| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/03/2005 | US6887645 Negative resist composition |
| 05/03/2005 | US6887644 Polymer compound for a chemical amplification resist and a fabrication process of a semiconductor device using such a chemical amplification resist |
| 05/03/2005 | US6887626 Stencil/membrane-type photomask for arranging batch projections so that pattern density is balanced over semiconductor substrate |
| 05/03/2005 | US6887580 Adhesive polyimide resin and adhesive laminate |
| 05/03/2005 | US6887579 Oxidative conditioning compositions for metal oxide layer and applications thereof |
| 05/03/2005 | US6887523 Method for metal oxide thin film deposition via MOCVD |
| 05/03/2005 | US6887522 Forming a first copper film on a predetermined surface of a substrate by chemical vapor deposition and forming a second copper film on the first copper film by an electrolytic copper plating using the first copper film as an electrode |
| 05/03/2005 | US6887450 Directional assembly of carbon nanotube strings |
| 05/03/2005 | US6887427 Coating a metallic or semimetallic surface, especially a hydrided surface, by covalently bonding coating molecules containing reactive groups by irradiation with light |
| 05/03/2005 | US6887395 Method of forming sub-micron-size structures over a substrate |
| 05/03/2005 | US6887358 Installation for processing wafers |
| 05/03/2005 | US6887353 Tailored barrier layer which provides improved copper interconnect electromigration resistance |
| 05/03/2005 | US6887342 Field-assisted fusion bonding |
| 05/03/2005 | US6887341 Plasma processing apparatus for spatial control of dissociation and ionization |
| 05/03/2005 | US6887340 Etch rate uniformity |
| 05/03/2005 | US6887337 Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto |
| 05/03/2005 | US6887332 Patterning solution deposited thin films with self-assembled monolayers |
| 05/03/2005 | US6887330 Machine for punching out electronic circuitry parts, method for replacing tape supply reels, and method for producing electronic circuitry parts from tape |
| 05/03/2005 | US6887317 Reduced friction lift pin |
| 05/03/2005 | US6887316 Ceramic heater |
| 05/03/2005 | US6887315 Vacuum plate having a symmetrical air-load block |
| 05/03/2005 | US6887311 Method of forming ohmic electrode |
| 05/03/2005 | US6887137 Chemical mechanical polishing slurry and chemical mechanical polishing method using the same |
| 05/03/2005 | US6887132 Slurry distributor for chemical mechanical polishing apparatus and method of using the same |
| 05/03/2005 | US6887130 Chemical mechanical polishing apparatus |
| 05/03/2005 | US6887129 Chemical mechanical polishing with friction-based control |
| 05/03/2005 | US6887126 Wafer thickness control during backside grind |
| 05/03/2005 | US6887124 Method of polishing and cleaning substrates |
| 05/03/2005 | US6887085 Terminal for spiral contactor and spiral contactor |
| 05/03/2005 | US6887026 Semiconductor product container and system for handling a semiconductor product container |
| 05/03/2005 | US6886734 Device and method for clamping and wire-bonding the leads of a lead frame one set at a time |
| 05/03/2005 | US6886733 Conductive powder applying device immersing substrate into conductive powder by rotating tank including conductive powder and substrate at opposing positions |
| 05/03/2005 | US6886696 Wafer container with removable sidewalls |
| 05/03/2005 | US6886599 Gas supply unit |
| 05/03/2005 | US6886491 Plasma chemical vapor deposition apparatus |
| 05/03/2005 | US6886442 Punching apparatus for backing-films of CMP machines and preventive maintenance method for the same |
| 05/03/2005 | US6886423 Scalable, automated metrology system and method of making the system |
| 05/03/2005 | US6886347 Workpiece chuck with temperature control assembly having spacers between layers providing clearance for thermoelectric modules |
| 05/03/2005 | US6886272 Vacuum processing apparatus and operating method therefor |
| 05/03/2005 | US6886249 Method for making finned heat sink assemblies |
| 05/03/2005 | US6886248 Conductive material and method for filling via-hole |
| 05/03/2005 | US6886247 Circuit board singulation methods |
| 05/03/2005 | US6886244 Segmented pallet for disk-shaped substrate electrical biassing and apparatus comprising same |
| 05/03/2005 | US6886238 Method for manufacturing a head for recording and reading optical data |
| 04/29/2005 | CA2491242A1 Method of manufacturing n-type semiconductor diamond, and n-type semiconductor diamond |
| 04/28/2005 | WO2005039263A1 Multi-layer ceramic substrate, method for manufacturng the same and electronic device using the same |
| 04/28/2005 | WO2005039262A1 Method of producing module with embedded component and module with embedded component |
| 04/28/2005 | WO2005039261A2 Solder structures for out of plane connections and related methods |
| 04/28/2005 | WO2005039260A1 Electronic device and method of manufacturing thereof |
| 04/28/2005 | WO2005038995A2 Memory link processing with picosecond lasers |
| 04/28/2005 | WO2005038994A2 Laser-based system for memory link processing with picosecond lasers |
| 04/28/2005 | WO2005038941A2 Oled having non-hole blocking buffer layer |
| 04/28/2005 | WO2005038938A2 Adhesive bonding with low temperature grown amorphous or polycrystalline compound semiconductors |
| 04/28/2005 | WO2005038936A1 Light-emitting device and method for manufacturing same |
| 04/28/2005 | WO2005038932A2 Fully depleted silicon-on-insulator cmos logic |
| 04/28/2005 | WO2005038931A1 Semiconductor device and method for manufacturing same |
| 04/28/2005 | WO2005038930A2 Structuring method, and field effect transistors |
| 04/28/2005 | WO2005038929A1 Method for manufacturing semiconductor device |
| 04/28/2005 | WO2005038928A1 Method for manufacturing transistor |
| 04/28/2005 | WO2005038922A2 Field effect transistor, particularly vertical field effect transistor, memory cell, and production method |
| 04/28/2005 | WO2005038921A1 Semiconductor apparatus |
| 04/28/2005 | WO2005038915A1 Method for providing double-sided cooling of leadframe-based wire-bonded electronic packages and device produced thereby |
| 04/28/2005 | WO2005038911A1 Device, system and electric element |
| 04/28/2005 | WO2005038906A1 An etch back process using nitrous oxide |
| 04/28/2005 | WO2005038905A1 Wafer etching techniques |
| 04/28/2005 | WO2005038904A1 Semiconductor device |
| 04/28/2005 | WO2005038903A1 Method for preparing and assembling substrates |
| 04/28/2005 | WO2005038902A1 Bonding wire and integrated circuit device using the same |
| 04/28/2005 | WO2005038901A1 Dynamic schottky barrier mosfet device and method of manufacture |
| 04/28/2005 | WO2005038900A1 Semiconductor device and method of manufacturing such a semiconductor device |
| 04/28/2005 | WO2005038899A1 Process for producing high resistance silicon wafer, and process for producing epitaxial wafer and soi wafer |
| 04/28/2005 | WO2005038898A1 Removal of post etch residues and copper contamination from low-k dielectrics using supercritical co2 with diketone additives |
| 04/28/2005 | WO2005038897A1 Liquid composition, process for producing the same, film of low dielectric constant, abradant and electronic component |
| 04/28/2005 | WO2005038896A1 Plasma etching method |
| 04/28/2005 | WO2005038895A1 Method of liquid feeding and apparatus therefor |
| 04/28/2005 | WO2005038894A1 Surface-protecting sheet and semiconductor wafer lapping method |
| 04/28/2005 | WO2005038893A1 Substrate washing apparatus |
| 04/28/2005 | WO2005038892A1 A nitrous oxide stripping process for organosilicate glass |
| 04/28/2005 | WO2005038891A1 Composition for forming silicon-cobalt film, silicon-cobalt film and method for forming same |
| 04/28/2005 | WO2005038890A1 Methods of selective deposition of heavily doped epitaxial sige |
| 04/28/2005 | WO2005038889A1 The method for allngan epitaxial growth on silicon substrate |
| 04/28/2005 | WO2005038887A1 Environment-controlling apparatus, device-producing apparatus, device-producing method, and exposure apparatus |
| 04/28/2005 | WO2005038886A1 Multilayer film reflection mirror, production method for multilayer film reflection mirror, and exposure system |
| 04/28/2005 | WO2005038885A1 Optical characteristics measuring device and optical characteristics measuring method, exposure system and exposure method, and device production method |
| 04/28/2005 | WO2005038883A2 Manufacturing method of a ferroelectric capacitor |
| 04/28/2005 | WO2005038882A2 Electronic device and method of manufacturing thereof |
| 04/28/2005 | WO2005038881A2 Short-channel transistors |
| 04/28/2005 | WO2005038880A2 Via density rules |
| 04/28/2005 | WO2005038879A2 Boron ion delivery system |
| 04/28/2005 | WO2005038878A2 Developer-soluble materials and methods of using the same in via-first dual damascene applications |
| 04/28/2005 | WO2005038877A2 MOLECULAR AIRBORNE CONTAMINANTS (MACs) REMOVAL AND WAFER SURFACE SUSTAINING SYSTEM AND METHOD |
| 04/28/2005 | WO2005038875A2 High performance strained cmos devices |
| 04/28/2005 | WO2005038873A2 System and method for removal of photoresist in transistor fabrication for integrated circuit manufacturing |
| 04/28/2005 | WO2005038868A2 High-pressure processing chamber for a semiconductor wafer |
| 04/28/2005 | WO2005038867A2 Semiconductor device with a toroidal-like junction |
| 04/28/2005 | WO2005038865A2 Amorphous carbon layer to improve photoresist adhesion |
| 04/28/2005 | WO2005038863A2 Method and system for treating a dielectric film |
| 04/28/2005 | WO2005038825A1 Varnish for insulating film and insulating film |
| 04/28/2005 | WO2005038814A1 Storage device for storing electric charge and method for producing the same |
| 04/28/2005 | WO2005038810A1 Memory cell array with staggered local inter-connect structure |