Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2006
05/16/2006US7045403 Method for producing insulated gate thin film semiconductor device
05/16/2006US7045401 Strained silicon finFET device
05/16/2006US7045400 Solid-state imaging device and method for manufacturing same
05/16/2006US7045399 Electronic circuit
05/16/2006US7045398 Manufacturing method for electro-optical device, electro-optical device, manufacturing method for semiconductor device, semiconductor device, projection-type display apparatus, and electronic apparatus
05/16/2006US7045397 JFET and MESFET structures for low voltage high current and high frequency applications
05/16/2006US7045396 Stackable semiconductor package and method for manufacturing same
05/16/2006US7045395 Method of fabricating a thin and fine ball-grid array package with embedded heat spreader
05/16/2006US7045394 Method of manufacturing semiconductor device and system of manufacturing semiconductor device
05/16/2006US7045393 Method for manufacturing circuit devices
05/16/2006US7045392 Semiconductor device and method of fabrication thereof, semiconductor module, circuit board, and electronic equipment
05/16/2006US7045391 Multi-chips bumpless assembly package and manufacturing method thereof
05/16/2006US7045390 Stacked die package
05/16/2006US7045389 Method for fabricating a semiconductor devices provided with low melting point metal bumps
05/16/2006US7045388 Semiconductor device provided with low melting point metal bumps
05/16/2006US7045387 Method of performing back-end manufacturing of an integrated circuit device
05/16/2006US7045386 Semiconductor device and semiconductor chip for use therein
05/16/2006US7045385 Method for fabricating surface acoustic wave filter packages and package sheet used therein
05/16/2006US7045384 Method for determining metal work function by formation of Schottky diodes with shadow mask
05/16/2006US7045383 Method for making tapered opening for programmable resistance memory element
05/16/2006US7045382 Method for producing micromechanic sensors and sensors produced by said method
05/16/2006US7045381 Conductive etch stop for etching a sacrificial layer
05/16/2006US7045380 CMOS image sensor and method of fabricating the same
05/16/2006US7045379 Method of manufacturing surface shape recognition sensor
05/16/2006US7045378 Forming a photodiode to include a superlattice exclusion layer
05/16/2006US7045377 Method for making a semiconductor device including a superlattice and adjacent semiconductor layer with doped regions defining a semiconductor junction
05/16/2006US7045376 Method of passivating semiconductor device
05/16/2006US7045375 White light emitting device and method of making same
05/16/2006US7045374 Method for manufacturing semiconductor optical amplifier having planar buried heterostructure
05/16/2006US7045373 Manufacturing method for in-plane switching mode LCD unit with fewer masking process
05/16/2006US7045372 Apparatus and method for forming a battery in an integrated circuit
05/16/2006US7045371 Foreign material removing method for capacitance type dynamic quantity sensor
05/16/2006US7045370 Dicing and testing optical devices, including thin film filters
05/16/2006US7045369 Method of fabricating and/or repairing a light emitting device
05/16/2006US7045368 MRAM cell structure and method of fabrication
05/16/2006US7045277 Semiconductor processing methods of transferring patterns from patterned photoresists to materials, and structures comprising silicon nitride
05/16/2006US7045268 blends of polymer compositions having high UV transparency which are useful as base resins in resists and potentially in many other applications such as photoimaging
05/16/2006US7045267 Resist composition comprising photosensitive polymer having lactone in its backbone
05/16/2006US7045260 Post exposure modification of critical dimensions in mask fabrication
05/16/2006US7045259 Post exposure modification of critical dimensions in mask fabrication
05/16/2006US7045073 Pre-etch implantation damage for the removal of thin film layers
05/16/2006US7045071 Method for fabricating ferroelectric random access memory device
05/16/2006US7045070 Method of producing an electrode configuration and method of electrically contacting the electrode configuration
05/16/2006US7045069 Microfabrication method based on metal matrix composite technology
05/16/2006US7045045 Workpiece holder for processing apparatus, and processing apparatus using the same
05/16/2006US7045035 positioning printed circuits on surfaces of flexible platforms comprising movably supports, then adhering to the surface using tapes, moving the flexible platform through thin gaps formed between trays for collection and releasing the tapes by peeling; accuracy; cutting
05/16/2006US7045018 Substrate brush scrubbing and proximity cleaning-drying sequence using compatible chemistries, and method, apparatus, and system for implementing the same
05/16/2006US7045017 Method for post chemical-mechanical planarization cleaning of semiconductor wafers
05/16/2006US7045014 Substrate support assembly
05/16/2006US7045012 Jetting method of liquid, jetting apparatus of liquid, production method of substrate for electro-optical apparatus and production method of electro-optical apparatus
05/16/2006US7044836 Coated metal oxide particles for CMP
05/16/2006US7044833 Apparatus for transporting and polishing wafers
05/16/2006US7044732 Rolling process cover
05/16/2006US7044731 Heat treatment apparatus
05/16/2006US7044703 Automatic guided vehicle, automatic guided vehicle system and wafer carrying method
05/16/2006US7044658 High speed serial I/O technology using an optical link
05/16/2006US7044633 Method to calibrate a chip with multiple temperature sensitive ring oscillators by calibrating only TSRO
05/16/2006US7044521 Chuck and suction board for plates
05/16/2006US7044476 Compact pinlifter assembly integrated in wafer chuck
05/16/2006US7044399 Heating systems
05/16/2006US7044357 Bump formation method and wire bonding method
05/16/2006US7044356 Roller wire brake for wire bonding machine
05/16/2006US7044355 Bonding apparatus and bonding external appearance inspection device
05/16/2006US7044182 Bonding apparatus with position deviation correction
05/16/2006US7043991 Damper for a gauge sensor in a dry etch chamber
05/16/2006US7043985 High-resolution in-plane tuning fork gyroscope and methods of fabrication
05/16/2006US7043832 Manufacturing method for fixing tin balls in connectors or IC devices
05/16/2006US7043830 Method of forming conductive bumps
05/16/2006CA2465341C Folded memory layers
05/16/2006CA2172812C Method for combining a plurality of independently operating circuits within a single package
05/11/2006WO2006050517A1 A method for making a semiconductor device with a high-k gate dielectric layer and a silicide gate electrode
05/11/2006WO2006050482A2 High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric cvd films
05/11/2006WO2006050469A1 Control of photoelectrochemical (pec) etching by modification of the local electrochemical potential of the semiconductor structure relative to the electrolyte
05/11/2006WO2006050439A2 Multichip semiconductor package
05/11/2006WO2006050403A2 Gallium nitride/silicon based monolithic microwave integrated circuit
05/11/2006WO2006050385A2 Cardiac motion characterization by strain measurement
05/11/2006WO2006050323A1 Compositions and processes for photoresist stripping and residue removal in wafer level packaging
05/11/2006WO2006050051A2 Transistor structure with dual trench for optimized stress effect and method thereof
05/11/2006WO2006049976A2 Patterned silicon surfaces
05/11/2006WO2006049954A2 Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
05/11/2006WO2006049892A2 Metal ion-containing cmp composition and method for using the same
05/11/2006WO2006049886A2 Euv collector debris management
05/11/2006WO2006049834A1 A semiconductor device including semiconductor regions having differently strained channel regions and a method of manufacturing the same
05/11/2006WO2006049833A1 Silicon-on-insulator semiconductor device with silicon layer having defferent crystal orientations and method of forming the silicon-on-insulator semiconductor device
05/11/2006WO2006049791A1 Method of forming a thin film component
05/11/2006WO2006049780A2 Magnetoresistive random access memory device structures and methods for fabricating the same
05/11/2006WO2006049763A2 Thin film semiconductor devices and methods of making
05/11/2006WO2006049751A1 Packaging and manufacturing of an integrated circuit
05/11/2006WO2006049736A1 Etching method including photoresist plasma conditioning step with hydrogen flow rate ramping
05/11/2006WO2006049731A1 Method of singulating electronic devices
05/11/2006WO2006049707A1 Lithography-independent fabrication of small openings
05/11/2006WO2006049330A1 Exposure equipment
05/11/2006WO2006049302A1 Liquid treatment apparatus and method for operating same
05/11/2006WO2006049288A1 Organic transistor and manufacturing method thereof
05/11/2006WO2006049274A1 Exposure equipment and exposure method
05/11/2006WO2006049269A1 Polishing apparatus
05/11/2006WO2006049246A1 Method for producing resist composition and resist composition
05/11/2006WO2006049243A1 Pattern testing apparatus, pattern testing method, and pattern testing program
05/11/2006WO2006049240A1 Mask blank manufacturing method
05/11/2006WO2006049225A1 Semiconductor device manufacturing method and substrate treating apparatus