Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2006
03/14/2006US7011614 Infrared thermopile detector system for semiconductor process monitoring and control
03/14/2006US7011574 Polyelectrolyte dispensing polishing pad
03/14/2006US7011569 Method and apparatus for polishing workpiece
03/14/2006US7011565 Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
03/14/2006US7011561 Method of manufacturing an electroluminescent device
03/14/2006US7011484 End effector with tapered fingertips
03/14/2006US7011483 Load port, semiconductor manufacturing apparatus, semiconductor manufacturing method, and method of detecting wafer adapter
03/14/2006US7011039 Multi-purpose processing chamber with removable chamber liner
03/14/2006US7010976 Acceleration sensor and manufacturing method thereof
03/14/2006US7010958 High-resolution gas gauge proximity sensor
03/14/2006US7010852 Apparatus and method for carrying substrate
03/14/2006US7010826 Substrate cleaning tool and substrate cleaning apparatus
03/14/2006CA2336933C Silicon carbide horizontal channel buffered gate semiconductor devices
03/14/2006CA2273890C Thermally conductive pressure-sensitive adhesive, adhesive sheet containing the same, and method for fixing electronic part to heat-radiating member with the same
03/14/2006CA2239786C Preparation of cuxinygazsen (x=0-2, y=0-2, z=0-2, n=0-3) precursor films by electrodeposition for fabricating high efficiency solar cells
03/14/2006CA2158182C Field effect transistor using diamond
03/09/2006WO2006026765A2 Plasma ashing process for increasing photoresist removal rate and plasma apparatus wuth cooling means
03/09/2006WO2006026716A1 Atomic layer deposited titanium aluminum oxide films
03/09/2006WO2006026701A2 Tripled-gate transistor segment with engineered corners
03/09/2006WO2006026610A2 LOW TEMPERATURE GROWN LAYERS WITH MIGRATION ENHANCED EPITAXY ADJACENT TO AN InGaAsN(Sb) BASED ACTIVE REGION
03/09/2006WO2006026454A1 Underfill injection mold
03/09/2006WO2006026422A2 Method and apparatus for etching material layers with high uniformity of a lateral etch rate across a substrate
03/09/2006WO2006026370A2 Method to reduce plasma damage during cleaning of semiconductor wafer processing chamber
03/09/2006WO2006026339A2 Process for fabricating a self-aligned deposited source/drain insulated gate field-effect transistor
03/09/2006WO2006026180A2 Reduction of source and drain parasitic capacitance in cmos devices
03/09/2006WO2006026110A2 Yttria insulator ring for use inside a plasma chamber
03/09/2006WO2006026091A1 Deposition of hard-mask with minimized hillocks and bubbles
03/09/2006WO2006026055A2 Mos varactor using isolation well
03/09/2006WO2006026010A2 Forming abrupt source drain metal gate transistors
03/09/2006WO2006026007A1 Forming integrated circuits with replacement metal gate electrodes
03/09/2006WO2006025997A2 Programming, erasing, and reading structure for an nvm cell
03/09/2006WO2006025933A1 Siloxane resins and porous materials produced therefrom
03/09/2006WO2006025821A1 System for and method of manufacturing a large-area backplane by use of a small-area shadow mask
03/09/2006WO2006025698A1 Method of making camera module in wafer level
03/09/2006WO2006025639A1 Apparatus for cleaning a substrate and method thereof
03/09/2006WO2006025594A1 Health data collecting system and semiconductor device
03/09/2006WO2006025593A2 Growth of nitride semiconductor crystals
03/09/2006WO2006025529A1 Turning device for heavy object
03/09/2006WO2006025515A1 RAW MATERIAL LIQUID FOR METAL ORGANIC CHEMICAL VAPOR DEPOSITION AND METHOD FOR PRODUCING Hf-Si CONTAINING COMPLEX OXIDE FILM USING SUCH RAW MATERIAL LIQUID
03/09/2006WO2006025501A1 Method for manufacturing semiconductor device and semiconductor device manufactured by such method
03/09/2006WO2006025500A1 Method for manufacturing semiconductor device and semiconductor device manufactured by such method
03/09/2006WO2006025409A1 Silicon epitaxial wafer and method for manufacturing the same
03/09/2006WO2006025408A1 Exposure apparatus and device manufacturing method
03/09/2006WO2006025405A1 Method for dicing and packing sheet-shaped wafer, wafer packed article and peeling jig
03/09/2006WO2006025387A1 Bump forming method and solder bump
03/09/2006WO2006025386A1 Aligning method, processing system, substrate loading repeatability measuring method, position measuring method, exposure method, substrate processing apparatus, measuring method and measuring apparatus
03/09/2006WO2006025373A1 Surfactant
03/09/2006WO2006025363A1 Silicon oxide film forming method, semiconductor device manufacturing method and computer storage medium
03/09/2006WO2006025353A1 Field effect transistor, method for manufacturing the same and electronic device using the field effect transistor
03/09/2006WO2006025350A1 Semiconductor device and method for manufacturing the same
03/09/2006WO2006025347A1 Copper alloy and liquid-crystal display
03/09/2006WO2006025341A1 Substrate holder, stage apparatus, and exposure apparatus
03/09/2006WO2006025302A1 Exposure device, operation decision method, substrate treatment system and maintenance management method, and device manufacturing method
03/09/2006WO2006025292A1 Developing solution composition for lithography and method for resist pattern formation
03/09/2006WO2006025285A1 Variable delay circuit, macro cell data, logic verifying method, testing method, and electronic device
03/09/2006WO2006025279A1 Wafer inspection-use anisotropic conductive connector and production method and applications therefor
03/09/2006WO2006025210A1 Micromachine device
03/09/2006WO2006025183A1 Wafer temperature adjusting apparatus and wafer temperature adjusting method
03/09/2006WO2006025164A1 Method for manufacturing semiconductor device
03/09/2006WO2006025140A1 Semiconductor integrated circuit device and method for inspecting the same, semiconductor wafer and burn-in inspection apparatus
03/09/2006WO2006025037A1 Contacting and filling deep-trench-isolation with tungsten
03/09/2006WO2006025035A2 Vertical semiconductor devices and methods of manufacturing such devices
03/09/2006WO2006024978A1 Method of manufacturing a semiconductor device and such a semiconductor device
03/09/2006WO2006024857A1 Semiconductor device and method of forming a semiconductor device
03/09/2006WO2006024693A1 Novel polyorganosiloxane dielectric materials
03/09/2006WO2006014783A9 Method for manufacturing a semiconductor device having silicided regions
03/09/2006WO2006009278A3 Silicon wafer substrate locking stage and silicon wafer substrate temperature measuring method
03/09/2006WO2006006850A9 Laser cutting method and arrangement for performing said method
03/09/2006WO2005112583A3 Integrated ball and via package and formation process
03/09/2006WO2005112576A3 Method of bumping die pads for wafer testing
03/09/2006WO2005112535A8 Plate storing body for supplying component and component supplying apparatus
03/09/2006WO2005112128A3 Trench mosfet including buried source electrode and method of fabricating the same
03/09/2006WO2005088725A3 Trench-gate transistors and their manufacture
03/09/2006WO2005081299A3 Device manufacturing method and substrate comprising radiation sensitive material
03/09/2006WO2005076376A3 Adhesive sheet for light-emitting diode device and light-emitting diode device
03/09/2006WO2005069378A3 Power semiconductor device and method therefor
03/09/2006WO2005064400A3 Chuck system, lithographic apparatus using the same and device manufacturing method
03/09/2006US20060053405 Integrated circuit design method
03/09/2006US20060053402 Pattern data correcting method, photo mask manufacturing method, semiconductor device manufacturing method, program and semiconductor device
03/09/2006US20060052947 Biofabrication of transistors including field effect transistors
03/09/2006US20060052569 Silyl alkyl esters of anthracene-and phenanthrene carboxylic acids
03/09/2006US20060052498 Applicability improver for photosensitive resin composition and photosensitive resin composition containing the same
03/09/2006US20060052077 Tunable compensation device and method for received signals
03/09/2006US20060052040 Method for manufacturing microporous CMP materials having controlled pore size
03/09/2006US20060052037 Vacuum suction holding apparatus and holding method, polishing apparatus using this holding apparatus, and device manufacturing method using this polishing apparatus
03/09/2006US20060051979 Apparatus and method of exposing a semiconductor device having a curved surface to light
03/09/2006US20060051978 High dielectric constant transition metal oxide materials
03/09/2006US20060051977 Non-volatile semiconductor memory and method of making same, and semiconductor device and method of making device
03/09/2006US20060051976 Nanoporous membrane reactor for miniaturized reactions and enhanced reaction kinetics
03/09/2006US20060051975 Novel deposition of SiON dielectric films
03/09/2006US20060051974 Mask and manufacturing method using mask
03/09/2006US20060051973 Method for forming IMD films
03/09/2006US20060051972 Hybrid dielectric film
03/09/2006US20060051971 Composite dielectric forming methods and composite dielectrics
03/09/2006US20060051970 Method for forming porous film and porous film formed by the method
03/09/2006US20060051969 Semiconductor device fabrication method
03/09/2006US20060051968 Self-aligned contact etch with high sensitivity to nitride shoulder
03/09/2006US20060051967 Ferromagnetic; resitivities similar to semiconducting and insulating materials, and Curie temperatures greater than room temperature
03/09/2006US20060051966 In-situ chamber clean process to remove by-product deposits from chemical vapor etch chamber
03/09/2006US20060051965 Methods of etching photoresist on substrates