| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/08/2008 | US7317627 Semiconductor integrated circuit with voltage generation circuit, liquid crystal display controller and mobile electric equipment |
| 01/08/2008 | US7317621 Laminated circuit board and its manufacturing method, and manufacturing method for module using the laminated circuit board and its manufacturing apparatus |
| 01/08/2008 | US7317583 High numerical aperture projection system and method for microlithography |
| 01/08/2008 | US7317571 Catadioptric projection optical system, exposure apparatus having the same, device fabrication method |
| 01/08/2008 | US7317566 Electrode with transparent series resistance for uniform switching of optical modulation devices |
| 01/08/2008 | US7317505 Exposure apparatus and device manufacturing method |
| 01/08/2008 | US7317503 Thin film transistor array panel for liquid crystal display |
| 01/08/2008 | US7317483 Charge transfer device having output amplifier with reduced power consumption |
| 01/08/2008 | US7317432 Light emitting device and method of driving the same |
| 01/08/2008 | US7317395 RFID tag and method of manufacturing the same |
| 01/08/2008 | US7317344 Function selection circuit using a fuse option scheme |
| 01/08/2008 | US7317326 Inspection device and inspection method for active matrix panel, and manufacturing method for active matrix organic light emitting diode panel |
| 01/08/2008 | US7317311 Wafer handling checker |
| 01/08/2008 | US7317253 Cobalt tungsten phosphate used to fill voids arising in a copper metallization process |
| 01/08/2008 | US7317251 Multichip module including a plurality of semiconductor chips, and printed circuit board including a plurality of components |
| 01/08/2008 | US7317244 Semiconductor device and manufacturing method thereof |
| 01/08/2008 | US7317243 Encapsulated lead having step configuration |
| 01/08/2008 | US7317242 Semiconductor device including p-type silicon layer including implanted germanium |
| 01/08/2008 | US7317233 Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
| 01/08/2008 | US7317230 Fin FET structure |
| 01/08/2008 | US7317227 Method for forming pattern of stacked film |
| 01/08/2008 | US7317226 Patterned SOI by oxygen implantation and annealing |
| 01/08/2008 | US7317225 Power semiconductor device |
| 01/08/2008 | US7317224 Semiconductor device |
| 01/08/2008 | US7317223 Memory device and method of manufacturing the same |
| 01/08/2008 | US7317221 High density MIM capacitor structure and fabrication process |
| 01/08/2008 | US7317220 Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth |
| 01/08/2008 | US7317219 Magnetic random access memory (MRAM) and method of manufacturing the same |
| 01/08/2008 | US7317209 Thin film transistor device and method of manufacturing the same, thin film transistor substrate and display having the same |
| 01/08/2008 | US7317208 Semiconductor device with contact structure and manufacturing method thereof |
| 01/08/2008 | US7317207 Semiconductor device, method of making the same and liquid crystal display device |
| 01/08/2008 | US7317206 Conductive elements for thin film transistors used in a flat panel display |
| 01/08/2008 | US7317205 Light emitting device and method of manufacturing a semiconductor device |
| 01/08/2008 | US7317203 Method and monitor structure for detecting and locating IC wiring defects |
| 01/08/2008 | US7317202 Method for manufacture of an epitaxial structural element layer sequence and optoelectronic semiconductor chip |
| 01/08/2008 | US7317199 Circuit device |
| 01/08/2008 | US7317197 Method of detecting tightly adhering state, tight adhesion control method and method of and apparatus for near field exposure |
| 01/08/2008 | US7317172 Bake system |
| 01/08/2008 | US7317165 Intermediate substrate, intermediate substrate with semiconductor element, substrate with intermediate substrate, and structure having semiconductor element, intermediate substrate and substrate |
| 01/08/2008 | US7316983 Film formation apparatus and film formation method and cleaning method |
| 01/08/2008 | US7316982 Controlling carbon nanotubes using optical traps |
| 01/08/2008 | US7316981 Method of removing silicon from a substrate |
| 01/08/2008 | US7316980 Method for forming ferrocapacitors and FeRAM devices |
| 01/08/2008 | US7316979 Method and apparatus for providing an integrated active region on silicon-on-insulator devices |
| 01/08/2008 | US7316978 Method for forming recesses |
| 01/08/2008 | US7316977 Chemical-mechanical planarization composition having ketooxime compounds and associated method for use |
| 01/08/2008 | US7316976 Polishing method to reduce dishing of tungsten on a dielectric |
| 01/08/2008 | US7316975 Method of forming sidewall spacers |
| 01/08/2008 | US7316974 Wiring pattern formation method, manufacturing method for multi layer wiring substrate, and electronic device |
| 01/08/2008 | US7316973 Method for fabricating semiconductor device |
| 01/08/2008 | US7316972 Contact hole formation method |
| 01/08/2008 | US7316971 Wire bond pads |
| 01/08/2008 | US7316970 Method for forming high selectivity protection layer on semiconductor device |
| 01/08/2008 | US7316969 Method and apparatus for thermally treating substrates |
| 01/08/2008 | US7316968 Methods of forming semiconductor devices having multiple channel MOS transistors |
| 01/08/2008 | US7316967 Flow method and reactor for manufacturing noncrystals |
| 01/08/2008 | US7316966 Method for transferring substrates in a load lock chamber |
| 01/08/2008 | US7316965 Substrate contact for a capped MEMS and method of making the substrate contact at the wafer level |
| 01/08/2008 | US7316964 Active matrix substrate, a manufacturing method of the active matrix substrate |
| 01/08/2008 | US7316963 Method for manufacturing semiconductor device |
| 01/08/2008 | US7316962 High dielectric constant materials |
| 01/08/2008 | US7316961 Method of manufacturing semiconductor device |
| 01/08/2008 | US7316960 Strain enhanced ultra shallow junction formation |
| 01/08/2008 | US7316959 Semiconductor device and method for fabricating the same |
| 01/08/2008 | US7316958 Masks for fabricating semiconductor devices and methods of forming mask patterns |
| 01/08/2008 | US7316957 Semiconductor device and method for manufacturing the same |
| 01/08/2008 | US7316956 Method for fabricating semiconductor device and wire with silicide |
| 01/08/2008 | US7316955 Method of manufacturing semiconductor device |
| 01/08/2008 | US7316954 Methods of fabricating integrated circuit devices that utilize doped poly-Si1−xGex conductive plugs as interconnects |
| 01/08/2008 | US7316953 Method for forming a recessed gate with word lines |
| 01/08/2008 | US7316952 Method for forming a memory device with a recessed gate |
| 01/08/2008 | US7316951 Fabrication method for a trench capacitor having an insulation collar |
| 01/08/2008 | US7316950 Method of fabricating a CMOS device with dual metal gate electrodes |
| 01/08/2008 | US7316949 Integrating n-type and p-type metal gate transistors |
| 01/08/2008 | US7316948 Semiconductor device and method of manufacturing the same |
| 01/08/2008 | US7316947 Method of manufacturing a semiconductor device |
| 01/08/2008 | US7316946 Method of manufacturing a semiconductor device |
| 01/08/2008 | US7316945 Method of fabricating a fin field effect transistor in a semiconductor device |
| 01/08/2008 | US7316944 Fabricating method of a liquid crystal display device |
| 01/08/2008 | US7316943 Method for manufacturing semiconductor apparatus having drain/source on insulator |
| 01/08/2008 | US7316942 Flexible active matrix display backplane and method |
| 01/08/2008 | US7316941 Semiconductor device with a MOSFET formed in close proximity to a bipolar device and method of manufacture |
| 01/08/2008 | US7316940 Chip dicing |
| 01/08/2008 | US7316939 Semiconductor device manufacturing method and manufacturing apparatus |
| 01/08/2008 | US7316938 Adjustable film frame aligner |
| 01/08/2008 | US7316937 Method for manufacturing a solid-state image sensing device, such as a CCD |
| 01/08/2008 | US7316936 Laser decapsulation method |
| 01/08/2008 | US7316935 Reticle for layout modification of wafer test structure areas |
| 01/08/2008 | US7316934 Personalized hardware |
| 01/08/2008 | US7316933 Method for producing an annular microstructure element |
| 01/08/2008 | US7316930 Use of vertically stacked photodiodes in a gene chip system |
| 01/08/2008 | US7316899 Apparatus for high speed characterization and discrimination of toxins and/or bacteria in medical, food/beverage and environmental solutions |
| 01/08/2008 | US7316893 Modular containment cell arrangements |
| 01/08/2008 | US7316889 Photoresist pattern; smooth surface and edges; resolution; wide depth of focus range; acid generator upon exposure |
| 01/08/2008 | US7316888 Smooth surface photresist pattern; using acrylated ester and acid generator |
| 01/08/2008 | US7316886 For forming on resist film a protective film soluble in an alkali developing solution, capable of peeling off by an alkali developing solution used in a development while protecting the resist film from an immersion liquid in pattern formation by immersion exposure, and forming a good pattern |
| 01/08/2008 | US7316885 Method of forming resist pattern, positive resist composition, and layered product |
| 01/08/2008 | US7316871 Mask pattern with edges having inverted shapes to alleviate the effects of diffraction of laser beams to reduce overlap regions such that crystallization characteristics are improved |
| 01/08/2008 | US7316870 Device manufacturing method, mask set for use in the method, data set for controlling a programmable patterning device, method of generating a mask pattern and a computer program |
| 01/08/2008 | US7316844 Spin-on protective coatings for wet-etch processing of microelectronic substrates |