| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/21/2005 | US20050082563 Group iii nitride semiconductor device and its method of manufacture |
| 04/21/2005 | US20050082559 Mask and method for using the mask in lithographic processing |
| 04/21/2005 | US20050082557 Nitride-based light emitting device and method of manufacturing the same |
| 04/21/2005 | US20050082552 Large bumps for optical flip chips |
| 04/21/2005 | US20050082551 Large bumps for optical flip chips |
| 04/21/2005 | US20050082549 Light emitting and/or detecting device and method of manufacturing the same |
| 04/21/2005 | US20050082547 Light emitting device having a transparent conducting layer |
| 04/21/2005 | US20050082542 Methods of forming power semiconductor devices using boule-grown silicon carbide drift layers and power semiconductor devices formed thereby |
| 04/21/2005 | US20050082540 Electroluminescence display device |
| 04/21/2005 | US20050082539 Semiconductor device and method of manufacturing the same |
| 04/21/2005 | US20050082538 Interconnect, interconnect forming method, thin film transistor, and display device |
| 04/21/2005 | US20050082537 Semiconductor device and method for manufacturing the same |
| 04/21/2005 | US20050082536 Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same |
| 04/21/2005 | US20050082535 Thin film transistor array panel and manufacturing method thereof |
| 04/21/2005 | US20050082533 Method of manufacturing transistor, transistor, circuit board, electro-optical device and electronic apparatus |
| 04/21/2005 | US20050082532 Light emitting device and manufacturing method thereof |
| 04/21/2005 | US20050082531 Double silicon-on-insulator (SOI) metal oxide semiconductor field effect transistor (MOSFET) structures |
| 04/21/2005 | US20050082529 Active matrix electro-luminescent display with an organic leveling layer |
| 04/21/2005 | US20050082526 Techniques for layer transfer processing |
| 04/21/2005 | US20050082523 Methods for forming patterns on a filled dielectric material on substrates |
| 04/21/2005 | US20050082522 Strained channel transistor formation |
| 04/21/2005 | US20050082496 Method and apparatus for image formation |
| 04/21/2005 | US20050082476 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 04/21/2005 | US20050082385 Shower head structure and cleaning method thereof |
| 04/21/2005 | US20050082347 Self-locking wire bond structure and method of making the same |
| 04/21/2005 | US20050082281 Electric heater for a semiconductor processing apparatus |
| 04/21/2005 | US20050082278 Semiconductor processing temperature control |
| 04/21/2005 | US20050082274 Substrate heater and fabrication method for the same |
| 04/21/2005 | US20050082273 Wafer bake system and method for operating the same |
| 04/21/2005 | US20050082266 Method and apparatus for deflashing of integrated circuit packages |
| 04/21/2005 | US20050082264 Laser beam machine |
| 04/21/2005 | US20050082256 Plasma etching method |
| 04/21/2005 | US20050082255 Plasma etching method |
| 04/21/2005 | US20050082165 Electro-chemical machining apparatus |
| 04/21/2005 | US20050082089 Stacked interconnect structure between copper lines of a semiconductor circuit |
| 04/21/2005 | US20050082075 Device and method for providing shielding in radio frequency integrated circuits to reduce noise coupling |
| 04/21/2005 | US20050082007 Mask etch processing apparatus |
| 04/21/2005 | US20050082006 Plasma processing apparatus |
| 04/21/2005 | US20050082005 Plasma processing method and apparatus |
| 04/21/2005 | US20050082004 Plasma processing equipment |
| 04/21/2005 | US20050082003 Plasma treatment apparatus and plasma generation method |
| 04/21/2005 | US20050082001 Cleaning method and cleaning device |
| 04/21/2005 | US20050082000 Method for cleaning elements in vacuum chamber and apparatus for processing substrates |
| 04/21/2005 | US20050081998 Chemical-mechanical planarization slurries and powders and methods for using same |
| 04/21/2005 | US20050081996 determining/estimating in advance the relation of photoresist dissolution concentration in developing solution and resist dissolution speed, then developing; photolithography; for production of semiconductors |
| 04/21/2005 | US20050081988 Method and apparatus for cutting protective tape |
| 04/21/2005 | US20050081986 Die bonding apparatus and method for bonding semiconductor chip using the same |
| 04/21/2005 | US20050081958 Pasted soi substrate, process for producing the same and semiconductor device |
| 04/21/2005 | US20050081917 Performance polymer film insert molding for fluid control devices |
| 04/21/2005 | US20050081890 Dehydration drying method and apparatus, and substrate processing apparatus |
| 04/21/2005 | US20050081886 Wafer cleaning method and equipment |
| 04/21/2005 | US20050081885 Contacting the substrate with a process solution of surfactants; reducing the number of defects in the manufacture of semiconductor devices; reducting dynamic surface tension while minimizing foaming |
| 04/21/2005 | US20050081884 Semiconductor device cleaning employing heterogeneous nucleation for controlled cavitation |
| 04/21/2005 | US20050081883 Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device |
| 04/21/2005 | US20050081824 Prevent damage to semiconductor surfaces using laser light and lens systems |
| 04/21/2005 | US20050081791 Vacuum treatment installation for flat rectangular or square substrates |
| 04/21/2005 | US20050081789 Silicon nitride film forming method, silicon nitride film forming system and silicon nitride film forming system precleaning method |
| 04/21/2005 | US20050081787 Apparatus and method for supplying a source, and method of depositing an atomic layer using the same |
| 04/21/2005 | US20050081785 Apparatus for electroless deposition |
| 04/21/2005 | US20050081781 Fully dry, Si recess free process for removing high k dielectric layer |
| 04/21/2005 | US20050081780 Fabrication method for polycrystalline silicon thin film and apparatus using the same |
| 04/21/2005 | US20050081778 Method for vanishing defects in single crystal silicon and single crystal silicon |
| 04/21/2005 | US20050081744 Electroplating compositions and methods for electroplating |
| 04/21/2005 | US20050081631 Tuning fork gyroscope |
| 04/21/2005 | US20050081605 Vacuum leakage detecting device for use in semiconductor manufacturing system |
| 04/21/2005 | US20050081375 Printed circuit board assembly and method |
| 04/21/2005 | DE202005001255U1 Mounting structure of photoelectric semiconductor wafer for manufacture of light-emitting diode, has electrically conductive material on front of wafer for establishing connection to photoelectric semiconductor |
| 04/21/2005 | DE19857059B4 Verfahren zum Herstellen eines SOI-Bauteils A method for producing an SOI component |
| 04/21/2005 | DE19853588B4 Halteeinrichtung für ein Substrat Holding means for a substrate |
| 04/21/2005 | DE19756518B4 Herstellungsverfahren für eine Phasenverschiebungs-Photomaske Manufacturing method for a phase shift photomask |
| 04/21/2005 | DE10250872B4 Verfahren zur Herstellung einer Halbleiterstruktur mit mehreren Gate-Stapeln A process for producing a semiconductor structure having a plurality of gate stacks |
| 04/21/2005 | DE10139056B4 Verfahren zum Dünnen eines scheibenförmigen Gegenstands sowie zur Herstellung eines beidseitig strukturierten Halbleiterbauelements A method of thinning a plate-like object and for the production of a semiconductor device structured on both sides |
| 04/21/2005 | CA2540184A1 Tunable optical filter with heater on a cte-matched transparent substrate |
| 04/21/2005 | CA2539920A1 Device and method for cleaning the edges of substrates |
| 04/20/2005 | EP1524757A2 Negative charge pump |
| 04/20/2005 | EP1524703A2 Method of manufacturing a Silicon-based thin-film-photoelectric conversion device |
| 04/20/2005 | EP1524701A2 High-voltage field-effect transistor |
| 04/20/2005 | EP1524699A1 Method for forming MIS semiconductor devices having a notched gate insulator and devices thus obtained |
| 04/20/2005 | EP1524695A2 Affinity based self-assembly systems and devices for photonic and electronic applications |
| 04/20/2005 | EP1524688A1 Method for fabricating semiconductor devices having silicided electrodes |
| 04/20/2005 | EP1524687A1 Silicide formation by substantially simultaneous deposition of metal and silicon |
| 04/20/2005 | EP1524686A1 Method for reducing the contact resistance of the connection regions of a semiconductor device |
| 04/20/2005 | EP1524685A1 Method for processing a semiconductor device comprising an silicon-oxy-nitride dielectric layer |
| 04/20/2005 | EP1524684A1 Method for providing a semiconductor substrate with a layer structure of activated dopants |
| 04/20/2005 | EP1524682A1 Component for vacuum apparatus, production method thereof and apparatus using the same |
| 04/20/2005 | EP1524672A2 Magnetic memory device and method of manufacturing magnetic memory device |
| 04/20/2005 | EP1524559A2 Hydrodynamic bearing apparatus and stage apparatus using the same |
| 04/20/2005 | EP1524558A1 Lithographic apparatus and device manufacturing method |
| 04/20/2005 | EP1524557A1 Lithographic apparatus and device manufacturing method |
| 04/20/2005 | EP1524556A1 Lithographic apparatus, device manufacturing method and positioning system |
| 04/20/2005 | EP1524555A1 Lithographic apparatus and device manufacturing method |
| 04/20/2005 | EP1524530A1 Semiconductor logic circuit device having pull-up/pull-down circuit for input buffer pad and wafer-probing testing method therefore |
| 04/20/2005 | EP1524330A1 Sputter target having modified surface texture |
| 04/20/2005 | EP1524299A1 Composition for preparing organic insulator |
| 04/20/2005 | EP1524215A1 Vacuum processing chamber for planar rectangular in particular square substrate |
| 04/20/2005 | EP1524060A2 Methods of positioning components using liquid prime movers and related structures |
| 04/20/2005 | EP1523795A1 Sensor protection circuit |
| 04/20/2005 | EP1523778A2 Heteroatom-containing diamondoid transistors |
| 04/20/2005 | EP1523775A2 Soi field effect transistor element having a recombination region and method of forming same |
| 04/20/2005 | EP1523774A1 Semiconductor component with trench insulation and corresponding production method |