| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/30/2006 | US7052960 Method for manufacturing a flash memory device |
| 05/30/2006 | US7052959 Method of forming an EPROM cell and structure therefor |
| 05/30/2006 | US7052958 FinFET CMOS with NVRAM capability |
| 05/30/2006 | US7052957 Methods of fabricating double-sided hemispherical silicon grain electrodes and capacitor modules |
| 05/30/2006 | US7052956 Method for forming capacitor of semiconductor device |
| 05/30/2006 | US7052955 Semiconductor memory device and manufacturing method thereof |
| 05/30/2006 | US7052954 Method of fabricating a MOS structure with two conductive layers on the gate electrode |
| 05/30/2006 | US7052953 Dielectric material forming methods and enhanced dielectric materials |
| 05/30/2006 | US7052952 Method for forming wire line by damascene process using hard mask formed from contacts |
| 05/30/2006 | US7052951 Ferroelectric memory devices with enhanced ferroelectric properties and methods for fabricating such memory devices |
| 05/30/2006 | US7052949 Method for forming bit line |
| 05/30/2006 | US7052948 Film or layer made of semi-conductive material and method for producing said film or layer |
| 05/30/2006 | US7052947 Fabrication of gate dielectric in nonvolatile memories in which a memory cell has multiple floating gates |
| 05/30/2006 | US7052946 Method for selectively stressing MOSFETs to improve charge carrier mobility |
| 05/30/2006 | US7052945 Short-channel Schottky-barrier MOSFET device and manufacturing method |
| 05/30/2006 | US7052944 Thin-film transistor and method of manufacture thereof |
| 05/30/2006 | US7052943 Method of manufacturing a semiconductor device |
| 05/30/2006 | US7052942 Surface passivation of GaN devices in epitaxial growth chamber |
| 05/30/2006 | US7052941 Method for making a three-dimensional integrated circuit structure |
| 05/30/2006 | US7052940 Method of fabricating top gate type thin film transistor having low temperature polysilicon |
| 05/30/2006 | US7052939 Structure to reduce signal cross-talk through semiconductor substrate for system on chip applications |
| 05/30/2006 | US7052938 Flip clip attach and copper clip attach on MOSFET device |
| 05/30/2006 | US7052937 Method and structure for providing improved thermal conduction for silicon semiconductor devices |
| 05/30/2006 | US7052936 Use of polybenzoxazoles (PBOS) for adhesion |
| 05/30/2006 | US7052935 Flip-chip package and fabricating process thereof |
| 05/30/2006 | US7052934 Fabrication method of semiconductor device |
| 05/30/2006 | US7052933 Method of manufacturing an electronic device, and electronic device |
| 05/30/2006 | US7052932 Oxygen doped SiC for Cu barrier and etch stop layer in dual damascene fabrication |
| 05/30/2006 | US7052931 Flat panel display device with first electrode having concentration gradient and fabrication method thereof |
| 05/30/2006 | US7052930 Active matrix organic electroluminescent display device and fabricating method thereof |
| 05/30/2006 | US7052929 Solid state image pickup device capable of suppressing smear |
| 05/30/2006 | US7052928 Solid state imaging device, method for producing the same, and portable electronic device |
| 05/30/2006 | US7052927 Pin detector apparatus and method of fabrication |
| 05/30/2006 | US7052926 Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology method |
| 05/30/2006 | US7052925 Method for manufacturing self-compensating resistors within an integrated circuit |
| 05/30/2006 | US7052924 Light active sheet and methods for making the same |
| 05/30/2006 | US7052923 Field emission display with smooth aluminum film |
| 05/30/2006 | US7052922 Stable electroless fine pitch interconnect plating |
| 05/30/2006 | US7052921 System and method using in situ scatterometry to detect photoresist pattern integrity during the photolithography process |
| 05/30/2006 | US7052920 Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same |
| 05/30/2006 | US7052919 Recipe cascading in a wafer processing system |
| 05/30/2006 | US7052918 Multi-layer film for thin film structure, capacitor using the same and fabrication method thereof |
| 05/30/2006 | US7052826 diluting waste photoresist with solvent, measuring the solids content and thicknessses of the photoresists; monitoring and comparing them to target values to determine recyclabilty |
| 05/30/2006 | US7052821 Sacrificial compositions, methods of use thereof, and methods of decomposition thereof |
| 05/30/2006 | US7052810 exposing and developing a testing photoresist layer using a test photo mask to form hole patterns corresponding to first hole patterns; measuring photoresist critical dimensions (pCDs) of the second hole patterns on the test photoresist layer; determining correction of mask critical dimention (mCDs) |
| 05/30/2006 | US7052807 Uniformity |
| 05/30/2006 | US7052627 Mixture of fluoride, or hydrogen fluoride salt, acid and solvent |
| 05/30/2006 | US7052625 Chemical mechanical polishing; microelectronics; semiconductors; eliminating short circuiting |
| 05/30/2006 | US7052624 Manufacturing method for an electronic device, and the electronic device |
| 05/30/2006 | US7052623 Method for processing silicon using etching processes |
| 05/30/2006 | US7052621 Bilayered metal hardmasks for use in Dual Damascene etch schemes |
| 05/30/2006 | US7052620 Polishing slurry for aluminum-based metal, and method of manufacturing semiconductor device |
| 05/30/2006 | US7052617 Simplified etching technique for producing multiple undercut profiles |
| 05/30/2006 | US7052599 Method and apparatus for reuse of abrasive fluid used in the manufacture of semiconductors |
| 05/30/2006 | US7052584 Method of forming a capacitor |
| 05/30/2006 | US7052583 Magnetron cathode and magnetron sputtering apparatus comprising the same |
| 05/30/2006 | US7052577 Annular receptacle for a rotating carrier |
| 05/30/2006 | US7052576 Pressure control apparatus and method of establishing a desired level of pressure within at least one processing chamber |
| 05/30/2006 | US7052552 Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD |
| 05/30/2006 | US7052546 High-purity crystal growth |
| 05/30/2006 | US7052522 Polishing composition and polishing method using the same |
| 05/30/2006 | US7052464 Alignment method for fabrication of integrated ultrasonic transducer array |
| 05/30/2006 | US7052377 Apparatus and method for feeding slurry |
| 05/30/2006 | US7052371 Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk |
| 05/30/2006 | US7052368 Polishing pad for chemical mechanical polishing apparatus |
| 05/30/2006 | US7052367 Polishing apparatus |
| 05/30/2006 | US7052366 Endpoint detection system for wafer polishing |
| 05/30/2006 | US7052229 Alignment of semiconductor wafers and other articles |
| 05/30/2006 | US7052114 Fabrication of a printhead chip incorporating a plurality of nozzle arrangements |
| 05/30/2006 | US7051934 Methods of forming metal layers in integrated circuit devices using selective deposition on edges of recesses |
| 05/30/2006 | US7051915 Capillary for wire bonding and method of wire bonding using it |
| 05/30/2006 | US7051887 Supporting column and cassette using the same |
| 05/30/2006 | US7051863 Transferring apparatus, carrying apparatus, and transferring method |
| 05/30/2006 | US7051800 Hot plate cooling system |
| 05/30/2006 | US7051759 Processing apparatus having integrated pumping system |
| 05/30/2006 | US7051742 Removing photoresists and etching residues; using solvents; water and chelate compound; heating; controlling temperature |
| 05/30/2006 | US7051741 Reduction/oxidation material removal method |
| 05/30/2006 | US7051671 Vacuum processing apparatus in which high frequency powers having mutually different frequencies are used to generate plasma for processing an article |
| 05/30/2006 | US7051454 Method for etching a metal layer in a semiconductor device |
| 05/30/2006 | US7051428 In line system used in a semiconductor package assembling |
| 05/30/2006 | US7051427 Integrated circuit trimming device broken die sensor |
| 05/30/2006 | CA2311778C Field effect transistor |
| 05/30/2006 | CA2227612C Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom |
| 05/26/2006 | WO2006055943A2 Electrode array device having an adsorbed porous reaction layer having a linker moiety |
| 05/26/2006 | WO2006055937A2 Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical systems |
| 05/26/2006 | WO2006055929A2 Minimizing resist poisoning in the manufacture of semiconductor devices |
| 05/26/2006 | WO2006055828A2 Silicided source/drain electrode with polysilicon grains |
| 05/26/2006 | WO2006055822A2 Method and system for topography-aware reticle enhancement |
| 05/26/2006 | WO2006055639A2 Systems and methods for voltage distribution via multiple epitaxial layers |
| 05/26/2006 | WO2006055601A2 Method for fabricating and separating semiconductor devices |
| 05/26/2006 | WO2006055476A2 Method of integrating optical devices and electronic devices on an integrated circuit |
| 05/26/2006 | WO2006055363A2 Modular tool unit for processing microelectronic workpieces |
| 05/26/2006 | WO2006055357A2 Trench capacitor with hybrid surface orientation substrate |
| 05/26/2006 | WO2006055345A1 Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices |
| 05/26/2006 | WO2006055236A2 Wafer processing system and method of manufacturing wafers |
| 05/26/2006 | WO2006055200A2 Field effect transistor having a carrier exclusion layer |
| 05/26/2006 | WO2006055133A1 Autofocus for high power laser diode based annealing system |
| 05/26/2006 | WO2006055123A1 Single axis light pipe for homogenizing one axis of illumination systems based on laser diodes |
| 05/26/2006 | WO2006055003A1 Systems and methods for creating crystallographic-orientation controlled poly-silicon films |
| 05/26/2006 | WO2006054953A1 Doped metal oxide films and systems for fabricating the same |