| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/06/2006 | US7056391 use of a high vapor pressure liquid prior to or simultaneous with cryogenic cleaning to remove contaminants from the surface of substrates requiring precision cleaning such as semiconductors, metal films, or dielectric films |
| 06/06/2006 | US7056389 Method and device for thermal treatment of substrates |
| 06/06/2006 | US7056388 Reaction chamber with at least one HF feedthrough |
| 06/06/2006 | US7056382 Excimer laser crystallization of amorphous silicon film |
| 06/06/2006 | US7056196 Wafer polisher |
| 06/06/2006 | US7056194 Semiconductor processing methods of removing conductive material |
| 06/06/2006 | US7056129 Anisotropically electroconductive adhesive film, method for the production thereof, and semiconductor devices |
| 06/06/2006 | US7056080 Two-arm transfer robot |
| 06/06/2006 | US7055875 Ultra low contact area end effector |
| 06/06/2006 | US7055825 Shaft sealing apparatus |
| 06/06/2006 | US7055809 Vaporizing reactant liquids for chemical vapor deposition film processing |
| 06/06/2006 | US7055808 Vaporizing reactant liquids for chemical vapor deposition film processing |
| 06/06/2006 | US7055745 Laser scanning method and system employing visible scanning-zone indicators identifying a three-dimensional omni-directional laser scanning volume for package transport |
| 06/06/2006 | US7055732 Semiconductor processing apparatus including plasma-resistant, welded aluminum structures |
| 06/06/2006 | US7055702 Slip resistant horizontal semiconductor wafer boat |
| 06/06/2006 | US7055535 Holding unit, processing apparatus and holding method of substrates |
| 06/06/2006 | US7055532 Method to remove fluorine residue from bond pads |
| 06/06/2006 | US7055376 Method and a pump apparatus for the generation of an adjustable, substantially constant volume flow of a fluid and a use of this method |
| 06/06/2006 | US7055263 Method for cleaning deposition chambers for high dielectric constant materials |
| 06/06/2006 | US7055229 Support system for semiconductor wafers and methods thereof |
| 06/06/2006 | US7055212 Clean gas injector system for reactor chamber |
| 06/06/2006 | CA2173389C Ccd register read amplifier |
| 06/01/2006 | WO2006058332A2 Reduced channel pitch in semiconductor device |
| 06/01/2006 | WO2006058262A2 Semiconductor integrated injection logic device and method |
| 06/01/2006 | WO2006058240A1 Gas distribution system for improved transient vapor phase deposition |
| 06/01/2006 | WO2006058081A2 Multiple shadow mask structure for deposition shadow mask protection and method of making and using same |
| 06/01/2006 | WO2006058034A2 Molecular self-assembly in substrate processing |
| 06/01/2006 | WO2006057829A2 Scratch resistant coated article and method of making |
| 06/01/2006 | WO2006057826A2 Topotactic anion exchange oxide films and method of producing the same |
| 06/01/2006 | WO2006057818A2 Contact doping and annealing systems and processes for nanowire thin films |
| 06/01/2006 | WO2006057787A1 Self-aligned trench filling with high coupling ratio |
| 06/01/2006 | WO2006057775A2 Method for fabricating a mim capacitor having increased capacitance density and related structure |
| 06/01/2006 | WO2006057773A1 Scalable integrated logic and non-volatile memory |
| 06/01/2006 | WO2006057745A2 Direct imprinting of etch barriers using step and flash imprint lithography |
| 06/01/2006 | WO2006057686A2 Cap layers and/or passivation layers for nitride-based transistors, transistor structures and methods of fabricating same |
| 06/01/2006 | WO2006057645A2 Enhancement of electron and hole mobilities in 110 under biaxial compressive strain |
| 06/01/2006 | WO2006057530A1 Apparatus for automatically venting photoresist |
| 06/01/2006 | WO2006057479A1 Slurry for use in metal-chemical mechanical polishing and preparation method thereof |
| 06/01/2006 | WO2006057463A1 Nitride single crystal seeded growth in supercritical ammonia with alkali metal ion |
| 06/01/2006 | WO2006057451A1 Autofocus device and optical measurement evaluation method |
| 06/01/2006 | WO2006057425A1 Quantum dot array and production method therefor, and dot array element and production method thererfor |
| 06/01/2006 | WO2006057422A1 Semiconductor multilayer substrate, method for producing same and light-emitting device |
| 06/01/2006 | WO2006057404A1 Heater unit |
| 06/01/2006 | WO2006057400A1 Semiconductor device manufacturing method and substrate processing equipment |
| 06/01/2006 | WO2006057394A1 Method and device for forming solder bump |
| 06/01/2006 | WO2006057376A1 Treatment device for fragile member |
| 06/01/2006 | WO2006057360A1 Semiconductor device and production method therefor, wiring board and production method therefor, semiconductor package and electronic apparatus |
| 06/01/2006 | WO2006057353A1 Method for forming thin film, deposition source substrate and method for producing the same |
| 06/01/2006 | WO2006057345A1 Photoresist coating liquid supplying apparatus, and photoresist coating liquid supplying method and photoresist coating apparatus using such photoresist coating liquid supplying apparatus |
| 06/01/2006 | WO2006057335A1 Die bonding equipment |
| 06/01/2006 | WO2006057319A1 Substrate processing equipment |
| 06/01/2006 | WO2006057312A1 Wiring/electrode and sputtering target |
| 06/01/2006 | WO2006057299A1 Stage apparatus and exposure apparatus |
| 06/01/2006 | WO2006057263A1 Mobile body system, exposure apparatus, and method of producing device |
| 06/01/2006 | WO2006057236A1 Substrate processing method and method for manufacturing semiconductor device |
| 06/01/2006 | WO2006057230A1 Au BONDING WIRE FOR SEMICONDUCTOR ELEMENT |
| 06/01/2006 | WO2006057202A1 Etching method and etching apparatus |
| 06/01/2006 | WO2006057117A1 Semiconductor device manufacturing method and semiconductor device |
| 06/01/2006 | WO2006057106A1 Method for supplying power to circuit block in semiconductor device for radio, and semiconductor device for radio |
| 06/01/2006 | WO2006057097A1 Semiconductor device |
| 06/01/2006 | WO2006056959A1 Method of modifying surface area and electronic device |
| 06/01/2006 | WO2006056648A2 Electronics module and method for manufacturing the same |
| 06/01/2006 | WO2006056643A2 Method for manufacturing an electronics module |
| 06/01/2006 | WO2006056567A1 Substrate work station and add-on module for a substrate work station |
| 06/01/2006 | WO2006056557A2 Electrostatic holding device having a number of supply sources |
| 06/01/2006 | WO2006056543A1 Apparatus method for wet treatment of wafers |
| 06/01/2006 | WO2006056298A1 Resist stripper and residue remover for cleaning copper surfaces in semiconductor processing |
| 06/01/2006 | WO2006037933A3 Method for providing mixed stacked structures, with various insulating zones and/or electrically conducting zones vertically localized |
| 06/01/2006 | WO2006033919A3 Providing driving current arrangement for oled device |
| 06/01/2006 | WO2006028705B1 Mask material conversion |
| 06/01/2006 | WO2006022192A3 Electronic device and manufacturing method thereof |
| 06/01/2006 | WO2006020565A3 Barrier layer configurations and methods for processing microelectronic topographies having barrier layers |
| 06/01/2006 | WO2006014785A3 Interactive wagering contest method and system |
| 06/01/2006 | WO2006007825A3 Semiconductor and method for producing the same |
| 06/01/2006 | WO2006001032B1 Replaceable led system |
| 06/01/2006 | WO2005119707A3 Power light emitting die package with reflecting lens and the method of making the same |
| 06/01/2006 | WO2005117101A3 Method for making a semiconductor structure using silicon germanium |
| 06/01/2006 | WO2005114731A3 Double density method for wirebond interconnect |
| 06/01/2006 | WO2005106926A3 Light emitting diode component |
| 06/01/2006 | WO2005093836B1 Semiconductor constructions having a buried bit line, and methods of forming same |
| 06/01/2006 | WO2005079476A3 Method of dry plasma etching semiconductor materials |
| 06/01/2006 | WO2005073429A3 Method and apparatus for selectively changing thin film composition during electroless deposition in a single chamber |
| 06/01/2006 | WO2005072338A3 Multi-step pad conditioningh system and method for chemical planarization |
| 06/01/2006 | WO2005044695A8 Low cost wafer box improvements |
| 06/01/2006 | WO2005027200A8 Method and device for contacting vo semiconductor chips on a metallic substrate |
| 06/01/2006 | WO2004095542A3 Apparatus and method for picking up semiconductor chip |
| 06/01/2006 | WO2004070777A3 High value split poly p-resistor with low standard deviation |
| 06/01/2006 | US20060117293 Method for designing an overlay mark |
| 06/01/2006 | US20060117286 Method for correcting timing error when designing semiconductor integrated circuit |
| 06/01/2006 | US20060117279 Method for storing multiple levels of design data in a common database |
| 06/01/2006 | US20060116057 Method and apparatus for cleaning a web-based chemical mechanical planarization system |
| 06/01/2006 | US20060116056 Apparatus and methods for polishing a semiconductor wafer |
| 06/01/2006 | US20060116051 Polishing pad with built-in optical sensor |
| 06/01/2006 | US20060116002 Surface-activation of semiconductor nanostructures for biological applications |
| 06/01/2006 | US20060116001 Patterning method |
| 06/01/2006 | US20060116000 Manufacturing method of insulating film and semiconductor device |
| 06/01/2006 | US20060115999 Methods of exposure for the purpose of thermal management for imprint lithography processes |
| 06/01/2006 | US20060115998 Method for forming pattern of organic insulating film |
| 06/01/2006 | US20060115997 Method for patterning thin film, method and apparatus for fabricating flat panel display |
| 06/01/2006 | US20060115996 Method for enhancing FSG film stability |