Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2009
08/12/2009CN101504917A Method for preventing secondary breakdown of VDMOS tube
08/12/2009CN101504916A Production method for transistor, method for forming channel stop and semi-conductor element
08/12/2009CN101504915A Plasma etching method and plasma etching apparatus
08/12/2009CN101504914A Improved cooling apparatus for silicon chip cutting liquor
08/12/2009CN101504913A Method of producing group III nitride substrate wafers and group III nitride substrate wafers
08/12/2009CN101504912A Method for preventing electric charge generation in high voltage device manufacturing process
08/12/2009CN101504911A Plating apparatus and plating method
08/12/2009CN101504910A Processing apparatus
08/12/2009CN101504543A Extraction of key process parameter
08/12/2009CN101504512A Exposure method, expose apparatus, carrier apparatus and equipment manufacturing method
08/12/2009CN101504499A Data cable lead wire section structure of TFT-LCD and method for producing the same
08/12/2009CN101503826A Preparation of AlN growth face composite substrate and nitride semiconductor device
08/12/2009CN101503824A Nitride semiconductor single-crystal substrate and method of its synthesis
08/12/2009CN101503650A Silicon chip cleaning liquid and cleaning method thereof
08/12/2009CN101503429A Organometallic compounds, processes for the preparation thereof and methods of use thereof
08/12/2009CN101503295A SiC material comprising combination of alpha-SiC and beta-SiC and two-part plasma chamber cathode manufactured using the same
08/12/2009CN101503130A Pallet for conveying workpiece
08/12/2009CN101502822A Calibrating equipment of nozzle and calibration method of nozzle
08/12/2009CN101502812A Composite type water tank device
08/12/2009CN100527033C 精密加工设备和精密加工方法 Precision machining equipment and precision machining method
08/12/2009CN100526999C Optical etching device aligning method and system
08/12/2009CN100526998C Rinse liquid for lithography and method for forming resist pattern using same
08/12/2009CN100526997C Exposure apparatus inspection method
08/12/2009CN100526996C Exposure apparatus and exposure method
08/12/2009CN100526992C Exposure apparatus, exposure method, device manufacturing method
08/12/2009CN100526989C Lithographic apparatus, device manufacturing method, and a projection element for use in the lithographic apparatus
08/12/2009CN100526988C Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped such an apparatus
08/12/2009CN100526987C Lithographic apparatus and device manufacturing method
08/12/2009CN100526985C Off-axis signal treatment method based on linear model
08/12/2009CN100526984C Particle-optical device for object irradiation
08/12/2009CN100526983C Composition for forming anti-reflective coating
08/12/2009CN100526962C Display device and method of manufacturing the same
08/12/2009CN100526915C Multilayer material and method of preparing same
08/12/2009CN100526901C Probe card for probing wafers with raised contact elements
08/12/2009CN100526871C Inspection device for humidity sensor and method for adjusting sensor characteristics of humidity sensor
08/12/2009CN100526660C Control apparatus for eliminating reversing shake of dbl act gas cylinder
08/12/2009CN100526639C Method and equipment for handling and mounting wind turbine blades
08/12/2009CN100526517C Electroplating liquid
08/12/2009CN100526501C Vaporizing device and treatment apparatus
08/12/2009CN100526450C Detergent and cleaning method using the same
08/12/2009CN100526409C Slurry compositions and CMP methods using the same
08/12/2009CN100526018C Chemical mechanical polishing and pad dressing method
08/12/2009CN100526017C Chemomechanical grinder and its grinding pad regulating method
08/12/2009CN100526015C Chemical mechanical polishing method
08/12/2009CN100525893C Continuous dissolving device, continuous dissolving method, and gas-dissolved water supply
08/11/2009US7574280 Automatic material handling system, production system for semiconductor device, and production management method for semiconductor device
08/11/2009US7573924 Nitride semiconductor laser device
08/11/2009US7573745 Multiple use memory chip
08/11/2009US7573723 Method for attaching chips in a flip-chip arrangement
08/11/2009US7573582 Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring system
08/11/2009US7573580 Optical position measuring system and method using a low coherence light source
08/11/2009US7573568 Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process
08/11/2009US7573560 Supporting plate, stage device, exposure apparatus, and exposure method
08/11/2009US7573256 Semiconductor wafer examination method and semiconductor chip manufacturing method
08/11/2009US7573225 Electromagnetic alignment and scanning apparatus
08/11/2009US7573141 Semiconductor package with a chip on a support plate
08/11/2009US7573135 Electronic parts packaging structure in which a semiconductor chip is mounted on a wiring substrate and buried in an insulation film
08/11/2009US7573133 Interconnect structures and methods for their fabrication
08/11/2009US7573131 Die-up integrated circuit package with grounded stiffener
08/11/2009US7573121 Method for enhancing electrode surface area in DRAM cell capacitors
08/11/2009US7573116 Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device
08/11/2009US7573113 Photodiode with ultra-shallow junction for high quantum efficiency CMOS image sensor and method of formation
08/11/2009US7573110 Method of fabricating semiconductor devices
08/11/2009US7573109 Semiconductor device
08/11/2009US7573108 Non-planar transistor and techniques for fabricating the same
08/11/2009US7573105 Modular bipolar-CMOS-DMOS analog integrated circuit and power transistor technology
08/11/2009US7573099 Semiconductor device layout and channeling implant process
08/11/2009US7573092 Nonvolatile semiconductor memory device having element isolating region of trench type
08/11/2009US7573091 Semiconductor device and method of manufacturing the same
08/11/2009US7573087 Interconnect line selectively isolated from an underlying contact plug
08/11/2009US7573081 Method to fabricate horizontal air columns underneath metal inductor
08/11/2009US7573075 Compound semiconductor device, production method of compound semiconductor device and diode
08/11/2009US7573072 A white-light emitting device including a ultraviolet or blue semiconductor light source having a peak emission from about 250 to about 500 nm and a phosphor having the formula ((oxides of strontium,barium,calcium) 2(silicon dioxide); europium activated) and one or more additional phosphor/garnet
08/11/2009US7573069 Semiconductor device and manufacturing method thereof
08/11/2009US7573067 Semiconductor display device
08/11/2009US7573062 Thin-film transistor, thin-film transistor sheet and their manufacturing method
08/11/2009US7573019 Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method
08/11/2009US7573006 Apparatus relating to the reconstruction of semiconductor wafers for wafer-level processing
08/11/2009US7572974 Gel electrolytes for dye sensitized solar cells
08/11/2009US7572758 Cleaning liquid and cleaning method
08/11/2009US7572743 Low temperature methods for forming patterned electrically conductive thin films and patterned articles therefrom
08/11/2009US7572742 Equipment and method for processing semiconductor
08/11/2009US7572741 Methods of fabricating oxide layers on silicon carbide layers utilizing atomic oxygen
08/11/2009US7572740 Methods for optimizing thin film formation with reactive gases
08/11/2009US7572739 Tape removal in semiconductor structure fabrication
08/11/2009US7572738 Crack stop trenches in multi-layered low-k semiconductor devices
08/11/2009US7572737 Apparatus and methods for adjusting an edge ring potential substrate processing
08/11/2009US7572736 Method of dry-etching semiconductor devices
08/11/2009US7572735 Blanket resist to protect active side of semiconductor
08/11/2009US7572734 Etch depth control for dual damascene fabrication process
08/11/2009US7572733 Gas switching during an etch process to modulate the characteristics of the etch
08/11/2009US7572732 Method to modulate etch rate in SLAM
08/11/2009US7572731 Group 2a, yttrium or lanthanide complexes of a beta-diketiminate ligand; for example, Strontium bis(N-isopropyl-(4-tert-butylimino)-2-penten-2-aminato); for chemical vapor deposition in semiconductor manufacture; higher vapor pressure, lower melting point, and lower sublimation point
08/11/2009US7572730 Method of manufacturing wiring substrate, liquid ejection head and image forming apparatus
08/11/2009US7572729 Method of manufacturing semiconductor device
08/11/2009US7572728 Semiconductor device and method for manufacturing the same
08/11/2009US7572727 Semiconductor formation method that utilizes multiple etch stop layers
08/11/2009US7572726 Method of forming a bond pad on an I/C chip and resulting structure
08/11/2009US7572725 Methods for wafer-level packaging of microelectronic devices and microelectronic devices formed by such methods
08/11/2009US7572724 Doped single crystal silicon silicided eFuse
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