| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 02/28/2006 | US7005241 Process for making circuit board or lead frame |
| 02/28/2006 | US7005240 Depositing a second layer on first layer; using a lithographic projection for forming elevated structure; conformally depositing a third layer on elevated first structure and on first layer; etching back third layer for forming spacer |
| 02/28/2006 | US7005239 Method of forming metal line |
| 02/28/2006 | US7005238 Exposing a chemically amplified photoresist on a substrate supported by a heating plate having a porous partition facing the surface where in the space over the partion an air stream formation mechanism discharges the acid evaporated formed |
| 02/28/2006 | US7005236 Laying down two separate photoresist layers to eliminate distortion of features in the resist image close to cavity edge; the first reduces problems, e.g., air bubbles; the second's processed normally; thickness; uniformity; integrated circuits |
| 02/28/2006 | US7005219 Defect repair method employing non-defective pattern overlay and photoexposure |
| 02/28/2006 | US7005194 Aluminum alloy member superior in corrosion resistance and plasma resistance |
| 02/28/2006 | US7005101 Virtual gate design for thin packages |
| 02/28/2006 | US7005085 Composite oxide; fine particle size; generating aerosols, heating to remove liquid, coating surfaces |
| 02/28/2006 | US7005081 Base material cutting method, base material cutting apparatus, ingot cutting method, ingot cutting apparatus and wafer producing method |
| 02/28/2006 | US7005046 Apparatus for electro chemical deposition |
| 02/28/2006 | US7005032 Wafer table for local dry etching apparatus |
| 02/28/2006 | US7005009 Film forming apparatus, film forming method and tray for substrate |
| 02/28/2006 | US7004994 Method for making a film from silver-containing particles |
| 02/28/2006 | US7004984 Resistor and, or capacitor on cermic core; firing, trimming; controlling sintering temperature |
| 02/28/2006 | US7004822 Chemical mechanical polishing and pad dressing method |
| 02/28/2006 | US7004819 CMP systems and methods utilizing amine-containing polymers |
| 02/28/2006 | US7004814 CMP process control method |
| 02/28/2006 | US7004716 Device and method for aligning disk-shaped substrates |
| 02/28/2006 | US7004715 Apparatus for transferring and loading a reticle with a robotic reticle end-effector |
| 02/28/2006 | US7004711 Transporting apparatus |
| 02/28/2006 | US7004708 Apparatus for processing wafers |
| 02/28/2006 | US7004558 Fluid ejection device including integrated circuit with shielding element |
| 02/28/2006 | US7004522 Suction unit |
| 02/28/2006 | US7004376 Solder printing mask, wiring board and production method thereof, electrooptical apparatus and production method thereof and electronic device and production method thereof |
| 02/28/2006 | US7004375 is slightly tacky at room temperature and useful for electronic component assembly; used in chip scale packages (CSP) |
| 02/28/2006 | US7004372 Method for determining optimum bond parameters when bonding with a wire bonder |
| 02/28/2006 | US7004369 Capillary with contained inner chamfer |
| 02/28/2006 | US7004358 Dispenser |
| 02/28/2006 | US7004244 Thermal interface wafer and method of making and using the same |
| 02/28/2006 | US7004234 Vaporizer for generating feed gas for an arc chamber |
| 02/28/2006 | US7004181 Apparatus for cleaning a substrate |
| 02/28/2006 | US7004180 Electrostatic chuck cleaning method |
| 02/28/2006 | US7004107 Method and apparatus for monitoring and adjusting chamber impedance |
| 02/28/2006 | US7004054 In-process tape bur monitoring |
| 02/28/2006 | US7004015 Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein |
| 02/28/2006 | US7004012 Method of estimating thickness of oxide layer |
| 02/28/2006 | US7003875 Method for manufacturing piezo-resonator |
| 02/28/2006 | US7003874 Methods of bonding solder balls to bond pads on a substrate |
| 02/23/2006 | WO2006020828A2 Top electrode for a dram capacitor |
| 02/23/2006 | WO2006020645A1 Magnetic support structure for an elevator tube of a verticle rapid thermal processing unit |
| 02/23/2006 | WO2006020565A2 Barrier layer configurations and methods for processing microelectronic topographies having barrier layers |
| 02/23/2006 | WO2006020518A1 Method of planarizing a semiconductor substrate |
| 02/23/2006 | WO2006020409A2 Apparatus and method for depositing a material on a substrate |
| 02/23/2006 | WO2006020333A1 A semiconductor substrate processing apparatus and method thereof |
| 02/23/2006 | WO2006020265A2 Atomic layer deposition of tantalum-containing materials using the tantalum precursor taimata |
| 02/23/2006 | WO2006020158A2 Planarizing a semiconductor structure to form replacement metal gates |
| 02/23/2006 | WO2006020134A2 Method and system for characterizing porous materials |
| 02/23/2006 | WO2006020064A2 Asymmetric hetero-doped high-voltage mosfet (ah2mos) |
| 02/23/2006 | WO2006019898A2 Schottky diode structure to reduce capacitance and switching losses and method of making same |
| 02/23/2006 | WO2006019890A2 Systems and methods for forming integrated circuit components having matching geometries |
| 02/23/2006 | WO2006019871A2 Method of discharging a semiconductor device |
| 02/23/2006 | WO2006019761A2 Mems device and interposer and method for integrating mems device and interposer |
| 02/23/2006 | WO2006019670A2 Vibratable die attachment tool |
| 02/23/2006 | WO2006019603A2 Thin tungsten silicide layer deposition and gate metal integration |
| 02/23/2006 | WO2006019460A2 Method of assembling a semiconductor component and apparatus therefor |
| 02/23/2006 | WO2006019449A1 Formula-based run-to-run control |
| 02/23/2006 | WO2006019402A1 Non-aqueous microelectronic cleaning compositions containing fructose |
| 02/23/2006 | WO2006019178A1 Exposure method and device |
| 02/23/2006 | WO2006019166A1 Alignment information display method, program thereof, alignment method, exposure method, device manufacturing method, display system, display device, program, and measurement/inspection device |
| 02/23/2006 | WO2006019156A1 Method for manufacturing semiconductor device having three-dimensional multilayer structure |
| 02/23/2006 | WO2006019133A1 Coating liquid for forming organic multilayer film, method for manufacturing field effect transistor, and field effect transistor |
| 02/23/2006 | WO2006019124A1 Exposure apparatus and device manufacturing method |
| 02/23/2006 | WO2006019089A1 Photosensitive transfer material and pattern forming method and pattern |
| 02/23/2006 | WO2006018985A1 Method for purifying aqueous alkaline solution |
| 02/23/2006 | WO2006018974A1 Semiconductor device and its manufacturing method |
| 02/23/2006 | WO2006018972A1 Lighting optical device, regulation method for lighting optical device, exposure system, and exposure method |
| 02/23/2006 | WO2006018960A1 Developing method |
| 02/23/2006 | WO2006018948A1 Object processing device and its method |
| 02/23/2006 | WO2006018821A1 Self-aligned epitaxially grown bipolar transistor |
| 02/23/2006 | WO2006018820A2 Semiconductor devices and the manufacture thereof |
| 02/23/2006 | WO2006018787A2 Method of detaching a thin semiconductor circuit from its base |
| 02/23/2006 | WO2006018672A1 Packing tray |
| 02/23/2006 | WO2006018387A2 Gripper unit, mounting head, and method for fitting substrates with electrical components |
| 02/23/2006 | WO2006018267A2 Power dissipation-optimized high-frequency coupling capacitor and rectifier circuit |
| 02/23/2006 | WO2006018013A1 Method for application of a zinc sulphide buffer layer to a semiconductor substrate by means of chemical bath deposition in particular on the absorber layer of a chalcopyrite thin-film solar cell |
| 02/23/2006 | WO2006005321A3 Method for producing an integrated circuit and substrate comprising a buried layer |
| 02/23/2006 | WO2005117111A3 Adhesive/spacer island structure for multiple die package |
| 02/23/2006 | WO2005104190A3 Semiconductor processing methods for forming electrical contacts, and semiconductor structures |
| 02/23/2006 | WO2005103818A3 Method for structuring at least one layer and electric component with structures from said layer |
| 02/23/2006 | WO2005098949A3 Spacer die structure and method for attaching |
| 02/23/2006 | WO2005081323A3 Trench-gate semiconductor devices and the manufacture thereof |
| 02/23/2006 | WO2005070178A3 Test result marking of electronic packages |
| 02/23/2006 | WO2005060548A3 Method of preventing damage to porous low-k materials during resist stripping |
| 02/23/2006 | WO2005059962A3 Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift |
| 02/23/2006 | WO2005055279A3 Wafer container with door actuated wafer restraint |
| 02/23/2006 | WO2005042804A3 Method and apparatus for fluid processing a workpiece |
| 02/23/2006 | WO2005038868A3 High-pressure processing chamber for a semiconductor wafer |
| 02/23/2006 | WO2005029544A3 Systems and methods for processing thin films |
| 02/23/2006 | WO2005001905A3 High-density finfet integration scheme |
| 02/23/2006 | WO2004100258A3 Ribbon bonding |
| 02/23/2006 | WO2004084267A3 System, method and apparatus for improved local dual-damascene planarization |
| 02/23/2006 | WO2003017745A3 Architecture tool and methods of use |
| 02/23/2006 | US20060041851 Renesting interaction map into design for efficient long range calculations |
| 02/23/2006 | US20060041397 Method for checking a integrated circuit for electrostatic discharge bobustness |
| 02/23/2006 | US20060041078 Polymer having a hydroxy group or a carboxy group; crosslinking agent; and an alkali-dissolution rate regulator that is a naphthoquinone compound or a compound having a t-butoxycarbonyl group, a hydroxy group, a carboxy group, or a phenyl group; for use in dual damascene processes |
| 02/23/2006 | US20060041043 Composite media for ion processing |
| 02/23/2006 | US20060040595 Method and system for chemical mechanical polishing pad cleaning |
| 02/23/2006 | US20060040586 Method and apparatus for polishing a semiconductor device |
| 02/23/2006 | US20060040514 Magnetic processing of electronic materials |