| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/18/2006 | DE10202701B4 Vorrichtung zum Polieren eines Wafers An apparatus for polishing a wafer |
| 05/18/2006 | DE102005048860A1 Schutzfilmmittel zum Laservereinzeln und Waferverarbeitungsverfahren unter Verwendung des Schutzfilmmittels Means for Laservereinzeln protective film and wafer processing method using the protective film by means of |
| 05/18/2006 | DE102005048380A1 Vorrichtung zum Belichten eines Substrats, Photomaske und modifiziertes Beleuchtungssystem der Vorrichtung und Verfahren zum Bilden eines Musters an einem Substrat unter Verwendung der Vorrichtung An apparatus for exposing a substrate, photomask and modified illumination system of the apparatus and method for forming a pattern on a substrate using the apparatus |
| 05/18/2006 | DE102005030338A1 Thin film etching for liquid crystal display device comprises forming layer on substrate, aligning mask having pattern above layer, and removing portion of layer by irradiating substrate with femtosecond laser through mask |
| 05/18/2006 | DE102005001163B3 Semiconductor wafers` testing method, involves testing wafer by probes, and reducing heating energy with constant cooling efficiency, under consideration of detected increase of temperature of fluids flowing via tempered chuck device |
| 05/18/2006 | DE102004058305B3 Semiconductor component with polymer cover layer over electrical linkages leaving contacts exposed |
| 05/18/2006 | DE102004055061A1 Verfahren zur Anordnung eines Flip-Chips auf einem Substrat A process for the assembly of a flip chip on a substrate |
| 05/18/2006 | DE102004054658B3 Static megasound cleaning system for cleaning substrates, has outer basin with four side walls with acoustic irradiation surfaces, where each surface is responsible for treatment of only small partial area of entire substrate surface |
| 05/18/2006 | DE102004053761A1 Halbleitereinrichtung und Verfahren für deren Herstellung Semiconductor device and methods for their preparation |
| 05/18/2006 | DE102004049667B3 Herstellungsverfahren für einen Grabenkondensator mit einem Isolationskragen, der über einen vergrabenen Kontakt einseitig mit einem Substrat elektrisch verbunden ist, insbesondere für eine Halbleiterspeicherzelle und entsprechender Grabenkondensator Manufacturing method for a grave capacitor with an insulation collar, which is electrically connected through a buried contact on one side with a substrate, in particular for a semiconductor memory cell and corresponding capacitor grave |
| 05/18/2006 | DE102004015994B4 Vorrichtung zur Vereinzelung und Positionierung von Modulbrücken Apparatus for separating and positioning module bridges |
| 05/18/2006 | DE10149199B4 Speicherzellenfeld und Verfahren zu seiner Herstellung Memory cell array and process for its preparation |
| 05/18/2006 | DE10134461B4 Prozess zur Abscheidung von WSix-Schichten auf hoher Topografie mit definierter Stöchiometrie und dadurch hergestelltes Bauelement Process for the deposition of WSi x films on high topography with a defined stoichiometry and thus component produced |
| 05/18/2006 | DE10131710B4 Verfahren zur gezielten Einstellung der Stufenhöhe bei der STI-Technik zur Herstellung von integrierten Schaltungen Process for the controlled adjustment of the step height in the STI technique for the production of integrated circuits |
| 05/18/2006 | DE10131668B4 Verfahren zur abrasiven Bearbeitung von Oberflächen, auf Halbleiter-Wafern A method for the abrasive machining of surfaces on semiconductor wafers |
| 05/18/2006 | DE10066082B4 Gezielte lokale Erzeugung von Öffnungen in einer Schicht Targeted local generation of holes in a layer |
| 05/18/2006 | DE10065380B4 Verfahren zur Charakterisierung und Simulation eines chemisch-mechanischen Polier-Prozesses A method for characterizing and simulation of a chemical mechanical polishing process |
| 05/18/2006 | DE10050049B4 Verfahren zur Vorbereitung eines Kondensators mit tiefem Graben zur Strukturanalyse und zugehöriges Strukturanalyseverfahren A process for the preparation of a capacitor with a deep trench for the structural analysis and related structure analysis method |
| 05/18/2006 | DE10042429B4 Oberflächenstabilisierung bei siliciumreichem Silicaglas unter Verwednung von verlängerter Post-Ablagerungsverzögerungszeit Surface stabilization in silicon-rich silica glass under Verwednung of prolonged post-deposition delay time |
| 05/18/2006 | CA2708337A1 Amorphous oxide and field effect transistor |
| 05/18/2006 | CA2708335A1 Amorphous oxide and field effect transistor |
| 05/18/2006 | CA2587539A1 Compositions exhibiting inhibition of cyclooxygenase-2 |
| 05/18/2006 | CA2586864A1 New hexafluoroalcohol-based monomers and processes of preparation thereof |
| 05/18/2006 | CA2585190A1 Amorphous oxide and field effect transistor |
| 05/18/2006 | CA2585071A1 Field effect transistor employing an amorphous oxide |
| 05/17/2006 | EP1657755A1 Electric power transforming apparatus |
| 05/17/2006 | EP1657754A2 Compound semiconductor device and method of fabricating the same |
| 05/17/2006 | EP1657752A1 Integrated circuit and method of manufacturing an integrated circuit on a semiconducting substrate |
| 05/17/2006 | EP1657746A1 Semiconductor device and method for making the same |
| 05/17/2006 | EP1657745A1 Integrated circuit and method of manufacturing an integrated circuit on a semiconductive substrate |
| 05/17/2006 | EP1657744A2 Wafer guide, MOCVD equipment, and nitride semiconductor growth method |
| 05/17/2006 | EP1657743A1 Transportation apparatus and drive mechanism |
| 05/17/2006 | EP1657742A1 Flip chip system with organic/inorganic hybrid underfill composition |
| 05/17/2006 | EP1657741A1 Thermal processing unit and thermal processing method |
| 05/17/2006 | EP1657740A1 Silicon carbide epitaxial wafer, method for producing such wafer, and semiconductor device formed on such wafer |
| 05/17/2006 | EP1657739A2 Semiconductor composite apparatus, method for manufacturing it, LED employing it and display employing the LED. |
| 05/17/2006 | EP1657738A2 Capacitor and method for manufacturing the same |
| 05/17/2006 | EP1657553A2 Method of manufacturing an external force detection sensor |
| 05/17/2006 | EP1657264A1 Fluorocopolymer, process for producing the same, and resist composition containing the same |
| 05/17/2006 | EP1657074A1 Method for making a thermal transfer donor element |
| 05/17/2006 | EP1657043A1 Equipment and method for controlling encapsulating semiconductors with plastics |
| 05/17/2006 | EP1657002A2 Method of cleaning fluorine-containing rubber molded article for semiconductor production apparatuses and cleaned molded article |
| 05/17/2006 | EP1656716A1 Electrical connector |
| 05/17/2006 | EP1656702A1 Vertical nanotransistor, method for producing the same and memory assembly |
| 05/17/2006 | EP1656698A2 Semiconductor device having electrical contact from opposite sides and method therefor |
| 05/17/2006 | EP1656697A1 Mems based multi-polar electrostatic chuck |
| 05/17/2006 | EP1656696A2 Methods of forming a transistor with an integrated metal silicide gate electrode |
| 05/17/2006 | EP1656695A1 Method for sealing thin film transistors |
| 05/17/2006 | EP1656694A1 High aspect ratio etch using modulation of rf powers of various frequencies |
| 05/17/2006 | EP1656693A1 Masking methods |
| 05/17/2006 | EP1656671A1 Spin coating apparatus and coated substrate manufactured using the same |
| 05/17/2006 | EP1656473A2 Metal nano-objects, formed on semiconductor surfaces, and methods for making said nano-objects |
| 05/17/2006 | EP1656467A2 Copper-containing pvd targets and methods for their manufacture |
| 05/17/2006 | EP1656323A1 Boron nitride agglomerated powder |
| 05/17/2006 | EP1597328B1 Modular barrier removal polishing slurry |
| 05/17/2006 | EP1595266B1 Quantum point made of electrically conducting carbon, production method, and application |
| 05/17/2006 | EP1576072A4 Aqueous phosphoric acid compositions for cleaning semiconductor devices |
| 05/17/2006 | EP1565268B1 Nozzle arrangement |
| 05/17/2006 | EP1470528B1 Method for manufacturing rfid labels |
| 05/17/2006 | EP1468335A4 A cleaning agent composition for a positive or a negative photoresist |
| 05/17/2006 | EP1432955A4 A thermoplastic heat exchanger and method of making the same |
| 05/17/2006 | EP1423855B1 Mram with midpoint generator reference |
| 05/17/2006 | EP1412131A4 Method for fabricating polishing pad using laser beam and mask |
| 05/17/2006 | EP1360719A4 Molds for wafer scale molding of protective caps |
| 05/17/2006 | EP1356515A4 Molding assembly for wafer scale molding of protective caps |
| 05/17/2006 | EP1356514A4 Use of infrared radiation in molding of protective caps |
| 05/17/2006 | EP1356513A4 Molding of protective caps |
| 05/17/2006 | EP1251920A4 Method and apparatus for metal removal by ion exchange |
| 05/17/2006 | EP1193751B1 Electrode and method of manufacturing an electrode |
| 05/17/2006 | EP0985007B1 Oxygen-containing phosphor powders, methods for making phosphor powders and devices incorporating same |
| 05/17/2006 | CN2781609Y Strip fitting device for cavity surface of seminconductor laser |
| 05/17/2006 | CN2781573Y Integrated circuit component |
| 05/17/2006 | CN2781572Y Integrated circuit assembly and three-dimentional integrated circuit assembly |
| 05/17/2006 | CN2781565Y Structure of wafer probe card |
| 05/17/2006 | CN2781392Y Avalanche photodiode temp bias voltage tester |
| 05/17/2006 | CN2780733Y Induction heating sealing linkage device |
| 05/17/2006 | CN2780407Y Fixed ring on carrier head in polishing device used for chemical machinery |
| 05/17/2006 | CN1774842A Advanced microelectronic connector assembly and method of manufacturing |
| 05/17/2006 | CN1774838A Anisotropic conductive connector and circuit-device electrical-inspection device |
| 05/17/2006 | CN1774817A Adhesive of a silicon and silica composite particularly useful for joining silicon parts |
| 05/17/2006 | CN1774816A Magnetoresistive random acess memory device structures and methods for fabricating the same |
| 05/17/2006 | CN1774815A Field effect transistor |
| 05/17/2006 | CN1774808A Memory cell, memory cell arrangement and method for the production of a memory cell |
| 05/17/2006 | CN1774807A Cubic memory array |
| 05/17/2006 | CN1774802A Circuit device with at least partial packaging and method for forming |
| 05/17/2006 | CN1774799A Shallow trench isolation process |
| 05/17/2006 | CN1774798A Formation of a relaxed useful layer from a wafer with no buffer layer |
| 05/17/2006 | CN1774797A Semiconductor device and process for producing the same |
| 05/17/2006 | CN1774796A A method and apparatus for process control in time division multiplexed TDM etch processes |
| 05/17/2006 | CN1774795A Manufacturing method of semiconductor device |
| 05/17/2006 | CN1774794A Susceptor and vapor growth device |
| 05/17/2006 | CN1774793A Resist stripping method and device |
| 05/17/2006 | CN1774792A Device and method for thermal treatment |
| 05/17/2006 | CN1774791A Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions |
| 05/17/2006 | CN1774790A Integrated system for processing semiconductor wafers |
| 05/17/2006 | CN1774673A Porous underlayer film and underlayer film forming composition used for forming the same |
| 05/17/2006 | CN1774671A Photosensitive resin composition |
| 05/17/2006 | CN1774666A Bonding structure of thin film circuit |
| 05/17/2006 | CN1774639A System and method for in-situ monitor and control of film thickness and trench depth |
| 05/17/2006 | CN1774607A Vertical-type heat treating apparatus and workpiece transfer method |