Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2009
05/26/2009US7537984 III-V power field effect transistors
05/26/2009US7537983 Mosfet
05/26/2009US7537982 Method and structure for isolating substrate noise
05/26/2009US7537981 Silicon on insulator device and method of manufacturing the same
05/26/2009US7537980 Method of manufacturing a stacked semiconductor device
05/26/2009US7537979 Method of manufacturing semiconductor device
05/26/2009US7537978 Semiconductor device and manufacturing method thereof
05/26/2009US7537977 Method for manufacturing a thin film transistor array panel for a liquid crystal display and a photolithography method for fabricating thin films
05/26/2009US7537976 Manufacturing method of thin film transistor
05/26/2009US7537975 Organic thin film transistor and method of fabricating the same
05/26/2009US7537974 Photoresist composition, method for forming film pattern using the same, and method for manufacturing thin film transistor array panel using the same
05/26/2009US7537973 Method for fabricating structure of thin film transistor array
05/26/2009US7537972 Semiconductor device and method of manufacturing the same
05/26/2009US7537971 Method for fabricating CMOS image sensor
05/26/2009US7537970 Bi-directional transistor with by-pass path and method therefor
05/26/2009US7537969 Fuse structure having reduced heat dissipation towards the substrate
05/26/2009US7537968 Junction diode with reduced reverse current
05/26/2009US7537967 Mold cleaning sheet and manufacturing method of a semiconductor device using the same
05/26/2009US7537966 Method for fabricating board on chip (BOC) semiconductor package with circuit side polymer layer
05/26/2009US7537965 Manufacturing method for a leadless multi-chip electronic module
05/26/2009US7537964 Method of fabricating a miniature silicon condenser microphone
05/26/2009US7537963 Device and method for manufacturing the same
05/26/2009US7537962 Method of fabricating a shielded stacked integrated circuit package system
05/26/2009US7537961 Conductive resin composition, connection method between electrodes using the same, and electric connection method between electronic component and circuit substrate using the same
05/26/2009US7537960 Method of making multi-chip package with high-speed serial communications between semiconductor dice
05/26/2009US7537959 Chip stack package and manufacturing method thereof
05/26/2009US7537958 High performance multi-chip flip chip package
05/26/2009US7537957 Solid state imaging device and method for manufacturing solid state imaging device
05/26/2009US7537956 Silicon optoelectronic device manufacturing method and silicon optoelectronic device manufactured by thereof and image input and/or output apparatus having the same
05/26/2009US7537955 Thin film growth of uniform Group IBIIIAVIA solar cell absorber layer; depositing preparatory melt material; obtaining an absorber layer for a solar cell
05/26/2009US7537954 Microelectronic assembly having thermoelectric elements to cool a die and a method of making the same
05/26/2009US7537952 Method of manufacturing MEMS device package
05/26/2009US7537951 Image sensor including spatially different active and dark pixel interconnect patterns
05/26/2009US7537950 Nitride-based light emitting heterostructure
05/26/2009US7537949 Optoelectronic substrate and methods of making same
05/26/2009US7537948 Electro-optical device, manufacturing method of the same, and electronic apparatus
05/26/2009US7537947 Optoelectronic displays
05/26/2009US7537946 Display apparatus
05/26/2009US7537945 Semiconductor laser device and method of manufacturing the same, and optical transmission module and optical disk apparatus using the semiconductor laser device
05/26/2009US7537944 Method for manufacturing p-type group III nitride semiconductor, and group III nitride semiconductor light-emitting device
05/26/2009US7537943 Method of manufacturing a semiconductor integrated circuit device
05/26/2009US7537942 Counting circuit for controlling an off-chip driver and method of changing and output current value of the off-chip driver using the same
05/26/2009US7537941 Variable overlap of dummy shapes for improved rapid thermal anneal uniformity
05/26/2009US7537940 Method of manufacturing electronic device capable of controlling threshold voltage and ion implanter controller and system that perform the method
05/26/2009US7537939 System and method for characterizing lithography effects on a wafer
05/26/2009US7537915 Nucleic acids encoding chromophores/fluorophores and methods for using the same
05/26/2009US7537882 Anti-reflective coating composition and production method for pattern using the same
05/26/2009US7537869 Avoiding image macro-flare by determining the variations of lengths of parallel lines of transparency of two patterns adjacent or overlapping the photoresist film; the second has a larger transparent region than the first which has parallel lines of transparent regions of the same length
05/26/2009US7537864 Hole pattern design method and photomask
05/26/2009US7537709 Method for isotropic etching of copper
05/26/2009US7537708 Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface
05/26/2009US7537673 Plasma processing apparatus
05/26/2009US7537672 Apparatus for plasma processing
05/26/2009US7537671 Self-calibrating optical emission spectroscopy for plasma monitoring
05/26/2009US7537662 Method and apparatus for depositing thin films on a surface
05/26/2009US7537660 Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display
05/26/2009US7537657 Silicon wafer and process for producing it
05/26/2009US7537628 Exhaust trap device
05/26/2009US7537448 Thermal processing method and thermal processing unit
05/26/2009US7537446 Apparatus for forming a porous reaction injection molded chemical mechanical polishing pad
05/26/2009US7537425 Wafer processing apparatus having dust proof function
05/26/2009US7537151 Method of making high performance heat sinks
05/26/2009US7537114 System and method for storing and transporting photomasks in fluid
05/26/2009US7537108 Methods and apparatus for transporting substrate carriers
05/26/2009CA2476175C Floor planning for programmable gate array having embedded fixed logic circuitry
05/22/2009WO2009065066A1 Method of forming backside point contact structures for silicon solar cells
05/22/2009WO2009064974A2 Embossed electrostatic chuck
05/22/2009WO2009064875A1 Particle beam assisted modification of thin film materials
05/22/2009WO2009064872A2 Particle beam assisted modifcation of thin film materials
05/22/2009WO2009064871A2 Techniques for measuring and controlling ion beam angle and density uniformity
05/22/2009WO2009064867A2 Particle beam assisted modification of thin film materials
05/22/2009WO2009064745A1 High negative zeta potential polyhedral silsesquioxane composition and method for damage free semiconductor wet clean
05/22/2009WO2009064677A2 Cmp pad dressers
05/22/2009WO2009064565A1 Method of making microarrays
05/22/2009WO2009064518A1 Component with bonding adhesive
05/22/2009WO2009064166A2 An integrated ion sensitive field effect transistor sensor
05/22/2009WO2009064063A1 Novel pre-treatment process for liberation of metals from waste printed circuit boards using organic solution
05/22/2009WO2009064010A1 Polishing composition comprising a n-substituted imidazole and a method for polishing a copper film
05/22/2009WO2009064007A1 Oxide semiconductor material, method for manufacturing oxide semiconductor material, electronic device and field effect transistor
05/22/2009WO2009063954A1 Substrate processing method and substrate processed by this method
05/22/2009WO2009063906A1 Bonding substrate manufacturing apparatus and bonding substrate manufacturing method
05/22/2009WO2009063903A1 Mask case, transfer apparatus, exposure apparatus, mask transfer method and device manufacturing method
05/22/2009WO2009063877A1 Movable element and processing stage
05/22/2009WO2009063844A1 Semiconductor device and semiconductor device manufacturing method
05/22/2009WO2009063827A1 Circuit connecting material and structure for connecting circuit member
05/22/2009WO2009063825A1 Wafer processing apparatus
05/22/2009WO2009063808A1 Positive-type photosensitive resin composition, method for production of resist pattern, semiconductor device, and electronic device
05/22/2009WO2009063793A1 Adhesive tape for processing semiconductor wafer
05/22/2009WO2009063755A1 Plasma processing apparatus and method for plasma processing semiconductor substrate
05/22/2009WO2009063726A1 Process for production of photoresist resins
05/22/2009WO2009063721A1 Semiconductor device
05/22/2009WO2009063648A1 Thin-film transistor, manufacturing method therefor and electronic device using a thin-film transistor
05/22/2009WO2009063639A1 Etching mask, base material having etching mask, finely processed article, and method for production of finely processed article
05/22/2009WO2009063638A1 Semiconductor light emitting device
05/22/2009WO2009063631A1 Plasma treatment device
05/22/2009WO2009063629A1 Plasma processing apparatus
05/22/2009WO2009063620A1 Plasma dicing apparatus and semiconductor chip manufacturing method
05/22/2009WO2009063606A1 Thin film transistor, method for manufacturing thin film transistor, and display device
05/22/2009WO2009063591A1 Method for manufacturing semiconductor device
05/22/2009WO2009063588A1 Semiconductor device and method for manufacturing the same