| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/23/2006 | US20060040513 DUV laser annealing and stabilization of SiCOH films |
| 02/23/2006 | US20060040512 Single-shot semiconductor processing system and method having various irradiation patterns |
| 02/23/2006 | US20060040511 [method of fabricating shallow trench isolation structure for reducing wafer scratch] |
| 02/23/2006 | US20060040510 Semiconductor device with silicon dioxide layers formed using atomic layer deposition |
| 02/23/2006 | US20060040509 Composition for preparing nanoporous material |
| 02/23/2006 | US20060040508 Method to protect internal components of semiconductor processing equipment using layered superlattice materials |
| 02/23/2006 | US20060040507 Method for depositing porous films |
| 02/23/2006 | US20060040506 Semiconductor fabrication methods and apparatus |
| 02/23/2006 | US20060040505 Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith |
| 02/23/2006 | US20060040504 Photoresist trimming process |
| 02/23/2006 | US20060040503 Process for fabricating a strained channel MOSFET device |
| 02/23/2006 | US20060040502 Method for manufacturing semiconductor device |
| 02/23/2006 | US20060040501 Integrated dual damascene RIE process with organic patterning layer |
| 02/23/2006 | US20060040500 Nitride semiconductor chip and method for manufacturing nitride semiconductor chip |
| 02/23/2006 | US20060040499 In situ surface contaminant removal for ion implanting |
| 02/23/2006 | US20060040498 Method for manufacturing dual damascene structure with a trench formed first |
| 02/23/2006 | US20060040497 Material for contact etch layer to enhance device performance |
| 02/23/2006 | US20060040496 Method of forming a material film |
| 02/23/2006 | US20060040495 Deposition method of TiN film having a multi-layer structure |
| 02/23/2006 | US20060040494 Through-hole conductors for semiconductor substrates and method for making same |
| 02/23/2006 | US20060040493 Iridium etching for FeRAM applications |
| 02/23/2006 | US20060040492 Formation of air gaps in an interconnect structure using a thin permeable hard mask and resulting structures |
| 02/23/2006 | US20060040491 Slot designs in wide metal lines |
| 02/23/2006 | US20060040490 Method of fabricating silicon carbide-capped copper damascene interconnect |
| 02/23/2006 | US20060040489 Multi-layered structure forming method, method of manufacturing wiring substrate, and method of manufacturing electronic apparatus |
| 02/23/2006 | US20060040488 Method of electrically connecting a microelectronic component |
| 02/23/2006 | US20060040487 Semiconductor device, method for manufacturing the same, and plating solution |
| 02/23/2006 | US20060040486 Method of depositing noble metal electrode using oxidation-reduction reaction |
| 02/23/2006 | US20060040485 Method of forming via structures and method of fabricating phase change memory devices incorporating such via structures |
| 02/23/2006 | US20060040484 Apparatus and method for staircase raised source/drain structure |
| 02/23/2006 | US20060040483 Method and system for modifying a gate dielectric stack containing a high-k layer using plasma processing |
| 02/23/2006 | US20060040482 Mos transistor and fabrication thereof |
| 02/23/2006 | US20060040481 Methods and structures for preventing gate salicidation and for forming source and drain salicidation and for forming semiconductor device |
| 02/23/2006 | US20060040480 Systems and methods for forming niobium and/or vanadium containing layers using atomic layer deposition |
| 02/23/2006 | US20060040479 Method of making semiconductor devices |
| 02/23/2006 | US20060040478 Method of producing a calibration wafer |
| 02/23/2006 | US20060040477 Method and apparatus for forming expitaxial layers |
| 02/23/2006 | US20060040476 Patterning SOI with silicon mask to create box at different depths |
| 02/23/2006 | US20060040475 Multi-chamber MOCVD growth apparatus for high performance/high throughput |
| 02/23/2006 | US20060040474 Low oxygen content photoresist stripping process for low dielectric constant materials |
| 02/23/2006 | US20060040473 Laser processing method and laser processing apparatus |
| 02/23/2006 | US20060040472 Method for separating semiconductor substrate |
| 02/23/2006 | US20060040471 Method of forming vias on a wafer stack using laser ablation |
| 02/23/2006 | US20060040470 Methods for minimizing defects when transferring a semiconductor useful layer |
| 02/23/2006 | US20060040469 Soi wafer manufacturing method |
| 02/23/2006 | US20060040468 Method for transferring a semiconductor body from a growth substrate to a support material |
| 02/23/2006 | US20060040467 Process and apparatus for thinning a semiconductor workpiece |
| 02/23/2006 | US20060040466 Methods of forming integrated circuits, and DRAM circuitry memory cells |
| 02/23/2006 | US20060040465 Methods of forming conductive lines and methods of forming conductive contacts adjacent conductive lines |
| 02/23/2006 | US20060040464 Semiconductor device and method for fabricating the same |
| 02/23/2006 | US20060040463 Manufacturing method of an electronic part built-in substrate |
| 02/23/2006 | US20060040462 Novel method to improve SRAM performance and stability |
| 02/23/2006 | US20060040461 Method of forming a capacitor |
| 02/23/2006 | US20060040460 MIS capacitor and production method of MIS capacitor |
| 02/23/2006 | US20060040459 Method to produce thin film resistor with no resistor head using dry etch |
| 02/23/2006 | US20060040458 Method to produce thin film resistor using dry etch |
| 02/23/2006 | US20060040457 Methods of forming low leakage currents metal-insulator-metal (MIM) capacitors and related MIM capacitors |
| 02/23/2006 | US20060040456 Method for the production of a bipolar semiconductor component, especially a bipolar transistor, and corresponding bipolar semiconductor component |
| 02/23/2006 | US20060040455 Methods of forming integrated circuits, and DRAM circuitry memory cells |
| 02/23/2006 | US20060040454 Semiconductor devices having DRAM cells and methods of fabricating the same |
| 02/23/2006 | US20060040453 Bipolar transistor |
| 02/23/2006 | US20060040452 Method of forming an integrated circuit incorporating higher voltage devices and low voltage devices therein |
| 02/23/2006 | US20060040451 Method of forming an integrated circuit employable with a power converter |
| 02/23/2006 | US20060040450 Source/drain structure for high performance sub 0.1 micron transistors |
| 02/23/2006 | US20060040449 Method of forming an integrated circuit incorporating higher voltage devices and low voltage devices therein |
| 02/23/2006 | US20060040448 Method for fabricating a semiconductor device having improved hot carrier immunity ability |
| 02/23/2006 | US20060040447 NAND memory arrays and methods |
| 02/23/2006 | US20060040446 Method for manufacturing interpoly dielectric |
| 02/23/2006 | US20060040445 Capacitor having a dielectric layer that reduces leakage current and a method of manufacturing the same |
| 02/23/2006 | US20060040444 Method for fabricating a three-dimensional capacitor |
| 02/23/2006 | US20060040443 Methods of forming capacitor electrodes using fluorine and oxygen |
| 02/23/2006 | US20060040442 Bump inspection apparatus and method for IC component, bump forming method for IC component, and mounting method for IC component |
| 02/23/2006 | US20060040441 Method of forming an integrated circuit employable with a power converter |
| 02/23/2006 | US20060040440 Nand flash memory cell row and manufacturing method thereof |
| 02/23/2006 | US20060040439 Temperature stable metal nitride gate electrode |
| 02/23/2006 | US20060040438 Method for improving the thermal stability of silicide |
| 02/23/2006 | US20060040437 Methods of forming field effect transistors |
| 02/23/2006 | US20060040436 Method and apparatus forming crystallized semiconductor layer, and method for manufacturing semiconductor apparatus |
| 02/23/2006 | US20060040435 Method for manufacturing semiconductor device |
| 02/23/2006 | US20060040434 Method of fabricating thin film transistor |
| 02/23/2006 | US20060040433 Graded semiconductor layer |
| 02/23/2006 | US20060040432 Thin film trnsistor, method for producing a thin film transistor and electronic device having such a transistor |
| 02/23/2006 | US20060040431 Supporting member for semiconductor elements, and method for driving supporting member for semiconductor elements |
| 02/23/2006 | US20060040430 System and method for integrating low schottky barrier metal source/drain |
| 02/23/2006 | US20060040429 Fabrication method of thin film transistor |
| 02/23/2006 | US20060040428 Conductive structures for microfeature devices and methods for fabricating microfeature devices |
| 02/23/2006 | US20060040427 Multifunction electrode and method of making same |
| 02/23/2006 | US20060040426 Circuitized substrate, method of making same and information handling system using same |
| 02/23/2006 | US20060040425 Circuit element and method of manufacturing the same |
| 02/23/2006 | US20060040424 Semiconductor device substrate, semiconductor device, and manufacturing method thereof |
| 02/23/2006 | US20060040423 Attachment of integrated circuit structures and other substrates to substrates with vias |
| 02/23/2006 | US20060040422 Microelectronic devices and methods for manufacturing and operating packaged microelectronic device |
| 02/23/2006 | US20060040421 Spacers for packaged microelectronic imagers and methods of making and using spacers for wafer-level packaging of imagers |
| 02/23/2006 | US20060040420 ISFET using PbTiO3 as sensing film |
| 02/23/2006 | US20060040419 Transflective LCD (Liquid Crystal Display) panel and method of constructing the same |
| 02/23/2006 | US20060040418 Method of correcting amplitude defect in multilayer film of EUVL mask |
| 02/23/2006 | US20060040416 Method for manufacturing a light emitting device |
| 02/23/2006 | US20060040415 Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring |
| 02/23/2006 | US20060040414 Methods of forming conductive materials |
| 02/23/2006 | US20060040413 Pt/PGO etching process for FeRAM applications |