Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2006
09/19/2006US7110085 Lithographic apparatus, substrate holder and method of manufacturing
09/19/2006US7110084 Illumination optical system and exposure apparatus
09/19/2006US7110082 Optical system for maskless lithography
09/19/2006US7110070 Active-matrix addressed reflective LCD and method of fabricating the same
09/19/2006US7110068 Liquid crystal display device
09/19/2006US7110063 Liquid crystal display and method of manufacturing the same
09/19/2006US7110059 Display device
09/19/2006US7110058 Method of fabricating liquid crystal display device
09/19/2006US7109917 Intergrated semiconductor component for high-frequency measurement and use thereof
09/19/2006US7109901 Use of and gates with a write control circuit for trimming a bleeder resistor
09/19/2006US7109838 System for integrating a toroidal inductor in a semiconductor device
09/19/2006US7109825 Passive devices and modules for transceiver
09/19/2006US7109779 Semiconductor integrated circuit and a burn-in method thereof
09/19/2006US7109771 Semiconductor integrated circuit with reduced leakage current
09/19/2006US7109761 Comparator circuit
09/19/2006US7109751 Methods of implementing phase shift mask compliant static memory cell circuits
09/19/2006US7109740 Method for retesting semiconductor device
09/19/2006US7109733 Test head docking system and method
09/19/2006US7109731 Membrane probing system with local contact scrub
09/19/2006US7109660 Plasma processing device and baffle plate thereof
09/19/2006US7109592 SMT passive device noflow underfill methodology and structure
09/19/2006US7109588 Method and apparatus for attaching microelectronic substrates and support members
09/19/2006US7109586 System for reducing or eliminating semiconductor device wire sweep
09/19/2006US7109583 Mounting with auxiliary bumps
09/19/2006US7109577 Semiconductor device and power supply system
09/19/2006US7109576 Semiconductor component having encapsulated die stack
09/19/2006US7109575 Low-cost flexible film package module and method of manufacturing the same
09/19/2006US7109574 Integrated circuit package with exposed die surfaces and auxiliary attachment
09/19/2006US7109572 Quad flat no lead (QFN) grid array package
09/19/2006US7109571 Method of forming a hermetic seal for silicon die with metal feed through structure
09/19/2006US7109570 Integrated circuit package with leadframe enhancement and method of manufacturing the same
09/19/2006US7109568 Semiconductor device including n-channel fets and p-channel fets with improved drain current characteristics
09/19/2006US7109567 Semiconductor device and method of manufacturing such device
09/19/2006US7109566 Semiconductor device with resistor pattern and method of fabricating the same
09/19/2006US7109565 Finger metal-insulator-metal capacitor device with local interconnect
09/19/2006US7109564 Low power fuse structure and method of making the same
09/19/2006US7109563 Films deposited at glancing incidence for multilevel metallization
09/19/2006US7109561 Method of manufacturing a semiconductor device and a method for fixing the semiconductor device using substrate jig
09/19/2006US7109559 Nitrided ultra thin gate dielectrics
09/19/2006US7109557 Sacrificial dielectric planarization layer
09/19/2006US7109554 Thin film semiconductor device and method for manufacturing same
09/19/2006US7109553 Semiconductor device and method of manufacturing same
09/19/2006US7109551 Semiconductor device
09/19/2006US7109550 Semiconductor fabrication process with asymmetrical conductive spacers
09/19/2006US7109549 Semiconductor device and method of manufacturing the same
09/19/2006US7109548 Operating a memory device
09/19/2006US7109547 Non-volatile semiconductor memory device having memory cell array suitable for high density and high integration
09/19/2006US7109546 Horizontal memory gain cells
09/19/2006US7109545 Integrated circuit memory with offset capacitor
09/19/2006US7109544 Architecture for vertical transistor cells and transistor-controlled memory cells
09/19/2006US7109543 Semiconductor device having trench capacitor and method for fabricating the same
09/19/2006US7109542 Capacitor constructions having a conductive layer
09/19/2006US7109541 Integrated circuit component, protected against random logic events, and associated method of manufacture
09/19/2006US7109540 Semiconductor device for restraining short circuiting and method of manufacturing thereof
09/19/2006US7109538 Nonvolatile semiconductor memory device
09/19/2006US7109537 CMOS pixel with dual gate PMOS
09/19/2006US7109536 Memory embedded semiconductor device and method for fabricating the same
09/19/2006US7109534 Transistor and electronic device
09/19/2006US7109530 Nitride-based semiconductor element
09/19/2006US7109527 Semiconductor chip for optoelectronics and method for production thereof
09/19/2006US7109521 Silicon carbide semiconductor structures including multiple epitaxial layers having sidewalls
09/19/2006US7109516 Strained-semiconductor-on-insulator finFET device structures
09/19/2006US7109511 Techniques for wafer prealignment and sensing edge positions
09/19/2006US7109510 Method and apparatus for aligning a substrate on a stage
09/19/2006US7109509 Device for the detection of substrates stacked with a specific spacing
09/19/2006US7109501 Charged particle beam lithography system, pattern drawing method, and method of manufacturing semiconductor device
09/19/2006US7109500 Mask pattern correction method, semiconductor device manufacturing method, mask manufacturing method and mask
09/19/2006US7109498 Radiation source, lithographic apparatus, and device manufacturing method
09/19/2006US7109497 Illumination system particularly for microlithography
09/19/2006US7109494 Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus using deflector
09/19/2006US7109482 Object inspection and/or modification system and method
09/19/2006US7109443 Multi-zone reflecting device for use in flash lamp processes
09/19/2006US7109435 Beam irradiator and laser anneal device
09/19/2006US7109311 Sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process
09/19/2006US7109249 Lower dielectric constant than corresponding non-porous matrix material, making porous matrix material particularly attractive for electronic applications including integrated circuits, multichip modules, and flat panel displays
09/19/2006US7109133 Semiconductor chip mounting apparatus and method of mounting semiconductor chips using the same
09/19/2006US7109132 High density plasma chemical vapor deposition process
09/19/2006US7109131 System and method for hydrogen-rich selective oxidation
09/19/2006US7109130 Zeolite films for low k applications
09/19/2006US7109129 Optimal operation of conformal silica deposition reactors
09/19/2006US7109128 Semiconductor device and method of manufacturing the same
09/19/2006US7109127 Manufacturing method of semiconductor device
09/19/2006US7109126 Method of manufacturing a semiconductor integrated circuit device
09/19/2006US7109125 Selective fabrication of high capacitance density areas in a low dielectric constant material
09/19/2006US7109124 Solid state plasma antenna
09/19/2006US7109123 Silicon etching method
09/19/2006US7109122 Method and apparatus for reducing substrate charging damage
09/19/2006US7109121 Stress control of semiconductor microstructures for thin film growth
09/19/2006US7109120 Profiled standoff structure and method for optical display package
09/19/2006US7109119 Scum solution for chemically amplified resist patterning in cu/low k dual damascene
09/19/2006US7109118 Electrochemical fabrication methods including use of surface treatments to reduce overplating and/or planarization during formation of multi-layer three-dimensional structures
09/19/2006US7109117 Method for chemical mechanical polishing of a shallow trench isolation structure
09/19/2006US7109116 Method for reducing dendrite formation in nickel silicon salicide processes
09/19/2006US7109115 Methods of providing ohmic contact
09/19/2006US7109114 HDP-CVD seasoning process for high power HDP-CVD gapfil to improve particle performance
09/19/2006US7109113 Solid source precursor delivery system
09/19/2006US7109112 Method of providing a structure using self-aligned features
09/19/2006US7109111 Method of annealing metal layers
09/19/2006US7109110 Method of manufacturing a superjunction device
09/19/2006US7109109 Contact plug in semiconductor device and method of forming the same