| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/14/2006 | US7012301 Trench lateral power MOSFET and a method of manufacturing the same |
| 03/14/2006 | US7012299 Storage layer optimization of a nonvolatile memory device |
| 03/14/2006 | US7012298 Non-volatile memory device |
| 03/14/2006 | US7012297 Scalable flash/NV structures and devices with extended endurance |
| 03/14/2006 | US7012295 Semiconductor memory with peripheral transistors having gate insulator thickness being thinner than thickness of memory and select transistors |
| 03/14/2006 | US7012294 Semiconductor constructions |
| 03/14/2006 | US7012293 Fabricating an SRAM cell |
| 03/14/2006 | US7012292 Oxidative top electrode deposition process, and microelectronic device structure |
| 03/14/2006 | US7012291 Monolithic three-dimensional structures |
| 03/14/2006 | US7012289 Memory cell having a thin insulation collar and memory module |
| 03/14/2006 | US7012287 HEMT device with a mesa isolating multilayer film |
| 03/14/2006 | US7012286 Heterojunction field effect transistor |
| 03/14/2006 | US7012281 Light emitting diode device and manufacturing method |
| 03/14/2006 | US7012278 Light-emitting apparatus driven with thin-film transistor and method of manufacturing light-emitting apparatus |
| 03/14/2006 | US7012276 Organic thin film Zener diodes |
| 03/14/2006 | US7012274 Modulation doped thyristor and complementary transistors combination for a monolithic optoelectronic integrated circuit |
| 03/14/2006 | US7012265 Lithographic apparatus, integrated circuit device manufacturing method, and integrated circuit device manufactured thereby |
| 03/14/2006 | US7012264 Lithographic apparatus and device manufacturing method |
| 03/14/2006 | US7012263 Ion source apparatus and electronic energy optimized method therefor |
| 03/14/2006 | US7012262 Corrector for correcting first-order chromatic aberrations of the first degree |
| 03/14/2006 | US7012252 Method and an apparatus of an inspection system using an electron beam |
| 03/14/2006 | US7012240 Image sensor with guard rings and method for forming the same |
| 03/14/2006 | US7012125 Spin-on-glass anti-reflective coatings for photolithography |
| 03/14/2006 | US7012051 Using mixture containing hydroxylamine compound |
| 03/14/2006 | US7012031 Photoresist pattern, method of fabricating the same, and method of assuring the quality thereof |
| 03/14/2006 | US7012030 Very low dielectric constant plasma-enhanced CVD films |
| 03/14/2006 | US7012029 Method of forming a lamination film pattern and improved lamination film pattern |
| 03/14/2006 | US7012028 Transistor fabrication methods using reduced width sidewall spacers |
| 03/14/2006 | US7012027 Zirconium oxide and hafnium oxide etching using halogen containing chemicals |
| 03/14/2006 | US7012026 Method for producing defined polycrystalline silicon areas in an amorphous silicon layer |
| 03/14/2006 | US7012025 Tantalum removal during chemical mechanical polishing |
| 03/14/2006 | US7012024 Methods of forming a transistor with an integrated metal silicide gate electrode |
| 03/14/2006 | US7012023 Semiconductor device and method of manufacturing the same |
| 03/14/2006 | US7012022 Self-patterning of photo-active dielectric materials for interconnect isolation |
| 03/14/2006 | US7012021 Method for end point detection polysilicon chemical mechanical polishing in an anti-fuse memory device |
| 03/14/2006 | US7012020 Multi-layered metal routing technique |
| 03/14/2006 | US7012019 Circuit barrier structure of semiconductor packaging substrate and method for fabricating the same |
| 03/14/2006 | US7012018 Metallic strain-absorbing layer for improved fatigue resistance of solder-attached devices |
| 03/14/2006 | US7012017 Partially etched dielectric film with conductive features |
| 03/14/2006 | US7012016 Method for growing group-III nitride semiconductor heterostructure on silicon substrate |
| 03/14/2006 | US7012015 Wafer-level thick film standing-wave clocking |
| 03/14/2006 | US7012014 Recessed gate structure with reduced current leakage and overlap capacitance |
| 03/14/2006 | US7012013 Dielectric pattern formation for organic electronic devices |
| 03/14/2006 | US7012012 Method of etching substrates |
| 03/14/2006 | US7012011 Wafer-level diamond spreader |
| 03/14/2006 | US7012010 Methods of forming trench isolation regions |
| 03/14/2006 | US7012009 Method for improving the electrical continuity for a silicon-germanium film across a silicon/oxide/polysilicon surface using a novel two-temperature process |
| 03/14/2006 | US7012008 Dual spacer process for non-volatile memory devices |
| 03/14/2006 | US7012007 Strained silicon MOSFET having improved thermal conductivity and method for its fabrication |
| 03/14/2006 | US7012006 Embedded ROM device using substrate leakage |
| 03/14/2006 | US7012005 Self-aligned differential oxidation in trenches by ion implantation |
| 03/14/2006 | US7012004 Method of manufacturing a nonvolatile memory cell with triple spacers and the structure thereof |
| 03/14/2006 | US7012003 Memory for producing a memory component |
| 03/14/2006 | US7012002 Semiconductor memory device and method for fabricating the same |
| 03/14/2006 | US7012001 Method for manufacturing a semiconductor device for use in a memory cell that includes forming a composite layer of tantalum oxide and titanium oxide over a bottom capacitor electrode |
| 03/14/2006 | US7011999 Method of manufacturing an integrated circuit device including forming an oxidation resistant film over an isolation region and subsequently forming a gate insulating film of a misfet |
| 03/14/2006 | US7011998 High voltage transistor scaling tilt ion implant method |
| 03/14/2006 | US7011997 Method of fabricating a HEMT device |
| 03/14/2006 | US7011996 Method of manufacturing thin film transistor |
| 03/14/2006 | US7011995 Electro-optical device and semiconductor circuit |
| 03/14/2006 | US7011994 Method of forming wiring and method of manufacturing image display system by using the same |
| 03/14/2006 | US7011993 Transistor and method for manufacturing the same |
| 03/14/2006 | US7011992 Method of fabricating a thin film transistor using dual or multiple gates |
| 03/14/2006 | US7011990 Alloying method using laser irradiation for a light emitting device |
| 03/14/2006 | US7011989 Method for producing encapsulated chips |
| 03/14/2006 | US7011988 Build-up structures with multi-angle vias for Chip to Chip interconnects and optical bussing |
| 03/14/2006 | US7011987 Method of fabricating organic electroluminescence panel package |
| 03/14/2006 | US7011986 Method for manufacturing a housing for a chip with a micromechanical structure |
| 03/14/2006 | US7011985 Method for producing miniature amplifier and signal processing unit |
| 03/14/2006 | US7011984 Methods of forming switchable circuit devices |
| 03/14/2006 | US7011983 Large organic devices and methods of fabricating large organic devices |
| 03/14/2006 | US7011982 Nitride semiconductor laser device and method for manufacturing the same |
| 03/14/2006 | US7011981 Method for forming thin film and method for fabricating liquid crystal display using the same |
| 03/14/2006 | US7011980 Method and structures for measuring gate tunneling leakage parameters of field effect transistors |
| 03/14/2006 | US7011979 Detecting pinholes in vertical cavity surface-emitting laser passivation |
| 03/14/2006 | US7011978 Methods of forming capacitor constructions comprising perovskite-type dielectric materials with different amount of crystallinity regions |
| 03/14/2006 | US7011935 Method for the removal of an imaging layer from a semiconductor substrate stack |
| 03/14/2006 | US7011934 Forming a first molecular layer of trimethylsilyl groups on underlying film by reaction with hexamethyldisilazane while annealing; allowing the film to stand outside the firstchamber; forming a trimethylsilyl layer on the first |
| 03/14/2006 | US7011929 Forming barrier sidewall spacers; overcoating substrate with dielectric; anisotropic etching |
| 03/14/2006 | US7011915 Exposure parameter obtaining method, exposure parameter evaluating method, semiconductor device manufacturing method, charged beam exposure apparatus, and method of the same |
| 03/14/2006 | US7011912 Rapid, error free semiconductor batch production |
| 03/14/2006 | US7011911 Mask for polycrystallization and method of manufacturing thin film transistor using polycrystallization mask |
| 03/14/2006 | US7011890 Modulated/composited CVD low-k films with improved mechanical and electrical properties for nanoelectronic devices |
| 03/14/2006 | US7011889 Organosiloxanes |
| 03/14/2006 | US7011874 Ceramic substrate for semiconductor production and inspection devices |
| 03/14/2006 | US7011868 Low dielectrics; elastic modulus; integrated circuits |
| 03/14/2006 | US7011866 contacting hydrogen carrier gases and silane gases with heated catalysts and electric fields not higher than glow discharge voltage, to provide kinetic energy and carry vapor growth film on substrates; chemical vapor deposition; quality thin films |
| 03/14/2006 | US7011864 First coating apparatus coating a foaming insulation film material on the wafer, a second coating apparatus coating a non-porous insulation film material on the wafer |
| 03/14/2006 | US7011863 Substrate processing apparatus and substrate processing method |
| 03/14/2006 | US7011862 Method for producing wiring substrate |
| 03/14/2006 | US7011762 Metal bridging monitor for etch and CMP endpoint detection |
| 03/14/2006 | US7011734 Method of manufacturing semiconductor device having silicide layer |
| 03/14/2006 | US7011717 Method for heat treatment of silicon wafers and silicon wafer |
| 03/14/2006 | US7011716 Water-reactive agent is used for removing water, the reaction product is more soluble in the supercritical fluid than water; 1,1,1,5,5,5-hexafluoro-2,4-pentanedione; acetic anhydride; without damage to image |
| 03/14/2006 | US7011715 Rotational thermophoretic drying |
| 03/14/2006 | US7011712 Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof |
| 03/14/2006 | US7011710 Concentration profile on demand gas delivery system (individual divert delivery system) |
| 03/14/2006 | US7011709 Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, thin film transistor, and display |
| 03/14/2006 | US7011707 Production method for semiconductor substrate and semiconductor element |
| 03/14/2006 | US7011706 Device substrate and method for producing device substrate |