| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/11/2006 | WO2006049199A1 Insulating film forming method and substrate processing method |
| 05/11/2006 | WO2006049198A1 Carburetor and film-forming device |
| 05/11/2006 | WO2006049197A1 METHOD FOR PRODUCING CeO2 FINE PARTICLES AND POLISHING SLURRY CONTAINING SUCH FINE PARTICLES |
| 05/11/2006 | WO2006049189A1 Method for organic monomolecular layer formation and process for producing functional element |
| 05/11/2006 | WO2006049172A1 Semiconductor chip |
| 05/11/2006 | WO2006049143A1 Nonvolatile semiconductor storage device and method for writing therein |
| 05/11/2006 | WO2006049134A1 Exposure apparatus and device producing method |
| 05/11/2006 | WO2006049133A1 Probe |
| 05/11/2006 | WO2006049130A1 Method for manufacturing semiconductor device |
| 05/11/2006 | WO2006049125A1 Film forming equipment and film forming method |
| 05/11/2006 | WO2006049097A1 Semiconductor integrated circuit |
| 05/11/2006 | WO2006049085A1 Electrostatic chuck apparatus |
| 05/11/2006 | WO2006049076A1 Plasma processing method and plasma processing apparatus |
| 05/11/2006 | WO2006049059A1 Metal compound, thin film-forming material, and method for producing thin film |
| 05/11/2006 | WO2006049055A1 Substrate processing equipment and semiconductor device manufacturing method |
| 05/11/2006 | WO2006049046A1 Lower layer film-forming composition for lithography containing cyclodextrin compound |
| 05/11/2006 | WO2006049045A1 Sulfonic-ester-containing composition for formation of antireflection film for lithography |
| 05/11/2006 | WO2006049037A1 Exposure condition correcting method, substrate processing equipment and computer program |
| 05/11/2006 | WO2006049022A1 Ion beam sputtering equipment and method for forming multilayer film for reflective mask blank for euv lithography |
| 05/11/2006 | WO2006048847A1 Nanotube-based directionally-conductive adhesive |
| 05/11/2006 | WO2006048846A2 Semiconductor chip connection based on carbon nanotubes |
| 05/11/2006 | WO2006048845A2 Carbon nanotube-based conductive connections for integrated circuit devices |
| 05/11/2006 | WO2006048844A1 Carbon nanotube-based filler for integrated circuits |
| 05/11/2006 | WO2006048823A1 Planarising damascene structures |
| 05/11/2006 | WO2006048800A1 Method of growing a strained layer |
| 05/11/2006 | WO2006048387A1 Semiconductor device and method for producing the same |
| 05/11/2006 | WO2006048354A1 Semiconductor device and methods for the production thereof |
| 05/11/2006 | WO2006048287A1 Rotatable device for holding a substrate |
| 05/11/2006 | WO2006048241A1 Using polydentate ligands for sealing pores in low-k dielectrics |
| 05/11/2006 | WO2006048230A1 Increasing die strength by etching during or after dicing |
| 05/11/2006 | WO2006048185A1 Method and device for treating substrates and corresponding nozzle unit |
| 05/11/2006 | WO2006039641A3 Improving short channel effect of mos devices by retrograde well engineering using tilted dopant implantation into recessed source/drain regions |
| 05/11/2006 | WO2006039293A3 Localized control of thermal properties on microdevices and applications thereof |
| 05/11/2006 | WO2006013230A3 Manufacture of a layer including a component |
| 05/11/2006 | WO2005119741A3 Dram structures with source/drain pedestals and manufacturing method thereof |
| 05/11/2006 | WO2005117070A3 Surface-emitting semiconductor laser component featuring emission in a vertical direction |
| 05/11/2006 | WO2005098917A3 Methods of processing a substrate with minimal scalloping |
| 05/11/2006 | WO2005090648A3 Electrolytic processing apparatus and electrolytic processing method |
| 05/11/2006 | WO2005065207A3 Microelectronic packages and methods therefor |
| 05/11/2006 | WO2005060676A3 A method for manufacturing a superjunction device with wide mesas |
| 05/11/2006 | WO2005004198A3 Complex oxides for use in semiconductor devices and related methods |
| 05/11/2006 | WO2004108353A3 Integrated tool with interchangeable wet processing components and automated calibration systems |
| 05/11/2006 | US20060100804 Method for inspecting defect and system therefor |
| 05/11/2006 | US20060100740 Automatic reference position teaching method, automatic positioning method, and automatic carrying method for disk-like object, automatic reference position teaching device, automatic positioning device, and automatic carring device for disk-like object using these methods, and automatic semiconductor manufacturing equipment |
| 05/11/2006 | US20060100735 Process for determining the temperature of a semiconductor wafer in a rapid heating unit |
| 05/11/2006 | US20060100314 Circuit connecting material, film-like circuit connecting material using the same, circuit member connecting structure, and method of producing the same |
| 05/11/2006 | US20060099832 System and method for determining line widths of free-standing structures resulting from a semiconductor manufacturing process |
| 05/11/2006 | US20060099831 Silicon source reagent compositions, and method of making and using same for microelectronic device structure |
| 05/11/2006 | US20060099830 Plasma implantation using halogenated dopant species to limit deposition of surface layers |
| 05/11/2006 | US20060099829 Photoresist application over hydrophobic surfaces |
| 05/11/2006 | US20060099828 Semiconductor process and photoresist coating process |
| 05/11/2006 | US20060099827 Photo-enhanced UV treatment of dielectric films |
| 05/11/2006 | US20060099826 Method of forming an insulation film and semiconductor device having the insulation film |
| 05/11/2006 | US20060099825 Quantum device, manufacturing method of the same and controlling method of the same |
| 05/11/2006 | US20060099824 High density plasma chemical vapor deposition process |
| 05/11/2006 | US20060099823 Active area bonding compatible high current structures |
| 05/11/2006 | US20060099822 Method of making a memory cell |
| 05/11/2006 | US20060099821 Apparatus for detecting an amount of strain and method for manufacturing same |
| 05/11/2006 | US20060099820 Deposition method and apparatus |
| 05/11/2006 | US20060099819 Low dielectric constant compositions and methods of use thereof |
| 05/11/2006 | US20060099818 Dual-tank etch method for oxide thickness control |
| 05/11/2006 | US20060099817 Novel slurry for chemical mechanical polishing of metals |
| 05/11/2006 | US20060099816 System and method for plasma induced modification and improvement of critical dimension uniformity |
| 05/11/2006 | US20060099815 Cooling system for a semiconductor device and method of fabricating same |
| 05/11/2006 | US20060099814 Chemical-mechanical polishing mixture of a cationic abrasive, a cationic acrylamide-diallyldimethylammonium chloride copolymer and water; pH of 6 or less |
| 05/11/2006 | US20060099813 Chemical mechanical polish of PCMO thin films for RRAM applications |
| 05/11/2006 | US20060099812 Semiconductor device and method of fabricating a semiconductor device |
| 05/11/2006 | US20060099811 Method for structuring of silicon substrates for microsystem technological device elements and associated silicon substrate |
| 05/11/2006 | US20060099810 Laser micromachining method |
| 05/11/2006 | US20060099809 Method of flip-chip mounting a semiconductor chip and mounting apparatus using the same |
| 05/11/2006 | US20060099808 Electric viscous fluid device and electronic equipment |
| 05/11/2006 | US20060099807 Methods for fabricating one or more metal damascene structures in a semiconductor wafer |
| 05/11/2006 | US20060099806 Method of forming electrode for compound semiconductor device |
| 05/11/2006 | US20060099805 Heat treating system and heat treating method |
| 05/11/2006 | US20060099804 Post-polish treatment for inhibiting copper corrosion |
| 05/11/2006 | US20060099803 Thin film capacitor |
| 05/11/2006 | US20060099802 Diffusion barrier for damascene structures |
| 05/11/2006 | US20060099801 Method and structure to wire electronic devices |
| 05/11/2006 | US20060099800 Method for fabricating low leakage interconnect layers in integrated circuits |
| 05/11/2006 | US20060099799 Plasma processing method and film forming method |
| 05/11/2006 | US20060099798 Semiconductor device and manufacturing method of the same |
| 05/11/2006 | US20060099797 Integrated circuits with contemporaneously formed array electrodes and logic interconnects |
| 05/11/2006 | US20060099796 Method of forming a multi-layer semiconductor structure having a seam-less bonding interface |
| 05/11/2006 | US20060099795 I-shaped and L-shaped contact structures and their fabrication methods |
| 05/11/2006 | US20060099794 Interconnect structure to reduce stress induced voiding effect |
| 05/11/2006 | US20060099793 Contact for dual liner product |
| 05/11/2006 | US20060099792 Tolerance bondwire inductors for analog circuitry |
| 05/11/2006 | US20060099791 Bonded wafer and method of producing bonded wafer |
| 05/11/2006 | US20060099790 Method of implanting at least one solder bump on a printed circuit board |
| 05/11/2006 | US20060099789 Micro lead frame packages and methods of manufacturing the same |
| 05/11/2006 | US20060099788 Injection molded metal bonding tray for integrated circuit device fabrication |
| 05/11/2006 | US20060099787 Method for damascene formation using plug materials having varied etching rates |
| 05/11/2006 | US20060099786 Copper interconnect structure with modulated topography and method for forming the same |
| 05/11/2006 | US20060099785 De-fluorination after via etch to preserve passivation |
| 05/11/2006 | US20060099784 Semiconductor device manufacturing method |
| 05/11/2006 | US20060099783 SELF-ALIGNED LOW-k GATE CAP |
| 05/11/2006 | US20060099782 Method for forming an interface between germanium and other materials |
| 05/11/2006 | US20060099781 Method for producing by vapour-phase epitaxy a gallium nitride film with low defect density |
| 05/11/2006 | US20060099780 Method for fabricating a semiconductor device |
| 05/11/2006 | US20060099779 Method for transferring a thin layer including a controlled disturbance of a crystalline structure |