05/03/2005US6887760 Fabrication process of a trench gate power MOS transistor with scaled channel
05/03/2005US6887759 LDD-type miniaturized MOS transistors
05/03/2005US6887758 Non-volatile memory device and method for forming
05/03/2005US6887757 Method of manufacturing flash memory
05/03/2005US6887756 Method of forming flash memory with protruded floating gate
05/03/2005US6887755 Methods of forming rugged silicon-containing surfaces
05/03/2005US6887754 Semiconductor device having a reduced leakage current and a fabrication process thereof
05/03/2005US6887753 Methods of forming semiconductor circuitry, and semiconductor circuit constructions
05/03/2005US6887752 Semiconductor memory and process for fabricating the same
05/03/2005US6887751 MOSFET performance improvement using deformation in SOI structure
05/03/2005US6887750 Method for manufacturing semiconductor device including implanting a first impurity through an anti-oxidation mask
05/03/2005US6887749 Multiple oxide thicknesses for merged memory and logic applications
05/03/2005US6887748 Mixed-mode process
05/03/2005US6887747 Method of forming a MISFET having a schottky junctioned silicide
05/03/2005US6887746 Insulated gate field effect transistor and method for forming the same
05/03/2005US6887745 Polysilicon thin film transistor and method of forming the same
05/03/2005US6887744 Method of forming a thin film transistor substrate with a interconnection electrode
05/03/2005US6887743 Method of fabricating a gate dielectric layer for a thin film transistor
05/03/2005US6887742 Method for manufacturing a thin film transistor array panel for a liquid crystal display
05/03/2005US6887739 Method of manufacturing semiconductor package including forming a resin sealing member
05/03/2005US6887738 Method of making semiconductor device with flip chip mounting
05/03/2005US6887737 Epoxidized acetals and thioacetals, episulfidized acetals and thioacetals, and reworkable thermosetting resin compositions formulated therefrom
05/03/2005US6887731 Liquid crystal display and method of manufacturing the same
05/03/2005US6887730 Storage capacitor structure
05/03/2005US6887727 System and method for increasing nitrogen incorporation into a semiconductor material layer using an additional element
05/03/2005US6887726 Semiconductor layer formed by selective deposition and method for depositing semiconductor layer
05/03/2005US6887725 Micro electron gun of quantum size effect type and flat display using such electron guns as well as methods of their manufacture
05/03/2005US6887724 Test element group, method of manufacturing a test element group, method of testing a semiconductor device, and semiconductor device
05/03/2005US6887722 Method for exposing a semiconductor wafer
05/03/2005US6887721 Method of purging CVD apparatus and method for judging maintenance of times of semiconductor production apparatuses
05/03/2005US6887720 Ferroelectric memory device and method of forming the same
05/03/2005US6887719 Magnetoresistive random access memory (MRAM) cell patterning
05/03/2005US6887716 Process for producing high quality PZT films for ferroelectric memory integrated circuits
05/03/2005US6887655 Photoresist removing compositions
05/03/2005US6887650 Transfer method, method of manufacturing thin film devices, method of manufacturing integrated circuits, circuit board and manufacturing method thereof, electro-optical apparatus and manufacturing method thereof, ic card, and electronic appliance
05/03/2005US6887649 Multi-layered resist structure and manufacturing method of semiconductor device
05/03/2005US6887648 A protective coatings for photoresists, comprising an acid generator, a toluenesulfonate acid amine salt, as crosslinking agent, promoting shelf life, storage stability, consistent absorption spectra
05/03/2005US6887647 Used for super-micro lithography; capable of forming high precision patterns
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