| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/02/2009 | US7541290 Methods of forming mask patterns on semiconductor wafers that compensate for nonuniform center-to-edge etch rates during photolithographic processing |
| 06/02/2009 | US7541289 Process for removing high stressed film using LF or HF bias power and capacitively coupled VHF source power with enhanced residue capture |
| 06/02/2009 | US7541288 Methods of forming integrated circuit structures using insulator deposition and insulator gap filling techniques |
| 06/02/2009 | US7541287 Method for machining a semiconductor wafer on both sides in a carrier, carrier, and a semiconductor wafer produced by the method |
| 06/02/2009 | US7541286 Method for manufacturing semiconductor device using KrF light source |
| 06/02/2009 | US7541285 Substrate processing apparatus and substrate processing method |
| 06/02/2009 | US7541284 Includes first ruthenium film that covers surface of substrate and second ruthenium film formed on first, where first film may be deposited by plasma-enhanced ALD (PEALD) process, and second by atomic layer deposition (ALD) process; high density, smooth surface, good adhesiveness, short incubation period |
| 06/02/2009 | US7541283 Plasma processing method and plasma processing apparatus |
| 06/02/2009 | US7541282 Methods of forming metal-nitride layers in contact holes |
| 06/02/2009 | US7541281 Method for manufacturing electronic device |
| 06/02/2009 | US7541280 Method of foming a micromechanical structure |
| 06/02/2009 | US7541279 Method for manufacturing semiconductor device |
| 06/02/2009 | US7541278 Interconnect substrate, semiconductor device, methods of manufacturing the same, circuit board, and electronic equipment |
| 06/02/2009 | US7541277 Stress relaxation, selective nitride phase removal |
| 06/02/2009 | US7541276 Methods for forming dual damascene wiring for semiconductor devices using protective via capping layer |
| 06/02/2009 | US7541275 Method for manufacturing an interconnect |
| 06/02/2009 | US7541274 Integrated circuit with a reduced pad bump area and the manufacturing method thereof |
| 06/02/2009 | US7541273 Method for forming bumps |
| 06/02/2009 | US7541272 Damascene patterning of barrier layer metal for C4 solder bumps |
| 06/02/2009 | US7541271 MOS transistors having low-resistance salicide gates and a self-aligned contact between them and method of manufacture |
| 06/02/2009 | US7541270 Methods for forming openings in doped silicon dioxide |
| 06/02/2009 | US7541269 Method of forming tungsten polymetal gate having low resistance |
| 06/02/2009 | US7541267 Reversed T-shaped finfet |
| 06/02/2009 | US7541266 Covert transformation of transistor properties as a circuit protection method |
| 06/02/2009 | US7541265 Capacitor material for use in circuitized substrates, circuitized substrate utilizing same, method of making said circuitized substrate, and information handling system utilizing said circuitized substrate |
| 06/02/2009 | US7541264 Temporary wafer bonding method for semiconductor processing |
| 06/02/2009 | US7541263 Method for providing mixed stacked structures, with various insulating zones and/or electrically conducting zones vertically localized |
| 06/02/2009 | US7541262 Method for producing semiconductor device |
| 06/02/2009 | US7541261 Flexible electronics using ion implantation to adhere polymer substrate to single crystal silicon substrate |
| 06/02/2009 | US7541260 Trench diffusion isolation in semiconductor devices |
| 06/02/2009 | US7541259 Semiconductor device having a compressed device isolation structure |
| 06/02/2009 | US7541258 Method of manufacturing semiconductor substrate and method of manufacturing semiconductor device |
| 06/02/2009 | US7541257 Semiconductor device having three-dimensional construction and method for manufacturing the same |
| 06/02/2009 | US7541256 Method of fabricating back-illuminated imaging sensors using a bump bonding technique |
| 06/02/2009 | US7541255 Method for manufacturing semiconductor device |
| 06/02/2009 | US7541254 Method of manufacturing thin film capacitor |
| 06/02/2009 | US7541253 Method of forming an integrated resistor |
| 06/02/2009 | US7541252 Methods of fabricating a semiconductor device including a self-aligned cell diode |
| 06/02/2009 | US7541251 Wire bond and redistribution layer process |
| 06/02/2009 | US7541250 Method for forming a self-aligned twin well region with simplified processing |
| 06/02/2009 | US7541249 Process for producing a base connection of a bipolar transistor |
| 06/02/2009 | US7541248 Integrated semiconductor device and method of manufacturing thereof |
| 06/02/2009 | US7541247 Guard ring structures for high voltage CMOS/low voltage CMOS technology using LDMOS (lateral double-diffused metal oxide semiconductor) device fabrication |
| 06/02/2009 | US7541246 Method of manufacturing semiconductor device |
| 06/02/2009 | US7541245 Semiconductor device with silicon-film fins and method of manufacturing the same |
| 06/02/2009 | US7541244 Semiconductor device having a trench gate and method of fabricating the same |
| 06/02/2009 | US7541243 Methods of forming integrated circuit devices having gate electrodes formed on non-uniformly thick gate insulating layers |
| 06/02/2009 | US7541242 NROM memory cell, memory array, related devices and methods |
| 06/02/2009 | US7541241 Method for fabricating memory cell |
| 06/02/2009 | US7541240 Integration process flow for flash devices with low gap fill aspect ratio |
| 06/02/2009 | US7541239 Selective spacer formation on transistors of different classes on the same device |
| 06/02/2009 | US7541238 Inductor formed in an integrated circuit |
| 06/02/2009 | US7541237 Non-volatile memory cell array having discontinuous source and drain diffusions contacted by continuous bit line conductors and methods of forming |
| 06/02/2009 | US7541236 Method for manufacturing semiconductor device |
| 06/02/2009 | US7541235 Method for providing a programmable electrostatic discharge (ESD) protection device |
| 06/02/2009 | US7541234 Methods of fabricating integrated circuit transistors by simultaneously removing a photoresist layer and a carbon-containing layer on different active areas |
| 06/02/2009 | US7541233 Semiconductor device and method of manufacturing the same |
| 06/02/2009 | US7541232 Method for fabrication of devices in a multi-layer structure |
| 06/02/2009 | US7541231 Integration of SiGe NPN and vertical PNP devices on a substrate |
| 06/02/2009 | US7541230 Method and apparatus for crystallizing semiconductor with laser beams |
| 06/02/2009 | US7541229 Thin film transistor and method for fabricating same |
| 06/02/2009 | US7541228 Semiconductor device, method of manufacturing the same, and method of designing the same |
| 06/02/2009 | US7541227 Thin film devices and methods for forming the same |
| 06/02/2009 | US7541226 Manufacturing process of thin film transistor |
| 06/02/2009 | US7541225 Method of manufacturing a thin film transistor array panel that includes using chemical mechanical polishing of a conductive film to form a pixel electrode connected to a drain electrode |
| 06/02/2009 | US7541224 Active matrix type display device and method of manufacturing the same |
| 06/02/2009 | US7541223 Array substrate and liquid crystal display apparatus having the same |
| 06/02/2009 | US7541222 Wire sweep resistant semiconductor package and manufacturing method therefor |
| 06/02/2009 | US7541221 Integrated circuit package system with leadfinger support |
| 06/02/2009 | US7541220 Integrated circuit device having flexible leadframe |
| 06/02/2009 | US7541219 Integrated metallic contact probe storage device |
| 06/02/2009 | US7541218 Wafer-level chip package process |
| 06/02/2009 | US7541217 Stacked chip structure and fabrication method thereof |
| 06/02/2009 | US7541215 Image sensor and method for manufacturing the same |
| 06/02/2009 | US7541214 Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore |
| 06/02/2009 | US7541213 Semiconductor device and manufacturing method thereof |
| 06/02/2009 | US7541211 Photoelectric conversion device, its manufacturing method, and image pickup device |
| 06/02/2009 | US7541210 Method for fabricating CMOS image sensor |
| 06/02/2009 | US7541209 Method of forming a device package having edge interconnect pad |
| 06/02/2009 | US7541208 Methods for preserving strained semiconductor substrate layers during CMOS processing |
| 06/02/2009 | US7541207 Light emitting device and method of manufacturing the same |
| 06/02/2009 | US7541206 Nitride-based semiconductor light-emitting device and method of manufacturing the same |
| 06/02/2009 | US7541205 Fabrication method of transparent electrode on visible light-emitting diode |
| 06/02/2009 | US7541204 Method of manufacturing an optical semiconductor element |
| 06/02/2009 | US7541203 Conductive adhesive for thinned silicon wafers with through silicon vias |
| 06/02/2009 | US7541202 Connection device and test system |
| 06/02/2009 | US7541201 Apparatus and methods for determining overlay of structures having rotational or mirror symmetry |
| 06/02/2009 | US7541200 Treatment of low k films with a silylating agent for damage repair |
| 06/02/2009 | US7541199 Methods of forming magnetic memory devices including oxidizing and etching magnetic layers |
| 06/02/2009 | US7541198 Method of forming quantum-mechanical memory and computational devices |
| 06/02/2009 | US7541138 Evaluation of immersing the resist film in a solvent after the selective exposure step and before the post-exposure baking step followed by development; accuracy; no surface roughness; excellent resist pattern profile; antiswelling agents; minimal deterioration in sensitivity; miniaturization |
| 06/02/2009 | US7541136 Transparent film configured to give a predetermined phase difference to exposure light passing through that part of the second opening area in which the transparent film is provided relative to exposure light passing through the second surrounding area; focus monitor masks; photolithography; efficiency |
| 06/02/2009 | US7541134 Antireflective film-forming composition, method for manufacturing the same, and antireflective film and pattern formation method using the same |
| 06/02/2009 | US7541118 photomasks comprising a non-phase shifting, phase shifting and opaque segemnts, for use in photolithography to produce patterns having a very fine pitch |
| 06/02/2009 | US7541117 Shifter pattern image transferred to the photoresist film in the shifter pattern image light exposure step does not overlap the trim pattern image transferred to the film in the trim pattern image light exposure step; photoresist film is patterned with a photoresist material remaining in the dark part |
| 06/02/2009 | US7541094 Etching; photolithography |
| 06/02/2009 | US7541069 Method and system for coating internal surfaces using reverse-flow cycling |
| 06/02/2009 | US7541067 depositing a thin film CdS on photovoltaic device; heat transfer from the solar cell absorber layer to minimize buffer layer material particle formation within the supply solution; in the form of rolled foils |
| 06/02/2009 | US7541061 Vacuum chamber load lock structure and article transport mechanism |
| 06/02/2009 | US7541058 cost effective producing printed circuit boards; angular reflector on cladding layers capable of transmitting and/or receiving both electrical and optical signals; electrooptics |