| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/18/2009 | CN100462319C Chemical polishing method and glass base plate with the method and chemical polishing device |
| 02/17/2009 | US7493582 Pattern layout and layout data generation method |
| 02/17/2009 | US7493542 Arrangement for testing integrated circuits |
| 02/17/2009 | US7493185 Quality prognostics system and method for manufacturing processes |
| 02/17/2009 | US7492655 Memory device having high speed sense amplifier comprising pull-up circuit and pull-down circuits with drivability for each |
| 02/17/2009 | US7492569 Capacitor cell, semiconductor device and process for manufacturing the same |
| 02/17/2009 | US7492530 Metallic nano-optic lenses and beam shaping devices |
| 02/17/2009 | US7492443 Device manufacturing method, device manufactured thereby and a mask for use in the method |
| 02/17/2009 | US7492428 Thin film transistor array substrate and fabricating method thereof |
| 02/17/2009 | US7492361 Image display apparatus using thin-film transistors |
| 02/17/2009 | US7492343 Liquid crystal display device |
| 02/17/2009 | US7492192 Logic processing apparatus, semiconductor device and logic circuit |
| 02/17/2009 | US7492184 Programmable logic device and method for designing the same |
| 02/17/2009 | US7492147 Wafer probe station having a skirting component |
| 02/17/2009 | US7492047 Semiconductor device and its manufacture method |
| 02/17/2009 | US7492038 Semiconductor device |
| 02/17/2009 | US7492032 Fuse regions of a semiconductor memory device and methods of fabricating the same |
| 02/17/2009 | US7492030 Techniques to create low K ILD forming voids between metal lines |
| 02/17/2009 | US7492029 Asymmetric field effect transistors (FETs) |
| 02/17/2009 | US7492020 Micro structure with interlock configuration |
| 02/17/2009 | US7492017 Semiconductor transistor having a stressed channel |
| 02/17/2009 | US7492012 Light emitting device and method of manufacturing the same |
| 02/17/2009 | US7492009 Semiconductor device having silicon on insulator structure and method of fabricating the same |
| 02/17/2009 | US7492008 Control of buried oxide in SIMOX |
| 02/17/2009 | US7492004 Transistors having a channel region between channel-portion holes and methods of forming the same |
| 02/17/2009 | US7492000 Self-aligned split-gate nonvolatile memory structure and a method of making the same |
| 02/17/2009 | US7491999 Non-volatile memory cells utilizing substrate trenches |
| 02/17/2009 | US7491997 Memory device and method of manufacturing the same |
| 02/17/2009 | US7491991 Method for fabricating CMOS image sensor |
| 02/17/2009 | US7491988 Transistors with increased mobility in the channel zone and method of fabrication |
| 02/17/2009 | US7491986 Semiconductor integrated circuit device |
| 02/17/2009 | US7491984 Method for fabricating group III nitride compound semiconductors and group III nitride compound semiconductor devices |
| 02/17/2009 | US7491983 Nitride-based semiconductor device of reduced current leakage |
| 02/17/2009 | US7491972 Polysilicon semiconductor thin film substrate, method for producing the same, semiconductor device, and electronic device |
| 02/17/2009 | US7491966 Semiconductor substrate and process for producing it |
| 02/17/2009 | US7491959 Defect inspection apparatus |
| 02/17/2009 | US7491953 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions |
| 02/17/2009 | US7491945 Charged particle beam apparatus, charged particle beam control method, substrate inspection method and method of manufacturing semiconductor device |
| 02/17/2009 | US7491913 Bake apparatus for use in spin-coating equipment |
| 02/17/2009 | US7491908 Plasma processing device and ashing method |
| 02/17/2009 | US7491895 Wiring substrate and method of fabricating the same |
| 02/17/2009 | US7491893 Mounting substrate and mounting method of electronic part |
| 02/17/2009 | US7491785 Multi-functional cyclic silicate compound, siloxane-based polymer prepared from the compound and process of producing insulating film using the polymer |
| 02/17/2009 | US7491662 Substrate processing apparatus |
| 02/17/2009 | US7491661 Device manufacturing method, top coat material and substrate |
| 02/17/2009 | US7491660 Method of forming nitride films with high compressive stress for improved PFET device performance |
| 02/17/2009 | US7491659 APCVD method of forming silicon oxide using an organic silane, oxidizing agent, and catalyst-formed hydrogen radical |
| 02/17/2009 | US7491658 Ultra low k plasma enhanced chemical vapor deposition processes using a single bifunctional precursor containing both a SiCOH matrix functionality and organic porogen functionality |
| 02/17/2009 | US7491657 Method of manufacturing a semiconductor device having a one time programmable (OTP) erasable and programmable read only memory (EPROM) cell |
| 02/17/2009 | US7491656 Semiconductor device, method for forming silicon oxide film, and apparatus for forming silicon oxide film |
| 02/17/2009 | US7491655 Semiconductor device and method of fabricating the same |
| 02/17/2009 | US7491654 Method of forming a ZrO2 thin film using plasma enhanced atomic layer deposition and method of fabricating a capacitor of a semiconductor memory device having the thin film |
| 02/17/2009 | US7491653 Metal-free catalysts for pulsed deposition layer process for conformal silica laminates |
| 02/17/2009 | US7491652 In-line processing for forming a silicon nitride film |
| 02/17/2009 | US7491651 Polymerizing tetramethoxysilane, tetraethoxysilane, tetrapropoxysilane or tetrabutoxysilane with dimethyldimethoxysilane or trimethylmethoxysilane, methanol and oxalic acid forming polysiloxane; applying to a surface, curing; planarization film, an interlayer insulation film, a protective film |
| 02/17/2009 | US7491650 Exposing a substrate of polysilicon, monocrystalline silicon or amorphous silicon, anda second dielectric material to an etch composition of isopropyl alcohol, NH4F, and tetramethyl ammonium fluoride; semiconductor capacitor electrode |
| 02/17/2009 | US7491649 Plasma processing apparatus |
| 02/17/2009 | US7491648 Method of patterning a photoresist film using a lithographic |
| 02/17/2009 | US7491647 Etch with striation control |
| 02/17/2009 | US7491646 Electrically conductive feature fabrication process |
| 02/17/2009 | US7491645 Method for manufacturing a semiconductor device |
| 02/17/2009 | US7491644 Manufacturing process for a transistor made of thin layers |
| 02/17/2009 | US7491643 Method and structure for reducing contact resistance between silicide contact and overlying metallization |
| 02/17/2009 | US7491642 Electrical passivation of silicon-containing surfaces using organic layers |
| 02/17/2009 | US7491641 Method of forming a conductive line and a method of forming a conductive contact adjacent to and insulated from a conductive line |
| 02/17/2009 | US7491640 Method of manufacturing semiconductor device |
| 02/17/2009 | US7491639 Method of manufacturing a semiconductor device and semiconductor obtained by means of such a method |
| 02/17/2009 | US7491638 Method of forming an insulating capping layer for a copper metallization layer |
| 02/17/2009 | US7491637 Formation of conductive templates employing indium tin oxide |
| 02/17/2009 | US7491636 Methods for forming flexible column die interconnects and resulting structures |
| 02/17/2009 | US7491635 Method for forming a fully silicided gate and devices obtained thereof |
| 02/17/2009 | US7491634 Methods for forming roughened surfaces and applications thereof |
| 02/17/2009 | US7491633 High switching speed two mask schottky diode with high field breakdown |
| 02/17/2009 | US7491632 Buried subcollector for high frequency passive semiconductor devices |
| 02/17/2009 | US7491631 Method of doping a gate electrode of a field effect transistor |
| 02/17/2009 | US7491630 Undoped gate poly integration for improved gate patterning and cobalt silicide extendibility |
| 02/17/2009 | US7491629 Method for producing an n-doped field stop zone in a semiconductor body and semiconductor component having a field stop zone |
| 02/17/2009 | US7491628 Method for patterning large scale nano-fibrous surfaces using capillography |
| 02/17/2009 | US7491627 III-nitride device and method with variable epitaxial growth direction |
| 02/17/2009 | US7491626 Layer growth using metal film and/or islands |
| 02/17/2009 | US7491625 Gang flipping for IC packaging |
| 02/17/2009 | US7491624 Method of manufacturing low CTE substrates for use with low-k flip-chip package devices |
| 02/17/2009 | US7491623 Method of making a semiconductor structure |
| 02/17/2009 | US7491622 Process of forming an electronic device including a layer formed using an inductively coupled plasma |
| 02/17/2009 | US7491621 Method of forming isolation structures in a semiconductor manufacturing process |
| 02/17/2009 | US7491620 Method and structures for indexing dice |
| 02/17/2009 | US7491619 Methods of fabricating semiconductor devices |
| 02/17/2009 | US7491618 Methods and semiconductor structures for latch-up suppression using a conductive region |
| 02/17/2009 | US7491617 Transistor structure with minimized parasitics and method of fabricating the same |
| 02/17/2009 | US7491616 Method of manufacturing a semiconductor device including dopant introduction |
| 02/17/2009 | US7491615 Method of fabricating strained-silicon transistors and strained-silicon CMOS transistors |
| 02/17/2009 | US7491614 Methods for forming channel stop for deep trench isolation prior to deep trench etch |
| 02/17/2009 | US7491613 Line element and method of manufacturing the line element |
| 02/17/2009 | US7491612 Field effect transistor with a heterostructure and associated production method |
| 02/17/2009 | US7491611 Method and apparatus for controlling a circuit with a high voltage sense device |
| 02/17/2009 | US7491610 Fabrication method |
| 02/17/2009 | US7491609 Semiconductor device and method for manufacturing the same |
| 02/17/2009 | US7491608 Vertical transistor with horizontal gate layers |
| 02/17/2009 | US7491607 Method of fabricating flash memory cell |
| 02/17/2009 | US7491606 Semiconductor device and method for fabricating the same |