Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2009
08/06/2009WO2009096747A2 Apparatus for manufacturing polycrystalline silicon thin film
08/06/2009WO2009096728A2 Apparatus for repairing photomask and repairing method using same
08/06/2009WO2009096685A2 Led package, and a production method therefor, and a device using the led package
08/06/2009WO2009096603A1 Method for forming trench isolation structure
08/06/2009WO2009096578A1 Method for producing group iii nitride-based compound semiconductor, wafer including group iii nitride-based compound semiconductor, and group iii nitride-based compound semiconductor device
08/06/2009WO2009096530A1 ZnO SUBSTRATE, METHOD FOR PROCESSING ZnO SUBSTRATE, AND ZnO SEMICONDUCTOR DEVICE
08/06/2009WO2009096515A1 Microwave plasma processing device
08/06/2009WO2009096495A1 Polishing composition and polishing method using the same
08/06/2009WO2009096483A1 Washing apparatus
08/06/2009WO2009096480A1 Composition and method for removing hard mask
08/06/2009WO2009096470A1 Fabrication process of semiconductor device
08/06/2009WO2009096469A1 Semiconductor storage device
08/06/2009WO2009096468A1 Semiconductor storage device, semiconductor device having memory mounted therein, and methods for fabricating the devices
08/06/2009WO2009096467A1 Semiconductor storage device
08/06/2009WO2009096466A1 Semiconductor storage device
08/06/2009WO2009096465A1 Semiconductor storage device
08/06/2009WO2009096464A1 Semiconductor device, and method for manufacturing the same
08/06/2009WO2009096459A1 Resin composition, and method for temporarily fixing workpiece
08/06/2009WO2009096454A1 Chip mounting method and chip mounting apparatus
08/06/2009WO2009096420A1 Method for concave and convex pattern formation and process for producing magnetic recording medium utilizing the method
08/06/2009WO2009096380A1 Substrate cleaning apparatus, substrate cleaning method and computer storage medium
08/06/2009WO2009096379A1 Heating device for pressure measurement and pressure measuring device
08/06/2009WO2009096373A1 Vacuum transportation device
08/06/2009WO2009096371A1 Fine pattern mask, method for producing the same, and method for forming fine pattern using the mask
08/06/2009WO2009096363A1 Resistance nonvolatile memory device and method for manufacturing same
08/06/2009WO2009096340A1 Sulfur atom-containing composition for resist underlayer film formation and method for resist pattern formation
08/06/2009WO2009096328A1 Magnetic device manufacturing method
08/06/2009WO2009096270A1 AlN HETEROEPITAXIAL CRYSTAL, METHOD FOR PRODUCING THE SAME, BASE SUBSTRATE FOR GROUP III NITRIDE FILM USING THE CRYSTAL, LIGHT-EMITTING DEVICE, SURFACE ACOUSTIC WAVE DEVICE, AND SPUTTERING APPARATUS
08/06/2009WO2009096269A1 Silicon carbide semiconductor device
08/06/2009WO2009096264A1 Semiconductor device manufacturing method, semiconductor device, electronic device, semiconductor manufacturing apparatus and storage medium
08/06/2009WO2009096259A1 Plasma processing method and plasma processing system
08/06/2009WO2009096251A1 Method of aftertreatment of amorphous hydrocarbon film and method for manufacturing electronic device by using the aftertreatment method
08/06/2009WO2009096249A1 Load lock apparatus and substrate cooling method
08/06/2009WO2009096248A1 Annealing apparatus
08/06/2009WO2009096241A1 Method for manufacturing electronic member, and electronic member
08/06/2009WO2009096233A1 Crimp-type high power thyristor module
08/06/2009WO2009096216A1 Electronic part mounting structure, electronic part mounting method, and electronic part mounting substrate
08/06/2009WO2009096148A1 Semiconductor device and method for manufacturing the same
08/06/2009WO2009096142A1 Substrate detecting apparatus and substrate transfer apparatus
08/06/2009WO2009096137A1 Driver module structure
08/06/2009WO2009096123A1 METHOD FOR GROWING AlxGa1-xN SINGLE CRYSTAL
08/06/2009WO2009096110A1 Information processing apparatus, information processing method, and program
08/06/2009WO2009096095A1 Thin film forming method, plasma film forming apparatus and storage medium
08/06/2009WO2009096084A1 Deposition apparatus and deposition method
08/06/2009WO2009096083A1 Floating gate type nonvolatile memory device and method for manufacturing the same
08/06/2009WO2009096002A1 Manufacturing method of semiconductor storage device
08/06/2009WO2009096001A1 Semiconductor storage device and memory embedded semiconductor device, and manufacturing method thereof
08/06/2009WO2009096000A1 Semiconductor storage device
08/06/2009WO2009095999A1 Semiconductor storage device
08/06/2009WO2009095998A1 Semiconductor storage device
08/06/2009WO2009095997A1 Semiconductor device and its manufacturing method
08/06/2009WO2009095996A1 Semiconductor storage device
08/06/2009WO2009095898A1 New metal precursors containing beta-diketiminato ligands
08/06/2009WO2009095835A2 Fully insulated semiconductor device and a method of manufacturing the same
08/06/2009WO2009095813A1 A method for fabricating a dual-orientation group-iv semiconductor substrate
08/06/2009WO2009095683A1 Tracking apparatus
08/06/2009WO2009095474A1 Laser labeling device comprising a feed unit with a conveyor belt that has a low friction coefficient
08/06/2009WO2009095389A1 Method and device for transporting electronic modules
08/06/2009WO2009095380A1 Method for manufacturing heterostructures
08/06/2009WO2009095173A1 Method for the production of a semiconductor structure
08/06/2009WO2009094922A1 A monitoring system and method of semiconductor process
08/06/2009WO2009094884A1 Method and device for detecting endpoint in process
08/06/2009WO2009094711A1 Method for patterned etching of selected material
08/06/2009WO2009076661A3 Super-self-aligned contacts and method for making the same
08/06/2009WO2009076276A3 Systems and methods for delivery of fluid-containing process material combinations
08/06/2009WO2009073361A4 Pulsed bias plasma process to control microloading
08/06/2009WO2009073188A3 Active material devices with containment layer
08/06/2009WO2009066923A3 Substrate rotating and oscillating apparatus for rapid thermal process
08/06/2009WO2009064974A3 Embossed electrostatic chuck
08/06/2009WO2009060320A3 Method for integrating selective ruthenium deposition into manufacturing of a semiconductior device
08/06/2009WO2009055565A3 Semiconductor structure and method of manufacture
08/06/2009WO2009052224A3 Semiconductor structures with rare-earths
08/06/2009WO2009046380A3 End effector with sensing capabilities
08/06/2009WO2009032448A3 Zwitterionic block copolymers and methods
08/06/2009WO2009031052A3 Zero-capacitor (floating body) random access memory circuits with polycide word lines and manufacturing methods therefor
08/06/2009WO2009029902A4 Photovoltaic production line
08/06/2009WO2009014858A3 Method and apparatus for selectively patterning free standing quantom dot (fsqdt) polymer composites
08/06/2009WO2007046628A8 Insulator undergoing abrupt metal-insulator transition, method of manufacturing the insulator, and device using the insulator
08/06/2009US20090199153 Exposure condition setting method and program for setting exposure conditions
08/06/2009US20090199148 Pattern-producing method for semiconductor device
08/06/2009US20090198377 Wafer position teaching method and teaching tool
08/06/2009US20090198368 Manufacturing apparatus, information processing method, and program
08/06/2009US20090198065 Resist polymer, resist composition, process for pattern formation, and starting compounds for production of the resist polymer
08/06/2009US20090197428 Impurity-activating thermal process method and thermal process apparatus
08/06/2009US20090197427 Impurity-activating thermal process method and thermal process appartus
08/06/2009US20090197426 Process for Preparing a Dielectric Interlayer Film Containing Silicon Beta Zeolite
08/06/2009US20090197425 Substrate processing apparatus
08/06/2009US20090197424 Substrate processing apparatus and method for manufacturing semiconductor device
08/06/2009US20090197423 Substrate processing method and substrate processing apparatus
08/06/2009US20090197422 Reducing damage to low-k materials during photoresist stripping
08/06/2009US20090197421 Chemistry and compositions for manufacturing integrated circuits
08/06/2009US20090197420 Method for etching a silicon-containing arc layer to reduce roughness and cd
08/06/2009US20090197419 Process for removing high stressed film using lf or hf bias power and capacitively coupled vhf source power with enhanced residue capture
08/06/2009US20090197418 Substrate processing apparatus
08/06/2009US20090197417 Method for forming spacers of different sizes
08/06/2009US20090197416 Silicon nano wire having a silicon-nitride shell and mthod of manufacturing the same
08/06/2009US20090197415 Polishing fluid composition
08/06/2009US20090197414 Polishing Composition and Polishing Method Using The Same
08/06/2009US20090197413 Polishing Composition and Polishing Method Using The Same
08/06/2009US20090197412 Chemical mechanical polishing composition and process
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