Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2009
11/03/2009US7611994 Fine patterning method for semiconductor device
11/03/2009US7611993 Plasma processing method and plasma processing apparatus
11/03/2009US7611992 Semiconductor light emitting element and method of manufacturing the same
11/03/2009US7611991 Technique for increasing adhesion of metallization layers by providing dummy vias
11/03/2009US7611990 Deposition methods for barrier and tungsten materials
11/03/2009US7611989 Polysilicon dummy wafers and process used therewith
11/03/2009US7611988 Composition comprising source of deposition ions selected from cobalt and nickel ions, reducing agent for reducing deposition ions onto substrate, and stabilizer comprising molybdenum oxide; for electrolessly depositing cobalt, nickel or alloys thereof onto substrate in manufacture of microelectronics
11/03/2009US7611987 Defectivity and process control of electroless deposition in microelectronics applications
11/03/2009US7611986 Dual damascene patterning method
11/03/2009US7611985 Formation of holes in substrates using dewetting coatings
11/03/2009US7611983 Semiconductor device and a manufacturing method of the same
11/03/2009US7611982 Method of forming sheet having foreign material portions used for forming multi-layer wiring board and sheet having foreign portions
11/03/2009US7611981 Optimized circuit design layout for high performance ball grid array packages
11/03/2009US7611980 Single spacer process for multiplying pitch by a factor greater than two and related intermediate IC structures
11/03/2009US7611979 Metal gates with low charge trapping and enhanced dielectric reliability characteristics for high-k gate dielectric stacks
11/03/2009US7611978 Method for forming gate electrode of semiconductor device
11/03/2009US7611977 Process of phosphorus diffusion for manufacturing solar cell
11/03/2009US7611976 Gate electrode dopant activation method for semiconductor manufacturing
11/03/2009US7611975 Method of implanting a substrate and an ion implanter for performing the method
11/03/2009US7611974 Multilayer structure and fabrication thereof
11/03/2009US7611973 Methods of selectively forming epitaxial semiconductor layer on single crystalline semiconductor and semiconductor devices fabricated using the same
11/03/2009US7611972 Semiconductor devices and methods of manufacture thereof
11/03/2009US7611971 Method of removing residual contaminants from an environment
11/03/2009US7611970 Wafer processing method
11/03/2009US7611969 Generation and applications of negative dielectric constant materials
11/03/2009US7611968 Wafer laser processing method and laser beam processing machine
11/03/2009US7611967 Wafer sawing method
11/03/2009US7611966 Dual pulsed beam laser micromachining method
11/03/2009US7611965 Semiconductor device and manufacturing method thereof
11/03/2009US7611964 Method of forming isolation layer of semiconductor memory device
11/03/2009US7611963 Method for forming a multi-layer shallow trench isolation structure in a semiconductor device
11/03/2009US7611962 Method for fabricating semiconductor device
11/03/2009US7611960 Method and system for wafer backside alignment
11/03/2009US7611959 Zr-Sn-Ti-O films
11/03/2009US7611958 Method of making a semiconductor element
11/03/2009US7611957 Method of manufacturing semiconductor device
11/03/2009US7611956 Semiconductor device having MOS varactor and methods for fabricating the same
11/03/2009US7611955 Method of forming a bipolar transistor and semiconductor component thereof
11/03/2009US7611954 Bipolar transistor self-alignment with raised extrinsic base extension and methods of forming same
11/03/2009US7611953 Bipolar transistor with isolation and direct contacts
11/03/2009US7611952 Method of manufacturing semiconductor device having side wall spacers
11/03/2009US7611951 Method of fabricating MOS transistor having epitaxial region
11/03/2009US7611950 Method for forming shallow trench isolation in semiconductor device
11/03/2009US7611949 Method of fabricating metal-oxide-semiconductor transistor
11/03/2009US7611948 Methods of forming non-volatile memory device
11/03/2009US7611947 Method of manufacturing semiconductor device
11/03/2009US7611946 Method of fabricating a non-volatile memory device
11/03/2009US7611945 Method and resulting structure for fabricating DRAM capacitor structure
11/03/2009US7611944 Integrated circuit fabrication
11/03/2009US7611943 Transistors, integrated circuits, systems, and processes of manufacture with improved work function modulation
11/03/2009US7611942 Semiconductor integrated circuit device and a method of manufacturing the same
11/03/2009US7611941 Method for manufacturing a memory cell arrangement
11/03/2009US7611940 CMOS image sensor and manufacturing method thereof
11/03/2009US7611939 Semiconductor device manufactured using a laminated stress layer
11/03/2009US7611938 Semiconductor device having high drive current and method of manufacture therefor
11/03/2009US7611937 High performance transistors with hybrid crystal orientations
11/03/2009US7611936 Method to control uniformity/composition of metal electrodes, silicides on topography and devices using this method
11/03/2009US7611935 Gate straining in a semiconductor device
11/03/2009US7611934 Semiconductor device and method of fabricating the same
11/03/2009US7611933 Process for manufacturing a thin-film transistor (TFT) device and TFT device manufactured by the process
11/03/2009US7611932 Method of manufacturing a thin film transistor
11/03/2009US7611931 Semiconductor structures with body contacts and fabrication methods thereof
11/03/2009US7611930 Method of manufacturing display device
11/03/2009US7611929 Method for fabricating TFT array substrate
11/03/2009US7611928 Method for producing a substrate
11/03/2009US7611927 Method of minimizing kerf width on a semiconductor substrate panel
11/03/2009US7611926 Thermosetting die bonding film
11/03/2009US7611925 Electronic device and method of manufacturing the same, chip carrier, circuit board, and electronic instrument
11/03/2009US7611924 Integrated circuit package with chip-side signal connections
11/03/2009US7611923 Method and apparatus for forming stacked die and substrate structures for increased packing density
11/03/2009US7611922 Image sensor and method for manufacturing the same
11/03/2009US7611921 Method for manufacturing CMOS image sensor which improves sensitivity by removing a passivation membrane in a pixel region of the CMOS image sensor
11/03/2009US7611920 Photonic coupling scheme for photodetectors
11/03/2009US7611919 Bonding interface for micro-device packaging
11/03/2009US7611917 Methods of forming light emitting devices with active layers that extend into opened pits
11/03/2009US7611916 Method of manufacturing semiconductor optical element
11/03/2009US7611915 Methods of manufacturing light emitting diodes including barrier layers/sublayers
11/03/2009US7611914 Method of fabricating turning mirror using sacrificial spacer layer and device made therefrom
11/03/2009US7611913 Ferroelectric rare-earth manganese-titanium oxides
11/03/2009US7611912 Underlayer for high performance magnetic tunneling junction MRAM
11/03/2009US7611911 Method and system for patterning of magnetic thin films using gaseous transformation to transform a magnetic portion to a non-magnetic portion
11/03/2009US7611766 Wafer protective sheet
11/03/2009US7611758 Plasma vapor deposition; tunable etch resistant film; electrode coupled to radio frequency power source; substrate holder coupled to second radio frequency
11/03/2009US7611640 Minimizing arcing in a plasma processing chamber
11/03/2009US7611600 Sticking apparatus and sticking method
11/03/2009US7611585 Plasma reaction chamber with a built-in magnetic core
11/03/2009US7611579 Systems and methods for synthesis of extended length nanostructures
11/03/2009US7611577 Semiconductor thin film manufacturing method and device, beam-shaping mask, and thin film transistor
11/03/2009US7611552 Includes aqueous dispersion solution of fumed silica; efficiently polishing semiconductor device such as wafer at high polishing speed without causing flaw
11/03/2009US7611322 Processing thin wafers
11/03/2009US7611318 Overhead transfer flange and support for suspending a substrate carrier
11/03/2009US7611253 Multiple functions LED night light with air freshener
11/03/2009US7611041 Semiconductor device, manufacturing method and apparatus for the same
11/03/2009US7611040 Method for forming solder bump and method for mounting semiconductor device using a solder powder resin composition
11/03/2009US7611011 Peroxide preservation
11/03/2009US7610874 Poled plasma deposition
11/03/2009CA2376564C Semi-insulating silicon carbide without vanadium domination
11/03/2009CA2283160C Novel copper(i) precursors for chemical deposit in gas phase of metallic copper
10/2009
10/29/2009WO2009132207A2 Synthesis and use of precursors for ald of tellurium and selenium thin films
10/29/2009WO2009132181A2 Low profile process kit
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